JP2001356824A - Flow rate controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that a work to set a flow rate including the setting of an operation mode is complicate since it is necessary to control the flow rate by turning the knob of a setter at the time of fully closing a valve. SOLUTION: This device is provided with an operation mode selecting means for selecting any operation mode among plural kinds of operation modes including at least a control mode for controlling the degree of opening of a control valve so that the flow rate of fluid to be measured which is detected by a flow rate detecting means can be turned into a prescribed flow rate and a fully closing mode for fully closing the control valve. This operation mode selecting means alternately selects those two modes each time one control switch is controlled, and selects one mode when any operation different from the operation to alternately select the two modes is operated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow control device.

[0002]

2. Description of the Related Art For example, in a semiconductor manufacturing apparatus, various gases are used. In order to control the flow rate of these gases, a flow control device is interposed in a supply passage of each gas. Further, Japanese Patent Application Laid-Open No. Hei 6-341880 discloses a flow control device for controlling the flow rate by controlling the opening of a control valve.

FIG. 18 is a block diagram showing the configuration of such a conventional flow control device. In FIG. 18, 1 is a flow control device, 2 is a sensor, 3 is a bypass which is a gas flow passage provided in parallel with the sensor 2, 4 is a valve, 5 is a sensor tube, 6a and 6b are thermoresistors, and 7 is a bridge. circuit,
Reference numeral 8 denotes an amplifier circuit, and 9 denotes a setting device provided with a control signal input terminal for setting a gas flow rate. For example, a numerical value is set by adjusting a knob of a variable resistor according to a scale. 10 is a comparison control circuit, 11 is a flow rate display, and 12 is a power supply.

Next, the operation will be described. The gas flow rate is set by the setting device 9. In order to set the gas flow rate, the knob of the setting device 9 is turned to match a predetermined scale. In this flow control device, the gas flow rate can be set not only to a predetermined flow rate, but also to fully closed. That is, when the set value is set to 0, the valve 4 is fully closed, and when the flow rate is set to a predetermined value, the valve 4 is controlled to have the set value.

When the gas passes through the sensor tube 5, the thermo-resistors 6a and 6b are cooled by the specific heat of the gas, and the resistance value changes. These two thermo registers 6
The change in the resistance values of a and 6b is taken out as an output from the bridge circuit 7, and the amount of change in the resistance value is electrically output as a sensor signal from the amplifier circuit 8 in accordance with the flow rate of the gas.
The gas is divided by the bypass 3, and the total flow is detected from the ratio of the divided flow to the sensor flow. The sensor signal from the amplifying circuit 8 is compared with the setting signal of the setting device 9 by the comparison control circuit 10, and the flow control valve 4 is controlled based on the output of the comparison control circuit 10 to achieve the target flow rate. Control.

[0006]

Since the conventional flow control device is constructed as described above, when the valve 4 is to be fully closed, it must be adjusted by turning the knob of the setting device 9.

However, when the valve 4 is once fully closed and then used again after returning to the original set value, it is necessary to turn the knob of the setter 9 and be careful not to forget the set value once set. For example, it is necessary to record the original set values in order to perform the operation.

Further, for example, when controlling the fuel of a combustion burner by using a plurality of conventional flow control devices, when stopping the combustion, the flow control device for the fuel gas is fully closed and the flow control device for the air is closed. It is necessary to completely stop the unburned gas remaining in the burner piping at the same time as stopping the combustion by fully opening the flow control device. However, the operation of the setting device 9 forcibly opens the valve 4 fully. There was a problem that I could not do it. That is, even if the setting device 9 is set to the maximum flow rate, when the pressure on the fluid supply side is high, the valve 4 is kept at an opening that does not fully open, so that the valve 4 does not always fully open.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a flow control device capable of easily realizing a predetermined operation state.

Further, according to the present invention, it is not necessary to provide an external voltage source for selecting an operation mode by switching the operation mode as a non-voltage contact input, and it is possible to simplify a wiring operation operable with a single power supply. It is intended to obtain a flow control device.

Another object of the present invention is to provide a flow control device capable of eliminating a risk that the set operation mode is suddenly switched.

Another object of the present invention is to provide a flow control device capable of setting an operation mode by the input switch even when a control mode is selected by a non-voltage contact.

Also, the present invention provides a flow control device capable of outputting a signal including an alarm and an event to the outside on the basis of predetermined conditions, and enabling automatic setting of various operation modes using the output state. The purpose is to obtain.

Further, according to the present invention, when the control mode is selected by a non-voltage contact, the control mode is shifted to the control mode once, and the signal including the alarm and the event can be returned to the initial state. It is an object of the present invention to provide a flow control device which can eliminate a reset switch having a large current capacity for resetting.

It is another object of the present invention to provide a flow control device capable of shifting to a preset operation mode in accordance with a predetermined condition when a predetermined condition is satisfied even when the flow control device is used alone. And

[0016]

[Means for Solving the Problems] The flow control device according to the present invention includes a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the flow detection means becomes a predetermined flow rate, and a fully closed mode for fully closing the control valve. From at least a plurality of types of operation modes, including an operation mode selection means for selecting any operation mode,
This operation mode selecting means alternately selects two modes each time one operation switch is operated, and sets another mode when an operation different from that when the two modes are alternately selected is performed. It is configured to select a mode.

2. The flow control device according to the present invention includes an operation mode display unit that displays the three modes based on three states of lighting, turning off, and blinking when any one of the three modes is selected by the operation mode selection unit. It is prepared for.

3. The flow control device according to the present invention includes a non-volatile memory that stores the operation mode when any one of the operation modes is selected.

4. The flow control device according to the present invention includes a non-volatile memory that stores the operation mode when a predetermined time has elapsed without switching to a new mode after selecting one of the operation modes. is there.

[5] The flow control device according to the present invention includes an operation mode selection unit having a non-voltage contact input circuit for externally inputting the presence or absence of the ground potential.

6. In the flow control device according to the present invention, the power supplied from the outside is a single power supply.

7. The flow control device according to the present invention includes an operation switch for selecting an operation mode, and when an input for selecting a predetermined operation mode is made from the outside to the non-voltage contact input circuit, an input operation from the operation switch is performed. The operation mode selection means is provided with an operation switch input invalidation means for invalidating.

8. The flow control device according to the present invention includes an operation switch for selecting an operation mode, and when there is an input for selecting a control mode from the outside to the non-voltage contact input circuit,
The operation mode selection means is provided with a function of shifting to the control mode once and thereafter giving priority to the input of the operation switch.

9. A flow control device according to the present invention includes an output unit that outputs a signal based on a predetermined condition.

10. In the flow control device according to the present invention, when there is an input for selecting the control mode from the outside to the non-voltage contact input circuit, the flow is once shifted to the control mode, and the signal output by the output means is returned to the initial state. Means.

11. The flow control device according to the present invention includes a setting operation mode transition unit for setting the operation mode selection in advance and performing transition to the set operation mode based on a predetermined condition. is there.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below. Embodiment 1 FIG. 1 is a diagram showing a configuration of a flow control device according to a first embodiment of the present invention. In FIG. 1, reference numeral 21 denotes a flow control device. The flow control device 21 is provided with a solenoid valve (adjustment valve) to adjust the opening of the solenoid valve according to the operation mode, and to display the operation mode and the flow rate of the fluid to be measured. Things. The operation mode will be described later.

Reference numeral 22 denotes a flow path block of the flow control device 21,
Reference numeral 23 denotes an inlet pipe connection block, and reference numeral 25 denotes a flow path having a circular cross section through which the fluid to be measured flows. Reference numeral 31 denotes a stainless steel rectifying wire mesh for adjusting the flow of the fluid to be measured, 32 denotes a ring-shaped spacer for sandwiching the stainless steel rectifying wire mesh 31, 33 denotes a step portion for locking the spacer 32, and 34 denotes a stepped portion. It is a micro flow sensor (flow rate detecting means) for detecting the flow rate of the fluid to be measured.

The fluid to be measured in the first embodiment is, for example, a gas such as air, nitrogen, argon, carbon dioxide, oxygen, etc. However, the present invention is not limited to this, and is not limited thereto. It may be a flow meter.

The micro flow sensor 34 includes, for example,
The semiconductor diaphragm configuration disclosed by the applicant of the present application in the specification of Japanese Patent Application No. 3-106528 can be used. That is, although not shown, the micro flow sensor 34 has a heat generating portion and two temperature detecting portions disposed upstream and downstream of the heat generating portion. The flow rate corresponding to the flow velocity is obtained from the power supplied to the heat generating portion necessary to keep the difference in the temperature to be constant, or the heat generating portion is heated with a constant current or constant power and detected by the two temperature detecting portions. It is formed so that the flow rate can be determined from the temperature difference. Since the micro flow sensor 34 employs an extremely thin diaphragm structure that is thermally insulated, it has the features of high-speed response and low power consumption. In addition, naturally, the present invention is not limited to this, and an optimal one may be used from conventionally known flow rate measuring means. 35 to 37 are, for example, O made of synthetic rubber.
It is a ring.

Reference numeral 41 denotes a solenoid valve (control valve) for controlling the flow of the fluid to be measured, and reference numeral 42 denotes a flow path 43 through which the fluid to be measured flows.
And a valve seat 45 having a flow path 44 formed therein, a valve chamber 45 communicating the flow path 43 with the flow path 44, a valve element 46 housed in the valve chamber 45 for opening and closing the flow path 44, and a valve element 47. A magnetic plunger connected to 46, a solenoid coil 48 energized to move the plunger 47 up and down, and 49 a flow path block 22
And a seal ring for sealing between the valve seat 42 and the valve seat 42.

The operation mode referred to here is a function for defining the operation state of the flow control device. For example,
The “control mode” refers to an operation state in which the opening degree of the solenoid valve 41 is controlled so that the flow rate of the fluid to be measured detected by the micro flow sensor 34 becomes a set flow rate. The operation state in which the solenoid valve 41 is forcibly fully closed regardless of the flow rate or the detection flow rate of the micro flow sensor 34, and the "full open mode" refers to the flow rate setting value as well as the detection flow rate of the micro flow sensor 34. Regardless, it refers to an operation state in which the solenoid valve 41 is forcibly set to the set maximum opening (not necessarily 100% opening). In addition, various operation states such as a “test mode”, a “self-diagnosis mode”, and a “maintenance inspection mode” can be defined as needed.

Reference numeral 51 denotes a control unit; 52, a signal processing circuit for processing a sensor signal from the micro flow sensor 34;
Is a drive circuit for driving the solenoid valve 41, 54 is an input switch (operation switch) for inputting a predetermined command signal to the control unit 51, and 55 is an L indicating the current operation state.
An ED indicator 56 is a 4-digit 7-segment display (operation mode display means) for displaying the flow rate or operation mode of the fluid to be measured in characters, and 57 is a detected value of the flow rate of the fluid to be measured processed by the signal processing circuit 52. , Input command signals from the input switch 54, and based on these signals, the driving circuit 5
A CPU (operation mode selection means, operation mode display means, operation switch input invalidation means, output means, initial state return means, set operation mode transition means) for controlling the control unit 3;
A connector (output means) for supplying voltage and current to U57 and for inputting and outputting signals to and from CPU 57;
Reference numeral 9 denotes a ROM in which an algorithm for setting operation and arithmetic processing, a control program, and the like are written in advance, 60 denotes an EEPROM (non-volatile memory) that stores parameters, operation modes, and the like corresponding to the flow control device, and 61 denotes a measurement. This is a RAM for storing the flow rate data and the like at any time.

Next, each switch of the input switch 54 and LE
The function of each lamp of the D display lamp 55 will be described. 54
Reference numeral -1 denotes a RUN switch (operation mode selection means) which is pressed when the operation mode is switched according to a flowchart described later. This switching operation will be described later. 5
4-2 is a SHIFT switch pressed when setting is performed, 5
Reference numerals 4-3 and 54-4 denote a down switch (▽), an up switch (△), 5
4-5 is an up switch 54-4 and a down switch 5
When the set value is changed according to 4-3, the ENT switch is pressed to confirm the changed set value.
The T switch 54-5 is also used as a switch for performing an alarm, reset, integration reset, and the like. 54-6 is 7
The DISP switch is pressed when the display content of the segment display 56 is switched. The display content is instantaneous PV value (flow rate measurement value) → instant SP value (flow rate setting value) → integrated PV value every time the DISP switch 54-6 is pressed. → The instantaneous PV value → circulates and switches.

Reference numeral 55-1 denotes an SP lamp which lights when the content displayed on the 7-segment display 56 is SP display.
5-2 indicates that the content displayed on the 7-segment display 56 is P
An OK lamp (operation mode display means), which turns on when the instantaneous flow rate matches the set value, and which blinks when the operation mode is the fully open mode, is indicated by 55-4. Is an ALARM lamp that lights up when an abnormality is detected. 55-5 is an L lamp that lights up when the content displayed on the 7-segment display 56 indicates the integrated flow rate.
Reference numeral 6 denotes an L / min lamp that is turned on when the content displayed on the 7-segment display 56 indicates the instantaneous flow rate.

Next, the operation will be described with reference to the flowchart of FIG. First, the RUN of the input switch 54
When switch 54-1 is pressed, it is determined that the operation mode is to be switched, and the process proceeds from step ST1 to step ST2. In step ST2, it is determined whether or not the time during which the RUN switch 54-1 is pressed is less than 2 seconds.

If the time during which the RUN switch 54-1 is pressed is less than 2 seconds, the process proceeds to step ST3 to select the fully closed mode or the control mode, and determines whether or not the previous mode was the fully closed mode. judge. If it is determined that the previous mode was not the fully closed mode, that is, if it was determined that the previous mode was the control mode, step S
Proceeding to T4, the fully closed mode is selected. In step ST5, the OK lamp 55-3 is turned off to indicate that the mode is the fully closed mode. At this time, "OFF" is also displayed on the 7-segment display 56.

If it is determined in step ST3 that the previous mode is the fully closed mode, the process proceeds to step S3.
Proceeding to T6, the control mode is selected. Then, the flow rate is displayed on the 7-segment display 56, and the solenoid valve 4 is set so that the flow rate becomes the value displayed on the 7-segment display 56.
Control 1 When the flow rate matches the set value, step S
Proceeding to T7, the OK lamp 55-3 is turned on to indicate that the control mode has been entered.

Next, when the time during which the RUN switch 54-1 is pressed is 2 seconds or more, the process proceeds from step ST2 to step ST8, and the fully open mode is selected. Step ST9
Then, the OK lamp 55-3 blinks to indicate that the mode is the full open mode. Also, “FULL” is displayed on the 7-segment display 56. Steps ST4, ST6, and ST8 correspond to the operation mode selecting means, and include steps ST5, ST7, and ST9.
Corresponds to the operation mode display means. And step S
This mode switched at T10 is EEPROM
60.

As described above, according to the first embodiment, by operating only one RUN switch 54-1,
The operation mode can be easily set, and when the mode is returned to the control mode, the original set value is returned. Therefore, an effect that the operation becomes easy can be obtained.

Further, the number of switches is small and the number of signal lines for switching operation modes is also small. Therefore,
Switching of the operation mode can be realized with a small number of parts, the product cost can be suppressed, the signal line is shortened, and the possibility of malfunction due to noise or the like is reduced.

Further, when the fuel gas is used for controlling the fuel of the combustion burner as described above, if the fuel gas flow control device is accidentally fully opened during the combustion, the flame becomes unnecessarily large, and the fuel gas becomes undesirably large. It is dangerous because there is a risk of complete combustion,
Since the fully open mode is not selected unless the RUN switch 54-1 is pressed for two seconds, it is possible to prevent the full open mode from being selected by mistake.

Further, the OK lamp 55-3 is turned on, turned off or blinks, and the three modes of the fully closed mode, the control mode, and the fully open mode are performed.
Since two modes are displayed, it is possible to confirm which mode is selected.

Further, since the operation mode is stored in the EEPROM 60, the same mode as the previous mode is restored when the power is turned on again, and there is an effect that the trouble of resetting the mode even if there is a power failure or the like can be saved.

If the operation mode is not switched to the new operation mode after the operation mode is switched, the operation mode may be stored in the EEPROM 60 after a predetermined time has elapsed. By doing so, the number of times of writing to the EEPROM 60 can be reduced, and the time to reach the number of times of writing to the EEPROM becomes longer.

Although the push-button type RUN switch 54-1 is used as the operation mode selection means in the first embodiment, as shown in FIG. You may comprise so that a mode may be selected.

Further, as shown in FIG. 4, a configuration in which three mode display LEDs and three momentary switches SW are connected to the flow control device 21 may be adopted.

As shown in FIG. 5, every time the momentary switch SW is operated, the mode is sequentially switched from fully closed to fully opened to control, and three mode display LEDs and one momentary switch SW are transmitted to the flow control device 21. The connected configuration may be used.

Although the OK lamp 55-3 is used in the first embodiment as the operation mode display means, the operation mode may be displayed on the 7-segment display 56, or a liquid crystal display may be used. Can also. Furthermore, the flow rate can be displayed using a display device that displays a bar graph instead of a numerical display. In order to display the operation mode on such a display, for example, the bar graph may be displayed by blinking at time intervals corresponding to each mode.

Although the solenoid valve is used as the control valve in the first embodiment, it is needless to say that the control valve is not limited to this, and may be a valve using an electric motor or an air plunger as an actuator, a ball valve, a butterfly valve, or the like. It is possible to adopt various application examples such as those using the above.
When the full open mode is selected, it can be used as a flow meter, not as a flow control device.

Further, in the flow control device having the operation mode selecting means as shown in FIG. 3 of the first embodiment, three operation modes of the control mode / fully open mode / fully closed mode are used.
As shown in FIG. 6, switching of these modes is performed by external voltage input (for example, open / + 15 v /
-15v).

When a plurality of such flow control devices are used to control, for example, the fuel of a burner for combustion, and when an abnormality occurs in any of the flow control devices and an alarm is output, By completely closing the fuel gas flow control device and fully opening the air flow control device, it is necessary to stop combustion and to prevent unburned gas from remaining in the burner pipe. The wiring connection configuration of each flow control device for this purpose is as shown in FIG.

In FIG. 7, reference numeral 101 denotes a relay circuit for inputting a voltage for switching between a fully open state and a fully closed state, and reference numeral 102 denotes each of the flow rate control devices when performing an alarm reset (returning to a state where no alarm is output). Alarm reset switch for shutting off the power supply of MFC1, MFC1 is a flow control device for fuel gas, MFC2 is a flow control device for air, MF
C3 is a flow control device for oxygen. Thus, it is necessary to provide an external circuit such as a relay circuit for switching between the fully open / fully closed state and a reset switch.

FIG. 8 shows a power supply circuit (+15 V,
FIG. 2 is a wiring circuit diagram showing a configuration of an external circuit having a GND (−15v), an operation mode changeover switch 103, and an alarm lamp 104.

FIG. 9 is a circuit diagram showing an example of a circuit configuration for fully closing the flow control device when an alarm output is generated in the flow control device according to the first embodiment. In FIG. 9, reference numeral 105 denotes a photocoupler.

Embodiment 2 As described above, in the case where the configuration of FIG. 7 is employed in the first embodiment, it is necessary to provide an external circuit such as a relay circuit, and there is a disadvantage that the configuration of the system is complicated. Further, there has been a disadvantage that an expensive switch having a large current capacity needs to be used in order to shut off power to each flow control device when performing an alarm reset. The second embodiment attempts to improve these. Also, the second embodiment
The basic configuration of the flow control device is the same as the configuration of the flow control device shown in FIG. 1, but has a configuration that operates with a single power supply as shown in FIGS.

Here, a description will be given of the flow control device which operates with this single power supply. FIG. 10 is a configuration diagram showing a flow control device operated by a single power supply, and FIG. 11 is a configuration of a micro flow sensor 34 (only temperature detection units R _U and R _D are shown, and a heating unit is omitted) and a sensor output circuit. FIG. In FIG. 10, the same or corresponding parts as those in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. 10, reference numeral 148 denotes a detection element 34, a signal processing circuit 52, and C
Connector for supplying a single power supply to PU 57, 149
Is an AC adapter input connector. FIG.
, 70 is a power supply for the micro flow sensor 34,
Reference numeral 71 denotes a differential amplifier circuit that operates on the single power supply B and processes the output of the micro flow sensor 34. The signal processing circuit 52 includes the differential amplifier circuit 71.

The second embodiment provides a flow control device in which the operation mode is switched by a non-voltage contact input from the outside and the power supplied is a single power supply.

An input operation from an input switch 54 for selecting an operation mode, which is provided separately from a non-voltage contact input circuit for a non-voltage contact input for switching the operation mode, is specified by the non-voltage contact input. A flow control device that can be disabled when the operation mode is selected.

A control mode is selected by the no-voltage contact input in response to an input from an input switch 54 for selecting an operation mode provided separately from the no-voltage contact input circuit for the no-voltage contact input. If the input switch 5
4 is to provide a flow control device that gives priority to the input by the user.

Another object of the present invention is to provide a flow control device capable of outputting a signal including an alarm or an event to a connector 58 or an LED indicator 55 when a predetermined condition is satisfied.

Further, when the control mode is selected by the non-voltage contact input, the flow rate control device is provided which can once shift to the control mode and return the signal including the alarm and the event to the initial state. Is what you do.

FIG. 12 is a partial circuit diagram showing the configuration of the internal circuit of the flow control device according to the second embodiment. Reference numeral 111 denotes a power supply (+15 V) supply terminal, and 112 denotes a reference power supply (GN).
D) Supply terminal, 113 is an input terminal of a fully open operation mode selection signal by a no-voltage contact, 114 is an input terminal of a fully closed operation mode selection signal by a no-voltage contact, and 115 is an alarm output terminal (output means) of an open collector output. is there.

Q 1 is a transistor for inputting a fully open operation mode selection signal (ground potential) which is turned off when a fully open operation mode selection signal (ground potential) is inputted from an input terminal 113, and Q 2 is a fully closed operation mode selection signal (ground) from an input terminal 114. A transistor for inputting a fully-closed operation mode selection signal which is turned off when a potential is input, and Q3 is a transistor (output means) for open collector output of the alarm output terminal 115.

FIG. 13 is a circuit diagram showing a configuration of an external circuit having a non-voltage contact for switching the operation mode, which is used by connecting to each terminal of FIG. In FIG. 13, reference numeral 121 denotes a single power supply of +15 V, for example. 122 is an external circuit having the non-voltage contact,
When the movable contact N is moved down to the fixed contact A side, the movable contact N is grounded, and the fully closed operation mode ゛ is selected as the operation mode. When the movable contact N is moved down to the fixed contact C, the movable contact N is grounded, and the fully open operation mode # is selected as the operation mode. When the movable contact N is moved down to the fixed contact B side, the movable contact N floats, and the control mode # is selected as the operation mode. 123 is an alarm lamp circuit.

Next, the operation will be described. The flow control device according to the second embodiment is operated by a single power supply of +15 V as shown in FIGS.
As shown in FIG. 2, input of a no-voltage contact is possible, which facilitates wiring work of a power supply to be supplied to the flow control device.
There is no need to provide an external voltage source for setting the operation mode.

Next, when a predetermined operation mode (fully closed operation mode, fully open operation mode) is selected by the non-voltage contact input circuit provided in the flow control device of the second embodiment, A function of invalidating an input operation from the input switch 54 for selecting an operation mode provided separately from the voltage contact input circuit will be described.

FIG. 14 is a flowchart showing the operation of the function for invalidating the input operation from the input switch 54. First, it is determined whether the operation mode set by the no-voltage contact input is the fully closed operation mode (step ST111). As a result, if the fully closed operation mode is set, the input by the input switch 54 is invalidated. (Step ST113). On the other hand, if the fully closed operation mode is not set in step ST111, it is next determined whether the operation mode set by the non-voltage contact is the fully open operation mode (step ST11).
2). As a result, if the fully open operation mode is set,
Invalidates the input by the input switch 54 (step S
T113).

Therefore, the input operation from the input switch 54 for selecting the operation mode provided separately from the non-voltage contact of the external circuit 122 for switching the operation mode is performed by the non-voltage contact by the fully closed operation mode or the fully open operation mode. Can be disabled when is selected. In particular, when an alarm has occurred, the input switch 54 has been inadvertently set in the fully closed operation mode or the fully open operation mode by a non-voltage contact from outside. Switching to the control mode can be prevented.

Next, an input switch 54 for selecting an operation mode, which is provided in the flow rate control device of the second embodiment.
In the case where the control mode is selected by the non-voltage contact input with respect to the input from the controller, the control mode is shifted to the control mode once, and then the function of giving priority to the input by the input switch 54 will be described.

FIG. 15 is a flowchart showing the operation of the function of giving priority to the input by the input switch 54. First, it is determined whether or not the control mode is selected by the non-voltage contact of the external circuit 122 (step ST211). As a result, if the control mode has not been selected, the input switch priority flag is set to 0, and the mode shifts to the operation mode selected by the no-voltage contact (step ST212). On the other hand, if the control mode is selected in step ST211, the state of the input switch priority flag is checked (step ST213). If the flag is 0 (input switch non-priority), the flag is set to 1 and control is performed once. Mode (step ST2)
14). Thereby, in the next step ST213, the flag becomes 1 (input switch priority), and it is checked whether or not there is an operation mode selection input from the input switch (step ST215). If there is an input, the operation mode is shifted to the operation mode selected by the input switch. (Step ST21
6).

Therefore, when the control mode is selected by the non-voltage contact of the external circuit 122 in response to the input from the input switch 54, the control mode is shifted to the control mode once, and then the input by the input switch 54 is prioritized. When the control mode is selected by the non-voltage contact, the operation mode can be set by the input switch.

Next, when a predetermined condition is satisfied, a signal including an alarm, an event, or the like provided in the flow control device of the second embodiment is transmitted to the connector 58 or the LED indicator 5.
5 will be described. In the following description, the function will be described as a function of externally outputting an alarm from the alarm output terminal 115 as an open collector output.

FIG. 16 shows the use of the function of outputting a signal including an alarm or an event to the connector 58 or the LED indicator 55 to enable various flow control devices to operate in various operation modes according to the alarm output state of the flow control device. FIG. 9 is a circuit wiring diagram for enabling forced setting. MFC1,
MFC2 and MFC3 are flow control devices as described in FIG. 131 is an alarm reset switch, and L is a common connection line to which the alarm output terminal 115 of each flow control device is commonly connected.

Next, the operation will be described. The alarm output terminal 115 of each flow control device shown in FIG. 12 is shared so that when an alarm output occurs in any of the flow control devices, each flow control device forcibly shifts to a predetermined operation mode. Commonly connected to the connection line L. Then, the common connection line L and the input terminal 113 or the input terminal 11 of the operation mode to be forcibly shifted by each flow control device.
4 are connected via an alarm reset switch 131.

That is, in the flow control device MFC1, the input terminal 114 of the flow control device MFC1 is connected to the alarm terminal so as to forcibly shift to the fully closed operation mode when an alarm output is generated in any of the flow control devices. Alarm reset switch 1 to common connection line L of output terminal 115
31 are connected.

Further, in the flow control device MFC2, when an alarm output is generated in any of the flow control devices, the input terminal 113 of the flow control device MFC2 is connected to the alarm output device so as to forcibly shift to the full-open operation mode. Terminal 11
5 is connected to the common connection line L via an alarm reset switch 131.

In the flow control device MFC3, the input terminal 114 of the flow control device MFC3 is connected to the alarm terminal so as to forcibly shift to the fully closed operation mode when an alarm output is generated in any of the flow control devices. Output terminal 11
5 is connected to the common connection line L via an alarm reset switch 131.

When the alarm reset switch 131 is depressed, the input terminal 113 or the input terminal 114 of the operation mode of each flow control device is disconnected from the common connection line L which is at the ground level by the alarm output. In each flow control device, a control mode is selected as an operation mode. Thereafter, the operation mode input by the input switch 54 is prioritized according to the flowchart shown in FIG.

Next, when the control mode is selected by the non-voltage contact provided in the flow rate control device of the second embodiment, the control mode is shifted to the control mode once, and is output from the alarm output terminal 115. A function of returning a signal such as an alarm or an event to an initial state will be described.

FIG. 17 is a flowchart showing the operation of the function of returning signals such as alarms and events to the initial state. First, it is determined whether or not the control mode is selected by the non-voltage contact input (step ST32).
1). In this determination, it is determined that both the input terminal 113 and the input terminal 114 are not connected to the ground level, that is, both the fully open operation mode selection signal input transistor Q1 and the fully closed operation mode selection signal input transistor Q2 are turned on. Is detected, it is determined that the control mode is selected.

When the control mode is selected, the mode shifts to the control mode (step ST322). Then, the output signal is reset. For example, if an alarm output is generated from the alarm output terminal 115, the alarm output is reset.
It returns to the initial state (step ST323).

Therefore, even if the output signal is not reset by resetting the power supply of the flow control device shown in FIG. 7, the output signal can be reset by selecting the control mode by the non-voltage contact input. The output signal can be reset without using a reset switch having a large current capacity required for reset by reset. Further, there is no need to use external components such as relays used in FIG.

Embodiment 3 In the second embodiment, when a plurality of flow control devices are used, each flow control device transmits a signal including an alarm or an event to the connector 58 or the LE.
It was possible to forcibly set various operation modes in each of the flow control devices according to the alarm output state of any of the flow control devices by using a function of outputting to the D indicator light 55 and connecting the wiring externally. .

In the flow control device according to the third embodiment, when an alarm or an event is output from the flow control device, the flow control device independently shifts to various operation modes according to this state. Can do that.

FIG. 12 is an input circuit diagram showing the configuration of the flow control device. 12, the description of the parts already described in the second embodiment is omitted. In FIG. 12, S1 is an operation mode setting switch (setting operation mode shifting means) which shifts according to an output state such as an alarm or an event. This setting switch S1
The neutral terminal connected to the movable contact is connected to the alarm output terminal 115 inside the flow control device. The terminal of the setting switch S1 connected to the fixed contact 1 is connected to the input terminal 114 of the fully closed operation mode, and the terminal of the setting switch S1 connected to the fixed contact 3 is connected to the input terminal 113 of the fully open operation mode. ing.

That is, when the movable contact of the setting switch S1 is switched to the fixed contact 1 side, when an alarm output occurs, the flow control device shifts to the fully closed operation mode. When the movable contact of the setting switch S1 is switched to the fixed contact 3 side, when an alarm output is generated, the flow control device shifts to the full-open operation mode.

Therefore, according to the third embodiment, when the flow control device is used alone, the flow control device outputs an alarm or an event without using an external circuit as shown in FIG. Then, it is possible to shift to various operation modes inside the flow control device according to this state.

It is needless to say that the functions described above as the operation of the electronic circuit can also be realized by performing the arithmetic processing by the CPU 57 using a software program stored in the ROM 59 or the like in advance.

[0090]

Advantages of the Invention As described above, according to the present invention,
Among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the flow rate detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. And an operation mode selection means for selecting any one of the operation modes from the outside. The operation mode selection means alternately selects two modes each time one operation switch is operated, and selects the two modes. Is configured to select another mode when an operation different from that when alternately selecting is performed, so that a fully closed mode in which the control valve itself is fully closed can be selected from the outside, and separately from the control valve. No shut-off valve is required. Further, there is an effect that the operation for selecting the mode is facilitated.

2. According to the present invention, when any one of the three modes is selected by the operation mode selection unit, the operation mode display unit displays the three modes according to the three states of lighting, turning off, and blinking. With this configuration, it is possible to easily confirm which mode is selected.

3. According to the present invention, when any one of the three modes is selected, the nonvolatile memory for storing the operation mode is provided, so that when the power is turned on again, it is possible to return to the same mode as the previous mode. Thus, even if there is a power failure, there is an effect that the trouble of resetting the mode can be saved.

4. According to the present invention, when any one of the three modes is selected and the switching to the new mode is not performed and a predetermined time elapses, the nonvolatile memory that stores the operation mode is provided. So
When the mode is switched at intervals shorter than the predetermined time, a new mode is not stored in the nonvolatile memory, and the number of times of writing in the nonvolatile memory can be reduced. Therefore, there is an effect that the time to reach the number of times of writing life can be extended.

5. According to the present invention, since the operation mode selection means is provided with the non-voltage contact input circuit for externally inputting the presence or absence of the ground potential, it is not necessary to provide an external voltage source for selecting the operation mode. effective.

6. According to the present invention, since a configuration is adopted in which the power supplied from the outside is a single power supply, wiring for supplying power to the flow control device is simplified,
This has the effect of facilitating wiring work.

7. According to the present invention, an operation switch for selecting an operation mode is provided, and when an input for selecting a predetermined operation mode is made from the outside to the non-voltage contact input circuit, the input operation from the operation switch is invalidated. Since the configuration is such that the operation switch input invalidation means is provided, there is an effect that the danger that the operation mode set by the non-voltage contact input is suddenly switched by the operation switch can be eliminated.

8. According to the present invention, an operation switch for selecting an operation mode is provided, and when there is an external input for selecting a control mode in the non-voltage contact input circuit, the operation mode is shifted to the control mode once, and then the operation switch Since the operation mode selection means is provided with the function of giving priority to input, there is an effect that the operation mode can be set by the operation switch when the control mode is selected by the non-voltage contact input.

9. According to the present invention, an output unit for outputting a signal based on a predetermined condition is provided, so that the output state of the output unit is used instead of the input of the operation mode by the non-voltage contact, so that the external In addition, there is an effect that various operation modes can be automatically set according to the output state without using components such as relays.

10. According to the present invention, when there is an input for selecting the control mode from the outside to the non-voltage contact, once the mode is shifted to the control mode, and the initial state return means for returning the signal output by the output means to the initial state is provided. With this configuration, there is an effect that a reset switch having a large current capacity for resetting the power supply can be eliminated.

11. According to the present invention, the selection of the operation mode is set in advance, and the apparatus is configured to include the set operation mode shifting means for shifting to the set operation mode based on a predetermined condition. When the predetermined condition is satisfied without using an external circuit when the device is used alone, there is an effect that a function of shifting to the set operation mode according to the condition can be realized.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a flow control device of the present invention.

FIG. 2 is a flowchart showing an operation of the flow rate control device according to the first embodiment of the present invention.

FIG. 3 is a circuit block diagram showing another configuration of the operation mode selection means in the flow control device according to the first embodiment of the present invention.

FIG. 4 is a circuit block diagram showing another configuration of the operation mode selection means in the flow control device according to the first embodiment of the present invention.

FIG. 5 is a circuit block diagram showing another configuration of the operation mode selection means in the flow control device according to the first embodiment of the present invention.

FIG. 6 is a partial configuration diagram showing a configuration of an internal circuit such as a power supply, an operation mode, and an alarm output in the flow rate control device according to the first embodiment of the present invention.

FIG. 7 is a wiring configuration diagram when a plurality of flow rate control devices according to Embodiment 1 of the present invention are used.

FIG. 8 is a circuit diagram showing a configuration of an external circuit having a power supply circuit, an operation mode changeover switch, and an alarm lamp when the flow control device according to Embodiment 1 of the present invention is used alone.

FIG. 9 is a circuit diagram showing an example of a circuit configuration for completely closing the operation mode when an alarm output occurs in the flow control device according to the first embodiment of the present invention.

FIG. 10 is a configuration diagram illustrating a flow control device that operates with a single power supply according to Embodiment 2 of the present invention.

FIG. 11 is a circuit diagram showing a configuration of a microflow sensor and a sensor output circuit in a flow control device that operates with a single power supply according to Embodiment 2 of the present invention.

FIG. 12 is a partial circuit diagram showing a configuration of an internal circuit of a flow control device according to Embodiment 2 of the present invention.

FIG. 13 is a circuit diagram showing a configuration of an external circuit having a non-voltage contact for switching operation modes in the flow rate control device according to the second embodiment of the present invention.

FIG. 14 is a flowchart illustrating an operation of a function of invalidating an input operation from an input switch in the flow rate control device according to the second embodiment of the present invention.

FIG. 15 is a flowchart illustrating an operation of a function of giving priority to an input by an input switch in the flow rate control device according to the second embodiment of the present invention.

FIG. 16 is a circuit wiring diagram for enabling various operation modes to be forcibly set according to an alarm output state in the flow control device according to the second embodiment of the present invention.

FIG. 17 is a flowchart illustrating an operation of a function of returning a signal such as an alarm or an event to an initial state in the flow rate control device according to the second embodiment of the present invention.

FIG. 18 is a block diagram showing a configuration of a conventional flow control device.

[Explanation of symbols]

21, MFC1, MFC2, MFC3 Flow control device 25 Flow path 34 Micro flow sensor (flow detection means) 41 Solenoid valve (control valve) 54 Input switch (operation switch) 54-1 RUN switch (operation mode selection means) 55-3 OK lamp (operation mode display means) 56 segment display (operation mode display means) 57 CPU (operation mode selection means, operation mode display means, operation switch input invalidation means, output means, initial state return means, setting operation mode transition means ) 58 Connector (output means) 60 EEPROM (non-volatile memory) Q3 Open collector output transistor (output means) 115 Alarm output terminal (output means) S1 Setting switch (setting operation mode shift means) 122 External circuit (no-voltage contact) 148, 149 connector Source terminal)

Claims (11)

[Claims] 1. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. Operation mode selection means for selecting any one of the operation modes. The operation mode selection means alternately selects the two modes each time one operation switch is operated, and alternately switches the two modes. A flow control device characterized in that another mode is selected when an operation different from the selection is performed. 2. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. Operation mode selection means for selecting any one of the operation modes, and, when any one of the three modes is selected by the operation mode selection means, the three modes of lighting, extinguishing, and blinking are performed. A flow control device comprising an operation mode display means for displaying. 3. A flow control apparatus comprising: a flow path through which a fluid to be measured flows; a control valve for adjusting a flow rate of the fluid to be measured; and a flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. An operation mode selecting means for selecting any one of the operation modes; and a nonvolatile memory for storing the operation mode when any one of the operation modes is selected. . 4. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. An operation mode selecting means for selecting one of the operation modes, and storing the operation mode when a predetermined time has elapsed without switching to a new mode after selecting one of the operation modes. A flow control device comprising a non-volatile memory. 5. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. A flow control device, comprising: an operation mode selection means for selecting any one of the operation modes, wherein the operation mode selection means has a non-voltage contact input circuit for externally inputting the presence or absence of the ground potential. 6. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. And an operation mode selection means for selecting any one of the operation modes, wherein a single power supply is used as a power supply supplied from outside. 7. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. An operation mode selection means for selecting any one of the operation modes, and the operation mode selection means includes an operation switch for selecting an operation mode, and an input for externally selecting a predetermined operation mode to a non-voltage contact input circuit. Is being done,
A flow control device comprising an operation switch input invalidating means for invalidating an input operation from the operation switch. 8. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. Operation mode selection means for selecting any one of the operation modes, and the operation mode selection means includes an operation switch for selecting an operation mode, and has an external input for selecting a control mode to the non-voltage contact input circuit. And a means for temporarily shifting to the control mode and thereafter giving priority to the input of the operation switch. 9. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. A flow control device comprising: an operation mode selection unit that selects any one of the operation modes; and an output unit that outputs a signal based on a predetermined condition. 10. A flow control device comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. If there is an operation mode selection means for selecting one of the operation modes and an input for selecting the control mode from the outside to the non-voltage contact input circuit, once the control mode is entered, the signal output by the output means is initialized. A flow control device, comprising: an initial state returning unit for returning the flow rate to the initial value. 11. A flow control apparatus comprising: a flow path through which a fluid to be measured flows, a control valve for adjusting a flow rate of the fluid to be measured, and flow rate detecting means for detecting a flow rate of the fluid to be measured. From among a plurality of types of operation modes including at least a control mode for controlling the opening of the control valve so that the flow rate of the fluid to be measured detected by the detection means becomes a predetermined flow rate and a fully closed mode for fully closing the control valve. Operation mode selection means for selecting any one of the operation modes, and setting operation mode transition means for performing transition to the set operation mode based on predetermined conditions in which the selection of the operation mode is set in advance. A flow control device, comprising: