JP2003075504A - Electronic part measuring method and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high-speed and efficient electronic part measuring method and a device therefor, in which parts to be measured are supplied from a supply unit to a main conveying unit, sequentially and intermittently delivered to a conveying unit for measurement with a tester, and after the end of measurement, the parts are stored in a storing unit according to the measurement result. SOLUTION: The electronic part 1 to be measured which is supplied from the supply unit A is intermittently rotated by the main conveying unit 10 and delivered to a pair of measuring conveying units 40, 41 disposed shifting in phase to be measured. The respective measuring conveying units 40, 41 are provided with a plurality of stages 42 moving in the radial direction and in the rotating direction. A pair of electronic parts 1 to be measured are held on the stages, and a pair of testers 64, 65 are connected to a pair of measuring tools 60, 61 through switching means 62, 63 to measure the parts at the same time.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to measuring the characteristics of electronic parts, and more particularly to an electronic parts measuring method and apparatus for measuring the electrical operating characteristics in the manufacturing process of electronic parts such as semiconductor devices or after the final manufacturing.

[0002]

2. Description of the Related Art Electronic components such as ICs (semiconductor integrated circuits) are generally mass-produced through a plurality of manufacturing steps on a manufacturing line. It is common to measure the characteristics of such mass-produced electronic components whether or not they have predetermined electric operating characteristics during the manufacturing process or after the final manufacturing.
A conventional technique relating to measurement of operating characteristics of electronic components is disclosed in, for example, Japanese Patent Application Laid-Open No. 9-159724, "Device for measuring characteristics of electronic components and measuring method thereof".

In such a conventional technique, there is a plurality of suction nozzles arranged at equal intervals, and a (vacuum) suction nozzle sucks one electronic component to be measured and carries it intermittently in a constant rotation direction. A unit (system), first and second measurement transfer units (system) that are synchronized with the unit and that are intermittently rotated at a rate of once for every two cycles of the unit, and are alternately rotated alternately. A measurement probe, which is arranged at a predetermined stop position of the first and second measurement transport units so as to be able to come into contact with and separate from an electrode lead of an electronic component, is connected to the first and second probes via a switching means. It is composed of two testers.

Every time the above-mentioned main transport unit is stopped, electronic components are transferred from the main transport unit to the first or second measurement transport unit, and at the same time, the first or second measurement transport unit is transferred to the main transport unit. After transferring the measurement electronic components and contacting the probe with the electrode lead of the electronic component during the period when each measurement transport unit is stopped,
The tester is switched to each measurement system by the switching means to measure the characteristics of the electronic component. With such a configuration and operation, the measurement time can be approximated to the cycle time of the main transport unit.

FIG. 7 is a plan view showing a schematic configuration of the above-mentioned conventional electronic component testing apparatus. In FIG. 7, a plurality of measured electronic components 1 are attached to the main transport unit 10. A first measurement transport unit 40 and a second measurement transport unit 41 are arranged with respect to the main transport unit 10. The measured electronic component 1 is supplied to the main transport unit 10 from the supply unit indicated by arrow A, and the measured electronic component 1 after measurement is stored in the storage unit indicated by arrow L. In FIG. 7, B is delivery (main transport unit 10 → first measurement transport unit 40), C is first measurement, D is empty and E is delivery (first measurement transport unit 40 → main transport unit 10). is there. Further, F is a delivery (main transport unit 10 → second measurement transport unit 41), G is a measurement, H is empty, I is a delivery (second measurement transport unit 41 → main transport unit 10), and J and K are Indicates vacancy.

A first tester 64 is connected to the first measurement C and the second measurement G via a first switching means 62.
With such a configuration, as described above, the electronic component 1 transported via the main transport unit 10 is transported to the first measurement transport unit 40 and the second measurement unit 41, and the switching unit 62 is switched by the first tester 64. The first measurement C and the second measurement G are alternately performed via.

[0007]

However, the above-mentioned prior art has the following problems. First, for an electronic component to be measured that requires a measurement time longer than the transfer time of the main transfer system, it is necessary to reduce the transfer speed of the main transfer system, and thus the productivity (efficiency) decreases. Since the price of electronic parts depends on the productivity, it is not preferable to reduce the productivity in order to maintain the competitiveness.

[0008] Further, if the transport speed of the main transport system is increased to improve the capacity of the measuring apparatus, the measuring time is shortened and the number of electronic components to be measured is reduced.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and an electronic component measuring method and apparatus for ensuring a measuring time longer than the cycle time of the main transport system and improving productivity. The purpose is to provide.

[0010]

According to the method of measuring an electronic component of the present invention, an electronic component to be measured is supplied from a supply unit to a main transport unit to be completely rotated and transported, and the main transport unit is moved to different rotation positions. A measurement method in which the characteristics are measured by passing them to a pair of measuring transport units arranged, and after this measurement, the characteristics are transferred to the main transport unit and housed in the storage unit. It moves in the radial direction, rotates after transferring a pair of measured electronic components to the main transport unit. According to the preferred embodiment of the present invention, a pair of testers is connected to each of the pair of measurement transport units to measure the measured electronic component. The electronic component to be measured is transferred between the main transfer unit and the measurement transfer unit by the suction nozzle.

The electronic component measuring apparatus according to the present invention is
A main transport unit that intermittently rotates and transports the measured electronic component supplied from the supply unit, a pair of measurement transport units arranged at different rotation positions of the main transport unit, and each measurement transport unit. A measurement jig connected to the measured electronic component received and held from the main transport unit, a tester connected to this measurement jig, and a storage unit for storing the measured electronic component according to the measurement result. A measuring device comprising:
A plurality of stages each having a pair of holding portions for the electronic components to be measured and moving in the radial direction and the rotation direction are provided. According to a preferred embodiment of the present invention, the measuring transport unit rotates synchronously once per four cycles of intermittent rotation of the main transport unit. A pair of testers are connected to the measured electronic components held by the respective measurement transport units via a pair of measuring jigs and switching means. The main transport unit is provided with a plurality of suction nozzles that deliver the measured electronic components to the measurement transport unit.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The configuration and operation of a preferred embodiment of an electronic component measuring method and apparatus according to the present invention will be described in detail below with reference to the accompanying drawings. For convenience of explanation,
Similar reference numerals will be used for components corresponding to those described above.

FIG. 1 is a plan view showing a schematic configuration of a preferred embodiment of an electronic component measuring apparatus according to the present invention. This electronic component measuring apparatus includes a supply unit A for supplying the measured electronic component 1, a storage unit L for accommodating the measured electronic component 1 that has completed measurement, and a supply unit for the measured electronic component 1 from measurement to measurement. This is the same as the above-described conventional technique in that the main transport unit 10 that intermittently transports to a storage in a fixed direction, and the first measurement transport unit 40 and the second measurement transport unit 41 are provided. These measuring transport units 4
A first measuring jig 60 and a second measuring jig 61 are provided at 0 and 41, respectively. A first tester 64 is connected to the first electronic component probe 601 of the first measuring jig 60 and the first electronic component probe 611 of the second measuring jig 61 via the switching means 62. A second tester 65 is connected to the second electronic component probe 602 of the first measuring jig 60 and the second electronic component probe 612 of the second measuring jig 61 via the switching means 63.

The measuring transport units 40 and 41 transfer the measured electronic component 1 from the main transport unit 10 to the measuring transport units 40 and 41, and the measuring transport unit 4.
The transfer from 0, 41 to the main transfer unit 10 is possible at the same time, and the two measurement transfer units 40, 41 are in continuous positions with respect to the physical distribution of the main transfer unit 10.

Next, FIG. 2 is a side sectional view including the main carrying unit 10 and the first or second measuring carrying units 40, 41 of the preferred embodiment of the electronic component measuring apparatus according to the present invention shown in FIG. . As is clear from FIG. 2, the main transport unit 10 is a disk-shaped member that rotates around a rotation axis,
It rotates at a position higher than the measuring transport units 40 and 41 and can move up and down as shown by the arrow. Also,
The measuring transport units 40 and 41 are relatively small disc-shaped members that rotate about a rotation axis and can move up and down and left and right as indicated by arrows.

Next, FIG. 3 is a detailed mechanism diagram of the main transport unit 10 of the electronic component measuring apparatus according to the present invention shown in FIGS. The nozzle portion that sucks the measured electronic component 1 is a non-rotating guide 12 that supports the vertical movement of the nozzle shaft 11 itself. Nozzle shaft 11
Is a hollow bottom, a suction pad 13 having an optimum suction port according to the shape of the measured electronic component 1, an air stopper 15 made of a hard material to be pressed by the actuator 14 on the top, and an upper side surface. An air pipe joint 16 is attached.

The nozzle shaft 11 is constantly pushed upward by a spring 18 using a retaining ring 17 as a stopper. A plurality of nozzles are radially fixed to the rotary plate 19 at equal intervals. The rotary plate 19 is fixed to the upper part of the main shaft (main shaft) 20. A bearing 21 is formed in the middle of the main shaft 20 to regulate the axial direction and the radial direction. A coupling 22 is attached to the tip of the lowermost portion, and is connected to a rotary drive shaft such as a motor 23. This coupling 22
Corrects the center deviation between the rotary drive source shaft and the main shaft 20. At the center of the rotary plate 19, a central valve rotating side 2 is provided to enable the vacuum nozzle and the compressed air to be supplied to the rotating nozzle at each stop position.
4 is fixed.

A central valve fixed side 25 is superposed on the upper surface of the central valve rotating side 24, and is pressed by a spring 26 from above. The upper surface of the central valve rotating side 24 and the lower surface of the central valve fixed side 25 are sliding surfaces. The center shaft (center shaft) 27 forms a bearing by inserting a bearing 28 into a portion where the tip of the main shaft 20 is seated. The tip of the central shaft 27 is slotted to prevent the rotation stopper shaft 2
9 is inserted. This rotation stop shaft 29 is provided with a shaft retainer 32.
Since it is fixed to the top plate 31 composed of the main base 30, the central shaft 27 does not rotate. Central valve fixed side 2
The rotation of No. 5 is stopped by the key 33 with the central shaft 27.

Next, the actuator 14 for moving the nozzle portion up and down is arranged on the stop position of the nozzle portion, and is fixed on the disk-shaped collar above the cylindrical actuator holder 34. At the lower part of the actuator holder 34, a bearing by a bearing 35 is formed. The cylindrical bearing holder 36 holding the bearing 35 is fixed to the upper surface of the rotary plate 19. Actuator holder 3
4 holds the stop position of the nozzle portion by a rotation stop pin 37 fixed to the top plate 31.

Next, with reference to the sectional view of the measuring transport unit 40 or 41 in FIG.
1 will be described. The stage unit for sucking the measured electronic component 1 is a stage 42 capable of sucking two measured electronic components 1.
A guide 43 for linearly and smoothly moving the stage 42, a spring 44 for constantly pulling the stage 42 in one direction, a positioning stopper 45 for the pulled stage 42, and a cam follower 46 for transmitting the movement of the stage 42. Composed of and. A plurality of stage parts are fixed radially on the upper surface of the rotary plate 47 at equal intervals. The stage portion with respect to the rotary plate 47 is attached such that the moving direction of the stage 42 is the radial direction of the rotary plate and the stage 42 is always pulled outward.

The rotary plate 47 is fixed to the upper part of the main shaft 48. A bearing 49 is formed at an intermediate portion of the main shaft 48 to regulate the radial direction and the axial direction. A timing pulley 50 is attached to the tip of the lowermost portion, and the rotational drive of a motor 51 installed laterally is transmitted by a timing belt 59 to suppress the height of the measurement transport units 40 and 41. At the upper part where the bearings are formed, a central valve is provided on the rotating stage part so that vacuum and compressed air can be supplied at each stop position. The central valve fixed side 52 is fixed to an upper portion of a housing 54 that constitutes a bearing, the central valve rotating side 53 is superposed on the upper surface, and is pressed by a spring 55 from above. The upper surface of the central valve fixed side 52 and the lower surface of the central valve rotating side 53 are sliding surfaces. The central valve rotating side 53 is connected to the main shaft 48 by a key 56. At the receiving position and the delivering position of the measured electronic component 1 from the main transport unit 10, a motor 5 capable of numerical control is provided.
7 are arranged. An eccentric plate cam 58 is attached to the tip of the rotating rod of the motor 57, and is transmitted to the cam follower 46 of the stage part, thereby enabling the stage 42 to move.

Next, FIG. 5 shows a measuring jig 6 shown in FIG.
It is a schematic diagram of 0 and 61. A plurality of probes 66 for electrically connecting the testers 64, 65 and the electronic device under test 1
Is fixed to the probe holder (holding tool) 67 in accordance with the electrode lead of the measured electronic component 1. The probe holder 67 is fixed to the upper part of a slide plate (sliding plate) 68. A guide 69, which can be linearly and smoothly moved up and down, and a cam follower 70 are attached to the lower portion of the back portion. This cam follower 70
Is pressed by a spring 73 against an eccentric cam 72 fixed to the tip of a rotating rod of a numerically controllable motor 71 serving as a drive source. The height position of the tip of the probe 66 can be controlled by the rotation angle of the motor 71.

The measured electronic components 1 are supplied one by one to the supply position by the supply unit A during the rotation operation of the main transport unit 10. The supplied measured electronic component 1 is adsorbed by the nozzle of the main transport unit 10 and sent to the measurement transport units 40 and 41. Here, the main transport unit 10
The electronic components to be measured 1 attracted to the odd-numbered nozzles I, III, V and VII of the above-mentioned electronic components 1 to be adsorbed to the even numbered nozzles II, IV, VI and VIII by the first measuring transport unit 40. Is sent to the second measuring transport unit 41. Then, it is delivered to the respective measurement transport units 40 and 41.

The transfer units 40 and 41 for measurement mount two electronic parts to be measured 1 by the movement of the stage 42,
It is sent to the measuring jigs 60 and 61 and is measured by the two testers 64 and 65 at the same time. The measured electronic component 1 whose measurement has been completed is
It moves to the delivery position of the main transport unit 10 and delivers the measured electronic components 1 one by one to the suction nozzles of the main transport unit 10 where the measured electronic components 1 are not attracted. The measured electronic components 1 that have completed the measurement are sent to the storage unit L one by one by the main transport unit 10. Then, it is sorted according to the measurement result (for each good product or defective product) and stored.
Complete a series of operations.

Next, FIG. 6 is a diagram showing the flow of the measured electronic component 1 in the electronic component measuring apparatus according to the present invention.
The vertical axis represents the number of cycle operations of the main transport unit 10, that is, a series of operations of nozzle lowering, nozzle rising, and table rotation. On the other hand, the horizontal axis is the work position (AL) shown in FIG. In FIG. 6, each cycle is divided into three stages. The upper row shows the nozzle numbers of the main transport unit 10 (I to VII in FIG. 1).
I), the middle stage is the number (number) of the measured electronic component 1 held by each nozzle of the main transport unit 10, and the lower stage is the measured electronic component 1 held by each stage of the measurement transport units 40 and 41. Represents the number (number). The electronic component to be measured 1 is supplied from the supply unit A from the first position, and the position of the electronic component to be measured 1 is sequentially moved for each cycle.

Here, at the measurement positions C and G, *
At the positions marked, the testers 64 and 65 are measuring. Further, the number marked with a circle is the measured electronic component 1 for which the measurement has been completed. As shown in FIG. 6, each of the measurement transfer units 40 and 41 has a cycle operation 4 of the main transfer unit 10.
Intermittent rotation is performed once for each rotation. Then, the measuring transport units 40 and 41 operate alternately. At the measuring positions C and G, the main transport unit 10 is stopped for about 4 cycles.

As can be understood from the above description, the two electronic components to be measured 1 are simultaneously measured by the pair of testers 64, 65 and the pair of switching means 62, 63, and
By alternately operating the measurement transport units 40 and 41, it is possible to secure the measurement time for about two cycles of the main transport unit 10.

The configuration and operation of the preferred embodiment of the electronic component measuring method and apparatus according to the present invention have been described above in detail. However, such an embodiment is merely an example of the present invention and does not limit the present invention in any way. Those skilled in the art can easily understand that various modifications and changes can be made according to a specific application without departing from the gist of the present invention.

[0029]

As can be understood from the above description, according to the electronic component measuring method and apparatus of the present invention, the following remarkable practical effects can be obtained. That is, according to the present invention, a pair of measuring jigs is provided on each of a pair of measuring carrying units provided for the main carrying unit, and a pair of testers can simultaneously measure. As a result, the measurement time of the measured electronic component in each measurement transport unit is
It is possible to take about twice the cycle time of the main transport system,
The transport speed of the main transport unit is not limited to the measurement time in the measurement transport unit, and productivity is improved and electronic parts can be mass-produced at low cost.

[Brief description of drawings]

FIG. 1 is a plan view showing a schematic configuration of a preferred embodiment of an electronic component measuring device according to the present invention.

FIG. 2 is a side sectional view of a main transport unit and a measurement transport unit of the electronic component measuring apparatus shown in FIG.

3 is a side sectional view showing a detailed configuration of a main transport unit in the electronic component measuring apparatus shown in FIG.

FIG. 4 is a side sectional view showing a detailed configuration of a measuring transport unit used in the electronic component measuring apparatus shown in FIG.

5 is a schematic mechanism diagram of a measuring jig of the electronic component measuring apparatus shown in FIG.

6A and 6B are diagrams illustrating transfer of electronic components between a main transport unit and a measurement transport unit in the electronic component measuring apparatus shown in FIG.

FIG. 7 is a plan view showing a schematic configuration of a conventional electronic component measuring device.

[Explanation of symbols]

A supply unit L storage unit 1 Electronic parts under test 10 Main transport unit 40, 41 Measuring transport unit 42 stages 60, 61 Measuring jig 62, 63 switching means 64, 65 tester 66 probes

Claims (7)

[Claims] 1. An electronic component to be measured is supplied from a supply unit to a main transport unit to be intermittently rotated and transported, and is also delivered to a pair of measurement transport units arranged at different rotation positions of the main transport unit. In the electronic component measuring method, in which the characteristics are measured and then transferred to the main transport unit and stored in the storage unit after the measurement, each of the measurement transport units moves in the radial direction at the same rotation position, and the main transport unit The method for measuring electronic parts is characterized in that after the pair of electronic parts to be measured are delivered and received, the electronic parts are rotated. 2. The electronic component measuring method according to claim 1, wherein a pair of testers is connected to each of the pair of measuring transport units to measure the measured electronic component. 3. The electronic component measuring method according to claim 1, wherein the measured electronic component is transferred between the main transport unit and the measurement transport unit by a suction nozzle. 4. A main transport unit for intermittently rotating and transporting an electronic component to be measured supplied from a supply unit, and a pair of measurement transport units arranged at different rotation positions of the main transport unit. A measuring jig connected to the measured electronic component received and held from the main transport unit in each of the measuring transport units, a tester connected to the measuring jig, and the measured electronic component after measurement are measured. In the electronic component measuring device including a storage unit that stores according to a result, each of the measurement transport units has a pair of holding portions for the measured electronic component, and a plurality of moving units in a radial direction and a rotational direction. The electronic component measuring device is characterized in that the stage is provided. 5. The electronic component measuring apparatus according to claim 4, wherein the measuring transport unit is synchronously rotated once per four cycles of the intermittent rotation of the main transport unit. 6. A pair of testers are connected to the measured electronic components held by the respective measuring transport units via a pair of measuring jigs and a switching means. 4. The electronic component measuring device according to 4 or 5. 7. The electronic component measurement according to claim 4, 5 or 6, wherein the main transport unit is provided with a plurality of suction nozzles for delivering the measured electronic component to the measurement transport unit. apparatus.