JP2001300300A - Fixative liquid getter generating no falling-off - Google Patents
Fixative liquid getter generating no falling-offInfo
- Publication number
- JP2001300300A JP2001300300A JP2000127239A JP2000127239A JP2001300300A JP 2001300300 A JP2001300300 A JP 2001300300A JP 2000127239 A JP2000127239 A JP 2000127239A JP 2000127239 A JP2000127239 A JP 2000127239A JP 2001300300 A JP2001300300 A JP 2001300300A
- Authority
- JP
- Japan
- Prior art keywords
- getter
- water glass
- liquid
- liquid getter
- falling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Abstract
Description
【０００１】[0001]
【本発明の属する技術分野】本発明は、真空容器内に塗
布するか、又はあらかじめゲッターを固着した部品を真
空容器内に固定化して、そのゲッターで、特に塗布後、
固着後の脱落がない固着性液状ゲッターに関する物であ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of coating a vacuum vessel or fixing a part to which a getter is fixed in advance in a vacuum vessel.
The present invention relates to a fixable liquid getter that does not fall off after fixation.
【０００２】[0002]
【従来の技術】ゲッターは真空容器内に塗布又はあらか
じめゲッターを固着した部品を真空容器内に固定化して
その物理的、化学的反応力によって残留ガスを吸着し、
真空度を高めるもので、さまざまなゲッターが知られて
いる。ゲッターはその動作及び材料により、バルクゲッ
ターとフラッシュゲッターに分類され、フラッシュゲッ
ターはさらに反応型、非反応型、Ｇａｓ Ｄｏｐｅｄ型
に再分類される。フラッシュゲッターは、Ｚｒ金属やア
ルカリ土類金属、アルカリ金属及びその合金が鉄やステ
ンレス、ニッケルなどのベースメタルに圧入又は圧着し
たものを使用しているか、金属粉末を有機溶剤に懸濁
し、一次結着剤としてニトロセルロースを使用したもの
や、アジ化バリウムをカオリンと水と共に懸濁したもの
を真空容器内に塗布して使用されている。2. Description of the Related Art A getter is applied in a vacuum vessel or a part to which a getter is fixed in advance is fixed in the vacuum vessel, and the residual gas is absorbed by its physical and chemical reaction force.
Various getters are known to increase the degree of vacuum. Getters are classified into bulk getters and flash getters according to their operation and materials, and flash getters are further classified into reactive, non-reactive, and gas doped types. Flash getters use Zr metal, alkaline earth metals, alkali metals and their alloys pressed or pressed into a base metal such as iron, stainless steel, nickel, etc., or suspend metal powder in an organic solvent and perform primary bonding. A material using nitrocellulose as a dressing material or a material obtained by suspending barium azide with kaolin and water are applied to a vacuum container and used.
【０００３】[0003]
【本発明が解決しようとする課題】液状ゲッターは真空
装置内に塗布するが、ゲッター自体を過熱し脱ガスする
際に剥離したり、真空装置完成品を取り扱う際に、わず
かな衝撃、振動によってゲッターが脱落し、真空装置内
を汚染するという欠点があった。このようなゲッター剥
離、真空装置内汚染の問題に取り組んで、接触ゲッター
を改良技術したのが、特開平８−１５５２９３号公報に
見られる。ここでは、三次元網目構造を有する多孔質金
属体に、Ｚｒ、Ｖ、Ｎｂ、Ｔｉ、Ｍｎ及びＡｌの中から
選ばれるいずれか1種以上の金属粉末もしくは合金粉末
を担持させリボン状ゲッターとして用いている。また、
特開平６−２００６号公報には、金属粉末または金属化
合物粉末に水溶性フェノール樹脂を加えて粘度が５０〜
１０００ｃＰのスラリーを作成し、該スラリーをシート
状の発泡樹脂に塗布含浸させ、次いでスラリーを塗着さ
せたシートを乾燥させ、焼成することにより、発泡樹脂
を消失させ、スラリー中の金属を燒結させて、ゲッター
を得ることが記載されている。本発明の課題は、従来の
液状のゲッターが抱える問題を解決することであり、と
くに粉末ゲッター材を強固に固着させたゲッターを提供
する。The liquid getter is applied in a vacuum apparatus. However, when the getter is heated and degassed when it is degassed, or when the vacuum apparatus is finished, a slight shock or vibration is applied. There is a disadvantage that the getter comes off and contaminates the inside of the vacuum device. Japanese Patent Application Laid-Open No. 8-155293 discloses a technique for improving the contact getter by addressing the problems of getter peeling and contamination in the vacuum apparatus. Here, a porous metal body having a three-dimensional network structure supports one or more metal powders or alloy powders selected from among Zr, V, Nb, Ti, Mn, and Al, and is used as a ribbon-shaped getter. ing. Also,
JP-A-6-2006 discloses that a water-soluble phenol resin is added to a metal powder or a metal compound powder to have a viscosity of 50 to 50.
A slurry of 1000 cP is prepared, the slurry is applied and impregnated in a sheet-like foamed resin, and then the sheet on which the slurry is applied is dried and fired to eliminate the foamed resin and to sinter the metal in the slurry. It is described that a getter is obtained. An object of the present invention is to solve the problems of conventional liquid getters, and in particular to provide a getter in which a powdered getter material is firmly fixed.
【０００４】[0004]
【課題を解決するための手段】本発明者は、ゲッター材
料とアルミノケイ酸塩鉱物を水ガラスに分散させた固着
性液状ゲッターを用いれば、ゲッターの脱落が起らない
ことを見出し、本発明を完成するに至った。とくに、Ｚ
ｒの金属粉末にカオリンを添加し、水で希釈した水ガラ
スに懸濁させた液状ゲッターを塗布、乾燥させることに
より、強固に固着させたゲッターが得られる。Means for Solving the Problems The present inventor has found that the use of a fixed liquid getter in which a getter material and an aluminosilicate mineral are dispersed in water glass does not cause the getter to fall off. It was completed. In particular, Z
By adding kaolin to the metal powder of r and applying and drying a liquid getter suspended in water glass diluted with water, a getter firmly fixed is obtained.
【０００５】[0005]
【発明の実施の形態】本発明において用いるアルミノケ
イ酸塩鉱物としては、カオリン、活性白土、クレー等が
ある。本発明において用いるアルカリ土類金属として
は、Ｃａ，Ｍｇ，Ｂａがあり、アルカリ土類金属の化合
物としては、Ｂａ（Ｎ３）２、合金としてはＢａ−Ａ
ｌ、Ｂａ−Ａｌ−Ｎｉがある。また、アルカリ金属とし
てはＮａ，アルカリ金属の化合物としてはＮａＮ３が挙
げられる。本発明において用いるＴａ，Ｔｉ，Ｚｒ，Ｔ
ｈ，Ｗ，Ｎｂ，Ｍｏ，Ｖ，Ｆｅ，Ｎｉ，Ａｌの合金粉末
としては、Ｚｒ−Ａｌ，Ｆｅ−Ｖ−Ｚｒ，Ｚｒ−Ｎｉ等
がある。本発明の実施の形態をまとめると、以下のとお
りである。 （１） ゲッター材料とアルミノケイ酸塩鉱物を水ガラ
スに分散させた固着性液状ゲッター。 （２） ゲッター材料がアルカリ土類金属、アルカリ金
属またはその化合物若しくは合金である上記１記載の固
着性液状ゲッター。 （３） ゲッター材料がＴａ，Ｔｉ，Ｚｒ，Ｔｈ，Ｗ，
Ｎｂ，Ｍｏ，Ｖ，Ｆｅ，Ｎｉ，Ａｌの金属粉末又はその
合金粉末若しくはその化合物である上記１記載の固着性
液状ゲッター。 （４） 水ガラスが｛（Ｘ２Ｏ・ｎＳｉＯ２・ｍＨ
２Ｏ）Ｘ＝Ｎａ，Ｋ，Ｌｉからなるアルカリ金属、ｎ＝
２〜３．２、ｍ＝１０〜２５｝で表わされる上記１〜上
記３の何れか一つに記載された固着性液状ゲッター。DESCRIPTION OF THE PREFERRED EMBODIMENTS Aluminosilicate minerals used in the present invention include kaolin, activated clay, clay and the like. Examples of the alkaline earth metal used in the present invention, Ca, Mg, there is Ba, as the compound of alkaline earth metals, Ba (N 3) 2, as the alloy Ba-A
1, Ba-Al-Ni. Further, Na is used as an alkali metal, and NaN 3 is used as a compound of an alkali metal. Ta, Ti, Zr, T used in the present invention
Examples of alloy powders of h, W, Nb, Mo, V, Fe, Ni, and Al include Zr-Al, Fe-V-Zr, and Zr-Ni. The embodiments of the present invention are summarized as follows. (1) A sticky liquid getter in which a getter material and an aluminosilicate mineral are dispersed in water glass. (2) The stickable liquid getter according to the above (1), wherein the getter material is an alkaline earth metal, an alkali metal or a compound or alloy thereof. (3) The getter material is Ta, Ti, Zr, Th, W,
2. The sticky liquid getter according to the above 1, which is a metal powder of Nb, Mo, V, Fe, Ni, Al, an alloy powder thereof, or a compound thereof. (4) The water glass is ｛(X 2 O · nSiO 2 · mH
2 O) X = alkali metal consisting of Na, K, Li, n =
The stickable liquid getter according to any one of the above items 1 to 3, represented by 2 to 3.2 and m = 10 to 25 °.
【０００６】[0006]
【実施例】（実施例１）ゲッター材料としてＺｒ金属粉
末２３．６重量％、アルミノケイ酸塩鉱物としてカオリ
ン４３．８重量％、水ガラスとして旧ＪＩＳ１号水ガラ
ス４．３重量％、水２８．３重量％を配合し、２５℃
で、２時間混錬して固着性液状ゲッターを得た。 （実施例２）ゲッター材料としてＺｒＡｌ粉末合金１
７．２重量％、アルミノケイ酸塩鉱物としてカオリン４
５．５重量％、水ガラスとして旧ＪＩＳ１号水ガラス
８．１重量％、水２９．３重量％を配合し、２５℃で、
２時間混錬して固着性液状ゲッターを得た。 （実施例３）ゲッター材料としてＢａ（Ｎ３）２１８．
１重量％、アルミノケイ酸塩鉱物としてカオリン９．６
重量％、水ガラスとして旧ＪＩＳ１号水ガラス１．０重
量％、水７１．３％を配合し、２５℃で、２時間混錬し
て固着性液状ゲッターを得た。比較のために、水ガラス
を除いたほかは実施例１と同様にして、液状ゲッターを
得た。(Example 1) 23.6% by weight of Zr metal powder as a getter material, 43.8% by weight of kaolin as an aluminosilicate mineral, 4.3% by weight of old JIS No. 1 water glass as water glass, and 28.0% of water. 3% by weight, 25 ℃
And kneaded for 2 hours to obtain a sticky liquid getter. (Example 2) ZrAl powder alloy 1 as a getter material
7.2% by weight, kaolin 4 as aluminosilicate mineral
5.5% by weight, as the water glass, 8.1% by weight of old JIS No. 1 water glass and 29.3% by weight of water were blended.
The mixture was kneaded for 2 hours to obtain a sticky liquid getter. (Example 3) Ba (N 3 ) 2 as a getter material 18.
1% by weight, kaolin 9.6 as aluminosilicate mineral
% Of water glass and 1.0% by weight of old JIS No. 1 water glass and 71.3% of water were mixed and kneaded at 25 ° C. for 2 hours to obtain a sticky liquid getter. For comparison, a liquid getter was obtained in the same manner as in Example 1 except that the water glass was omitted.
【０００７】[0007]
【テスト結果】３０個のゲッターを、定格電圧２５Ｖ，
ＡＣで３０分エージングした後、５０ｃｍの高さよりベ
ニヤ板（厚さ５ｍｍ）上に落下させ、１回毎（累積１０
回まで）ゲッターの剥がれ落ちの有無を確認し、比較す
る。その結果を表１に示す。[Test result] 30 getters were rated at 25V,
After aging for 30 minutes with AC, it was dropped on a plywood (thickness: 5 mm) from a height of 50 cm, and each time (cumulative 10 times)
Up to the number of times) Check if the getter has peeled off and compare. Table 1 shows the results.
【表１】 [Table 1]
【０００８】[0008]
【本発明の効果】本発明の固着性液状ゲッターは、真空
装置内に塗布した際、ゲッター自体を過熱し脱ガスする
際に剥離したり、真空装置完成品を取り扱う際に、わず
かな衝撃、振動によってゲッターが脱落し、真空装置内
を汚染したりすることがない。The adhesive liquid getter of the present invention, when applied in a vacuum device, peels off when the getter itself is overheated and degassed. The getter does not fall off due to the vibration, and the inside of the vacuum device is not contaminated.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 渡辺 義文 新潟県岩船郡荒川町羽ヶ榎 株式会社ルミ ナスジャパン荒川町工場内 (72)発明者 松垣 吉彦 大阪府大阪市北区天満３丁目３番10号 松 垣薬品工業株式会社内 (72)発明者 大形 昌広 大阪府大阪市北区天満３丁目３番10号 松 垣薬品工業株式会社内 Ｆターム(参考） 4G066 AA02B AA13C AA30C AA64C CA01 DA01 FA03 5C035 JJ11 JJ13 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Yoshifumi Watanabe Hagaeno, Arakawa-cho, Iwafune-gun, Niigata Luminous Japan Co., Ltd. Arakawacho Plant (72) Inventor Yoshihiko Matsugaki 3-chome Tenma, Kita-ku, Osaka-shi, Osaka No. 10 Inside Matsugaki Pharmaceutical Co., Ltd. (72) Inventor Masahiro Ogata 3-10-3 Tenma, Kita-ku, Osaka City, Osaka Prefecture F-term inside Matsugaki Pharmaceutical Co., Ltd. 4G066 AA02B AA13C AA30C AA64C CA01 DA01 FA03 5C035 JJ11 JJ13
Claims (4)
水ガラスに分散させた固着性液状ゲッター。1. An adhesive liquid getter in which a getter material and an aluminosilicate mineral are dispersed in water glass.
カリ金属またはその化合物若しくは合金である請求項１
記載の固着性液状ゲッター。2. The getter material is an alkaline earth metal, an alkali metal or a compound or alloy thereof.
The fixable liquid getter according to the above.
ｈ，Ｗ，Ｎｂ，Ｍｏ，Ｖ，Ｆｅ，Ｎｉ，Ａｌの金属粉末
又はその合金粉末若しくはその化合物である請求項１記
載の固着性液状ゲッター。3. The getter material is Ta, Ti, Zr, T
The stickable liquid getter according to claim 1, wherein the liquid getter is a metal powder of h, W, Nb, Mo, V, Fe, Ni, or Al, an alloy powder thereof, or a compound thereof.
Ｈ２Ｏ）Ｘ＝Ｎａ，Ｋ，Ｌｉからなるアルカリ金属、ｎ
＝２〜３．２、ｍ＝１０〜２５｝で表わされる請求項１
〜請求項３の何れか一つに記載された固着性液状ゲッタ
ー。4. The method according to claim 1, wherein the water glass is ｛(X 2 O · nSiO 2 · m
H 2 O) X = alkali metal consisting of Na, K, Li, n
= 2 to 3.2, m = 10 to 25 °.
An adhesive liquid getter according to any one of claims 1 to 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000127239A JP3491888B2 (en) | 2000-04-27 | 2000-04-27 | Sticky liquid getter without falling off |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000127239A JP3491888B2 (en) | 2000-04-27 | 2000-04-27 | Sticky liquid getter without falling off |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001300300A true JP2001300300A (en) | 2001-10-30 |
| JP3491888B2 JP3491888B2 (en) | 2004-01-26 |
Family
ID=18636870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000127239A Expired - Fee Related JP3491888B2 (en) | 2000-04-27 | 2000-04-27 | Sticky liquid getter without falling off |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3491888B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007511102A (en) * | 2003-11-12 | 2007-04-26 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | Method for adhering getter material to a surface used in an electronic device |
| US8383455B2 (en) | 2005-12-23 | 2013-02-26 | E I Du Pont De Nemours And Company | Electronic device including an organic active layer and process for forming the electronic device |
-
2000
- 2000-04-27 JP JP2000127239A patent/JP3491888B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007511102A (en) * | 2003-11-12 | 2007-04-26 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | Method for adhering getter material to a surface used in an electronic device |
| US8383455B2 (en) | 2005-12-23 | 2013-02-26 | E I Du Pont De Nemours And Company | Electronic device including an organic active layer and process for forming the electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3491888B2 (en) | 2004-01-26 |
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