JP2003066346A - Electrostatic driving motor type mirror and optical switch using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical switch which attains mirror driving with low power consumption, the miniaturization of a device, and simplification the optical axis adjustment of an optical fiber. SOLUTION: A semiconductor substrate with an insulating layer formed by inserting silicon crystal layers is provided with a rotor in which rotor electrodes are formed radially, and a stator in which a plurality of stator electrodes are formed sectorally so as to be paired with the outer peripheral part of the rotor. A reflecting mirror and a flat plate with a hole or a groove for passing light are provided at part of the rotor. The electrostatic driving motor type mirror for varying a flat plate by rotationally driving the rotor by electrostatic force acting between voltage successively applied to the plurality of stator electrodes and voltage applied to the rotor electrodes, is formed so as to cross a first incidence optical path and a first emission optical path, a second incidence optical path and a second emission optical path arranged on a straight line. The optical switch for changing a direction of light is obtained by arranging the flat plate of the electrostatic driving motor type mirror at a prescribed angle at a position where each optical path crosses.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic drive motor type mirror and an optical switch using the same.

[0002]

2. Description of the Related Art FIG. 1 is a perspective view showing an example of a conventional optical switch, in which four optical fibers 1, 2, 3, 4 and a movable member coated with a conductor for switching the direction of light are movable. Mirror 5 and beam 6 for supporting the mirror 5 in the horizontal direction
And an insulating layer 7 and a pair of electrodes 8.

In the conventional optical switch having the above structure, when the mirror 5 stands by the electrostatic force between the electrodes 8 as shown in FIG. 1, the light emitted from the optical fiber 1 is reflected by the mirror 5. Then, while being received by the optical fiber 4, the light emitted from the optical fiber 2 is also reflected by the mirror 5 and received by the optical fiber 3. On the other hand, when the mirror 5 is returned to the horizontal state by cutting off the electrostatic force, the light emitted from the optical fiber 1 travels straight and is received by the optical fiber 3.

FIG. 2 is a perspective view showing another conventional optical switch, and the optical switch 9 has a housing 10. A side wall 11a forming a peripheral wall of the housing 10,
11b, 11c and 11d are optical fibers 12a,
It supports 12b, 12c and 12d. Housing 1
A movable mirror 13 is provided substantially at the center of 0. This movable mirror 13 is driven by an electric linear motor (not shown).
A straight line can be moved between the position indicated by the solid line and the position indicated by the dotted line.

In the optical switch 9, when the movable mirror 13 is in the solid line position, the light sent from the optical fiber 12a is reflected by the movable mirror 13 and guided to the optical fiber 12d, and the light sent from the optical fiber 12b. Is reflected by the movable mirror 13 and guided to the optical fiber 12c. Also,
When the movable mirror 13 is at the dotted line position, the optical fiber 12
The optical fiber 12 in which the light sent from a is at the facing position
The light guided to the optical fiber c and sent from the optical fiber 12b is guided to the optical fiber 12d at the facing position.

[0006]

In the first example of the conventional optical switch, an electrostatic force is used to drive the mirror supported by the beam. An electrostatic force must be applied to twist the beam to hold the mirror in a horizontal or vertical position, during which time it will always hinder the holding of the mirror.
Since the torsional restoring force of the beam works, it is necessary to constantly supply high power.

The second example of the conventional optical switch has a housing for fixing an optical fiber. Since the electric linear motor is installed in the housing and the optical fibers project in four directions of the housing, there is a problem that the device of the optical switch becomes large.

Further, the optical fiber is supported and fixed by the side wall forming the peripheral wall of the housing. However, since the supporting area for supporting and fixing the optical fiber on the side wall is small, sufficient fixing strength cannot be obtained. However, there is a problem in that it is difficult to adjust the optical axis when the optical fiber is supported and fixed.

[0009]

SOLUTION: A rotor having radial rotor electrodes is formed on a silicon crystal layer on one side of a semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and a rotor is formed so as to form a pair on an outer peripheral portion of the rotor. A stator having a plurality of stator electrodes formed in a fan shape is provided, and a flat plate having a reflection mirror is provided at a part of the rotor, and the voltage is sequentially applied to the plurality of stator electrodes and the voltage applied to the rotor electrodes. An electrostatic drive motor type mirror is provided which changes the flat plate by rotating the rotor by the electrostatic force acting on.

An electrostatic drive motor type mirror is provided in which holes or grooves are formed in the flat plate to allow light to pass therethrough.

A rotor in which a rotor electrode is radially formed on a silicon crystal layer on one side of a semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and a plurality of stator electrodes are fan-shaped so as to form a pair on the outer peripheral portion of the rotor. And a flat plate having a hole or a groove for allowing light to pass through are provided in a part of the rotor, and a voltage sequentially applied to a plurality of stator electrodes and a rotor electrode are applied. It has an electrostatic drive motor type mirror that changes the flat plate by rotating the rotor by the electrostatic force that acts between the voltage and the voltage. An optical switch that switches the direction.

On the same semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, an electrostatic drive motor type mirror, a first incident optical path and a first outgoing optical path linearly arranged,
The second incident optical path and the second outgoing optical path are arranged and formed so as to intersect with each other, and the reflection mirror of the electrostatic drive motor type mirror and a hole or groove for passing light are formed at the positions where the respective optical paths intersect. The flat plate is arranged at a predetermined angle to serve as an optical switch that switches the direction of light.

One incident optical path and a plurality of outgoing optical paths are formed on the same semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and a flat plate having a reflecting mirror is provided for each incident optical path. A plurality of electrostatic drive motor type mirrors, or a plurality of electrostatic drive motor type mirrors provided with a reflection mirror and a flat plate having holes or grooves for passing light are formed.
By combining the positions of the flat plates of the electrostatic drive motor type mirror, an optical switch is provided that switches light in a plurality of directions.

A plurality of incident light paths are formed on the same semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and the reflection mirror and a hole or groove for allowing light to pass through each of the incident light paths. Forming an optical switch in which a plurality of electrostatic drive motor type mirrors provided with a flat plate are formed, and combining the positions of the flat plates of the electrostatic drive motor type mirror to form an optical switch that switches light in a plurality of directions. .

The groove for fixing the optical fiber as the incident and outgoing optical paths is an optical switch formed in a V shape on a semiconductor substrate formed by sandwiching an insulating layer with a silicon crystal layer.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 3 is an electrostatic drive motor type mirror showing a first embodiment of the present invention, (a) is a top view,
(B) is an AA sectional view of the top view (a). The insulating layer 17 is formed into the silicon crystal layers 22a, 2a, 2 by the semiconductor manufacturing technology.
A rotor 15 having radial rotor electrodes 15a on a silicon crystal layer 22a on one side of a semiconductor substrate 22 sandwiched between 2b, and six stator electrodes 14a, 14b so as to form a pair on the outer peripheral portion of the rotor 15. 14c, 14
A stator 14 in which d, 14e, and 14f are formed in a fan shape is provided, and a central shaft 16 is provided at a position serving as a rotation center of the rotor 15. The stator 14 and the rotor 15 are electrically insulated by the insulating layer 17.

Six stator electrodes 14a, 14 forming a pair
b, 14c, 14d, 14e, 14f, the voltage applied sequentially to the stator electrodes 14a, 14b, 14c, 14d,
The reverse voltage of the voltage applied to 14e and 14f is applied to the rotor electrode 1
5a, the rotor 15 and the stator 14
An electrostatic force acts between the rotor 1 and
5 is rotationally driven. By providing the flat plate 18 on a part of the rotor 15, the flat plate 18 changes its angle as the rotor 15 is rotationally driven, and variably moves between the position 19a at the angle 1 and the position 19b at the angle 2. A reflection mirror 20 for reflecting light is provided on the flat plate 18.

4A and 4B are electrostatic drive motor type mirrors showing a second embodiment of the present invention, wherein FIG. 4A is a top view and FIG. 4B is a sectional view taken along the line AA of the top view. The flat plate 18 of the electrostatic drive motor type mirror described in the first embodiment is provided with the groove 21 for passing light. Although the groove has been described as a mode for transmitting light, a hole may be used without any problem.

FIG. 5 is a top view showing a first embodiment of the optical switch according to the present invention. It is an optical switch using the electrostatic drive motor type mirror 24a showing the second embodiment described above, and the electrostatic drive motor is provided on the same semiconductor substrate 23 formed by sandwiching an insulating layer with a silicon crystal layer by a semiconductor manufacturing technique. Type mirror 24a and the first arranged linearly
The incident optical path 25a and the first outgoing optical path 25b, and the second incident optical path 26a and the second outgoing optical path 26b are arranged and formed so as to intersect with each other in a cross shape, and The groove 28 for fixing the fiber 27 is formed in a V shape, and the optical fiber 27 is bonded and fixed to the groove 28.
A reflection mirror 20 for reflecting the light of the electrostatic drive motor type mirror 24a and a flat plate 18 having a groove 21 for allowing the light to pass are arranged at a predetermined angle at positions where the respective optical paths intersect.

When the flat plate 18 is at the position 19a at the angle 1, the light incident from the first incident light path 25a is reflected by the reflection mirror 20 of the flat plate 18 and switched to the second outgoing light path 26b. Similarly, the light incident from the second incident optical path 26a is switched to the first outgoing optical path 25b. Flat plate 1
When 8 is at the position 19b at the angle 2, the light incident from the first incident light path 25a passes through the groove 21 and becomes the first light.
Goes straight to the outgoing optical path 25b. Similarly, the light incident from the second incident light path 26a goes straight to the second emission light path 26b. With such a configuration, the electrostatic drive motor type mirror 2
The direction of light can be switched by switching the position of the flat plate 18 of 4a.

FIG. 6 is a top view showing a second embodiment of the optical switch according to the present invention. This optical switch is 1 row x 4
One incident optical path 29 and four outgoing optical paths 30a, 30b, 30 are formed in the same semiconductor substrate 23, which has a matrix of rows and is formed by sandwiching an insulating layer between silicon crystal layers.
c and 30d are formed, and the four electrostatic drive motor type mirrors 24b shown in the first embodiment are formed for one incident optical path 29. A groove 28 for fixing the optical fiber 27 as each of the incident and outgoing optical paths is formed in a V shape, and the optical fiber 27 is adhesively fixed to the groove 28.
By combining the angular positions of the flat plate 18 of the electrostatic drive motor type mirror 24b, the light from the incident light path 29 can be divided into four.
The direction of light can be switched to any one of the outgoing light paths 30a, 30b, 30c, 30d.

FIG. 7 is a top view showing a third embodiment of the optical switch according to the present invention. This optical switch is 1 row x 4
One incident optical path 29 and four outgoing optical paths 30a, 30b, 30 are formed in the same semiconductor substrate 23, which has a matrix of rows and is formed by sandwiching an insulating layer between silicon crystal layers.
c and 30d are formed, and four electrostatic drive motor type mirrors 24a shown in the above-described second embodiment are formed for one incident optical path 29. A groove 28 for fixing the optical fiber 27 as each of the incident and outgoing optical paths is formed in a V shape, and the optical fiber 27 is adhesively fixed to the groove 28.
By combining the angular positions of the flat plate 18 of the electrostatic drive motor type mirror 24a, the light from the incident optical path 29 can be divided into four.
The direction of light can be switched to any one of the outgoing light paths 30a, 30b, 30c, 30d.

FIG. 8 is a top view showing a fourth embodiment of the optical switch according to the present invention. Four incident light paths 31a, 31b, 31c, 31d are formed in the same semiconductor substrate 23 formed by sandwiching an insulating layer between silicon crystal layers, and the fourth embodiment is applied to the four incident light paths. Indicated by 1
The optical switches 33 are arranged and formed in a matrix of rows × 4 columns to form an optical switch in a matrix of 4 rows × 4 columns. The 16 electrostatic drive motor type mirrors 24a showing the second embodiment described above are arranged at the intersections of each column and each row, and four emission optical paths 32a, 32b, 32c are provided on the extension of each row. 32d is arranged and formed. A groove 28 for fixing the optical fiber 27 as each of the incident and outgoing optical paths is formed in a V shape, and the optical fiber 27 is adhesively fixed to the groove 28. In this embodiment, by combining the angular positions of the flat plate 18 of the electrostatic drive motor type mirror 24a, the light from the incident light paths 31a, 31b, 31c and 31d is emitted as shown by the broken line arrows in FIG. Light paths 32a, 32b, 32c, 3
The direction of light can be switched to any of 2d.

[0024]

With the structure of the electrostatic drive motor type mirror, in order to maintain the arrangement state of the reflection mirror and the flat movable plate having the hole or groove formed therein at a predetermined angle, a torsion restoring force is applied. Since the force that hinders the retention of the power does not work, the power required for the retention can be reduced.

According to the semiconductor manufacturing technology, the electrostatic drive motor type mirror and the incident optical path and the outgoing optical path are arranged and formed on the same semiconductor substrate formed by sandwiching the insulating layer between the silicon crystal layers, thereby miniaturizing the optical switch device. Has come to be realized.

Further, a groove for fixing an optical fiber as an incident optical path and an outgoing optical path is formed in a V shape on a semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and the optical fiber is bonded and fixed to the groove. As a result, the supporting area for supporting and fixing the optical fiber is increased, and sufficient fixing strength can be obtained. In addition, the adjustment of the optical axis performed when the optical fiber is supported and fixed becomes easy to adjust.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a conventional optical switch.

FIG. 2 is a perspective view showing another conventional optical switch.

3A and 3B are electrostatic drive motor type mirrors showing the first embodiment of the present invention, in which FIG. 3A is a top view and FIG. 3B is a top view of FIG.

4A and 4B are electrostatic drive motor type mirrors showing a second embodiment of the present invention, in which FIG. 4A is a top view and FIG. 4B is a top view of FIG.

FIG. 5 is a top view of the first embodiment of the optical switch according to the present invention.

FIG. 6 is a top view of a second embodiment of the optical switch according to the present invention.

FIG. 7 is a top view of a third embodiment of the optical switch according to the present invention.

FIG. 8 is a top view of a fourth embodiment of the optical switch according to the present invention.

[Explanation of symbols]

1 optical fiber 2 optical fiber 3 optical fiber 4 optical fiber 5 mirror 6 beams 7 Insulation layer 8 electrodes 9 Optical switch 10 housing 11a side wall 11b Side wall 11c side wall 11d side wall 12a optical fiber 12b optical fiber 12c optical fiber 12d optical fiber 13 Movable mirror 14 Stator 14a Stator electrode 14b Stator electrode 14c Stator electrode 14d stator electrode 14e Stator electrode 14f Stator electrode 15 rotor 15a rotor electrode 16 central axis 17 Insulation layer 18 flat plate 19a Angle 1 position 19b Angle 2 position 20 reflective mirror 21 groove 22 Semiconductor substrate 22a Silicon crystal layer 22b Silicon crystal layer 23 Semiconductor substrate 24a Electrostatic drive motor type mirror 24b Electrostatic drive motor type mirror 25a First incident optical path 25b First exit optical path 26a Second incident optical path 26b Second exit optical path 27 optical fiber 28 groove 29 incident optical path 30a exit optical path 30b exit optical path 30c exit optical path 30d exit optical path 31a Incident optical path 31b Incident optical path 31c Incident optical path 31d incident optical path 32a exit optical path 32b exit optical path 32c exit optical path 32d exit optical path 33 optical switch

Claims (10)

[Claims] 1. A rotor in which a rotor electrode is radially formed on a silicon crystal layer on one side of a semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and a plurality of stator electrodes are formed so as to form pairs on the outer peripheral portion of the rotor. Is provided in the shape of a fan, and a flat plate having a reflection mirror is provided on a part of the rotor. 2. The electrostatic drive motor type mirror according to claim 1, wherein the flat plate is provided with a hole or a groove for allowing light to pass therethrough. 3. The flat plate is changed by rotationally driving the rotor by an electrostatic force acting between a voltage sequentially applied to the plurality of stator electrodes and a voltage applied to the rotor electrode. Item 1. The electrostatic drive motor type mirror according to item 1. 4. The flat plate is changed by rotationally driving a rotor by an electrostatic force acting between a voltage applied to a plurality of stator electrodes in sequence and a voltage applied to a rotor electrode. Item 2. The electrostatic drive motor type mirror according to item 2. 5. A rotor in which a rotor electrode is radially formed on a silicon crystal layer on one side of a semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and a plurality of stator electrodes are formed so as to form a pair on the outer peripheral portion of the rotor. Is provided with a fan-shaped stator, a portion of the rotor is provided with a reflection mirror and a flat plate having a hole or groove for passing light, and a voltage sequentially applied to a plurality of stator electrodes and a rotor electrode are applied. It has an electrostatic drive motor type mirror that changes the flat plate by rotating the rotor by the electrostatic force that acts between the voltage and the generated voltage. Light is passed through a hole or groove and goes straight or is reflected by a reflection mirror. An optical switch characterized by switching the direction of light. 6. An electrostatic drive motor type mirror is provided on the same semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers,
A first incident optical path and a first outgoing optical path, and a second incoming optical path and a second outgoing optical path, which are arranged on a straight line, are arranged and formed so as to intersect with each other. Item 4. An optical switch characterized in that a flat plate of the electrostatic drive motor type mirror according to item 4 is arranged at a predetermined angle to switch the direction of light. 7. A static light emitting device according to claim 3, wherein one incident optical path and a plurality of outgoing optical paths are formed in the same semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers. An optical switch characterized in that a plurality of electric drive motor type mirrors are arranged and formed, and the direction of light is switched by combining the angle positions of the flat plates of the electrostatic drive motor type mirrors. 8. A static light emitting device according to claim 4, wherein one incident optical path and a plurality of outgoing optical paths are formed in the same semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers. An optical switch characterized in that a plurality of electric drive motor type mirrors are arranged and formed, and the direction of light is switched by combining the angle positions of the flat plates of the electrostatic drive motor type mirrors. 9. A plurality of incident optical paths are formed on the same semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers, and the optical switch according to claim 8 is arranged for each of the incident optical paths. Characteristic optical switch. 10. A groove for fixing an optical fiber as an incident and outgoing optical path is formed in a V shape on a semiconductor substrate formed by sandwiching an insulating layer between silicon crystal layers. The optical switch according to claim 7, claim 8 or claim 9.