JP2002214461A - Lightl signal processing beam forming circuit and laminate type optical waveguide array used for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light signal processing beam forming circuit which can control the directivity of a microwave radiated from an antenna over a wide range and realize a smaller antenna and to provide a laminate type optical waveguide array used for it. SOLUTION: A light signal processing beam forming circuit 10 is equipped with optical waveguide arrays 1 and 2 and a lens 3. The optical waveguide arrays 1 and 2 are formed by stacking waveguides and the waveguides on the incidence surface of the optical waveguide array 2 provided in an area which is smaller than the spot diameter of a laser beam converged by the lens 3. The optical waveguide array 1 receives signal light and reference light from two waveguides optionally selected out of the waveguides and projects the signal light and reference light on the lens 3 from different positions. The lens 3 irradiates the optical waveguide array 2 with the signal light and reference light after subjecting signal-and reference light to Fourier transformation. The optical waveguide array 2 samples the signal light and reference light having been Fourier-transformed by the waveguides.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to mobile communication, wireless LAN (Local Area Network)
k), and a stacked optical waveguide array useful for beam control in advanced wireless communication systems such as satellite communication, and an optical signal processing beam forming circuit using the same.

[0002]

2. Description of the Related Art In recent years, mobile communication and satellite communication have become increasingly important. In such mobile communication and satellite communication, it is necessary to receive radio waves from as wide a range as possible and transmit radio waves to a wide range.

[0003] That is, as shown in FIG.
It is desirable that the 0 antenna 201 receives radio waves 220 from various regions on the earth 210 over a wide range. Communication satellite 2
Generally, an adaptive array antenna is used for the antenna 201 of 00, and the adaptive array antenna is
For example, as shown in FIG.
01m, phase shifters 2021 to 202m, 2031 to 20
3 m, and combiners 202 and 203. The adaptive array antenna shown in FIG. 19 shows a case where radio waves from two directions are received. Phase shifter 2021
To 202 m are antenna elements 2011 to 20 respectively.
Of the radio waves received by 1 m, antenna elements 2011 to 2
Only the radio wave incident from the front at 01m is detected,
The detected radio wave is transmitted to 02. Also, the phase shifter 2021
To 202 m are antenna elements 2011 to 20 respectively.
Only a radio wave incident at a different angle from the front at 1 m is detected, and the detected radio wave is transmitted to the synthesizer 203. Then, the combiner 202 combines the radio waves from the phase shifters 2021 to 202m and outputs the radio waves incident on the antenna elements 2011 to 201m from the front. In addition, the synthesizer 203
Radio waves from the phase shifters 2031 to 203m are combined, and radio waves incident on the antenna elements 2011 to 201m from another angle different from the front are output.

As described above, the antenna elements 2011 to 20
In order to receive radio waves from two directions with 1 m, if m antenna elements are used, 2 m phase shifters are required. Therefore, if it is attempted to receive radio waves from n directions by the antenna elements 2011 to 201m, nx
m phase shifters are required.

FIG. 19 shows a receiving adaptive array antenna for receiving a radio wave, but the same applies to a transmission adaptive array antenna for transmitting a radio wave. For example, n × m phase shifters are required.

On the other hand, as a method of emitting radio waves in different directions, there is a method shown in FIG. Each of the antenna elements 331 to 334 of the array antenna 330 is connected to an optical fiber 341 to 344, respectively.
Heterodyne detection elements 321 to 324 are provided in the middle of 44. In this case, the antenna elements 331 to 334 and the optical fibers 341 to 344 are one-dimensionally arranged. Then, the front focal plane 3 of the Fourier transform lens 300
The signal light emitted from the point 310 and the reference light emitted from the point 311 are subjected to Fourier transform by the Fourier transform lens 300 and irradiated to the rear focal plane 302.
The signal light and the reference light applied to the rear focal plane 302 are
The light enters the four optical fibers 341 to 344 and propagates through the four optical fibers 341 to 344. In this case, since the signal light and the reference light have been subjected to Fourier transform, the laser light propagating through each of the optical fibers 341 to 344 has a different phase.

[0007] The heterodyne detection elements 321 to 324
Each of the laser beams propagated through the optical fibers 341 to 344 is subjected to heterodyne detection to generate a microwave having a frequency difference between the frequency of the signal light and the frequency of the reference light. And
Antenna elements 331 to 334 of array antenna 330
Receives microwaves from the optical fibers 341 to 344, and the array antenna 330 includes a microwave 350 having a directivity in a certain direction where a plurality of microwaves interfere with each other.
Is emitted. Further, by changing the position where the signal light is emitted one-dimensionally on the front focal plane 301, the microwave 351 can be emitted from the array antenna 330, and the directivity of the microwave can be one-dimensionally changed in the direction of DR1. Can be controlled.

[0008]

However, according to the conventional method, a large number of phase shifters are required in order to control the directivity of the microwave emitted from the antenna over a wide range. There is a problem that the device to be generated becomes large-scale.

[0009] Therefore, Fourier-transformed laser lights having different frequencies are made incident on a plurality of optical fibers arranged two-dimensionally, and the Fourier-transformed laser lights are sampled by the plurality of optical fibers, and the plurality of optical fibers of the array antenna are sampled. A system for guiding multiple sampled light beams to an optical heterodyne detection device that feeds microwaves to the device has been proposed (Yoshihiko Konishi, Wataru Nakajo, Masayuki Fujise, Kenichi Yamada: "An optically controlled array antenna pumped by an optical fiber array" Beam scanning characteristics ", IEICE, B-II, J78-B-II, 3, p.
p150-159 (1995-03). ). However, in this method using an optical fiber array, it is necessary to arrange a plurality of optical fibers with an adhesive so that the center of the core is at the apex of the equilateral triangle, and it is difficult to realize such an arrangement accurately. It is. In addition, since the optical fiber is composed of a core having a diameter of 10 μm and a cladding having a diameter of 125 μm, the laser light applied to the plurality of optical fibers arranged two-dimensionally is almost applied to the clad portion.
There is a problem that light use efficiency is low.

For this reason, an attempt has been made to emit a directional microwave using a one-dimensional optical waveguide whose core occupies about one third of the core. However, in the method using one-dimensionally arranged optical waveguides, a device that generates microwaves for emission by increasing the light use efficiency with a compact device can be manufactured. There is a problem that it can only be controlled in a specific way.

Therefore, the present invention has been made to solve such a problem, and an object of the present invention is to control the directivity of microwaves emitted from an antenna over a wide range and to make the antenna compact. An object of the present invention is to provide an optical signal processing beam forming circuit and a laminated optical waveguide array used for the same.

[0012]

According to the present invention, an optical signal processing beam forming circuit comprises: a signal light comprising a laser light having a first frequency; and a laser light having a second frequency different from the first frequency. An optical signal processing beam forming circuit for forming a plurality of light beams based on a reference light consisting of
A first light guide that receives reference light from a first one of the plurality of entrances, receives signal light from a second entrance different from the first entrance, and emits signal light and reference light. A wave path array, and first and second focal planes, Fourier-transforming the signal light and the reference light incident from the first focal plane,
A lens that focuses the converted signal light and reference light to a predetermined spot diameter and irradiates the second focal plane with the signal light and the reference light that irradiates the second focal plane from a plurality of entrances A second optical waveguide array that emits a plurality of light beams from a plurality of exit ports, wherein the first and second optical waveguide arrays face an entrance surface having a plurality of entrance ports and an entrance surface. A first optical waveguide array including: an output surface provided with a plurality of output ports corresponding to the plurality of input ports; and a plurality of optical waveguides for guiding laser light incident from the input port to the output port. And the plurality of entrances of the second optical waveguide array are arranged in a plurality of layers.

Preferably, the second optical waveguide array of the optical signal processing beam forming circuit comprises a plurality of elements for feeding a plurality of microwaves having a predetermined phase to a plurality of elements of an array antenna for emitting directional microwaves. A plurality of light beams are emitted to the optical heterodyne detecting element.

Preferably, the second optical waveguide array of the optical signal processing beam forming circuit includes a plurality of mixers connected to a plurality of elements of an array antenna for receiving directional microwaves. The plurality of light beams are emitted to a plurality of optical heterodyne detection elements that feed a plurality of microwaves having phases.

Preferably, the arrangement of the plurality of entrances of the second optical waveguide array of the optical signal processing beam forming circuit is similar to the arrangement of the plurality of elements of the array antenna.

Preferably, the arrangement of the plurality of exit ports of the first optical waveguide array of the optical signal processing beam forming circuit is similar to the arrangement of the light source for generating signal light and the light source for generating reference light. .

Preferably, an area of the second optical waveguide array of the optical signal processing beam forming circuit where the plurality of entrances are provided is smaller than a predetermined spot diameter.

Preferably, the plurality of optical waveguides of the second optical waveguide array of the optical signal processing beam forming circuit are provided so as to expand in a direction from the incident surface to the emission surface.

Preferably, the plurality of optical waveguides of the first optical waveguide array of the optical signal processing beam forming circuit are provided so as to converge in a direction from the incident surface to the emission surface.

[0020] Preferably, the lens of the optical signal processing beam forming circuit has a cylindrical shape having a first surface including a first focal plane and a second surface including a second focal plane.

According to the present invention, the laminated optical waveguide array includes a first surface, a second surface opposed to the first surface, and a first surface and the second surface. A plurality of optical waveguides, each of the plurality of optical waveguides has one port on the first surface, the other port on the second surface, and a plurality of the optical waveguides. Are arranged in a plurality of layers on the first surface.

Preferably, the plurality of optical waveguides of the stacked optical waveguide array are provided so as to extend in a direction from the first surface to the second surface.

Preferably, the plurality of one openings of the stacked optical waveguide array are arranged in a manner similar to the arrangement of a plurality of elements of an array antenna for transmitting and receiving microwaves having directivity.

Preferably, the plurality of one ports of the stacked optical waveguide array are arranged in a manner similar to the arrangement of a plurality of emission points of a plurality of laser beams having different frequencies.

Preferably, the plurality of cores and claddings of the plurality of optical waveguides are made of a polymer.

Preferably, the core is made of polymethyl methacrylate and the clad is made of epoxy resin.

[0027]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the drawings, the same or corresponding portions have the same reference characters allotted, and description thereof will not be repeated.

FIG. 1 shows an embodiment of an optical signal processing beam forming circuit according to the present invention. An optical signal processing beam forming circuit 10 includes optical waveguide arrays 1 and 2 and a lens 3. The lens 3 comprises an optical waveguide array 1 and an optical waveguide array 2
Is sandwiched between.

FIG. 2 is a perspective view of the optical waveguide arrays 1 and 2 constituting the optical signal processing beam forming circuit 10 shown in FIG. The optical waveguide arrays 1 and 2 include a substrate 20 and an optical waveguide 1
1 to 13. The optical waveguides 11 to 13 are
The layers are sequentially stacked on top. The optical waveguide 11 includes the core 1
12 and a cladding 113. The core 112 is surrounded by a clad 113. The optical waveguide 12 includes a core 122 and a clad 123. The core 122 is surrounded by a clad 123.
Further, the optical waveguide 13 includes a core 132 and a clad 133.
Consisting of The core 132 is surrounded by a cladding 133. The exit ports 111, 121, and 131 are provided corresponding to the entrance ports 110, 120, and 130, respectively. The cores 112, 122, and 132 are respectively provided with entrances 110, 120, and 130 and exits 111 and 1 respectively.
21 and 131 are formed in a curved shape.

The cores 112, 122 and 132 are made of polymer deuterated polymethyl methacrylate (PMMA).
(PolyMethylMethylAcrylate))
, And the claddings 113, 123, 133 are made of epoxy resin cured by ultraviolet rays. Accordingly, the core 112 has a higher refractive index than the cladding 113,
The laser beam incident from the entrance 110 is guided to the exit 111. Similarly, the cores 122 and 132 have a larger refractive index than the claddings 123 and 133, respectively.
Reference numeral 2 denotes a laser beam incident from the entrance 120
1, and the core 132 guides the laser light incident from the entrance 130 to the exit 131. In the present invention, deuterated PMMA is used for the cores 112, 122, and 132 for the following reason. Deuterated PMM
A is a gas obtained by replacing hydrogen contained in PMMA with deuterium. By replacing hydrogen with deuterium, the vibration frequency of hydrogen in PMMA shifts to a lower frequency side, and the wavelength 1.A used for optical communication. This is because the laser light of 3 to 1.5 μm is hardly absorbed by hydrogen in deuterated PMMA, and the transmittance increases.

As described above, the optical waveguides 11 to 13 have a structure in which a plurality of rod-shaped deuterated PMMAs are formed in an epoxy resin. Therefore, as a whole, the optical waveguide arrays 1 and 2 have the entrances 110, 120 and 130 on one surface B of the substantially flat epoxy resin and emit the light on the other surface A opposite to the surface B. A plurality of rod-shaped deuterated PMMAs are formed to have ports 111, 121, and 131.

FIGS. 3 and 4 show optical waveguide arrays 1 and 2 respectively.
The steps for fabricating are described below. A liquid ultraviolet curing epoxy resin is spin-coated on the silicon (Si) substrate 20 to a thickness of 20 μm. Then, the spin-coated epoxy resin is irradiated with 60 mJ of ultraviolet light to cure the epoxy resin, thereby forming a 20 μm epoxy resin layer 21 on the substrate 20 (FIG. 3A). This epoxy resin layer 21 constitutes a clad. Thereafter, spin coating and baking are repeated on the epoxy resin layer 21 to apply deuterated PMMA 22 to a thickness of 6 μm (FIG. 3B). The deuterated PMMA 22 constitutes a core.

After the deuterated PMMA 22 is applied, a resist 23 is applied thereon to a predetermined thickness by spin coating (FIG. 3C), and is passed through a mask 24 having holes 26 of a predetermined pattern. Then, the resist 23 is exposed to a predetermined pattern by irradiating light (FIG. 3D). In this case, the mask 24 has voids 26 formed in a curved shape as shown in FIG.
The resist 23 is exposed in a curved pattern in plan view. After the exposure of the resist 23, the resist 23 is removed except for the exposed portion, and a predetermined pattern of the resist 23a is left on the deuterated PMMA 22. Then, the deuterated PMMA 22 in the region where the resist 23a is not formed is removed by reactive ion etching using oxygen gas (FIG. 3).
(E)), the resist 23a is removed. As a result, a predetermined pattern of deuterated PMMA is formed on the epoxy resin layer 21.
Is formed (FIG. 4F). Thereby, the core 112 of the optical waveguide 11 is formed.

Thereafter, a liquid ultraviolet-curing epoxy resin is spin-coated to a thickness of 14 μm from the underlying epoxy resin layer 21 and irradiated with 60 mJ of ultraviolet light to cure the epoxy resin. The epoxy resin 25 is formed so as to surround the core 112 (FIG. 4G). Thereby, the optical waveguide 11 in which the core 112 made of a plurality of deuterated PMMAs is formed in the epoxy resin is completed ((h) in FIG. 4).

After the optical waveguide 11 is completed, the optical waveguide 11
(B) to (e) of FIG. 3 and (f) and (g) of FIG.
By repeating the above steps, an optical waveguide 12 is formed on the optical waveguide 11, and further, each of FIGS. 3 (b) to 3 (e) and FIGS. 4 (f) and 4 (g) is formed on the optical waveguide 12. By repeating the steps, an optical waveguide 13 is formed on the optical waveguide 12. Thereby, the optical waveguide arrays 1 and 2 are manufactured.

FIG. 6 shows the arrangement of the cores 112, 122 and 132 on the surface A (see FIG. 2) of the optical waveguide arrays 1 and 2 manufactured by the above-described manufacturing method. N
o. 1 to No. No. 4 corresponds to the emission port 131 of the core 132, 5-No. No. 9 corresponds to the emission port 121 of the core 122, 10-No. 13 corresponds to the emission port 111 of the core 112. As is clear from FIG. 6, a plurality of core Nos. Have good flatness and high positional accuracy in the horizontal direction DR1.
1 to No. 13 have been produced. 6, the size of the fabricated core is about 5 μm × 5 μm, the interval between the cores in the horizontal direction DR1 is about 15 μm, and the interval between the cores in the vertical direction DR2 is about 13 (= (15 (3) ¹ ) ^{/ 2} ) /
2) It is μm. In this way, by applying the epoxy resin by spin coating, a plurality of cores are formed in a layered manner with good flatness, and the uniformity of the distance in the vertical direction DR2 of the cores is improved. The positional accuracy of the core in the horizontal direction DR1 is improved. In particular, the flatness is good because the viscosity of the epoxy resin is small, so that the protruding core 112 of a predetermined pattern is also formed on the epoxy resin layer 21 on the surface (see FIG. 4F) by spin coating. This is because an ultraviolet curable epoxy resin can be applied with good flatness.

The core No. shown in FIG. 1 to No. In the sequence of No. 13, for example, three core Nos. 1, No.
5, No. 6 is located at the vertex of the equilateral triangle. Also, 3
Core No. 2, No. 6, No. 7 is also located at the vertex of the equilateral triangle. In the present invention, a plurality of core Nos. 5-No. 9, two adjacent cores arbitrarily selected from No. 9 7, No. 8 and a plurality of core Nos. Arranged in adjacent layers. 1 to No. 4 and two core Nos. 7, No. 8 is one of the core Nos. When 3 is selected, three core Nos. 3, No.
7, No. No. 8 has a plurality of core Nos. 8 located at the vertices of an equilateral triangle. 1 to No. 13 are arranged. In addition, the core No. 1 to No. 13 is not limited to an equilateral triangle and may be arranged in a square. Core No. 1 to No. When 13 are arranged in an equilateral triangle, there is an advantage that the side lobe in the laser light emitted from the lens 3 can be cut.

FIG. 7 shows core Nos. Arranged as shown in FIG. 7 shows a near-field image of FIG. (A) of FIG.
7 shows the intensity distribution of the laser beam in the horizontal direction DR1, and FIG.
(B) shows the intensity distribution of the laser beam in the vertical direction DR2. In FIG. 7A, the horizontal axis is the distance in the horizontal direction DR1, and the vertical axis is the intensity of the laser light normalized by the peak intensity. In FIG. 7B, the horizontal axis represents the distance in the vertical direction DR2, and the vertical axis represents the intensity distribution of the laser beam normalized by the peak intensity.

In the measurement of the near-field image, the core no. 7
A polarization preserving fiber is connected to the entrance of
m through the polarization-maintaining fiber.
7 was performed. From the results of FIG. The spot size of 7 is 7.42 μm in the horizontal direction
And the vertical direction is 8.13 μm. Note that the vertical and horizontal sizes are defined as the width of the laser light at which the intensity of the laser light becomes 1 / e ² of the peak intensity. Also, from the results in FIG. 7, it was confirmed that the signal propagated in the single mode. Other core Nos. 1 to No. 6, No. 8 ~
The same measurement was carried out for each sample No. 13 and it was confirmed that the laser light was propagating in a single mode, and the average spot size was obtained. As a result, 7.5 μm (horizontal direction, standard deviation: 0.20) × 8.2 μm (vertical direction, standard deviation:
0.16). Thus, a plurality of cores (a plurality of waveguides) manufactured by spin coating and light exposure technology are
Shows optical properties with good uniformity.

As shown in FIG. 1, in the optical waveguide array 1, the surface B (see FIG. 2) on which the entrances 110, 120, and 130 are formed is a laser light entrance surface, and the exit 11
The surface A on which 1, 121 and 131 are formed is a laser light emission surface. In the optical waveguide array 2, the surface A on which the emission ports 111, 121, and 131 are formed is the laser light incident surface, which is opposite to the optical waveguide array 1, and
The surface B on which 0, 120, and 130 are formed is a laser light emission surface.

FIG. 8 is a perspective view of the lens 3 of the optical signal processing beam forming circuit 10 shown in FIG. The lens 3 is a cylindrical lens made of quartz. The focal length is 1.34m
m, the radius r of the cylinder is 0.5 mm, and the lens length L is 3.2 mm. The lens 3 has a refractive index distribution that decreases parabolically from the center of the cylinder toward the periphery. At the center 30 of the cylinder, the refractive index is 1.48, and at the point 31 on the outer circumference, the refractive index is between 1.44 and
1.46. That is, the lens 3 is a commercially available GRIN (GRadient Index) lens.

The lens 3 receives a laser beam from the surface C,
The incident laser light is Fourier-transformed and emitted from the surface D. That is, the lens 3 emits laser light having a different phase at each position from the center of the cylinder to the outer periphery. Since the lens 3 has a pitch of 0.25, the front focal plane coincides with the plane C, and the rear focal plane coincides with the plane D. As a result, if the C surface of the lens 3 is brought into contact with the A surface of the optical waveguide array 1 and the D surface of the lens 3 is brought into contact with the A surface of the optical waveguide array 2, the optical signal processing beam forming circuit 10 shown in FIG. Can be assembled, making optical alignment easy.

FIG. 9 shows the principle of converting a transmission optical signal into a microwave having directivity and emitting the microwave. From the point 92 in the front focal plane 91 of the Fourier transform lens 90, the frequency f1
LB1 (signal light) is emitted, and a laser light LBr (reference light) having a frequency fr is emitted from a point 93, and a point 9
4 emits a laser beam LB2 (signal light) having a frequency f2, the Fourier transform lens 90 causes the three laser beams L
B1, LBr, and LB2 are incident, and the three incident laser beams LB1, LBr, and LB2 are Fourier-transformed, and laser beams having different phases in the respective regions from the center to the outer periphery are focused and irradiated on the rear focal plane 95. . The laser light applied to the rear focal plane 95 is sampled by a plurality of optical fibers (seven optical fibers in the case of FIG. 9) 96, propagates through the plurality of optical fibers 96, and passes through the optical heterodyne detection circuit 97. The light enters each heterodyne detection element. In this case, the beam spot diameter of the laser beam applied to the rear focal plane 95 needs to be larger than the area where the plurality of optical fibers 96 are arranged.

Each heterodyne detection element in the optical heterodyne detection circuit 97 performs photoelectric conversion of the incident laser light, and performs heterodyne detection of two lightwaves of a signal light and a reference light.
Each heterodyne detection element generates a microwave having a frequency corresponding to the difference between the frequency of the signal light and the frequency of the reference light. In this case, each heterodyne detector detects f1-fr from the laser beam LB1 and the laser beam LBr.
To generate a microwave having a frequency of
And a laser beam LBr to generate a microwave having a frequency of f2-fr.

The microwave generated by each heterodyne detection element is supplied to a plurality of antenna elements (seven antenna elements in FIG. 9) of the array antenna 98. Then, the plurality of microwaves supplied to the plurality of antenna elements are diffracted and emitted from the array antenna 98 as microwaves having directivity.

In this case, the deviation angle (Azimuth angle) of the emitted microwave from the central axis in the horizontal direction is Θ, and the deviation angle (Elevation angle) from the central axis in the vertical direction.
Is Φ, sinΘ = ((doptx / λopt) / (dmwx / λmwx)) * X / f (1) sinΦ = ((dopty / λopt) / (dmwy / λmwy)) * Y / f (2)

Here, X is the horizontal position of the signal light with reference to the emission point 93 of the reference light, and Y is the vertical position of the signal light with reference to the emission point 93 of the reference light. ,
f is the focal length of the Fourier transform lens 95, doptx,
dopty is the core spacing of the optical fiber 96 in the horizontal and vertical directions at the rear focal plane, λopt is the wavelength of the laser light, dmwx and dmwy are the horizontal and vertical spacings of a plurality of antenna elements of the array antenna 98, respectively. , Λmwx are microwave wavelengths. Also,
In order to satisfy the expressions (1) and (2), the arrangement shape of the plurality of optical fibers 96 in the rear focal plane 95 and the arrangement of the plurality of antenna elements of the array antenna 98 need to be similar. It is.

Accordingly, the angles Θ and Φ can be changed by changing the emission position (X, Y) of the signal light from the expressions (1) and (2), and as a result, the light is emitted from the array antenna 98. The direction of the microwave can be changed.

As shown in FIG. 1, the A surface of the optical waveguide array 1 contacts the C surface of the lens 3 (see FIG. 8), and the A surface of the optical waveguide array 2 contacts the D surface of the lens 3. The lens 3 has a front focal plane 91 on the C plane and a rear focal plane 95 on the D plane as shown in FIG. The exits of the plurality of cores 112, 121, and 131 provided on the A-side of the optical waveguide array 1 are in contact with the C-side of the lens 3, and the size of the exit is about 5 μm × 5 μm as described above. It is. Accordingly, the lens 3 receives the laser light emitted from the point light source in the C plane (the front focal plane 91), Fourier-transforms the incident laser light, and condenses it on the D plane (the rear focal plane 95). Irradiate. That is, when the reference light is emitted from the emission port 32 in the front focal plane 91 and the signal light is emitted from the emission port 33, the lens 3 performs a Fourier transform on the signal light and the reference light to perform the rear focal plane 95. Is focused and irradiated. Since the spot size R of the laser light applied to the rear focal plane 95 is larger than the area of the optical waveguide array 2 where a plurality of entrances are provided, the laser light Fourier-transformed by the lens 3 is It is sampled by a plurality of cores (waveguides) of the waveguide array 2.

An optical waveguide array 1 for receiving signal light is also provided.
By changing the core (waveguide) of the lens 3
The emission position of the laser beam to the emission port 33 can be changed from the emission port 33 to the emission port 34. When the emission position of the laser beam to the lens 3 is changed, the direction of the microwave emitted from the array antenna 98 can be changed by the above equations (1) and (2) (see FIG. 9).

As described above, the lens 3 forms an area from the front focal plane 91 to the rear focal plane 95 shown in FIG.

FIG. 11 shows an experimental system for experimenting whether or not a microwave having directivity can be emitted from the array antenna using the optical signal processing beam forming circuit 10 shown in FIG.

The experimental system includes a laser light source 40, optical fibers 41, 42 and 96, an optical channel selector 43, an optical signal processing beam forming circuit 10, an optical heterodyne detection circuit 97, an array antenna 98, a spectrum And an analyzer 100. The laser light source 40 is a reference laser 4
0A, the signal laser 40B, and the PLL (PhaseLo).
ced Loop) circuit 40C. The reference laser 40A emits a laser beam having a frequency fr. The signal laser light 40B emits a laser light having a frequency f1. The PLL circuit 40C generates a synchronization signal having a predetermined frequency, and outputs the synchronization signal to the reference laser 40A and the signal laser 40B. Thus, the reference laser 40A and the signal laser 40B can emit synchronized reference light and signal light.

The reference laser 40 A is provided with an optical fiber 41 and a core No. of the optical waveguide array 1. 5 is connected. The signal laser 40B is connected to an optical channel selector 43 by an optical fiber. Optical fiber 4
Numerals 1 and 42 are polarization plane preserving fibers for preserving the deflection plane of the laser beam. The optical channel selector 43 outputs the core No. of the optical waveguide array 1. 1 to No. 4, No. 6-No. 1
3 core No. 3 3 is channeled so that the laser light emitted from the signal laser 40B is incident on it.

A plurality of cores of the optical waveguide array 2 are connected to a plurality of optical fibers 96. The plurality of optical fibers 96 are each composed of a single mode optical fiber, and are connected to a plurality of antenna elements of an array antenna 98 via an optical heterodyne detection circuit 97 including a plurality of heterodyne detection elements. The plurality of antenna elements of the array antenna 98 are square and have an arrangement similar to the arrangement of the plurality of cores on the laser light incident surface of the optical waveguide array 2. The array is located at The horizontal interval between the plurality of antenna elements is 0.75λ,
The vertical spacing is 0.75 * (3) ^1/2 λ. Here, λ is the wavelength of the microwave. The arrangement shape of the plurality of emission ports on the emission surface of the optical waveguide array 1 is similar to the arrangement shape of the plurality of emission points from which the reference light and the signal light are emitted.

The spectrum analyzer 100 receives the microwave emitted from the array antenna 98 by the receiving unit 99 and analyzes the received microwave.

The reference light emitted from the reference laser 40A is
The core No. of the optical waveguide array 1 is transmitted through the optical fiber 41.
5 is incident. The signal light emitted from the signal laser 40B enters the optical channel selector 43 via the optical fiber 42, and the optical channel selector 43 causes the core No. of the optical waveguide array 1 to emit light. 3 is incident. The reference light is the core No. of the optical waveguide array 1. 5 and the signal light is transmitted through the core N
o. The light 3 is transmitted to the lens 3 from the light exit surface in contact with the front focal plane 91 of the lens 3. The lens 3 Fourier-transforms the reference light and the signal light, and outputs the laser light whose wavefront is inclined in accordance with the emission position of the signal light with respect to the emission position of the reference light on the front focal plane 91 to the rear focal plane 95. Irradiate. The optical waveguide array 2 has a rear focal plane 95 formed by a plurality of cores.
Is sampled, and the sampled laser light is emitted to a plurality of optical fibers 96.

The optical heterodyne detection circuit 97 heterodyne-detects the laser light incident from the plurality of optical fibers 96 by the plurality of heterodyne detection elements, and obtains a frequency difference f1-fr between the frequency f1 of the signal light and the frequency fr of the reference light.
Is generated and supplied to the plurality of antenna elements of the array antenna 98. Then, the array antenna 98 emits the microwave directed in a certain direction. The spectrum analyzer 100 receives the microwaves emitted from the array antenna 98 by the receiving unit 99 and analyzes the received microwaves.

In the optical system shown in FIG. 11, the antenna elements of the array antenna 98 are seven elements in three rows arranged in a regular triangle, and the core on the incident surface of the optical waveguide array 2 is similar to the seven antenna elements. Are arranged in an equilateral triangle. Also, if the spot size of the laser beam and omega ₁ in the back focal plane 95 of lens 3, the _{ω 1/2 = λ opt f} / (πω 0/2) ······· (3). Here, ω ₀ is the spot size of the laser beam on the front focal plane 91.

[0060] Therefore, in order to rear laser beam irradiated in the focal plane 95 is sampled by the seven core of the optical waveguide array 2 (waveguide) is such that the spot size omega ₁ is more φ38.2μm In addition, it is necessary to determine the focal length f of the lens 3 using the equation (3). Therefore, the spot size ω ₁ is equal to or greater than the φ38.2μm, λ _{o pt}
= 1319 nm, core spot size 7.5 x 8.2
f> 0.19 mm from equation (3) using μm. As described above, since the lens 3 has the focal length f of 1.34 mm, the spot size ω _{1 at} this time is set.
Becomes 275 μm. As a result, the laser light applied to the rear focal plane 95 of the lens 3 is sampled by the seven cores of the optical waveguide array 2.

Next, the insertion loss of each core (waveguide) of the optical waveguide arrays 1 and 2 and the crosstalk between adjacent waveguides in the optical system shown in FIG. 11 will be described. FIG.
Shows the measurement results of the loss of the output light from the optical fibers when the optical fibers are connected to the cores of the optical waveguide arrays 1 and 2 and the laser light enters the cores. FIG. 12A shows a measurement result when a polarization maintaining fiber is connected to the optical waveguide array 1, and FIG. 12B shows an optical waveguide array 2.
Is a measurement result when a single-mode optical fiber is connected to the optical fiber. 12A and 12B, the vertical axis represents
The insertion loss is shown, and the horizontal axis is the number of the core and the number of the optical fiber. The insertion loss is measured based on the loss of the output light from the optical fiber connected to the core on which the laser light is incident, and the smaller the loss of the output light, the smaller the insertion loss. Crosstalk is also measured by detecting the loss of output light from an optical fiber connected to a core different from the core on which the laser light is incident, and the larger the loss of output light, the smaller the crosstalk. .

From the results shown in FIG. In the core of No. 10, the insertion loss was 5.35 dB, but in other cores, it was around 2 dB. The crosstalk was about 30 dB or more for all the cores. Therefore, it was confirmed that the insertion loss of laser light and the crosstalk in the optical waveguide arrays 1 and 2 of the optical system shown in FIG. 11 were small. The insertion loss includes the propagation loss of the core and the connection loss between the core and the optical fiber.

The coupling efficiency in the optical system shown in FIG. 11, that is, the coupling efficiency between the laser light emitted from the optical waveguide array 1 and the optical waveguide array 2 will be described. Lens 3
When the spot size of the laser beam on the rear focal plane 95 is ω ₁ and the spot size of the core of the optical waveguide array 2 is ω ₂ , when the laser beam has a Gaussian distribution, the coupling efficiency η becomes η = ( _{4 / (ω 1 / ω 2} + ω 2 / ω 1) 2) exp (-2 (x 2 + y 2) / (ω 1 2 + ω 2 2) -2π 2 θ 2 ω 1 2 ω 2 2 / (Λ ² (ω ₁ ² + ω ₂ ² ))) (4) Here, x and y are horizontal and vertical distances from the optical axis of the optical waveguide array 2, and θ is an incident angle of a light beam to the optical waveguide array 2. Here, the focal length f of the lens 3
= 1.34 mm, spot size ω ₁ = 140 μm, ω ₂
= 8.2 μm, the coupling efficiency η between any of the elements is η = −24.5 dB from equation (4).

FIG. 13 shows a measurement result obtained by measuring the coupling efficiency η between the light emitted from the optical waveguide array 1 and the optical waveguide array 2. FIG. 13A shows the amount of deviation Elevati in the vertical direction from the optical axis on the incident surface of the optical waveguide array 2.
FIG. 13B shows a case where the shift amount Elevation in the vertical direction from the optical axis on the incident surface of the optical waveguide array 2 is 0 μm, and FIG.
(C) shows that the amount of deviation Elevation in the vertical direction from the optical axis on the incident surface of the optical waveguide array 2 is −13 μm.
The case of is shown. 13A, 13B, and 13C, the vertical axis represents the coupling efficiency η, and the horizontal axis represents the optical waveguide array 2.
Azim in the horizontal direction from the optical axis at the entrance surface of
uth. 13 (a), (b), (c) of FIG.
The measurement values shown in FIG. 12 are used to calibrate the insertion loss of each core of the optical waveguide array 2 using the measurement values shown in FIG.

From the results shown in FIG. 13, the average value of the coupling efficiency η was −25.0 dB (standard deviation 1.4 dB), and the coupling efficiency as theoretical was obtained.

FIG. 14 shows the result of measuring the phase characteristics of the laser beam incident on the optical waveguide array 2 in the optical system shown in FIG. In measuring the phase characteristics of laser light,
The optical channel selector 43 transfers the signal light to the core No. of the optical waveguide array 1. 2, No. 3, No. 6, No. 7,
No. 8, No. 11, No. 12 and the signal light is applied to the core no. 7 was calibrated so that the outputs of all the cores (waveguides) of the optical waveguide array 2 had the same phase. The core N of the optical waveguide array 2
o. With reference to the output of No. 5, the relative phase of the output from the other core was measured by a network analyzer (HP8510).

Each diagram in FIG. 14 corresponds to a core to which signal light is connected, and black circles indicate outputs of each core. In each figure, the ordinate indicates the relative phase, and the abscissa indicates the amount of deviation in the horizontal and vertical directions from the optical axis on the incident surface of the optical waveguide array 2. Further, the plane in the figure is a theoretical value. The core of the optical waveguide array 1 into which the signal light is incident is designated as a core No. 2,
No. 3, No. By changing to 6, ...
The phase of the laser light output from each core of the optical waveguide array 2 changes, and the measured value and the theoretical value show good agreement.

FIG. 15 shows the result of measuring the directivity of the microwave emitted from the array antenna 98. No. in the figure. 2, No. 3, No. , Etc. are the core numbers of the optical waveguide array 1. 2, No. 3, No. 6, ...
5 shows the result of measuring the microwave emitted from the array antenna 98 when the signal light is made incident on the antenna.
In each figure of FIG. 15, the horizontal axis is Azi with respect to the front direction.
The angle is a mut angle, and the vertical axis is an elevation angle. The shading in each drawing indicates the beam intensity, and the white portion is the direction of the main beam. Further, “x” marks are calculated values in the direction of the main beam. The core of the optical waveguide array 1 into which the signal light is incident is designated as a core No. 2, No. 3, N
o. By changing to 6,..., It was confirmed that the direction of the main beam changed greatly, and the direction of the microwave emitted from the array antenna 98 changed. It was also confirmed that the measured value in the direction of the main beam and the calculated value were in good agreement.

As described above, the optical signal processing beam forming circuit 1
Reference numeral 0 denotes an optical waveguide array in which a plurality of waveguides are stacked,
And the lens 3, and the signal light and the reference light having different frequencies are Fourier-transformed and incident on a plurality of waveguides.
Microwave directivity can be changed two-dimensionally with a compact device.

In the above description, the use of the optical signal processing beam forming circuit 10 shown in FIG. 1 to emit a microwave whose directivity changes two-dimensionally has been described. Can also be used when receiving microwaves having different directivities.

FIG. 16 is a block diagram showing a case where an optical signal processing beam forming circuit 10 is used in a system for receiving microwaves having different directivities and processing the received signals. The description of the laser light source 40, the optical fibers 41, 42, and 96, the optical channel selector 43, the optical signal processing beam forming circuit 10, the optical heterodyne detection circuit 97, and the array antenna 98 is as described above. 11 is the same as the arrangement. Mixers 101 to 107 are arranged between optical heterodyne detection circuit 97 and array antenna 98. In FIG. 16, the laser light source 40 further includes a signal laser 40D. The signal laser 40D is a PLL
The reference laser 40A is output by the synchronization signal from the circuit 40C.
The laser beam is emitted in synchronization with the laser beam emitted from the signal laser 40B. In this case, the reference laser 40
A and the signal lasers 40B and 40D emit laser lights having mutually different frequencies. The laser light emitted from the signal laser 40D enters the optical channel selector 43 via the optical fiber 44. Optical channel selector 43
Converts the laser light from the optical fiber 44 into the core No. 6 is incident. Therefore, the optical waveguide array 1 emits one reference light and two signal lights to the lens 3.

The lens 3 receives one reference light and two signal lights from the front focal plane 91 and performs a Fourier transform on the incident one reference light and two signal lights to perform a rear focal plane. 95 is condensed and irradiated with a predetermined spot size. The optical waveguide array 2 samples the laser light applied to the rear focal plane 95 of the lens 3 using a plurality of waveguides,
The sampled laser light is guided to an optical heterodyne detection circuit 97 via an optical fiber 96. The optical heterodyne detection circuit 97 heterogeneously detects the laser light incident by the plurality of heterodyne detection elements to generate a microwave, and supplies the generated microwave to the mixers 101 to 107. In this case, assuming that the frequency of the reference light is fr and the frequencies of the signal light are f1 and f2, the optical heterodyne detection circuit 97 generates the microwave M1 having the frequency f1-fr and the frequency f1
A 2-fr microwave M2 is supplied to the mixers 101 to 107. The microwaves M1 and M2 have mutually different phases.

The array antenna 98 is connected to the microwave 15
0, 151, and the plurality of antenna elements of the array antenna 98 receive the received signal RS1 having the phase of the microwave 150 and the receiving signal RS1 having the phase of the microwave 151.
Is transmitted to the corresponding mixers 101-107. Mixers 101 to 107 receive signals RS1 and RS2 from a plurality of antenna elements of array antenna 98 and a plurality of microwaves M1 and R2 from optical heterodyne detection circuit 97, respectively.
M2, and outputs a signal of an intermediate frequency between the received signal and the microwave to the synthesizer 108. Microwave 150,
If the frequency of 151 is frf, the mixers 101 to 101
7 is the intermediate frequency frf- (f1-fr), frf-
The two signals (f2-fr) are output to the synthesizer 108. In this case, as shown in FIG.
7 receives two reception signals RS1 and RS2 having different phases from a plurality of antenna elements of the array antenna 98, and receives two microwaves M1 and M2 having different phases from the optical heterodyne detection circuit 97. Received signal RS1 has the same phase as microwave M1. The reception signal RS2 has a phase that becomes the same when the phase of the microwave M2 is inverted. Then, the mixers 101 to 107 receive the reception signal Rs1.
Is mixed with the microwave M1, and the received signal RS2 is mixed with the microwave M2.

Then, the synthesizer 108 outputs the intermediate frequency fr
The two signals having f- (f1-fr) and frf- (f2-fr) are combined to output a received signal RS.

As described above, by supplying the microwaves M1 and M2 to the mixers 101 to 107, two microwaves having different phases can be received.

In FIGS. 16 and 17, two microwaves having different directivities (different phases) are supplied to the mixer by feeding two microwaves having phases corresponding to the phases of the two microwaves to be received. However, the present invention is not limited to this, and it is generally possible to receive n microwaves having different directivities. In this case, one reference light and the frequency Are emitted from the laser light source 40. The optical signal processing beam forming circuit 10 Fourier-transforms one reference light and n signal lights, and samples the Fourier-transformed one reference light and n signal lights by a plurality of waveguides. Optical heterodyne detection circuit 9
Emitted to 7. The optical heterodyne detection circuit 97 has a frequency difference n between the frequency of the reference light and the frequency of each signal light.
The microwaves are generated and supplied to the mixers 101 to 107. On the other hand, the array antenna 98 receives n microwaves having different phases from each other and converts n received signals having different phases from the plurality of antenna elements into the mixer 10.
1 to 107. Mixers 101 to 107 mix the n received signals with the corresponding microwaves and output n signals having an intermediate frequency between the received signals and the microwaves to combiner 108. The combiner 108 combines the n signals having the intermediate frequency and outputs a received signal.

As described above, even when a plurality of microwaves having different directivities are received, the optical signal processing beam forming circuit 1
0 can be used, so that the microwave receiving antenna can be reduced in size.

In the above description, the cores 112, 122 and 132 of the optical waveguide arrays 1 and 2 are made of deuterated PMMA. When the wavelength of the laser beam used for optical communication deviates from 1.3 to 1.5 μm, it is not necessary to use deuterated PMMA, and ordinary PMMA may be used. In the present invention, P
Not limited to MMA, the cores 112, 122, 132 may be made of thermally crosslinked silicone, polyimide, ZEONEX, and ARTON. Further, in the above, the optical waveguide arrays 1 and 2 have the optical waveguides 11 and 12,
In the present invention, the optical waveguide array is not limited to three layers, but may be formed by laminating four or more optical waveguides. In that case, the number of cores formed in each optical waveguide can be arbitrarily selected.

The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[0080]

The optical signal processing beam forming circuit according to the present invention Fourier-transforms signal laser light and reference laser light having different frequencies, and converts the laser light having a phase distribution in the radial direction of the laser light into a plurality of waveguides. Since sampling and emission are performed, microwaves can be generated by heterodyne detection of laser light having different frequencies emitted from a plurality of waveguides, and directional microwaves can be generated by superimposing a plurality of generated microwaves. Can be emitted.

In the optical waveguide array used in the optical signal processing beam forming circuit, at least one end of the core is arranged in a plurality of layers, so that the incident position of the signal laser light with respect to the reference laser light is determined. The microwave directivity can be controlled two-dimensionally by changing it.

[Brief description of the drawings]

FIG. 1 is a perspective view of an optical signal processing beam forming circuit according to an embodiment of the present invention.

FIG. 2 is a perspective view of an optical waveguide array.

FIG. 3 is a first process chart showing a method for manufacturing an optical waveguide array.

FIG. 4 is a second process chart illustrating a method for manufacturing an optical waveguide array.

FIG. 5 is a plan view of a mask used for patterning a resist.

FIG. 6 is an array diagram of cores at one end of an optical waveguide array.

FIG. 7 is a near-field image of an optical waveguide.

8 is a perspective view of a lens used in the optical signal processing beam forming circuit shown in FIG.

FIG. 9 is a configuration diagram for explaining the principle of generating a microwave whose directivity is controlled two-dimensionally.

FIG. 10 is a perspective view of the lens for explaining the function of the lens used in the optical signal processing beam forming circuit shown in FIG. 1;

11 is a configuration diagram showing an optical system for performing an experiment for emitting a microwave whose directivity is two-dimensionally controlled using the optical signal processing beam forming circuit shown in FIG. 1;

FIG. 12 shows measurement results of insertion loss and crosstalk of an optical waveguide.

13 is a measurement result of a coupling efficiency between a lens and an optical waveguide array in the optical signal processing beam forming circuit shown in FIG.

FIG. 14 is a diagram showing a radial phase distribution of laser light after transmission through a lens in the optical signal processing beam forming circuit shown in FIG. 1;

FIG. 15 shows a measurement result of directivity of microwaves emitted from the array antenna shown in FIG. 11;

16 is a configuration diagram illustrating an optical system when receiving microwaves having different directivities by using the optical signal processing beam forming circuit illustrated in FIG. 1;

FIG. 17 is a diagram for explaining a function of the mixer shown in FIG. 16;

FIG. 18 is a diagram for explaining the concept of radio wave reception by a communication satellite.

FIG. 19 is a configuration diagram of a conventional array antenna.

FIG. 20 is a configuration diagram for explaining a principle of generating a microwave whose directivity is controlled one-dimensionally.

[Explanation of symbols]

1, 2 optical waveguide array, 3 lens, 10 optical signal processing beam forming circuit, 11 to 13 optical waveguide, 20 substrate, 21 epoxy resin layer, 22 deuterated PMMA,
23, 23a resist, 24 mask, 26 holes,
30 centers, 31, 92, 93, 310, 311 points,
32-34,110,120,130 entrance, 40
Laser light source, 40A reference laser, 40B, 40D signal laser, 40C PLL circuit, 41, 42, 44, 9
6,341-344 Optical fiber, 43 Optical channel selector, 90,300 Fourier transform lens, 91,3
01 front focal plane, 95, 302 rear focal plane, 97 optical heterodyne detection circuit, 98, 330 array antenna, 99 receiver, 100 spectrum analyzer, 1
08, 202, 203 Combiners, 101 to 107 mixers, 111, 121, 131 Outlets, 112, 12
2,132 cores, 113,123,133 cladding, 150,151,350,351
00 communication satellite, 201 antenna, 210 earth, 2
20 microwave, 321-324 heterodyne detector, 331-334, 2011-201m antenna element, 2021-202m, 2031-203m phase shifter.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tomohiro Akiyama 2-1-2 Koikodai, Seika-cho, Soraku-gun, Kyoto Prefecture Within AT-R Environmentally Adaptive Communication Laboratory (72) Inventor Keizo Inagaki Kyoto Soraku 2nd-2nd, Kodai, Seika-cho, ATR Research Institute for Environmentally Adaptive Communications, ATR Co., Ltd. (72) Inventor Makoto Hikita 2-1-1 Nishishinjuku, Shinjuku-ku, Tokyo NTT Advanced Technology F-term within the company (reference) 2H047 KA04 KA12 KB09 MA03 MA07 QA05 QA07 TA00 2K002 AA07 AB19

Claims (15)

[Claims] An optical signal forming a plurality of light beams based on a signal light composed of a laser light having a first frequency and a reference light composed of a laser light having a second frequency different from the first frequency. A processing beam forming circuit, wherein the reference light is incident from a first entrance of a plurality of entrances, and the signal light is incident from a second entrance different from the first entrance. A first optical waveguide array that emits signal light and the reference light, and first and second focal planes, and Fourier transforms the signal light and the reference light incident from the first focal plane, A lens that focuses the converted signal light and reference light to a predetermined spot diameter and irradiates the second focal plane with the signal light and the reference light that irradiates the second focal plane with a plurality of incident lights Incident from the mouth, and the plurality of light beams A second optical waveguide array that emits from an exit port, wherein the first and second optical waveguide arrays are provided so as to face the entrance surface having the plurality of entrance ports, and the entrance surface, and An output surface having a plurality of output ports corresponding to the plurality of input ports, and a plurality of optical waveguides for guiding laser light incident from the input ports to the output port, wherein a plurality of the first optical waveguide arrays are provided. And a plurality of entrances of the second optical waveguide array are arranged in a plurality of layers. 2. The optical waveguide array according to claim 1, wherein the second optical waveguide array includes a plurality of optical heterodyne detecting elements for feeding a plurality of microwaves having a predetermined phase to a plurality of elements of an array antenna that emits microwaves having directivity. 2. The optical signal processing beam forming circuit according to claim 1, which emits a plurality of light beams. 3. A plurality of microwaves having a predetermined phase in a plurality of mixers connected corresponding to a plurality of elements of an array antenna for receiving directional microwaves, said second optical waveguide array comprising: 2. The optical signal processing beam forming circuit according to claim 1, wherein the plurality of light beams are emitted to a plurality of optical heterodyne detection elements that supply power. 4. The arrangement of the plurality of entrances of the second optical waveguide array is similar to the arrangement of the plurality of elements of the array antenna.
3. An optical signal processing beam forming circuit according to claim 1. 5. The arrangement of the plurality of exit ports of the first optical waveguide array is similar to the arrangement of a light source for generating the signal light and a light source for generating the reference light. The optical signal processing beam forming circuit according to any one of claims 1 to 4. 6. The light according to claim 2, wherein a region of the second optical waveguide array provided with the plurality of entrances is smaller than the predetermined spot diameter. Signal processing beam forming circuit. 7. The optical waveguide according to claim 2, wherein the plurality of optical waveguides of the second optical waveguide array are provided so as to expand in a direction from the incident surface to the emission surface. 3. An optical signal processing beam forming circuit according to claim 1. 8. The optical waveguide according to claim 2, wherein the plurality of optical waveguides of the first optical waveguide array are provided so as to converge in a direction from the incident surface to the emission surface. Item 6. An optical signal processing beam forming circuit according to item 1. 9. The lens according to claim 1, wherein the lens has a cylindrical shape having a first surface including the first focal plane and a second surface including the second focal plane. The optical signal processing beam forming circuit according to any one of the preceding claims. 10. A semiconductor device comprising: a first surface; a second surface facing the first surface; and a plurality of optical waveguides provided between the first surface and the second surface. Each of the plurality of optical waveguides has one port on the first surface and the other port on the second surface, and the plurality of one ports of the plurality of optical waveguides are A stacked optical waveguide array arranged in a plurality of layers on a first surface. 11. The stacked optical waveguide array according to claim 10, wherein the plurality of optical waveguides are provided so as to expand in a direction from the first surface toward the second surface. 12. The array according to claim 10, wherein the plurality of one openings are arranged in a manner similar to an arrangement shape of a plurality of elements of an array antenna for transmitting and receiving directional microwaves. Laminated optical waveguide array. 13. The stacked optical waveguide according to claim 10, wherein the plurality of one ports are arranged in a manner similar to an arrangement shape of a plurality of emission points of a plurality of laser lights having different frequencies. Wave path array. 14. The stacked optical waveguide array according to claim 10, wherein the plurality of cores and claddings of the plurality of optical waveguides are made of a polymer. 15. The stacked optical waveguide array according to claim 14, wherein said core is made of polymethyl methacrylate, and said cladding is made of epoxy resin.