JP2002286422A - Displacement sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus that is suited for allowing a measurement executer to instantly grasping a measurement result at a measurement point regarding a universal displacement sensor for measuring height, displacement, shape, and the like. SOLUTION: The displacement sensor is provided with a head section for generating an image signal by applying a line beam to the surface of an object to be measured at a specific angle and at the same time shooting a region including the illumination position from another angle by a two-dimensional image pickup element, a height data row acquisition means for acquiring a height data row corresponding to the height of a series of points on the illumination light image in a line beam by processing an image signal that is generated by the head section, a color data row acquisition means for acquiring color data row from height data row by converting the height data to color data according to a specific conversion rule, and an imaging means for generating image data corresponding to an image including a height distribution image by adjacently arranging a pixel row straight line corresponding to the color data row in time series, or an image signal.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention uses a linear beam (hereinafter, referred to as "line beam") and a two-dimensional image pickup device (for example, a two-dimensional CCD) to perform measurement based on the principle of a light cutting method. The present invention relates to a displacement sensor for measuring a displacement (for example, height, etc.) of a target object, and in particular, by projecting properties such as minute irregularities on the surface of the target object as a clear image,
The present invention relates to a displacement sensor capable of easily confirming whether or not measurement is correctly performed according to a predetermined measurement condition.

[0002]

2. Description of the Related Art The applicant of the present invention has previously used a beam having a linear cross section (hereinafter, referred to as a "line beam") and a two-dimensional image pickup device (for example, a two-dimensional CCD or the like) by the principle of a light cutting method. A novel displacement sensor that measures the displacement (for example, height) of a measurement target object has been proposed.

In this type of displacement sensor, it is assumed that measurement is not performed correctly according to predetermined measurement conditions due to the presence of disturbance light or the like. Therefore, it is demanded to project the properties such as minute irregularities on the surface of the measurement target object as a clear image.

Japanese Patent Laid-Open Publication No. Hei 5-81459 discloses an embossed image reading apparatus which can read an emboss formed on a recording medium and output the image in almost the same way as the actual appearance of the emboss. It has been disclosed.

That is, in this embossed image reading apparatus, a slit light is projected onto the surface of a recording medium (card) from a diagonal direction at a constant angle of incidence, and a slit light pattern projected on the ground surface of the recording medium is projected. The height of the slit light projection position is detected from the shift amount of the slit light pattern projected on the embossed portion. Multilevel image data is created using the detected height data as density data.

[0006]

However, in the "embossed image reading device" described in the publication, the emboss formed on the card is displayed in a shaded manner according to the height, so that the appearance closer to the actual emboss is obtained. Although it is intended to record the transaction using the card, rather than displaying at the time of measuring the height, it is possible to see the display after the time has elapsed since the emboss was recorded for the purpose of recording the transaction using the card It can be understood that it is assumed. The fact that the embodiment is described mainly on printing on a slip is a manifestation of this fact.

On the other hand, a general-purpose displacement sensor that measures height, displacement, shape, etc., generally displays the measurement result immediately to enable the measurement to be performed as intended by the person performing the measurement. It is important that the measurement conditions including the positional relationship between the sensor and the displacement sensor and the setting of the displacement sensor itself can be easily adjusted.

[0008] From this point of view, when it is intended to use it as a display technology in a general-purpose displacement sensor, the technology described in this "embossed image reading device" is still insufficient and requires further contrivance. The conclusion has been reached.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a general-purpose displacement sensor for measuring height, displacement, shape, and the like. It is an object of the present invention to provide a device suitable for a user to immediately grasp a measurement result.

[0010]

The displacement sensor of the present invention can be conceptually understood as follows. That is, first, measurement of a series of heights along the linear projected light beam light image projected on the target object is repeatedly performed.
The measurement results are sequentially displayed while performing such repeated measurements. In the display mode, a series of height values obtained by one measurement is displayed on a display screen as a set of minute regions which are linearly arranged in accordance with the arrangement order of the height values. Each height value included in a series of height values obtained by one measurement is represented by a color corresponding to the height in a corresponding minute area. A series of height values obtained in the next measurement are displayed adjacent to the previously displayed area. By repeating this, a planar display is obtained.

The "display" of a series of height values obtained by one measurement may be performed after the measurement and before the next measurement, or may be performed after the next measurement. The measurement may be performed in parallel with the measurement. The minute area on the display screen may be one pixel as a minimum unit capable of expressing a color, or may be an area where a plurality of pixels are aggregated. The color corresponding to the height is
Includes achromatic series with different brightness.

According to such a configuration of the present invention, measurement is performed while the light projecting / receiving optical system of the measuring device and the object are relatively moved in a direction perpendicular to the longitudinal direction of the light beam image, and the result of the measurement is obtained. If the display is repeated, a map-like display in which the height of each location of the object is represented in color can be obtained. Positive relative movement of the light emitting / receiving optical system of the measuring device and the object
If you repeat the measurement and display the result without causing
The display of the history of the change in height of the light beam image based on the temporal movement or deformation of the object can be obtained.

Therefore, when repeatedly measuring a series of heights along a linear projected light beam image projected on a target object, the height value obtained while repeating the measurement is repeated. The measurement operator can determine whether the intended measurement has been performed correctly shortly after starting the display.If the measurement conditions need to be corrected, the measurement In this case, the measurement condition can be corrected, and the result of the correction can also be immediately confirmed by the display, so that the usability as the measuring device is improved.

According to another aspect of the present invention, there is provided a displacement sensor comprising:
A head unit, a height data sequence acquiring unit, a color data sequence acquiring unit, and an imaging unit are provided.

The head section is formed integrally with or separate from the signal processing section, irradiates the surface of the object to be measured with a line beam at a predetermined angle, and changes the area including the irradiation position from another angle to the two-dimensional image sensor. To generate a video signal.

The height data string acquiring means acquires a height data string corresponding to the height of a series of points on the irradiation light image of the line beam by processing the video signal generated by the head unit. An algorithm for obtaining a height data sequence generally employs the principle of triangulation. In general, the direction of a straight line formed by the irradiation light image of the line beam is a direction orthogonal to the horizontal scanning line of the two-dimensional image sensor. Therefore, the displacement in the height direction of the surface of the measurement target object appears as a shift of the light image position in the horizontal scanning line direction on the light receiving surface of the two-dimensional image sensor.

As the two-dimensional image sensor, as previously proposed by the present applicant, a special two-dimensional image sensor (for example, two-dimensional C
CD, etc.). As a method of inexpensively manufacturing a two-dimensional imaging device having such an elongated visual field, an existing imaging device having an element array such as a digital camera or a video camera is diverted, and an optical window is left on the light receiving surface of the optical device. This can be realized by surrounding surrounding pixels with black pixels. As a method of forming an optical black pixel, a method of attaching a light-shielding mask such as aluminum, a method of modifying an element structure so that a pixel corresponding to an optical black pixel does not receive light,
Although the element itself receives light, an element that cuts off a transfer path to a vertical shift register to block transfer of electric charge can be used.

The color data acquisition means acquires a color data string from the height data string by converting the height data into color data according to a predetermined conversion rule. The imaging means,
Image data or a video signal corresponding to an image including a height distribution image in which pixel line straight lines corresponding to the color data lines are arranged adjacent to each other in time series are generated.

Here, the "pixel line" refers to a pixel (having an arbitrary size) which is one display unit on a display screen, for example, oriented in a vertical direction of the screen, as generally described above. Corresponds to those arranged in a line. The size of this pixel row is arbitrary as described repeatedly, and is not necessarily 1
The present invention is not limited to the horizontal scanning lines of the book, nor is it limited to the minimum display unit width defined by the resolution of the display device.

The image data or the video signal is not only a video signal conforming to the so-called NTCS or other general video standards, but also a case where the image data is simply output in parallel or in series without adding a synchronization signal or the like. The main purpose is to include

In a preferred embodiment of the displacement sensor of the present invention, an image monitor for displaying a predetermined height distribution image based on the generated image data or video signal is further added.

Further, in a preferred embodiment of the displacement sensor of the present invention, an image processing device for performing a predetermined image processing based on the generated image data or video signal is further added.

Here, the term "image processing apparatus" means that since image data or video signals obtained from the displacement sensor of the present invention have three-dimensional information, various feature extraction processing and measurement processing are performed based on the three-dimensional information. This means that it can be realized externally by providing a separate image processing device.

Next, various embodiments of the displacement sensor according to the present invention will be described as follows.

That is, the "predetermined conversion rule" in the present invention described above may be a method for converting a height into a density or a method for converting a height into a color.

Here, when converting the height into the density,
Generally, it can be set so that the density of a high portion is bright and the density of a low portion is dark. On the other hand, when converting height to color, unlike density,
By applying an arbitrary color, it is possible to express a clear difference visually ascertained even with a minute altitude difference.

In the "predetermined conversion rule" of the present invention, the relationship between the height range and the corresponding color range can be changed. In this case, even if the height range is narrow, an image that clearly shows the difference in height can be generated by setting the color range wide.

At this time, if the user can arbitrarily change the relationship between the height range and the corresponding color range, an optimum color distribution can be obtained according to the height range to be measured.

In the above-mentioned "predetermined conversion rule" of the present invention, a height region that is equal to or higher than a predetermined upper limit height has a specified upper limit color, and / or a height region that is equal to or lower than a predetermined lower limit height is specified. May be clipped to the lower limit color.

According to such a configuration, it is possible to obtain a clear image in which only the necessary height range is clearly color-coded in the target height range.

At this time, if the region to be clipped can be changed, a user-friendly device can be realized that accurately responds to the user's request.

As described above, the height distribution image included in the image data or the video signal in the displacement sensor of the present invention is in a state where all the pixel line straight lines of a predetermined number of one screen are aligned. It may be configured to correspond, or may be configured to correspond to a transitional state in which the pixel line straight lines are aligned.

Here, if the arrangement is made so as to correspond to the state where all are aligned, it is possible to obtain a rectangular height distribution image of a prescribed size having a certain height and width on the screen.
This image can be confirmed on an image monitor as it is, and can be subjected to various analyzes by sending it to an image processing device.

On the other hand, if it corresponds to the elapse of the state in which the pixel line straight lines are aligned, a series of obtained pixel lines are immediately formed into an image from the initial stage of measurement or photographing and provided to the operator via the image monitor. It is possible to quickly inform the operator of the properties of the measurement object.

"Imaging means" in the above displacement sensor
As a height distribution curve on a specific horizontal scanning line,
And / or may be configured to generate image data or a video signal corresponding to an image further including a height distribution curve on a specific time axis along a corresponding reference axis of the height distribution image. Good.

Here, as a more specific example, a height distribution image is formed by taking a time axis in the horizontal direction and a beam line in the vertical direction of the monitor screen. A height distribution curve on a specific horizontal line is drawn on the upper edge or the lower edge of the height distribution image along the time axis direction. Similarly, on the right edge or left edge of the height distribution image,
A height distribution curve at a specific time or a specific number of measurements is drawn along the beam line axis direction.

According to such a configuration, while observing the entire height distribution in a time series at a specific position of the object to be measured or on the upper surface of the object to be measured, the reference axis at each of the specific parts is The height distribution along the height can be confirmed, and the usability of the device is significantly improved.

At this time, if a specific horizontal scanning line and / or a specific time axis can be changed, an operator can greatly improve the usability by selecting an arbitrary horizontal scanning line and / or a time axis. it can.

Further, if the specific horizontal scanning line and / or the specific time axis is configured to automatically follow the peak or bottom height position, the usability can be further improved. In addition to the peak or bottom,
Obviously, if the arbitrary feature points can be set freely, the usability can be further improved.

The measurement of the above-mentioned peak or bottom height position and any characteristic point may be performed in a specific area of the height distribution image.

At this time, if the specific area for measuring the peak height position can be changed, it is obvious that the usability can be further improved.

The "imaging means" in the above-described displacement sensor of the present invention is provided with an image data or video signal corresponding to an image including a height distribution image whose display position is shifted in the time axis direction according to the elapsed time or the number of measurements. May be generated.

The "imaging means" in the above-described displacement sensor of the present invention generates image data or a video signal corresponding to an image including a height distribution image automatically corrected so that the display range is always constant. It may be configured as follows. According to such a configuration, there is an advantage that the color distribution on the screen does not change even if the distance between the sensor and the measurement target object changes.

The "imaging means" in the above-described displacement sensor of the present invention may generate image data or a video signal corresponding to an image including a height distribution image having a peak or bottom height position display.

Further, the "imaging means" in the above-described displacement sensor of the present invention generates image data or a video signal corresponding to an image including a height distribution image in a time range specified by a trigger input. You may.

[0046]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 shows a configuration diagram (part 1) showing an example of a displacement sensor system to which the present invention is applied.

As shown in the figure, the displacement sensor system includes a head unit 1, a signal processing unit 2, an image monitor 3, and an image processing device 4 capable of performing three-dimensional image processing.

The head unit 1 irradiates a line beam onto the surface of the object 5 to be measured at a predetermined angle, and generates a video signal by photographing an area including the irradiation position from another angle with a two-dimensional image sensor. It has a function to do.

In the figure, a projection 5a having a trapezoidal cross section is formed on the surface of the object 5 to be measured. Reference numeral 6 denotes a projection for height measurement corresponding to a line beam,
Reference numeral 7 denotes a light reception for height measurement.

FIG. 2 is a configuration diagram showing the internal configuration of the head unit. As shown in FIG.
Inside, a slit light source 101 for transmitting light emitted from a laser diode to the outside through a slit plate, and a light beam emitted from the slit light source 101 are appropriately focused and shaped to generate a line beam, which is measured. Light projecting lens system 102 for irradiating the surface of target object 5 from almost directly above
And a two-dimensional CCD 104 for photographing, via the light receiving lens system 103, a predetermined area including the line beam irradiation position on the measurement target object 5. In this example, a spherical lens is employed as the light projecting lens system 102, and a cylindrical lens is employed as the light receiving lens system 103. In the figure, 5a is a projection, 6 is light emission,
Reference numeral 7 denotes light reception. Further, as shown in FIG. 1, the object 5 to be measured is designed to be moved by an appropriate transport mechanism in the direction of the arrow in the figure.

Next, the electrical configuration of the head unit 1 and the signal processing unit 2 will be described. FIG. 3 shows a hardware configuration diagram of the head unit and the signal processing unit.

As shown in FIG. 1, a slit light source 101, a light projecting lens 102, a light receiving lens 103, a two-dimensional CCD 104, a CCD drive 105, an oscillation circuit 106 Signal generation circuit 10
7 and a sample and hold circuit 108 are included.

As described above, the slit light source 101 generates slit light by passing the light emitted from the laser diode through the slit plate, and emits the slit light. The slit light emitted from the slit light source 101 is formed into a line beam via the light projecting lens 102, and then applied to the object 5 to be measured. A certain area including the irradiation point is photographed by the two-dimensional image sensor 104 via the light receiving lens 103, and is converted into a discrete video signal corresponding to each pixel. The discrete video signals output from the CCD 104 are smoothly shaped by the sample and hold circuit 108 and output from the signal processing unit 1 to the outside.

The synchronizing signal generating circuit 107 generates various synchronizing signals for defining the light emitting timing of the slit light source 101, the driving timing of the CCD drive 104, and the driving timing of the sample and hold circuit 108. The generation of the synchronization signal is performed with reference to the clock signal output from the oscillation circuit 106.

Next, the configuration of the signal processing unit 2 will be described. The signal processing unit 2 includes a CPU 201 and an operation unit 20.
2, display LED 203, console 204, and I
/ O 205, memory control unit 206, frame buffer 207, image memory 208, D / A converter 109
, Character display memory 210, graphic display memory 211, A / D converter 212
And a synchronizing signal generator 213 and a transmitting circuit 214. The CPU 201 has an RO as well as a microprocessor.
It is composed of M, RAM, etc., and controls the entire signal processing unit.

More specifically, the CPU 201
Implements display control, input / output control, PIX → mm conversion processing, various arithmetic processing in accordance with setting contents, and the like.

The arithmetic unit 202 is composed of a dedicated hardware circuit and has various arithmetic functions necessary for image processing. The details will be described later with reference to FIG. The display LED 203 is an LED of various colors used for various operation displays and the like.

The console 204 functions as an interface for connecting a handy type console unit (not shown) to the signal processing unit 2.

The I / O 205 functions as an interface for inputting various signals from the outside to the signal processing unit or outputting various signals to the external device. The I / O 205 outputs a sensor output (digital data representing a measured value and / or a switching signal) to the outside.

The memory control unit 206 stores an input signal in the image memory 208,
7 to 211, and each memory 20
7 to 211 are superimposed on the video signal and output to the frame buffer 207, and control of the frame buffer 207 to generate a video signal from the D / A converter is performed.

The frame buffer 207 is a memory for adjusting the timing of a video signal, and the image memory 208 functions as a memory for storing an input image signal or a memory for generating a profile image.

The synchronizing signal generating section 213 generates various synchronizing signals inside the signal processing section 2 in accordance with the synchronizing signal from the head section 1.

Next, the configuration of the arithmetic unit 202 will be described. The calculation unit 202 mainly executes a calculation for acquiring height data from a video signal.

FIG. 4 shows a hardware configuration diagram of the arithmetic unit. As shown in the figure, the arithmetic unit 202 includes an interface (I / F) 202a and the first arithmetic unit 20.
2b, a second arithmetic unit 202c, and a register 202d.

Then, the first arithmetic unit 202b executes an arithmetic operation for obtaining the gray-scale center of gravity X for calculating the slit position on the CCD, based on the video signal captured via the interface (T / F) 202a. . Similarly, the second arithmetic unit 202c is provided with an interface (I / F) 202
An operation for obtaining the light power P on the CCD is executed based on the video signal taken in through a. The density G and the optical power P thus obtained are stored in the register 202d.
And provided for external access via the CPU bus.

Next, the display processing according to the present invention will be described based on the hardware configuration described above.

FIG. 5 is a flowchart (1) showing the display processing according to the present invention. This processing is configured to repeatedly execute the height data acquisition processing (step 501) and the display processing of one line height (step 502).

In the height data acquisition process (step 501), the density centroid of each horizontal line of the acquired video is calculated.
Processing such as conversion of the pixel data at the position of the density center of gravity into an actual height (mm) is executed.

Display processing of the height of one line (step 50)
In 2), by converting height data into color data according to a predetermined conversion rule, a color data string acquiring means for acquiring a color data string from the height data string, and a pixel string straight line corresponding to the color data string are formed. A process of generating image data corresponding to an image including a height distribution image arranged adjacently in time series on an image memory is executed.

The predetermined conversion rules include those for converting height to density and those for converting height to color. The flowchart of FIG. 5 shows a case where the height is converted into the density.

In this case, first, if the height result is within the display range, clipping processing is performed. By this clipping process, a height range exceeding a certain upper and lower limit value is clipped to an upper limit density (for example, white) and a lower limit density (for example, black). Next, the height information (mm) in the display range is converted to lightness information (gradation) of light and shade. Next, the display position coordinates on the grayscale image memory are calculated from the time information. Finally, the current measurement result is displayed on the grayscale image memory. At this time, since the past result is overwritten, it is not necessary to delete the past result.

FIG. 6 is an explanatory view (part 1) of the height data acquisition processing. As shown in the figure, trapezoidal bright lines are drawn in the video signal corresponding to the cross sections of the protrusions. By executing the gray-scale center-of-gravity calculation processing of each horizontal line on this video signal, the pixels (112.54, 111.36, 1
12.13, 112.04, 130.23, 160.5
1,160.98,132.22...). Next, the above-described series of pixels is height (12.54, 1).
1.36, 12.13, 12.04, 30.23, 6
0.51, 60.98, 32.22...) Using a predetermined conversion formula.

Next, FIG. 7 shows an explanatory diagram (part 1) showing a display example on the image monitor. FIG. 7A shows the case of black and white display, and FIG. 7B shows the case of color display.

In the monochrome gray scale display shown in FIG.
A height distribution image with the number of measurements taken along the horizontal axis and the position in the line direction taken along the vertical axis is drawn. 2.5mm-32.5mm
Are displayed in the range of 2.5 to 7.5, 7.5 to 12.
5,12.5-17.5,17.5-22.5,22.
Shading is performed in six steps of 5-27.5, 27.5-32.5. The shading is set so that the higher the height, the brighter and the lower the height, the darker.

In the color display shown in FIG. 7B, a display range of 2.5 mm to 32.5 mm is similarly classified by six colors. For the sake of explanation, each color is represented by an achromatic color of white to black.
Light blue for 7.5, pink for 7.5 to 12.5, white for 12.5 to 17.5, 17.5
Light gray for 22.5 to 22.5
Are color-coded such as red, and 27.5-32.5 are colored orange.

In the case of 256 gradations in black and white, RG in color
B (256 × 256 × 256) can be displayed, and a clear display can be made even for a slight difference in height.

Next, FIG. 8 shows a configuration diagram (part 2) showing an example of a displacement sensor system to which the present invention is applied. In this example, an image is displayed in which the brightness display of light and shade and the graph display are combined. That is, as shown in FIG. 8, a height distribution curve 8 on a specific horizontal scanning line is drawn around the lower edge of the height distribution image 10 along the time axis. This height distribution curve 8 represents the height distribution on the horizontal scanning line where the horizontal line cursor C1 exists.

On the other hand, in the vicinity of the right edge of the height distribution image 10, the height on a specific time axis is set along the beam line (the extending direction of the straight line formed by the irradiation image of the line beam). A distribution curve 9 is drawn. This height distribution curve 9 is represented by a vertical line cursor C drawn on the height distribution image 10.
2 corresponds to the height distribution on the time axis where 2 exists.

The horizontal line cursor C1 and the vertical line cursor C2 can be moved up, down, left, and right by operating a handy console unit (not shown).

Therefore, the operator operates these cursors C1 and C2 to check the height distribution on an arbitrary horizontal operation line and at an arbitrary time, and to determine the tendency of the height distribution based on the entire height distribution image. Can be checked comprehensively.

Next, FIG. 9 is a flowchart (part 2) showing the display processing according to the present invention. This display processing is for simultaneously displaying the height distribution image 10 and the horizontal and vertical height distribution curves 8 and 9 on the screen 3a of the image monitor 3 as described above.

When the process is started in the figure, in the first step, the line bright display position (XL, YL) on the screen 3a of the image monitor 3 is obtained. These display positions may be set in the system in advance, or may be specified by the user after purchase.

Subsequently, a display position initialization process (step 9)
02) and line number initialization processing (step 903)
Is performed, the process of acquiring height data (step 904) and the process of displaying the height of the line (step 905) are performed in the same manner as in the previous case.

That is, in the height data acquisition processing (step 904), after calculating the density centroid of each horizontal line of the acquired video (see the explanatory diagram of FIG. 10), the pixel data (pix) at the density centroid position is calculated. A process for converting to the actual height Z (mm) is executed (see the explanatory diagram of FIG. 10).

In the display processing of the height of one line, first, if the height result is within the display range, clipping processing is performed, and then the height information Z (mm) is converted to the brightness information P
(Gradation), and finally the coordinates (X,
A process for writing and displaying the gradation P in N) is executed.
In this case, since the past result is overwritten, erasing of the past result is unnecessary, and the processing can be speeded up.

When the height data acquisition processing (step 904) and the one-line height display processing (step 905) are completed in this way, the above processing is performed on 126 lines while updating the line number. Until the line number changes to the line bright display position YL.
(Step 906 YES), a process of displaying the coordinates (X, P / 4) on the X-direction section line bright is executed (Step 907).

Each time the line number reaches 126 (step 910 NO), the display position X is updated, and whenever the display position X reaches XL (step 908 YES), Y is updated.
A process of displaying the coordinates (N, P / 4) on the directional section line bright is executed (step 909).

Thereafter, each time the display position reaches 512, the process returns to the beginning and the above processing is repeatedly executed (step 911 NO).

FIG. 11 is an explanatory diagram (part 2) showing a display example on the monitor obtained in this way.

As described above, the horizontal line cursor C1 and the vertical line cursor C2 are drawn on the height distribution image 10, and the X-sectional line bright waveform 8 is displayed below the height distribution image 10. On the right side, a line bright waveform 9 in the Y-direction section is drawn. These two line bright waveforms 8 and 9 change appropriately according to the movement of the cursors C1 and C2.

Next, FIG. 12 shows a configuration diagram (part 3) showing an example of the displacement sensor system to which the present invention is applied. This processing corresponds to a case where the height distribution image is displayed while shifting the latest display position on the screen in the time axis direction with the passage of time, as shown in FIG.

When the processing is started in the figure, first, the display position X and the line number N are initialized (steps 1301 and 1302), and the height data acquisition processing (step 1301) is performed in the same manner as described above. 1303) and display processing of the height of one line (step 1304).

That is, as described above, in the height data acquisition processing (step 1303), after calculating the gray-scale centroid of each horizontal line of the obtained video, the pixel data (pix) at the gray-scale centroid position is actually calculated. To a height Z (mm).

In the display processing of the height of one line (step 1304), if the height result is out of the display range,
After the clipping process is performed, the height information Z (mm) is converted into light and shade brightness information P (gradation), and finally the gradation P is written and displayed at the coordinates (X, N) on the image memory. Execute At this time, it will overwrite the past results,
There is no need to erase past results.

In the above processing, when the value of the line number N is 126
(Step 1305 NO), the display position X
Is updated while the value of the display position X is 5 at a time.
Upon reaching 12, the process returns to the beginning and the above processing is repeated.

According to the above configuration, as shown in FIG. 15, the height distribution image 10 is displayed as the predetermined number of pixel line straight lines for one screen are aligned.
Specifically, the data measured first is displayed on the left end of the screen 3a, and the pixel line straight lines of the subsequent measurement are sequentially adjacently displayed on the right side. As a result, the latest display position is sequentially shifted rightward from the left end of the screen 3a,
Finally, it reaches the right end of the screen 3a. Thereafter, the new pixel line straight line is displayed again from the left end so as to overwrite the previous pixel line, as shown in FIG. According to such a display result, the operator can immediately confirm the data acquired by the sequential measurement on the screen 3a, and after the measurement of one screen, the pixel line straight line of the next screen is displayed. Since there is a difference between the previous screen and the current screen, this can be easily grasped based on the difference between the overwritten one and the one before the overwritten. .

Next, FIG. 16 shows a configuration diagram (part 4) showing an example of the displacement sensor system to which the present invention is applied. In this example, the display range can be automatically changed, so that careless fluctuation of the image on the monitor screen is suppressed.

That is, as shown in FIG. 16, in this example, two types of works A and B are scheduled to be measured. Work A exists at a higher position than Work B,
Each of the works A and B is configured to be movable in the horizontal direction.

Regarding such a situation, in this display method, the height display range on the monitor screen is set as a fixed range from the peak data of the entire screen data. Therefore, even if the position fluctuates in the Z direction as in the case of the work A and the work B shown in FIG. 16, there is no change in the display on the screen 3a as long as the height of the step is constant. That is, as is apparent from a comparison between FIG. 17A and FIG. 17B, in each of the height distribution curves 8 and 9, the influence of the height fluctuation is clearly shown. For the height distribution image displayed on the screen 3a,
No variation is seen with respect to its position and concentration. For this reason, when monitoring fine irregularities on the surface of the measurement target object, the fluctuation can be stably displayed even if the entire measurement target object moves up and down. In this height correction or reference position following process, only data existing in a data range corresponding to a predetermined display range from peak data of all screen data is regarded as valid data,
This can be realized by the writing process of the image memory.

FIG. 18 shows a configuration diagram (part 5) showing an example of the displacement sensor system to which the present invention is applied.
In this example, the clipping areas 11, 12, 13
Can be arbitrarily set in the line direction in position and width so that only the necessary height region is clearly displayed.

An explanatory diagram of the clipping processing is shown in FIG. In the figure, 14 is a target measurement range, 15 is a display range, 16 is a measurement error area, and 17 is a measurement error area. Measurement error area 1 in them
6 and 17 are clipped to the specified lower limit color. Therefore, as shown in the monitor screen of FIG.
The portion above the display range shown in FIG. 12 is clipped, and at the same time, the measurement error regions 12 and 13 shown below are clipped to the lower limit color level.

FIG. 20 is a configuration diagram (part 6) showing an example of the displacement sensor system to which the present invention is applied.
In this example, for example, in the case of a measurement target object having a cone 18, a peak position corresponding to the vertex of the cone is automatically searched, and a peak mark 2
0 is displayed.

FIG. 21 shows a configuration diagram (part 7) showing an example of the displacement sensor system to which the present invention is applied.

In this example, the horizontal line cursor C1 and the vertical line cursor C2 described above can be moved and set in the horizontal and vertical directions by a predetermined operation by the operator, respectively. The height distribution curves in the directions corresponding to the lower side and the right side of 10 are automatically displayed. Cone 1
8, the cursors C1, C
By observing the line bright waveforms on the lower side and the right side while variously changing the position of No. 2, it becomes possible to clearly grasp the characteristics of the measurement target object.

FIG. 22 is a block diagram (8) showing an example of the displacement sensor system to which the present invention is applied.

In this example, a function of automatically searching for the peak point of the object to be measured based on the height distribution image is provided, and the horizontal line cursor C1 and the vertical line cursor C2 always cross the searched peak position. Thus, the automatic tracking function is added.

According to such a configuration, in the case of an object to be measured having a conical body 18, the cross-sectional shape of a straight line crossing the vertex can be easily grasped.

FIG. 23 shows a configuration diagram (No. 9) of the displacement sensor system to which the present invention is applied. In this example, a measuring operation or an image capturing operation is performed for a certain period in accordance with a trigger input coming from outside. According to such a configuration, if the photoelectric switch 21 is provided to detect the arrival timing of the object to be measured, and to generate an output trigger input thereof, any of the object to be measured can be transferred to a belt conveyor or the like. The height distribution of the surface is automatically measured while waiting for it to arrive, and the image can be clearly displayed as a grayscale image or a color image on an image monitor. for that reason,
It would be very suitable to check the surface properties and the like of the object to be measured in advance when measuring this type of displacement sensor. In addition, the image data corresponding to the obtained height distribution image can be converted into a standard video signal of, for example, the NTSC system and provided to the image processing device 4, so that the image processing device 4 side can use various known tertiary images. The original image processing software or the optimally produced image processing software can appropriately analyze the surface properties of the measurement target object.

FIG. 24 shows a configuration diagram (No. 10) of the displacement sensor system to which the present invention is applied.

In this example, a feature point can be extracted from the set area by setting a line direction measurement area on the gray level display screen. It goes without saying that the extraction of the feature points includes a peak point, a bottom point, and any other feature points.

FIG. 25 shows a configuration diagram (No. 11) of the displacement sensor system to which the present invention is applied.

In this example, a measurement area 23 is set on the height distribution image 10, and within this measurement area, the peak height of each line can be detected. According to such a configuration, it will be possible to efficiently measure a feature point in a specific region for a measurement object having an arbitrary uneven shape on the surface.

Finally, FIG. 26 shows an explanatory diagram (part 5) of a display example on the monitor.

In this example, the relationship between the display range and the color range can be arbitrarily changed. That is, in the display example of FIG.
Are assigned to five levels of densities or colors, whereas in the display example shown in FIG.
2.5 is assigned to five levels of density or color.

By changing the display range as described above, it is possible to obtain an optimum display image according to the unevenness of the object to be measured. Note that the operator can arbitrarily perform the display range changing process by operating a handy console unit (not shown).

Description of the display example on the monitor (No. 6)
Is shown in FIG. In this example, images corresponding to the image monitor 24, the digital monitor 25, the trend monitor 26, and the profile monitor 27 are displayed on the display screen 3a of the image monitor 3 in such a manner that the screen is divided into four. . The height distribution image of the present invention described above corresponds to the 3d image 27. The four images 24 to 27 are subjected to data association or alignment matching so that the four images 24 to 27 are easily correlated vertically and horizontally. As a result, the operator only needs to look at this one screen, and through the comparison between the image monitor and the digital monitor, the comparison between the image monitor and the profile monitor, the comparison between the digital monitor and the trend monitor, the comparison between the profile monitor and the trend monitor, etc. This makes it possible to arbitrarily and easily grasp the characteristics of the object to be measured and the relationship between the output signal and the object to be measured.

[0118]

As is apparent from the above description, according to the present invention, it is possible to repeatedly measure a series of heights along a linear projected light beam image projected on a target object. In addition, as the measurement is repeated and displayed in order from the obtained height value, the measurement implementer should disclose the display and soon determine whether the intended measurement is being performed correctly if it is shortly after If it is necessary to correct the measurement conditions, the measurement conditions can be corrected even during repeated measurement, and the result of the correction can also be confirmed immediately on the display. Is significantly improved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram (part 1) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 2 is a schematic diagram showing an internal configuration of a head unit.

FIG. 3 is a hardware configuration diagram of a head unit and a signal processing unit.

FIG. 4 is a hardware configuration diagram of a calculation unit.

FIG. 5 is a flowchart (1) showing a display process according to the present invention.

FIG. 6 is an explanatory view (No. 1) of a height data acquisition process.

FIG. 7 is an explanatory diagram (part 1) illustrating a display example on a monitor.

FIG. 8 is a configuration diagram (part 2) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 9 is a flowchart (part 2) showing a display process according to the present invention.

FIG. 10 is an explanatory diagram (part 2) of the height data acquisition process.

FIG. 11 is an explanatory diagram (part 2) illustrating a display example on a monitor.

FIG. 12 is a configuration diagram (part 3) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 13 is a flowchart (part 3) showing a display process according to the present invention.

FIG. 14 is an explanatory diagram (part 3) illustrating a height data acquisition process and a display process.

FIG. 15 is an explanatory diagram (part 3) illustrating a display example on a monitor in chronological order.

FIG. 16 is a configuration diagram (part 4) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 17 is an explanatory diagram (part 4) of a display example on the monitor.

FIG. 18 is a configuration diagram (part 5) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 19 is an explanatory diagram of a clipping process.

FIG. 20 is a configuration diagram (part 6) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 21 is a configuration diagram (part 7) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 22 is a configuration diagram (part 8) illustrating an example of a displacement sensor system to which the present invention is applied.

FIG. 23 is a configuration diagram (No. 9) of the displacement sensor system to which the present invention is applied.

FIG. 24 is a configuration diagram (No. 10) of the displacement sensor system to which the present invention is applied.

FIG. 25 is a configuration diagram (11) of a displacement sensor system to which the present invention is applied.

FIG. 26 is an explanatory diagram (part 5) of a display example on the monitor.

FIG. 27 is an explanatory diagram (part 6) of a display example on the monitor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Head part 2 Signal processing part 3 Image monitor 4 Image processing device 5 Object to be measured 5a Step part 6 Light for height measurement 7 Light reception for height measurement 101 Slit light source 102 Lens system for light emission 103 Lens system for light reception 104 Two-dimensional CCD TH Threshold for calculating gray-scale center of gravity C1 Horizontal line cursor C2 Vertical line cursor 8 Height distribution curve on specific horizontal scanning line 9 Height distribution curve on specific time axis 10 Height distribution image 3a Image monitor Screen 11, 12, 13 Clipping area 14 Measurement range 15 Display range 16, 17 Measurement error area 20 Peak mark 18 Conical body 21 Photoelectric switch

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Michitoshi Okada 801 Minamifudo-cho, Higashiriori, Horikawa, Shiokoji-dori, Shimogyo-ku, Kyoto F-term in OMRON Corporation (reference) 2F065 AA04 AA24 AA53 BB05 DD00 DD06 FF02 FF04 FF09 GG06 HH05 HH12 JJ03 JJ08 JJ26 LL08 LL28 MM03 PP12 QQ01 QQ06 QQ24 QQ42 SS13 UU05 5B057 AA01 BA02 BA11 BA19 BA29 CA01 CA08 CA12 CA16 CB01 CB02 CB08 CB12 CE11 CE16 DA08 DA16 DA17 DB01 DB05 DB09 DC06 DC22

Claims (19)

[Claims] A head unit for irradiating a line beam at a predetermined angle to a surface of a measurement target object and generating a video signal by photographing a region including the irradiation position from another angle with a two-dimensional image sensor; By processing the video signal generated by the head,
Height data string acquisition means for acquiring a height data string corresponding to the height of a series of points on the irradiation light image of the line beam; and by converting the height data into color data according to a predetermined conversion rule. A color data string acquiring means for acquiring a color data string from the height data string; and image data corresponding to an image including a height distribution image in which pixel line straight lines corresponding to the color data string are arranged adjacent to each other in time series. Alternatively, a displacement sensor comprising: an imaging unit that generates a video signal. 2. The displacement sensor according to claim 1, further comprising an image monitor for displaying a predetermined height distribution image based on the generated image data or the video signal. 3. The displacement sensor according to claim 1, further comprising an image processing device that performs predetermined image processing based on the generated image data or video signal. 4. The displacement sensor according to claim 1, wherein the predetermined conversion rule is to convert a height into a density. 5. The displacement sensor according to claim 1, wherein the predetermined conversion rule is to convert a height into a color. 6. The predetermined conversion rule is capable of changing the relationship between the height range and the corresponding color range.
The displacement sensor according to any one of the above. 7. A predetermined conversion rule is such that a region of height higher than a predetermined upper limit height is clipped to a specified upper limit color and / or a region of height lower than a predetermined lower limit height is clipped to a specified lower limit color. The displacement sensor according to claim 1, wherein: 8. The displacement sensor according to claim 7, wherein a region to be clipped can be changed. 9. The method according to claim 1, wherein the height distribution image included in the image data or the video signal corresponds to a state in which all pixel line straight lines for a predetermined number of screens are aligned. The displacement sensor as described. 10. The apparatus according to claim 1, wherein the height distribution image included in the image data or the video signal corresponds to a progress state in which a predetermined number of pixel line straight lines for one screen are aligned. Displacement sensor. 11. The image forming means converts a height distribution curve on a specific horizontal scanning line and / or a height distribution curve on a specific time axis along a corresponding reference axis of the height distribution image. And generating image data or a video signal corresponding to an image further included.
The displacement sensor according to 1. 12. A specific horizontal scan line and / or
The displacement sensor according to claim 11, wherein a specific time axis is changeable. 13. A specific horizontal scan line and / or
The displacement sensor according to claim 11, wherein a specific time axis is automatically followed so as to always cross the peak or bottom height position. 14. The displacement sensor according to claim 13, wherein the measurement of the peak or bottom height position is performed in a specific area of the height distribution image. 15. The displacement sensor according to claim 14, wherein a specific area for measuring the peak height position can be changed. 16. The imaging means for generating image data or a video signal corresponding to an image including a height distribution image whose display position is shifted in a time axis direction according to an elapsed time or the number of measurements. Item 4. The displacement sensor according to any one of Items 1 to 3. 17. The image forming means generates image data or a video signal corresponding to an image including a height distribution image automatically corrected so that a display range is always constant.
The displacement sensor according to claim 1. 18. The apparatus according to claim 1, wherein the imaging means generates image data or a video signal corresponding to an image including a height distribution image having a peak or bottom height position display.
4. The displacement sensor according to any one of claims 1 to 3. 19. The imaging device according to claim 1, wherein the imaging unit generates image data or a video signal corresponding to an image including a height distribution image in a time range defined by a trigger input.
4. The displacement sensor according to any one of claims 1 to 3.