JP2003004588A - Test device for display board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to read and photograph alignment marks even in the case the kind of board to be tested is changed. SOLUTION: The test device two-dimensionally moves a video camera for photographing the alignment mark in a plane parallel to the board supported on a test stage and a camera stage of a test station in first and second directions crossing each other. A head for reading identifying codes, which are arranged in a carrying station, can also be two-dimensionally moved in the carrying station by using a head stage.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting a display substrate such as a liquid crystal display panel.

[0002]

2. Description of the Related Art A display substrate such as a liquid crystal display panel is generally subjected to a current test such as a lighting test. Such a test or inspection is performed by placing a substrate to be inspected on a transfer device, performing rough alignment of the substrate on the transfer device, and passing the substrate to a measurement stage, that is, an inspection stage. The alignment is performed, and then the substrate is energized. The measured or inspected substrate is passed from the inspection stage to the same or another delivery device and removed from the delivery device.

In the inspection of the display substrate as described above, an identifier for identifying the substrate to be inspected and an alignment mark for precise alignment with the probe unit are formed on the substrate in advance, and prior to the actual inspection. After the inspection, the quality of the substrate is recorded or stored together with the identifier by reading the identifier, and the alignment mark is read to perform precise alignment of the substrate with the inspection device.

The substrate is positioned with respect to the inspection device by the coarse alignment so that the alignment mark is within the field of view of the video camera for photographing the alignment mark, and the electrode of the substrate is surely brought into contact with the contact of the probe unit by the fine alignment. Thus, it is positioned with respect to the inspection device, in particular the probe unit.

[0005]

However, in the conventional inspection apparatus, the read head for the identifier and the video camera for the alignment mark are provided in the main body on which the transfer device or the inspection stage is arranged, or the probe unit attached to the main body. Since the read head and the video camera can be used on the same type of substrate, particularly, the same size substrate, the read head and the video camera cannot be commonly used on different types of substrates, especially, different size substrates.

That is, in the conventional inspection apparatus, the positions of the read head and the video camera are fixed even though the positions of the substrate identifier and the alignment mark with respect to the read head and the video camera are different depending on the type of the substrate. When the type of substrate to be changed is changed, the identifier and the alignment mark are out of the visual fields of the read head and the video camera, respectively, and as a result, the identifier cannot be read and the alignment mark cannot be photographed.

Therefore, conventionally, every time the position of the alignment mark and the identifier on the inspection apparatus is changed to a different substrate, the video camera and the read head are manually set for the alignment mark and the identifier on the new substrate. And it was difficult to set them accurately. In particular, if the setting of the video camera with respect to the alignment mark is incorrect, the electrodes of the substrate do not come into accurate contact with the contacts of the probe unit.

An object of the present invention is to make it possible to read the alignment mark and photograph the alignment mark even if the type of the substrate to be inspected is changed.

[0009]

An inspection apparatus according to the present invention includes a main body including an inspection station and a transfer station,
An inspection stage arranged at the inspection station to receive a display substrate, one or more video cameras for photographing alignment marks of the substrate received by the inspection stage, and a substrate received by the inspection stage by the video camera And a camera stage that is two-dimensionally moved in first and second directions intersecting each other in a plane parallel to.

When the type of substrate to be inspected is changed, the video camera uses a two-dimensional camera stage in a plane parallel to the received substrate so that the alignment mark of the new substrate is in the field of view of the video camera. Will be moved. As a result, even if the type of substrate to be inspected is changed, the identifier can be read and the alignment mark can be photographed.

The camera stage has a pair of first first portions which are spaced apart in the second direction and extend parallel to the first direction.
And a pair of second guides that are coupled to the first guide so as to extend in the second direction at intervals in the first direction and to be movable in the first direction. A pair of second guides for supporting a plurality of the video cameras at a distance in the second direction and movably in the second direction; A first drive mechanism for moving the video camera in a direction closer to each other and a second drive mechanism for moving the video camera in a direction closer to each other in the second direction. By doing so, the video camera can be moved two-dimensionally with a simple mechanism, and the plurality of alignment marks formed on the substrate can be individually photographed by the plurality of video cameras.

The inspection apparatus further includes a transfer device arranged at the transfer station to transfer the display substrate, a reading head for reading an identifier formed on the substrate received by the transfer device, A head stage for moving the reading head two-dimensionally in third and fourth directions intersecting each other in a plane parallel to the substrate received by the delivery device. That way, when the type of substrate to be inspected is changed, the read head will be moved by the head stage in a plane parallel to the received substrate so that the identifier of the new substrate is in the field of view of the read head. It is moved two-dimensionally. As a result, the identifier can be read even if the type of board to be inspected is changed.

The head stage is a pair of third head stages which are spaced apart in the fourth direction and extend parallel to the third direction.
And a fourth guide that extends in the fourth direction and is movably coupled to the third guide in the third direction and supports the read head movably in the fourth direction. A fourth guide, a third drive mechanism for moving the fourth guide in the third direction, and a fourth drive mechanism for moving the read head in the fourth direction can be included. . By doing so, the read head can be moved two-dimensionally with a simple mechanism.

[0014]

1 to 9, an inspection device 10 is used as a visual lighting inspection device in which a rectangular liquid crystal display panel containing liquid crystal is used as a substrate 12 to be measured. In the illustrated example, the substrate 12 includes a plurality of electrodes on each of adjacent sides of the rectangle.

The inspection apparatus 10 includes a main body 14 whose upper front surface is an upwardly inclined surface. The main body 14 is formed in a housing shape by a main body frame in which a plurality of channel members are assembled and a plurality of panels detachably attached to the main body frame.

An area on one side of the inclined surface of the main body 14 in the left-right direction (which is the left-right direction in FIG. 1 and hereinafter referred to as "Y direction") is a measurement station of the substrate 12, that is, an inspection station. The other area in the Y direction serves as a relay station for untested and measured substrates.

Although not shown, a plurality of cassettes for accommodating uninspected substrates and inspected substrates in a horizontal state are provided at the rear of the relay station (the front-back direction is perpendicular to the paper surface in FIG. 1). Direction, and is hereinafter referred to as "X direction").

The uninspected substrate cassette and the empty cassette are arranged in the cassette station with a space in the Y direction. The transfer robot that transfers the substrate 12 from the relay station to the cassette station or vice versa is
It is located at the transfer station between the relay station and the cassette station in the direction.

The probe unit 16 for measurement and the measuring stage, that is, the inspection jig 18 are arranged in the inspection station, and the transfer device 20 is arranged in the relay station. The main body 14 has first and second rectangular openings at the inspection station and the relay station, respectively, on the upper inclined surface of the front surface.

In the following description, the inspection stage 18
The axis line perpendicular to the substrate received by the transfer device 20 and the axis line perpendicular to the substrate received by the transfer device 20 are both referred to as the "Z axis line", and the direction of the Z axis line is referred to as the "Z direction".
Both the direction orthogonal to the Y direction in the plane parallel to the substrate received by 8 and the direction orthogonal to the Y direction in the plane of the substrate received by the transfer device 20 are referred to as “X ′ direction”.

In the illustrated example, since the substrate 12 is provided with a plurality of electrodes on each of the adjacent sides of the rectangle, the probe units 16 correspond to the two adjacent sides of the rectangle.
Equipped with two probe assemblies. In each probe assembly, a plurality of probe blocks 22 having a plurality of contacts pressed against the electrodes of the substrate 12 are assembled to a rectangular plate-shaped base 24 at intervals in one direction.

Each probe assembly includes a probe block 2
The main body 1 so that the arrangement direction of 2 is the direction of the corresponding side.
The plate-shaped base 24 is assembled to the edge portion forming the first opening 4. The probe assemblies are provided in the same number as the sides of the substrate on which the electrodes are arranged. However, the probe block 22 may be directly assembled to the main body 14.

In the transfer robot, the transfer station is movably supported by a pair of guide rails extending parallel to the Y direction, and a robot moving mechanism equipped with a motor and a lead screw rotated by the motor. The substrate 12 is moved to an appropriate position in the Y direction, and the substrate 12 is delivered and conveyed in a horizontal state to the cassette and the delivery device 20.

Each robot is a known device that transfers a substrate by displacing a pair of forked hands with a hand drive mechanism. The substrate 12 is transported and transferred by a robot in a state where its longitudinal direction is aligned with the longitudinal direction of the hand and in a horizontal state.

When the substrate is transferred to the cassette and the transfer device 20 by the robot, the display substrate is received by one arm and the display substrate received by the other arm is transferred to the cassette or the transfer device 20. This is performed by controlling the delivery device 20.

The measuring stage 18, as shown in FIG.
A chuck top 26 for releasably adsorbing the substrate 12,
And a drive stage 28 for moving the chuck top 26. The movement of the chuck top 26 by the drive stage 28 is performed by rotating the chuck top 26 around the Z axis orthogonal to the substrate 12 received by the chuck top 26 and in the X ′ direction and the Y direction in a plane parallel to the received substrate 12. 2D movement and movement in the Z direction.

The transfer to the substrate 12 between the inspection stage 18 and the transfer device 20 is performed by the transfer device 30 shown in FIG. The transfer device 30 includes a plurality of pairs of holding members 3 that are reciprocally moved between the delivery device 20 and the inspection stage 18.
2 are supported by a pair of arms 34 at intervals in the Y direction. The sandwiching member 32 is synchronously moved in a direction in which the sandwiching member moving mechanism 36 arranged on the arm 34 shifts toward and away from each other.

The carrying device 30 moves the holding members 32 in a direction toward each other, holds the substrate 12 in an inclined state with the holding members 32, and conveys it in that state, and also moves the holding members 32 in directions away from each other. Release the substrate. As a result, the transfer device 30 transfers the substrate 12 to and from the inspection stage 18 and the transfer device 20.

As shown in FIGS. 6 to 8, the transfer device 20 includes a work table 40 and a plurality of work tables 40 arranged so as to sandwich the untested or measured substrate 12 in a horizontal state with respect to the robot. Centering tool 42, a moving mechanism 44 for moving the work table 40 in the direction of the Z axis perpendicular to the substrate 12 sandwiched by the centering tool 42, and an angle about the axis of the work table 40 extending in the Y direction. And a drive mechanism 46 for rotating the same.

The work table 40 has a support mechanism 50 supporting a plurality of arms 48 extending in a radial direction of a virtual circle in a plane parallel to the substrate 12 sandwiched by the centering tool 42, and the robot and the transfer device 30. On the other hand, an elevating table 52 for delivering the substrate 12 in cooperation with the centering tool 42 is arranged on the support mechanism 50 so that it is located at the center of the arm 48.

In the illustrated example, four arms 48 are combined in a cross shape, a centering tool 42 is arranged on each arm 48, and the lifting table 5 is provided at the intersection of the arms 48.
2 are arranged.

Although not shown, the support mechanism 50 includes a rotating mechanism for angularly rotating the arm 48 around a Z axis perpendicular to the substrate 12 and a lifting mechanism for moving the lifting table 52 in the Z axis direction. That is, it has a displacement mechanism. The lifting table 52 is formed in a disk shape, and also has a plurality of suction pads 54 that releasably suction the substrate 12.
On the upper surface.

The arm 48 is attached to the output shaft 56 (see FIG. 6) of the rotation mechanism of the support mechanism 50, and the support mechanism 50 is supported by the moving mechanism 44. Lifting table 5
2 is supported by a displacement mechanism of the support mechanism 50, and by the displacement mechanism, a position to be advanced in the Z direction from the centering tool 42 and a position to be retracted to be substantially the same as the centering tool 42 in the Z direction. Is selectively displaced.

Each of the centering tools 42 is moved by a drive mechanism (not shown) in a synchronized manner in a direction in which they approach each other (radial direction of an imaginary circle) to hold and release the substrate 12. In such a centering tool 42, for example, a plate-shaped block 58 is movably coupled to a guide rail 60 arranged on the arm 48 in the longitudinal direction of the arm 48, and a pair of abutting parts are brought into contact with the end surface of the substrate 12. It is possible to use the roller 62 supported by a block so as to be rotatable around the Z axis.

The moving mechanism 44 enables the supporting mechanism 50 to move in the Z direction by means of a guide rail 66 and a guide 68 which are fitted inside the planar U-shaped receiving member 64 so as to be relatively movable and extend in the Z direction. It is assembled. A pair of pivots 70 extending coaxially in the Y direction are assembled to the receiving member 64, and are supported by the drive mechanism 46 by the pivots 70. The pivots 70 extend from the receiving member 64 in opposite directions.

The receiving member 64 includes a lead screw 72 attached to the receiving member 64 so as to extend in the Z direction,
It is moved in the Z direction by a Z-axis drive mechanism including one or more lead nuts 74 screwed to the lead screw 72 and assembled to the support mechanism 50, and an electric motor 76 that rotates the lead screw 72 around its axis. It

In the moving mechanism 44 as described above, when the lead screw 72 is rotated around the Z axis by the electric motor 76, the lead nut 74 is moved in the Z direction, so that the support mechanism 50 is moved in the Z direction. It This allows
The work table 40 is moved in the Z direction.

The drive mechanism 46 includes a pivot 70 of the moving mechanism 44.
Are individually supported by a pair of brackets or bases 78 spaced in the Y direction so that the moving mechanism 44 is between the bases 78 so as to be pivotally movable. Both bases 78
Is mounted on the frame of the inspection device 10 and supports the entire transfer device 20. One base 78 has a U-shape that opens upward, and the other base 78 (not shown) has an L-shape.

The drive mechanism 46 also includes a lead screw 80 that is rotatably disposed on one of the bases 78 and extends in the X direction, an electric motor 82 that rotates the lead screw 80 about its axis, and a lead screw 80. The lead nut 84 screwed together, the first link 86 pivotally connected to the lead nut 84 about an axis extending in the Y direction, and the second link 86 attached to one pivot shaft 70 of the moving mechanism 44. And link 88.

The lead nut 84 has an assembly portion 92 to which the first link 86 is assembled by the pivot 90. The first and second links 86 and 88 are relatively movably connected by a guide rail 94 and a guide 96 which are slidably coupled to each other. The moving direction of the lead nut 84 is regulated in the X direction by a pair of guide rails 98 attached to the base 78.

In the drive mechanism 46, the lead screw 80 is rotated by the electric motor 82 to move the lead nut 84.
Is moved in the X direction, the first link 86 moves the pivot 90
Angularly rotated about the axis of the first link 96 and slidably coupled to the first link 96, the second link 88 rotates angularly about the axis of the pivot 70. As a result, the moving mechanism 44 is angularly rotated about the axis of the pivot 70, so that the work table 40 supported by the moving mechanism 44 is rotated.
Is angularly rotated about an axis extending in the Y direction (actually, the axis of the pivot 70).

The inspection apparatus 10 also includes a plurality of video cameras 100 for photographing alignment marks formed on the substrate 12, a read head 102 for reading an identifier formed on the substrate, and the inspection stage 18 for the video camera 100. The camera stage 104 that is two-dimensionally moved in the X ′ direction and the Y direction that are orthogonal to each other within a plane parallel to the substrate 12 received by the reading head 102, and a plane parallel to the substrate 12 received by the transfer device 20. Head stage 1 for two-dimensionally moving in the X'direction and the Y direction inside
06 and.

The alignment mark is formed at a predetermined position from the electrode of the substrate 12. In the illustrated example, a cross-shaped alignment mark is formed on each of the plurality of corner portions of the substrate. In use, the video camera 100 corresponding to the position of the alignment mark on the substrate is used to photograph the corresponding alignment mark.

The identifier is a character such as an arithmetic number,
It is formed on a predetermined portion of the substrate 12 so as to be visible. The read head 102 is a video camera that captures a visible identifier.

The camera stage 104 has a pair of first guides 110 arranged on the base plate 108 so as to extend in parallel with the Y direction at intervals in the X'direction, and an X'direction at intervals in the Y direction. A pair of second guides 112 extending to the first guide 110 and movably in the Y direction, and a pair of second guides 112 that move the second guides 112 in the Y direction so that they are offset from each other. First drive mechanism 1
14 and a second drive mechanism 116 for moving each video camera 100 in the X ′ direction so that they are offset from each other.

The base plate 108 has a rectangular opening 118 which coincides with the first opening of the body 14. Each of the second guides 112 supports the two video cameras 100 at intervals in the Y direction and movably in the X ′ direction.

Each first drive mechanism 114 is a mechanism that can move the second guide 112 to an arbitrary position in the Y direction and can be releasably maintained at that position, like a jack.

Each second drive mechanism 116 wraps the endless belt 122 around the pair of pulleys 120 assembled to the second guide 112, connects the video camera 100 to the endless belt 122 with the assembling tool 126, and The endless belt 122 is moved by rotating the pulley 122 of No. 2 by the electric motor 124 to move the video camera 100 in the X ′ direction.

The head stage 106 has a pair of third guides 132 arranged on the base plate 130 so as to extend in parallel with each other in the Y direction at intervals in the X'direction, and with the third guide 132 extending in the X'direction. The fourth guide 134, which is movably coupled to the guide 132 in the Y direction, and the fourth guide 13.
It includes a third drive mechanism 136 for moving 4 in the Y direction and a fourth drive mechanism 138 for moving the read head 102 in the X ′ direction. The fourth drive mechanism 138 is housed within the fourth guide 134 and is therefore not shown.

The base plate 130 has a rectangular opening 140 that coincides with the second opening of the body 14. Each fourth guide 134 supports the read head 102 so as to be movable in the X ′ direction. The moving directions of the first and second drive mechanisms and the third and fourth drive mechanisms 136 and 138 are
It does not have to match.

Third and fourth drive mechanisms 136 and 138
Each has a fourth guide 134, like a jack.
And a mechanism capable of moving the reading head 102 to an arbitrary position in the X ′ direction and the Y direction and maintaining the position in a releasable manner. The height adjustment of the read head 102 in the Z direction can be adjusted by the Z adjustment mechanism 142.

Next, the operation of the inspection device 10 will be described.

First, the robot directs one hand to an empty cassette, passes the inspected substrate received by one hand to the empty cassette, and the other hand the cassette containing the unmeasured substrate. The unmeasured substrate 12 in the cassette is horizontally taken out by the other hand. At this point, the unmeasured substrate 12 has its longitudinal direction set to the longitudinal direction (X direction) of the hand, and the transfer device 20 maintains the work table 40 and the inspected substrate in a horizontal position.

Then, the lifting table 52 of the delivery device 20 is lifted to a position above the robot hand. In this state, one hand of the robot is projected below the elevating table 52, and the elevating table 52 is moved down between the bifurcated hands to a position where it is below one hand. As a result, the inspected substrate 12 is delivered from the delivery device 20 to one hand of the robot.

Then, one hand of the robot is retracted, the other hand of the robot is projected above the lifting table 52, and the lifting table 52 passes between the bifurcated hands and is above the other hand. Is raised up to. As a result, the substrate 12 is moved horizontally from the other hand in the horizontal state with its longitudinal direction being the X direction.
2 and is adsorbed to the adsorption pad 54.

Next, the robot retracts the other hand 40 and moves one hand to the empty cassette side to transfer the inspected substrate to the empty cassette.

Next, the lifting table 52 is attached to the centering tool 42.
Can be lowered to almost the same height as. However, the centering tool 4
2 is the substrate 1 before the start of lowering of the lifting table 52.
2 has been moved to a position where it can be received in the space formed by the rollers 62.

Then, the centering tool 42 is synchronously moved in the direction toward each other. As a result, the centering tool 42 brings the roller 62 into contact with the end surface of the substrate 12 and pushes the substrate 12 toward the partner centering tool 42. As a result, the substrate 12 is two-dimensionally moved in a plane parallel to the substrate 12 to be roughly aligned with the delivery device 20, and is sandwiched in a horizontal posture by the interaction of the centering tool 42. The rough alignment is so-called centering in which the center of the substrate 12 is aligned with the centers of the work table 40 and the arm 48.

At the time of rough alignment, the substrate 12 is released from the suction by the lifting table 52, and the lifting table 52 is released.
It is moved with respect to the lifting table 52 in a state of being slightly levitated from the lifting table 52 by the compressed air injected from. Therefore, even when the substrate 12 is two-dimensionally moved with respect to the transfer device 20 during the rough alignment, the substrate 1
2 damage is prevented.

During rough alignment, the substrate 12 is displaced with respect to the block 66 while the end face of the substrate 12 is brought into contact with the roller 62 to rotate the roller 62, so that the substrate 12 is moved two-dimensionally. Also, the movement of the substrate 12 becomes smooth.

When the rough alignment is completed, the arm 48 of the transfer device 20 is rotated 90 degrees around the Z-axis while the substrate 12 is again attracted to the lifting table 52. As a result, the direction of the substrate 12 being received is changed so that the longitudinal direction thereof is the transport direction (Y direction) of the substrate 12 by the transport device 30. At this time, since the substrate 12 is sandwiched by the centering tool 42 and adsorbed by the elevating table 52, it is not displaced with respect to the centering tool 42 or the elevating table 52.

Then, the work table 40 and the moving mechanism 44 are moved around the axis of the pivot 70 by the driving mechanism 46.
Is rotated once. As a result, the substrate 12 sandwiched by the centering tool 42 and adsorbed to the elevating table 52 is changed to an oblique posture inclined by 60 degrees with respect to the horizontal line. At this time, the guide rail 94 and the guide 96 slide relatively in the coupled state.

In this state, the identifier formed on the upper surface of the substrate 12 is photographed by the reading head 102 mounted on the main body 14 as shown in FIG.
At this point, since the substrate 12 is centered with respect to the transfer device 20, the identifier is accurately photographed, accurately read by the circuit that processes the output signal of the read head 102, and stored in the memory. It The identifier is used when recording and storing the inspection result of the board. However, the identifier may be displayed on the monitor and the operator may check the screen of the monitor and record the identifier.

Next, the holding member 32 is moved to the relay station, and the work table 40 is directed to the transfer device 30 by the moving mechanism 44 so that the position of the substrate 12 in the Z direction coincides with the position of the holding member 32 in the same direction. Is projected in the Z direction.

Next, the holding member 32 is moved in the direction in which the holding members 32 approach each other to hold the substrate 12, and the arm 48 is returned to its original position by the moving mechanism 44. As a result, the substrate 12 is delivered from the delivery device 20 to the holding member 32 in an oblique posture.

After the above, the transfer device 20 stands by to receive the inspected substrate from the transfer device 40 obliquely. Further, the transfer device 30 transfers an unmeasured substrate to the inspection station and transfers the substrate to the inspection stage 18 in an inclined state.

When the unmeasured substrate is conveyed to the inspection station, the inspection stage 18 causes the chuck top 26 to project in the Z direction by the drive stage 28 to adsorb the unmeasured substrate to the chuck top 26, and the holding member. After the 32 is moved away, the chuck top 26 is returned to its predetermined position.

Next, when the holding member 32 is moved from the inspection station to another place, each alignment mark formed on the substrate is photographed by the corresponding video camera 100.

The output signal of the television camera 100 is supplied to a processing circuit for image processing. The inspection device 10 is
Based on the result of the image processing, the drive stage 28 of the inspection stage 18 is driven so that each alignment mark is located at a predetermined position within the field of view of the corresponding video camera 100. As a result, precise alignment of the uninspected substrate is performed.

However, in the precision alignment, the output signal of the video camera 100 is reproduced on the monitor, and while the operator monitors the screen of the monitor, each alignment mark corresponds to a predetermined position within the visual field of the video camera 100. The drive stage 28 of the inspection stage 18 may be driven so that

When the precision alignment is completed, the inspection apparatus 10 causes the chuck top 26 to project again in the Z direction and presses the electrode of the substrate against the contact of the probe unit,
In that state, the board is energized to start the inspection.

When the inspection is completed, the holding member 32 of the transfer device 30 is moved above the chuck top 26, the chuck top 26 is obliquely raised to the height position of the holding member 32, and the holding member 32 is inspected. The chuck top 26 releases the inspected substrate while sandwiching it, and is obliquely lowered to a predetermined height position. As a result, the inspected substrate is passed from the chuck top 26 to the holding member 32 in an oblique posture.

Next, the holding member 32 is moved from the inspection station to the relay station. In the relay station, the work table 40 of the transfer device 46 is obliquely raised to the height position of the sandwiching member 32, the substrate is sucked by the elevating table 52, and the centering tool 42 is moved in the direction toward each other to move the substrate. And the holding member 32 releases the substrate. As a result, the inspected substrate holds the clamping member 32.
Is delivered to the delivery device 20.

Next, the holding member 32 is attached to the work table 4
The work table 40 is separated from the position corresponding to 0, and the work table 40 is obliquely lowered to a predetermined height position.
Reversed 0 degrees. As a result, the inspected substrate is changed to the horizontal posture.

Next, the inspected substrate and the uninspected substrate are transferred between the robot and the transfer device 20 by the steps already described.

When the type of the substrate to be inspected is changed in the inspection apparatus 10, the video camera 100 and the read head 102 have the alignment marks and identifiers of the new substrate in the visual fields of the video camera 100 and the read head 102, respectively. It is two-dimensionally moved by the camera stage 104 and the head stage 106 so as to enter.
As a result, even if the type of substrate to be inspected is changed, the alignment mark can be photographed and the identifier can be read.

4 and 5 show drive mechanisms 114 and 116.
Shows a state in which the video camera 100 is moved in a direction toward each other. The read head 102 has a driving mechanism 136,1.
It can also be moved by 38.

In the above embodiment, the uninspected substrate and the inspected substrate are transferred in the common transfer station. However, a transfer station for loader and a transfer station for unloader are provided, A transfer device may be arranged in each transfer station, and a substrate for each transfer device or a common robot may transfer the substrate to each transfer device.

The identifier may be a bar code instead of a character such as an arithmetic number. In this case, a sensor head such as a video camera or a bar code reading head may be used as the reading head. In the latter case, a video camera may be used as the read head. As the video camera and the video camera 100 for the alignment mark in this case, a line sensor in which a plurality of detection elements are arranged in a line like a CCD line sensor may be used, and in this case, the line sensor is perpendicular to the array direction of the detection elements. Is moved in the direction of.

The present invention is not limited to the above embodiment. For example, the present invention is applied not only to a delivery device for a visual inspection device, but also to a delivery device for another inspection device such as an automatic inspection device, an EL display substrate inspection device, and a glass substrate inspection device for a display panel. can do.

The present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the spirit of the invention.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of an inspection apparatus according to the present invention.

FIG. 2 is a sectional view taken along line 2-2 in FIG.

3 is a cross-sectional view of a camera stage in the inspection device of FIG.

4 is an enlarged view of a camera stage in the inspection device of FIG.

FIG. 5 is a diagram for explaining the operation of the camera stage.

6 is a cross-sectional view taken along line 6-6 in FIG.

7 is a plan view showing an embodiment of a transfer device used in the inspection device of FIG. 1. FIG.

8 is a front view of the delivery device shown in FIG. 7. FIG.

9 is a diagram showing an embodiment of a head stage used in the inspection apparatus of FIG.

[Explanation of symbols]

10 Inspection device 12 Display substrate 14 body 16 probe units 18 Inspection stage 20 Delivery device 30 carrier 100 video camera 102 read head 104 camera stage 106 head stage 108 Base plate 110,112 First and second guides 114,116 First and second drive mechanisms 130 base plate 132,134 Third and fourth guides 136, 138 Third and fourth drive mechanisms

Front page continuation (51) Int.Cl. ⁷ Identification symbol FI theme code (reference) G09F 9/00 352 G09F 9/00 352 5G435 (72) Inventor Isao Ueki 2-6-8 Kichijojihonmachi, Musashino-shi, Tokyo Japan Micronics Co., Ltd. F-term (reference) 2F069 AA03 AA17 AA93 BB13 CC06 DD12 GG04 GG07 GG12 GG45 GG58 GG62 HH30 JJ07 JJ13 JJ22 MM04 MM24 MM32 2G014 AA13 AB21 AB59 AC20 CA08 FA20 CA08 CA20 2 5G435 AA17 AA19 BB12 KK05 KK09 KK10

Claims (4)

[Claims] 1. A main body having an inspection station and a transfer station, an inspection stage arranged in the inspection station for receiving a display substrate, and one or more images of alignment marks of the substrate received by the inspection stage. A video camera and a first crossing each other in a plane parallel to the substrate received by the inspection stage
And a camera stage that moves two-dimensionally in a second direction. 2. The camera stage includes a pair of first guides spaced apart in the second direction and extending in parallel to the first direction, and the second stage spaced apart in the first direction.
A pair of second guides that are coupled to the first guide and extend in the first direction and are movable in the first direction, each of the plurality of video cameras being spaced apart in the second direction. And a pair of second guides that are movably supported in the second direction, and a first drive mechanism that moves the second guides in a direction in which the second guides are close to each other in the first direction. The inspection device according to claim 1, further comprising a second drive mechanism that moves the video camera in a direction in which the video camera shifts in the second direction. 3. A transfer device arranged at the transfer station for transferring a display substrate, a read head for reading an identifier formed on the substrate received by the transfer device, and the read head. 3. The inspection apparatus according to claim 1, further comprising: a head stage that moves two-dimensionally in third and fourth directions that intersect each other in a plane parallel to the substrate received by the delivery device. 4. The head stage includes a pair of third guides that are spaced apart in the fourth direction and extend parallel to the third direction, and the head stage extends in the fourth direction and the thirteenth direction.
A fourth guide movably coupled to the guide in the third direction, the fourth guide supporting the read head movably in the fourth direction, and the fourth guide including the fourth guide. The inspection apparatus according to claim 3, further comprising a third drive mechanism for moving the read head in the third direction, and a fourth drive mechanism for moving the read head in the fourth direction.