JP2001286162A - Drive device utilizing electrostrictive expansion and construction material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To contrive high efficiency of a drive device itself as well as miniaturization, light-weight and energy saving thereof, and enable high speed control. SOLUTION: An electroristrictive expansion and contraction polymer Q based on an elastomer dielectric between suitable electrodes capable of adjusting its shape by the fluctuation of application voltage and current is utilized as the operation member of the drive device. The drive device is a valve device by two-way valve, three-way valve, a five-way valve or the like for regulating the flow velocity and flow rate and the like of fluid and changing over a flow passage, and an actuator or the like for generating the power of linear movement, rotational movement, linear rotational composite movement, curvature movement or the like by a drive element utilizing the electrorestrictive expansion and contraction polymer Q. Furthermore, the electrorestrictive expansion and contraction polymer Q capable of being transformed into fluctuation voltage and current by the change of the shape of fluctuating itself can be utilized as the transforming element of the drive device for transforming mechanical energy into electric energy.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a valve device, a pump device, an actuator device, a sensor device, a power generation device, and an electrostrictive material having physical properties capable of converting electrical energy and mechanical energy between normal and reverse. The present invention relates to a driving device using an electrostrictive elastic material characterized by being used for a mold driving device and the like.

[0002]

2. Description of the Related Art Conventionally, a motor as an electric drive source is generally used as a device for converting an electric signal into a mechanical movement such as a straight line or a rotation. That is, a current is supplied to a coil constituting a motor, and electric energy is converted into rotational force to obtain necessary torque and momentum. Other devices that convert an electric signal into mechanical motion such as a straight line or a rotation include, for example, a valve device, a pump device, and an actuator device, and most of them use an electromagnetic valve of an electromagnetic solenoid type.

[0003]

However, when a conventional motor-based device is used to obtain a mechanical motion such as a straight line or a rotation from an electric signal, it is necessary to efficiently obtain a high torque in order to obtain a high torque. The size or current consumption is increased, so that complicated control devices and the like must be provided. In addition, a valve device, a pump device, an actuator device, and the like using a conventional electromagnetic solenoid type electromagnetic valve have a large portion occupied by a heavy electromagnetic solenoid, which is not suitable for miniaturization, weight reduction, and the like. . In addition, conventionally, when a plurality of solenoid valves are used at the same time, for example, as in a valve device, each of the plurality of solenoid valves must be individually controlled. However, there were problems such as difficulty in conversion.

Accordingly, the present invention has been made in view of the above-mentioned various existing circumstances, and can achieve high efficiency at the same time as miniaturization, weight reduction and energy saving of the apparatus itself, and high-speed control. Valve device, pump device,
Actuator device, vibration type drive device, sensor device,
It is an object of the present invention to provide a driving device using an electrostrictive elastic member that can be configured as a power generation device or the like.

[0005]

In order to solve the above-mentioned problems, the present invention is based on an elastomer dielectric between matching electrodes whose shape can be adjusted by fluctuations in applied voltage and current. As the electrostrictive elastic member, for example, an electrostrictive elastic polymer Q based on an elastomer dielectric is used as an operating member of the driving device. The driving device uses a two-way valve, a three-way valve, a five-way valve, or the like, which adjusts the flow velocity and flow rate of the fluid and switches the flow path, using the electrostrictive elastic member (Q) as a valve body or a movable part supporting the valve body. The valve device 1 can be used. The driving device moves the electrostrictive elastic member (Q) to the movable portion 3 that supports the diaphragm valve 34 or the diaphragm valve 44.
The diaphragm type pump device 31 which sends out the liquid and gas used as 5 can be used. The driving device can be the actuator device 51 that generates power such as linear motion, rotary motion, linear-rotation combined motion, and bending motion using the electrostrictive elastic member (Q) as a driving element such as a motor or a cylinder. The driving device includes a valve body of the valve device 1, a diaphragm valve of the pump device 31, and a piston cylinder of the actuator devices 51 and 100 via the fluid substance 103 that is pressurized and depressurized by the bending motion of the electrostrictive elastic member (Q). 81, 91 or bellows 101, 101a, 10
Power can be generated for a driving element such as 1b. The driving device uses the electrostrictive elastic member (Q) to move the elastic vibrator (30).
1) Either itself or as a piezoelectric element bonded to the elastic vibrating body (301), the elastic vibrating body (30
Vibration type in which a moving body (302) pressed and brought into contact with an elastic vibrating body (301) with the vibration energy is continuously linearly and rotationally moved by generating a surface vibration wave due to bending traveling wave by vibrating 1). The driving device 300 can be used. Uses electrostrictive stretchable polymer Q based on elastomer dielectric, for example, as an electrostrictive stretchable material that can be converted to voltage and current that fluctuates due to changes in its shape, as a conversion element of a drive device that converts mechanical energy into electrical energy. It can be done. The driving device may be any of various sensor devices such as a pressure sensor, a force sensor, a speed sensor, an acceleration sensor, an angle sensor, an angular acceleration sensor, and an angular velocity sensor using the electrostrictive elastic member (Q) as a sensor element. The driving device can be a power generation device using the electrostrictive elastic member (Q) as a power generation element. The drive is
A shutter device using an electrostrictive elastic member (Q) that changes light transmittance based on a change in film thickness due to expansion and contraction of itself can be provided.

In the driving device using the electrostrictive elastic member according to the present invention, the electrostrictive elastic polymer Q used as the electrostrictive elastic member used in the driving device is applied with an applied voltage. Displacement of the Coulomb force acting between the molecules due to fluctuations in the current to adjust the shape of itself, or displacement of the Coulomb force acting between the molecules due to the change in the shape of the body, fluctuating voltage,
By converting it into a fluctuating current, conversion between mechanical energy and electrical energy can be performed at high efficiency and at high speed. The valve device 1 operates itself with high efficiency and high speed by energizing the valve body or the movable part supporting the valve body with the electrostrictive expansion / contraction polymer Q, and easily performs the valve opening and closing operations. The diaphragm type pump device 31 is provided with a diaphragm valve 34 or a diaphragm valve 4 made of an electrostrictive polymer Q.
By operating the movable portion 35 supporting the motor 4 at a high efficiency and at a high speed, the pump itself can be easily operated. The actuator device 51 becomes highly efficient and high-speed in linear motion, rotational motion, linear-rotation combined motion, bending motion, etc. with respect to the motor and cylinder itself by energizing the electrostrictive elastic polymer Q constituting a driving element such as a motor and a cylinder. Give power. The valve body of the valve device 1, the diaphragm valve of the pump device 31, the piston cylinders 81, 91 or the bellows 101, 101 of the actuator devices 51, 100.
The driving elements such as a and 101b generate high-efficiency and high-speed power such as expansion and contraction and bending motion through the fluid substance 103 that is pressurized and depressurized by the bending motion of the electrostrictive elastic member (Q). The life of the electrode is prevented from being shortened due to friction with other members when the electrode is curved. The vibration-type driving device 300 excites a traveling wave of bending vibration of an arbitrary wavelength by applying positive and negative voltages and currents having phases shifted from each other to the elastic vibrator (301) by the electrostrictive elastic polymer Q. (301)
The moving body (302) brought into pressure contact with the object is continuously linearly or rotationally moved. The sensor device displays an accurate measurement value as an electric signal by a mechanical reaction given to the sensor element by the electrostrictive elastic polymer Q. The power generation device efficiently generates power by applying mechanical energy to a power generation element made of the electrostrictive elastic polymer Q. The shutter device changes its own light transmittance based on a change in film thickness caused by expansion and contraction of the electrostrictive expansion and contraction polymer Q, and changes light intensity and illuminance from a subject such as a light source in a short time and continuously.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. Reference numeral 1 in the first embodiment shown in FIGS. The valve device is a two-way valve or a three-way valve for adjusting and switching the flow path. A film-type electrostrictive member such as a film-type electro-mechanical member is applied to a valve element or a movable portion supporting the valve element to be described later. The strain elastic polymer Q is used. Electrostrictive elastic polymer Q adjusts its own shape by displacing Coulomb force acting between molecules due to applied voltage and fluctuation of current, for example, contraction of thickness, expansion of area due to elongation,
This is a so-called electrostrictive polymer artificial muscle (EPAM) based on an elastomer dielectric, which enables reduction. The film thickness of the film-type electrostrictive stretchable polymer Q can be formed from a millimeter unit to a micron unit.

As shown in FIG. 1, the electrostrictive elastic polymer Q is formed on both sides of a flat elastomer polymer EP.
For example, it is formed by sandwiching a thin film-shaped two matching electrodes R by heat fusion of a carbon particle material such as graphite or carbon black, or vacuum evaporation of a metal, and by applying a potential difference between the matching electrodes R, the elastomer is formed. The polymer EP itself is thinly stretched together with the compatible electrode R, and its thickness shrinks (see FIG. 1 (b)). When the potential difference is removed, the polymer EP returns to its original shape (see FIG. 1 (a)).
Specifically, the use of silicon rubber and acrylic enables a strain rate of 100% or more, a maximum operating pressure of 2 to 8 MPa, and a maximum energy density of 3.4 J / cc, a fast response time of, for example, 1 ms or less, and a voltage efficiency. Also have high numbers,
The operating temperature range is, for example, −40 to 80 ° C., for example, 1
Those having a service life of 100 million times or more are obtained. In addition to the general category of polymers, in addition to the electrostrictive stretchable polymer Q, there are piezo polymers, shape memory polymers, polymer-based air gap electrostatic devices, and the like. Moreover, by using an elastomer, it is possible to form a material whose performance is similar to natural muscle.

The operating principle of the electrostrictive stretchable polymer Q will be described below. The operating pressure is P, the electric field is E, the dielectric constant is ε, the dielectric constant of the empty space is ε ₀ , the voltage is V, and the thickness of the polymer is Assuming that z is z, P = ε · ε ₀ · E ² = ε · ε ₀
(V / z) ² At this time, pressure may increase due to electrode adaptation, which in turn causes the attraction between the charged electrodes and the charge to each electrode to couple into the effective pressure perpendicular to the plane of the film. Both forces are allowed, as well as the forces to be distributed on. In the small range of strain without boundary conditions, the strain s of the polymer thickness s
S = P / Y = −ε · ε ₀ · (V
/ Z) ² / Y. This equation assumes that the elastomer is an ideal rubber, i.e., non-reducible, and has a Poisson's ratio of 0.5. Energy density e _a
Is that e _a = Y · s ² = (ε, ε ₀ ) ² · (V / z) ⁴ /
It becomes Y. On the other hand, in the common non-linear module elastomer when strain is high, a more general expression in which elastic energy density of a material is related to the working pressure as _{P, e a = (1/2)} · P · ln [1 + s _z ]. From the above equations, the ideal electrostrictive polymer artificial muscle having the maximum energy density has a high dielectric constant, a high breaking strength (V / z), and a relatively low elastic modulus Y.

As shown in FIG. 2, a valve device 1 having a two-way valve structure includes a fluid port A and a fluid port B inside a valve housing 2.
A cylindrical projection-shaped valve seat 4 is provided in the lower part of the valve chamber 3 which branches off, and a cylindrical or rectangular supporting recess 5 is formed in the upper part of the valve housing 2 so as to face the valve seat 4. is there. Between the valve seat 4 and the support recess 5, a sealing material 6 is stuck on one end surface side, for example, a circular or square film-shaped electrostriction having an expansion stroke in the thickness direction of about 1.5 mm or more. The elastic polymer Q is sandwiched. Then, in order to control the plurality of valve devices 1 collectively, the plurality of valve devices 1 are themselves formed, for example, as a manifold structure, and the adaptation of the electrostrictive elastic polymer Q of each valve device 1 via a high voltage conversion circuit such as a booster circuit. Electrode R
For example, when an input voltage DC12V or DC24V or the like is applied thereto, the electrostrictive stretchable polymer Q is thinly stretched and the thickness is contracted and deformed. By doing so, the electrostrictive elastic polymer Q, which is tightly plugged in contact with the valve seat 4 via the sealing material 6, is separated from the valve seat 4 and opened, and the flow path between the fluid port A and the fluid port B is opened. Is formed by each of the valve devices 1.

FIG. 3 shows another example of a valve device 1 having a two-way valve structure. A fluid port A and a fluid port B are provided in a valve housing 2.
An annular valve seat 7 protrudes inward from the inner surface of the peripheral wall in the circular valve chamber 3 which is branched into two, and an electrostrictive elastic polymer Q having a circular flat cross-sectional shape is a rod-shaped fixing seat. It is supported from the bottom inside the valve chamber 3 in the valve housing 2 through the valve housing 8.
The flow path between the fluid port A and the fluid port B is switched by forming the electrostrictive elastic polymer Q in a state where the peripheral side surface thereof is separated from the valve seat 7 in the valve chamber 3. It is in a state. Here, by applying a voltage and a current to the compatible electrode R of the electrostrictive elastic polymer Q, the electrostrictive elastic polymer Q is thinly stretched in the radial direction, so that the peripheral side surface of the electrostrictive elastic polymer Q contacts the valve seat 7. The flow path between the fluid port A and the fluid port B is brought into close contact therewith so as to be sealed.

FIG. 4 shows a valve device 1 having a three-way valve structure, in which a valve housing 2 is provided to face upward in a cylindrical inner wall-shaped valve chamber 3 branched into a fluid port A and a fluid port B. A cylindrical projecting first valve seat 11 and a ring-shaped projecting second valve seat 12 provided downward in a valve chamber 3 branched into a fluid port B and a fluid port C are arranged to face each other. is there. In addition, a poppet with a guide made of an elastic body is provided at the lower end of a pressing operation rod portion 13 which is inserted through a circular opening-shaped guide portion 17 and is slidably arranged vertically above the second valve seat 12 communicating with the fluid port C. The valve body 14 is mounted horizontally. This poppet valve body 14 is connected to the first valve seat 11 and the second valve seat 11.
When the poppet valve element 14 is locked to the first valve seat 11, the fluid port B is sealed and the fluid port A and the fluid port C are closed. So that a flow path between them is formed (FIG. 4B)
reference). On the other hand, when the poppet valve element 14 is locked to the second valve seat 12, the fluid port C is sealed and a flow path between the fluid port A and the fluid port B is formed (FIG. 4). (See (c)) to constitute a switching valve mechanism. Further, the poppet valve body 1 with a guide is operated by, for example, an operation spring 16 wound around the outer circumference of the first valve seat 11.
4 is urged to be locked to the second valve seat 12 side.

On the other hand, at the upper end of the rod 13 for pressing operation, a circular film-shaped wear-resistant material 18 which can be expanded and contracted is provided. Attach the film type electrostrictive stretchable polymer Q. Further, the poppet valve element 14 is disposed above the guide portion 17 of the valve housing 2 on the side of the support recess 15 formed in a circular shape having a diameter larger than the inner diameter of the guide portion 17.
The upper surface of the pressing operation rod portion 13 is pressed against the electrostrictive elastic polymer Q so that the pressing member 13 is locked to the first valve seat 11 side against the expanding elastic force of the operation spring 16. At this time, as shown in the partial enlarged view of FIG.
The electrostrictive stretchable polymer Q is formed so that only the outer peripheral edge of the compatible electrode R closes the support concave portion 15A side upper edge of the valve housing 2 and the support concave portion 15A, and has the same center as the support concave portion 15A. A support recess 15B having a circular hollow shape and having a diameter is sandwiched by a lower edge of a lid 19 formed oppositely, and an electrostrictive stretchable polymer Q is formed in a cylindrical space formed by opposed joining of the support recess 15A and the support recess 15B. Can be flexibly deformed together with the compatible electrode R.

A voltage is applied to a suitable electrode R of the electrostrictive elastic polymer Q,
When an electric current is applied, the electrostrictive elastic polymer Q is thinly stretched and the thickness is contracted and deformed, whereby the entire surface is curved and deformed in an upward arc shape, and the pressing operation rod portion 13 is lifted. At first, the poppet valve element 14 which comes into contact with the first valve seat 11 and is sealed off is separated from the first valve seat 11, and the poppet valve element 14 is entrusted to the second spring by the expansion spring force of the operation spring 16. It is pressed and locked to the seat 12 side to seal the fluid port C and form a flow path between the fluid port A and the fluid port B (see FIG. 4A). On the other hand, when the corresponding electrode R of the electrostrictive elastic polymer Q is turned off, the electrostrictive elastic polymer Q returns to the original shape and is pressed.
3 is pushed down against the expanding pressure of the operation spring 16. Then, the poppet valve element 14 is pressed against the first valve seat 11 and locked, whereby the fluid port B is sealed and a flow path between the fluid port A and the fluid port C is formed (FIG. 4 ( b)).

FIG. 5 shows another example of a valve device 1 having a three-way valve structure. A fluid port A and a fluid port B are provided in a valve housing 2.
And a slightly longer long cylindrical projection 21 provided upwardly in the valve chamber 3 branched into a fluid port B and a short cylinder type provided downwardly in the valve chamber 3 branched into the fluid port C. The protruding portions 22 are disposed so as to face each other, and the first cylindrical protruding portion 21 and the short cylindrical protruding portion 22 each have an annular first inner peripheral wall.
The valve seat 23 and the second valve seat 24 protrude inward. A switching valve 25 formed by connecting a large-diameter cylindrical lower electrostrictive elastic polymer Q1 and a small-diameter cylindrical upper electrostrictive elastic polymer Q2 in a state of being overlapped in two stages along the longitudinal direction.
Is supported upright from the bottom of the valve chamber 3 in the valve housing 2 via an elongated rod-shaped fixing seat 28.

The lower electrostrictive elastic polymer Q1 and the upper electrostrictive elastic polymer Q2 are connected to one of the compatible electrodes R
By applying a voltage and a current only to one another, they operate in opposite directions so that if one expands, the other contracts. For example, by applying a voltage and a current to the matching electrode R of only the lower electrostrictive elastic polymer Q1 of the electrostrictive elastic polymers Q1 and Q2, the peripheral surface of the lower electrostrictive elastic polymer Q1 has a first valve. The upper electrostrictive stretchable polymer Q2 in the non-energized state is joined to the seat 23 to form a tightly plugged state.
By being in an open state separated from the valve seat 24, the fluid port A is sealed and the flow path between the fluid port B and the fluid port C can be switched to an open state. On the other hand, the compatible electrode R consisting of only the upper electrostrictive elastic polymer Q2
By applying a voltage and current to the upper electrostrictive elastic polymer Q2, the peripheral side surface of the upper electrostrictive elastic polymer Q2 is joined to the second valve seat 24 to be in a tightly closed state, and the lower electrostrictive elastic polymer Q1 in the non-energized state is closed by itself. When the side face is in an open state separated from the first valve seat 23, the fluid port C is sealed and the flow path between the fluid port A and the fluid port B can be switched to an open state. .

In the present embodiment, an electrostrictive polymer Q based on an elastomer dielectric is used for the valve element or the movable part supporting the valve element of the valve device 1 having a two-way valve or a three-way valve structure. However, although illustration is omitted as another configuration, the present invention can be used for a multi-branch valve such as a five-way valve, a six-way valve, and the like.

FIGS. 6, 7 and 8 show a second embodiment. In the second embodiment, the shape of the device itself is changed by the change in applied voltage and current. Electrostrictive stretchable polymer Q based on tunable elastomeric dielectric
May be formed as the diaphragm valve 34 of the diaphragm pump device 31 for sending out a liquid, a gas, or the like (see FIG. 6), or as a movable portion that supports the diaphragm valve 34 of the diaphragm pump device 31. The diaphragm valve 34 of the diaphragm pump device is used to drive the diaphragm valve 34 indirectly by utilizing the pressure of a viscous fluid or the like (see FIG. 7). (See FIG. 8). It should be noted that a bass speaker can be constructed by applying the function of the diaphragm pump device 31, or can be used as other drive devices such as a valve device, an actuator device, and the like.

That is, as shown in FIG. 6, when the diaphragm valve 34 of the diaphragm type pump device 31 is integrally formed of the electrostrictive expansion / contraction polymer Q, for example, a circular membrane is provided in the middle of a hollow cylindrical pump housing 32. A diaphragm valve 34 made of an electrostrictive elastic polymer Q is stretched so that the inside of the pump housing 32 is divided into a first chamber 33A on the left side and a second chamber 33B on the right side.
4 is supported on the inner wall surface on the second chamber 33B side in the pump housing 32 via the return spring 35. And
A suction port 3 arranged in parallel with and opposed to a first chamber 33A side in a pump housing 32 along a diaphragm valve 34 stretched.
6 and a discharge port 37, and the suction port 36 side is provided with a tapered stepped portion 36A whose diameter is reduced from the inside of the pump housing 32 to the outside of the pump housing 32, and this is provided with a spherical suction valve body. 3
8, and the outlet 37 side has a tapered stepped portion 37A whose diameter increases from the inside of the pump housing 32 to the outside of the pump housing 32.
, And a spherical discharge valve body 39 is disposed thereon.

When a current and a voltage are applied to the matching electrodes R on both sides of the diaphragm valve 34 made of the electrostrictive elastic polymer Q, the diaphragm valve 34 reciprocates right and left between the two chambers 33A and 33B. At this time, when the first chamber 33A is contracted by the diaphragm valve 34 to be in a pressurized state, the suction port 36 is closed by the suction valve body 38 and the discharge port 37 is closed.
The side is opened by pressing the discharge valve body 39 outward, and the liquid and gas retained in the first chamber 33A are discharged from the discharge port 37 to the outside of the pump housing 32. On the other hand, when the first chamber 33A is expanded and decompressed by the diaphragm valve 34, the suction port 36 is opened by drawing the suction valve body 38 inward, and the discharge port 37 side is opened with the discharge valve body 39 inside. To the first chamber 33 through the suction port 36.
Liquid and gas are sucked into A, and the same operation is repeated periodically.

On the other hand, as shown in FIG. 7, when the movable portion supporting the diaphragm valve 44 is formed integrally with the electrostrictive expansion / contraction polymer, for example, a circular film-like A diaphragm valve 44 made of a flexible metal thin film is stretched so that the inside of the pump housing 32 is divided into a first chamber 33A on the left side and a second chamber 33B on the right side. Electrostrictive elastic polymer Q whose center is fixed to the inner wall surface on the second chamber 33B side in the pump housing via a return spring 35
It is supported by the movable part 45 formed by. The movable part 45 is the second with the return spring 35 built-in.
It is attached to the inner wall surface of the room 33B. And the pump housing 32
Communication passage 46 having a narrow width from the first chamber 33A side to the side.
A suction port 36 and a discharge port 37 are disposed on the upper and lower sides of the communication passage 46 so as to face each other.
A tapered stepped portion 36A whose diameter is reduced from the inside toward the outside of the pump housing 32 is provided, and a spherical suction valve body 38 is arranged on the stepped portion 36A. 32, a tapered stepped portion 37A whose diameter is increased toward the outside is provided with a spherical discharge valve body 39.

By applying a current and a voltage to the matching electrode R of the movable part 45 made of the electrostrictive elastic polymer Q, the movable part 4
The diaphragm valve 44 reciprocally bends left and right between the two chambers by periodically repeating a state where the diaphragm 5 is stretched thin and the thickness is contracted and deformed, and a state where the diaphragm 5 is restored to the original shape. At this time, the first chamber 3 is controlled by the diaphragm valve 44.
When 3A is reduced to a pressurized state, the suction port 36 side is closed by the suction valve body 38, and the discharge port 37 side is opened by pressing the discharge valve body 39 to the outside. The liquid and gas remaining in the one chamber 33A are discharged to the outside of the pump housing 32. On the other hand, when the first chamber 33A is expanded and decompressed by the diaphragm valve 44, the suction port 36 is opened by drawing the suction valve body 38 inward, and the discharge port 37 side is opened with the discharge valve body 39 inside. The liquid and the gas are sucked into the first chamber 33A from the suction port 36.

FIG. 8 shows a diaphragm-type pump device 31 which is used as a driving diaphragm valve 44 for indirectly driving the diaphragm valve using the pressure of a viscous fluid or the like. That is, the pump housing 3 in which the diaphragm type pump device 31 is formed in, for example, a circular box shape.
2 is a cover 47 having an arc-shaped depression formed in the center on the opening side.
The suction port 36 and the discharge port 37 are disposed on the side wall of the pump housing 32 so as to face each other.
On the side, there is provided a tapered stepped portion 36A whose diameter is reduced from the inside of the pump housing 32 toward the outside of the pump housing 32, and a spherical suction valve body 38 is disposed on the stepped portion 36A. 3
2 A tapered stepped portion 37A whose diameter increases from the inside toward the outside of the pump housing 32 is provided with a spherical discharge valve body 39.
Is arranged. A rod-shaped guide portion 4 is provided between the joint between the opening edge of the pump housing 32 and the opening edge of the lid 47.
4A is protrudingly provided at the center of the disc-shaped operating valve portion 44B, and a doughnut-shaped flexible film member 44C is provided on the peripheral portion of the operating valve portion 44B.
The flexible membrane member 44C of the diaphragm valve 44, which is provided continuously, is clamped in a state where only the flexible membrane member 44C is slackened, and the guide portion 44A is disposed in a state of being in contact with the center of the bottom inside the pump housing 32. Further, a return spring 35 is wound around the guide portion 44A, and both ends of the return spring 35 are fixed to the operation valve portion 44B and the inner bottom portion of the pump housing 32, respectively.

The electrostrictive elastic polymer Q, together with the flexible membrane member 44C of the diaphragm valve 44, is applied only to the outer peripheral edge of the pump housing 3 excluding the portion where the compatible electrode R is attached.
2 is fixed between the opening edge of the lid 2 and the opening edge of the lid 47, and the electrostrictive elastic polymer Q is applied to the compatible electrode R in a cylindrical space formed between the diaphragm valve 44 and the lid 47.
In addition, it can be flexibly deformed. Therefore, a first chamber 33A is formed between the inner bottom of the pump housing 32 and the diaphragm valve 44, and a second chamber 33B is formed between the diaphragm valve 44 and the electrostrictive elastic polymer Q,
A third chamber 33C is provided between the electrostrictive polymer Q and the lid 47.
Is formed. The second chamber 33B and the third chamber 33C are filled with, for example, a viscous fluid, and the third chamber 33C is brought into a pressurized state by applying a current to the appropriate electrode R to bend the electrostrictive polymer Q itself. Further, the diaphragm valve 44 is moved toward the lid portion 47 against the restoring force of the return spring 35 by setting the second chamber 33B in a reduced pressure state. On the other hand, the electrostrictive elastic polymer Q itself is returned to a planar shape by turning off the compatible electrode R, and
By setting the chamber 33C in a reduced pressure state and the second chamber 33B in a pressurized state, the diaphragm valve 44 is moved toward the bottom inside the pump housing 32 by the restoring force of the return spring 35.

An electric current is applied to a suitable electrode R of the electrostrictive elastic polymer Q,
By applying a voltage, the state in which the electrostrictive elastic polymer Q is thinly stretched and curved toward the concave side of the lid portion 47 and the state in which it has returned to the original planar shape are periodically repeated.
Following this, the depressurized state and the pressurized state are alternately repeated in each of the second chamber 33B and the third chamber 33C, and the diaphragm valve 44 is moved to the lid 4 against the stability of the return spring 35.
7 or by the return force of the return spring 35 toward the bottom inside the pump housing 32. At this time, as shown in FIG. 8A, when the diaphragm valve 44 moves toward the inner bottom side of the pump housing 32 and the first chamber 33A is reduced to a pressurized state, the suction port 3
The side 6 is closed by a suction valve body 38, and the discharge port 37 side is opened by pressing the discharge valve body 39 outward, and the liquid and gas remaining in the first chamber 33 </ b> A from this discharge port 37 are removed. It is discharged to the outside of the pump housing 32. On the other hand, as shown in FIG. 8B, when the first chamber 33A is expanded by the diaphragm valve 44 to be in a decompressed state, the suction port 36 side is opened by drawing the suction valve body 38 inward, and the discharge port is opened. On the 37th side, the discharge valve body 39 is drawn inward and closed, and liquid and gas are sucked from the suction port 36 into the first chamber 33A.

FIGS. 9 to 21 show a third embodiment. In the third embodiment,
An electrostrictive stretchable polymer Q based on an elastomeric dielectric whose shape can be adjusted by fluctuations in applied voltage and current,
For example, it is used as a driving element of an actuator device 51 for generating power of a reciprocating linear motion of a motor, a cylinder or the like. Although not shown in the drawings, the electrostrictive stretchable polymer Q may be used as an operating member of the actuator device 51 for generating power such as reciprocating rotation, combined linear rotation and reciprocating bending. Of course. Further, it is also possible to configure a bass speaker by applying the operation of the actuator device 51, or to use it as another drive device such as a valve device or a pump device.

That is, as shown in FIG. 9, as a bimorph type actuator device 51, for example, the negative electrode side of the compatible electrode R
An electrostrictive elastic polymer Q having an electrode sandwich structure is formed by sandwiching a suitable electrode R, for example, a positive electrode side on both end surfaces thereof, while sandwiching the electrode Q in a sandwich shape by Q2.
One end of each of the electrostrictive elastic polymers Q1 and Q2 is attached to a plate-like base portion 52, and the other end of each of the electrostrictive elastic polymers Q1 and Q2 is formed in a circular dish shape for taking out the force uniformly. One end of the rod 53 is attached via a frame 54, and the distal end of the rod 53 is supported by a suitable plate-shaped support portion 55. For example, if the rod 53 is oriented in the horizontal direction, it may be in one of the up and down directions. Alternatively, if the rod 53 is facing upward, an operation of tilting in any of the left, right, front and rear directions can be performed. The outer peripheral edges of the base portion 52 and the support portion 55 are connected to each other by an expandable and contractible tubular bellows portion 56 which also serves as a protective cover, thereby covering the electrostrictive elastic polymers Q1, Q2 and the like. If a voltage or current is applied between the center negative pole side and the upper or lower, left or right plus pole side of the compatible electrode R, the electrostrictive stretchable polymers Q1, Q
Either side of 2 expands, the entire electrostrictive elastic polymer Q is curved, and the bellows portion 56 also deforms and the rod 53 tilts while being supported by the support portion 55.
On the other hand, when the conduction to the compatible electrode R is removed, the electrostrictive elastic polymer Q returns to the original planar shape and returns the rod 53 to the original state. In this way, the bimorph-type actuator device 51 that is small and lightweight can be easily formed.

FIGS. 10 and 11 show the actuator device 5.
As another example, a cylinder telescopic structure is shown. That is, as shown in FIG. 10, a bottomed inner cylindrical member 61 and an outer cylindrical member 62 having different diameters from each other,
A plurality of rolling rollers 63 and 6 fitted on the inner circumference of the outer cylindrical member 62 on the opening end side and the outer circumference of the inner cylindrical member 61 on the opening end side, respectively.
4, they are coaxially inserted through and arranged so as to be able to expand and contract with each other. Then, the inner cylindrical member 61
A cylindrical or spiral electrostrictive stretchable polymer Q is internally provided as an actuator portion, and both open ends of the actuator portion are fixed to the inner bottom portions of the inner tubular member 61 and the outer tubular member 62, respectively. The bottom of the inner tubular member 61 is formed with a flange portion 65 whose diameter is increased outward. One portion of the flange portion 65 is adapted to abut on the tip of the opening edge of the outer tubular member 62 and lock it. A stopper pin 66 is attached. In the center of the bottom of the inner cylindrical member 61, a small hole 6 for introducing a wiring for energizing the actuator portion and removing air is provided.
7 is provided.

When a voltage or a current is applied to the compatible electrode R, the actuator portion made of the electrostrictive polymer Q extends in the axial direction of the cylinder, and slides in a direction to separate the inner cylindrical member 61 and the outer cylindrical member 62 from each other. (FIG. 10 (a)
reference). On the other hand, when the electric current to the compatible electrode R is removed, the actuator portion made of the electrostrictive elastic polymer Q contracts in the cylinder axis direction, and slides the inner tubular member 61 and the outer tubular member 62 in a direction of approaching each other ( FIG. 10 (b)). In this way, the compact and lightweight cylinder type actuator device 51 can be easily formed.

As shown in FIG. 11, an outward annular projection 71 is formed on the outer periphery of the open end of the inner cylindrical member 61, and an inward annular projection 72 is formed on the inner periphery of the open end of the outer cylindrical member 62. The plurality of rolling rollers 63 formed on the outer periphery of the outward annular projection 71 and the plurality of rolling rollers 64 fitted on the inner periphery of the inward annular projection 72 are slidable with each other. The two cylindrical members 61 and 62 are coaxially inserted and disposed, and an outward annular projection 71 and an inward annular projection are provided separately from the actuator portion made of the electrostrictive elastic polymer Q disposed inside the inner cylindrical member 61. A cylindrical electrostrictive elastic polymer Q as a second actuator portion is provided in an annular space formed between the electrostrictive polymer Q and the second actuator portion. Further, the flange portion 65 on the bottom side of the inner tubular member 61 has both tubular members 61, 6.
A rod-shaped guide member 73 having a length corresponding to the slide stroke between the two and having a large-diameter stopper head 73A at the end is attached, and this guide member 73 is an outwardly extending annular projection of the outer cylindrical member 62. The stopper head 73 </ b> A is inserted into a through hole 74 formed on the outside of the base 71, and the stopper head 73 </ b> A is locked in the through hole 74 when the two cylindrical members 61 and 62 move in the separating direction. These electrostrictive stretchable polymers Q are opposite to each other so that if one expands by applying a voltage and a current to the matching electrode R of one electrostrictive stretchable polymer Q, the other electrostrictive stretchable polymer Q contracts. It works.

When a voltage and a current are applied to the matching electrode R of the inner actuator portion by the electrostrictive elastic polymer Q, the inner actuator portion itself extends in the cylinder axis direction,
The outer actuator portion made of the electrostrictive elastic polymer Q in a non-energized state contracts in the coaxial direction, and slides the inner tubular member 61 and the outer tubular member 62 in a direction to separate them from each other (FIG. 11A). reference). On the other hand, when a voltage and a current are applied to the corresponding electrode R of the outer actuator portion by the electrostrictive elastic polymer Q, and at the same time, the energization to the corresponding electrode R of the inner actuator portion is removed, the inner actuator portion contracts in the cylinder axis direction. On the other hand, the outer actuator part extends in the cylinder axis direction, and the inner cylindrical member 61
And the outer cylindrical member 62 are slid in a direction to approach each other (see FIG. 11B). The cylinder-type actuator device 5 thus reduced in size and weight.
1 can be easily formed.

FIGS. 12 and 13 show the actuator device 5.
As another example, a cylinder piston type structure is shown. That is, as shown in FIG. 12, a piston rod 82 is inserted into a bottomed cylinder 81, and a plurality of rolling rollers 83 fitted on the outer circumference of the tip of the piston rod 82 and the inner circumference on the opening end side of the cylinder 81, respectively. , 84 so as to be slidable with each other. A cylindrical or spiral electrostrictive polymer as an actuator is sandwiched between an outward flange 85 formed on the bottom side of the cylinder 81 and a disk-shaped flange 86 formed on one end of the piston rod 81. Q is externally mounted, and both open ends of the actuator portion are fixed to the flange portions 85 and 86 of the cylinder 81 and the piston rod 82, respectively. A small hole 8 is provided in the center of the flange portion 85 of the cylinder 81 for introducing wiring for energizing the actuator portion and removing air.
7 is provided.

When a voltage or a current is applied to the compatible electrode R, the actuator portion made of the electrostrictive elastic polymer Q extends in the axial direction of the cylinder, and moves the cylinder 81 and the piston rod 82, which are combined in the retractable structure, away from each other. Slide (see FIG. 12A). On the other hand, when the electric current to the compatible electrode R is removed, the actuator portion made of the electrostrictive elastic polymer Q contracts in the cylinder axis direction, and slides the cylinder 81 and the piston rod 82 in a direction of approaching each other (FIG. 12B). reference). In this way, the compact and lightweight piston cylinder type actuator device 51 can be easily formed.

As shown in FIG. 13, a piston rod 92 having a large-diameter cylindrical flange portion 92A formed substantially at the center thereof is inserted into a long bottomed cylinder 91, and the opening end side of the cylinder 91 is opened. Are formed so as to be slidable with each other via a plurality of rolling rollers 93 and 94 fitted on the inner circumference of the inward annular projection 91A and the outer circumference of the flange 92A of the piston rod 92, respectively. In the cylindrical space formed between the flange portion 92A of the piston rod 92 and the bottom of the cylinder 91, a cylindrical electrostrictive expansion / contraction polymer Q is provided as an actuator portion. Both ends of the actuator section are fixed to the bottom of the cylinder 91, respectively.

When a voltage or a current is applied to the compatible electrode R, the actuator portion made of the electrostrictive polymer Q extends in the cylinder axis direction, and pushes the piston rod 92 outward while pressing the flange portion 92A of the piston rod 92. One end is slid out (see FIG. 13A). On the other hand, when the electric current to the compatible electrode R is removed, the actuator portion made of the electrostrictive polymer Q contracts in the cylinder axis direction,
The piston rod 92 is slid and retracted into the cylinder 91 (see FIG. 13B). In this way, the compact and lightweight piston cylinder type actuator device 51 can be easily formed.

FIGS. 14 to 21 show the structure of another actuator device 100 using a contracting body using a fluid substance 103 such as an incompressible viscous fluid as another example of the actuator device. That is, as shown in FIG. 14A, one end opening side of a cylindrical extensible bellows 101 made of a flexible composite metal material such as brass, beryllium copper, phosphor bronze, stainless steel, or the like is covered with a lid 102. The bellows 101 is filled with a fluid substance 103 such as an incompressible viscous fluid, and the other end opening side of the bellows 101 is closed together with a compatible electrode R with an electrostrictive elastic polymer Q that can be flexibly deformed. It is fixed. Therefore, FIG.
As shown in (b), by applying a current to the compatible electrode R and bending the electrostrictive elastic polymer Q so as to protrude outward from the bellows 101, the electrostrictive elastic polymer Q rises in an arc shape. Bellows 101 is reduced by a stroke corresponding to the volume. On the other hand, as shown in FIG. 14A, when the compliant electrode R is turned off, the electrostrictive elastic polymer Q returns to its original flat state, and the bellows 101 returns to its original shape. By using the fluid substance 103 in this way, it is possible to prevent the life of the compatible electrode R from being shortened due to friction with other members when the compatible electrode R is curved, and to protect the compatible electrode R.

Further, as shown in FIG.
1 may be assembled in a reduced state, so that the bellows 101 is filled with a fluid substance 103 such as an incompressible viscous fluid. In this case, as shown in FIG.
The bellows 101 is curved so as to protrude inward, and the bellows 101 is extended by a stroke corresponding to the reduced volume of the electrostrictive stretchable polymer Q that is concave in an arc shape. On the other hand, as shown in FIG. 15A, when the compatible electrode R is turned off, the electrostrictive elastic polymer Q returns to the original planar state, and the bellows 101 returns to the original shape.

As shown in FIG. 16, a pair of bellows 101a,
The other open side of 1b is joined and fixed so as to sandwich the electrostrictive stretchable polymer Q, and one of the bellows 101a is filled with the fluid substance 103 in a state where the bellows 101a itself is extended. The bellows 101b may have a structure in which the bellows 101b itself is filled with a fluid substance 103 in a reduced state, and is assembled in a so-called tandem type. In this case, as shown in FIG.
Is curved toward the inside of the other bellows 101b which is reduced, the inside of the other bellows 101b is pressurized by the fluid substance 103, and the bellows 101b itself is extended, The inside of one bellows 101a which has been in an extended state is in a negative pressure state by the fluid substance 103, and the one bellows 101 itself is reduced. On the other hand, as shown in FIG. 16A, when the corresponding electrode R is turned off, the electrostrictive elastic polymer Q returns to its original flat state, one bellows 101a returns to its original expanded state, and the other bellows 101a returns to its original expanded state. Each of the bellows 101b returns to the original reduced state.

Further, as shown in FIG.
The structure may be such that the fluid substance 103 is filled inside in a state where 1 is extended, and both ends are closed and fixed with the electrostrictive elastic polymer Q, respectively. In this case, FIG.
As shown in (b), when a current is applied to the compatible electrode R, each of the electrostrictive stretchable polymers Q is bent toward the outside of the bellows 101, and the inside of the bellows 101 is in a negative pressure state by the fluid substance 103. The bellows 101 itself is reduced. On the other hand, as shown in FIG. 17A, when the corresponding electrode R is turned off, each of the electrostrictive stretchable polymers Q returns to the original plane state, and the bellows 101 returns to the original extended state.

Further, as shown in FIG.
1 itself is formed by enclosing a spring material (110, 111) as a reinforcing elastic material inside an inelastic, for example, cloth-made cylindrical film bellows, and one end opening side of the bellows 101 is closed by a lid portion 102. . A cylindrical guide portion 104 is fixed upright by welding or screwing at the center of the lid portion in the bellows 101, and a large-diameter support concave portion 105 is formed at the center of the other end opening side of the bellows 101. Recess 105
The cylinder part 106 is closed and fixed with a lid part 107 having a smaller diameter than the cylinder part 106, the guide part 104 is slidably inserted through the cylinder part 106 through a plurality of rolling rollers 108, and the bellows 101 itself Is assembled in an extended state.

The electrostrictive polymer Q is provided in the supporting recess 10.
5 is fixed so as to hermetically seal, a first chamber 109 a having a shallow bottom cavity formed between the electrostrictive elastic polymer Q and the support recess 105, a lid 107, a guide 104, and a bellows 101. And a cylindrical second chamber 109b, which is a deep-bottom cavity, formed therebetween and communicates with each other through an inner portion of the cylinder portion 106, and a fluid material such as an incompressible viscous fluid is provided inside the bellows 101. 103 are filled. The inner surface of the cover 102 inside the bellows 101, the support recess 10
A coil-shaped internal spring 110 is interposed between the five outer surfaces, and a coil-shaped external spring 111 is also interposed between the protruding extension portions protrudingly formed outside the end of the bellows 101. .
The internal spring 110 and the external spring 111 are provided to supplement the spring property of the bellows 101 itself, and may be removed if the bellows 101 alone can secure the spring property. .

In this case, as shown in FIG. 18 (b), when a current is applied to the compatible electrode R, the electrostrictive stretchable polymer Q is curved in a protruding shape toward the outside of the extended bellows 101, The first chamber 109a and the second chamber 109b inside the bellows 101 are decompressed by the fluid substance 103, and the bellows 101 itself is reduced. on the other hand,
As shown in FIG. 18A, when the compliant electrode R is turned off, the electrostrictive elastic polymer Q returns to the original flat state, and the first chamber 109a and the second chamber 109b inside the bellows 101 flow. As a result, the bellows 101 returns to the original stretched state by being pressurized by the non-conductive substance 103.

Further, as shown in FIG.
1 itself is formed of a soft plate material such as rubber with cloth, and the guide portion 104 is slidably inserted through the cylinder portion 106 through a plurality of bearings 108. The intermediate portion between the cylinder portion 106 and the guide portion 104, respectively. Is provided with a space in the circumferential surface of the slide, in which the coil spring 112 is inserted in a reduced state, and the guide 104 is constantly urged in the direction of being drawn into the cylinder 106. As the fluid substance filled in the bellows 101, a viscous material such as fat or oil is used.
As a lubricating oil for the rolling rollers 108 and the coil springs 112 disposed on the slide contact surface between the guide roller 104 and the guide portion 104.

In this case, as shown in FIG. 19 (b), when a current is applied to the compatible electrode R, the electrostrictive elastic polymer Q is curved in a protruding shape toward the outside of the extended bellows 101, The first chamber 109a and the second chamber 109b inside the bellows 101 are decompressed by the fluid substance 103, and at the same time, a force acts to draw the guide part 104 into the cylinder part 106 by the pressure expansion elastic force of the coil spring 112. The reduction operation of the bellows 101 itself is performed smoothly. On the other hand, as shown in FIG. 19 (a), when the compatible electrode R is turned off, the electrostrictive elastic polymer Q returns to the original flat state, and the first chamber 109a and the second chamber 109b inside the bellows 101. Is pressurized by the fluid substance 103, and at the same time, the bellows 101 returns to the original expanded state while the coil spring 112 is contracted.

As shown in FIG. 20, the guide portion 10 is provided on the cylinder portion 106 through a plurality of rolling rollers 108.
4 is slidably inserted so that the attached bellows 101 itself is assembled in a reduced state, and at the same time, the electrostrictive elastic polymer Q is concavely curved toward the inside of the bellows 101 by energizing the corresponding electrode R. I have to be able to. And the first chamber 1 inside the bellows 101
09a is expanded, and a stopper portion 113 in the form of an enlarged flange is provided at the upper end of the guide portion 104 which is slidably inserted through the cylinder portion 106 through a plurality of rolling rollers 108.
And the stopper portion 113 faces the inside of the first chamber 109a. And the lid 10 inside the bellows 101
2 A coil-shaped internal spring 110 is interposed between the inner surface and the outer surface of the support recess 105, and a coil-shaped external spring 11 is also provided between a protruding outer extension formed on the outer side of the end of the bellows 101.
1 is interposed.

In this case, as shown in FIG. 20 (b), when a current is applied to the compatible electrode R, the electrostrictive elastic polymer Q is curved concavely inward of the reduced bellows 101. First chamber 109a inside bellows 101, second chamber 109a
The chamber 109 b is pressurized by the fluid substance 103, and at the same time, the guide spring 104 is pulled out of the cylinder 106 by the pressure expansion elasticity of the external spring 111 and the internal spring 110. The bellows 101 itself is smoothly extended until the stopper portion 113 is locked to the upper edge of the cylinder portion 106. On the other hand, as shown in FIG. 20 (a), when the compatible electrode R is turned off, the electrostrictive elastic polymer Q returns to the original planar state, and the first chamber 109a and the second chamber 109b inside the bellows 101. Is a fluid substance 103
, And the external spring 111
And bellows 101 while reducing the internal spring 110
Returns to the original reduced state.

As shown in FIG. 21, a cylindrical box-shaped housing 201 having a cylinder portion 202 formed on the upper end opening side.
And a sealing member 204 such as a seal member provided on the inner peripheral wall surface of the cylinder portion 202 above the rolling roller 203 so as to be slidable on the cylinder portion 202 via the rolling roller 203, and the upper end of the support recess 105. A lid portion 102 in which the first chamber 109a is formed by closing and fixing the electrostrictive elastic polymer Q on the opening side, and a cylinder portion formed in the center of the support recess 105 of the lid portion 102 by expanding the space of the first chamber 109a. The guide portion 10 formed upright at the center of the housing 201
4 is slidably inserted through a plurality of rolling rollers 108, and a stopper 113 having a diameter-enlarged flange is provided at the upper end of the guide 104, and the stopper 113 faces the first chamber 109a. . In the second chamber 109b between the inner bottom of the housing 201 and the lid 102, a coil-shaped internal spring 110 is inserted in a reduced state. A shallow-bottom hollow first chamber 109a formed between the electrostrictive elastic polymer Q and the support recess 105; and a cylindrical hollow second chamber 109b between the inner bottom of the housing 201 and the lid 102. Are communicated with each other via an inner portion of a cylinder portion 106, and the inside is filled with a fluid substance 103 such as an incompressible viscous fluid.

In this case, as shown in FIG. 21 (b), when a current is applied to the compatible electrode R, the electrostrictive elastic polymer Q is curved in a concave shape toward the inside of the support recess 105, and
2. First chamber 109a and second chamber 109b inside housing 201
Is pressurized by the fluid substance 103, and at the same time, the lid 102 is guided by the guide 104 by the pressure expansion elasticity of the internal spring 110, and the cylinder 20 of the housing 201 is
2, the housing 201 and the lid 102 are smoothly extended from each other until the stopper 113 at the upper end of the guide 104 is locked to the upper edge of the cylinder 106. On the other hand, as shown in FIG. 21 (a), when the suitable electrode R is turned off, the electrostrictive elastic polymer Q returns to the original planar state, and the lid 102, the first chamber 109a inside the housing 201, The second chamber 109b is decompressed by the fluid substance 103, and at the same time, the housing 201 and the lid 102 return to the original reduced state while the internal spring 110 is reduced.

In the actuator device 51 according to the third embodiment, the extension stroke is set large by reducing the diameter of the bellows 101 itself, or conversely, the extension stroke is reduced by increasing the diameter of the bellows 101 itself. The pressure applied to the surface and the extension stroke can be freely adjusted by setting or the like. Further, the actuator device 51 can be used as a valve body of the valve device 1. Further, in each of the valve device 1 according to the second embodiment and the actuator device 51 according to the third embodiment, a direct current voltage is applied to the compatible electrode R of the electrostrictive elastic polymer Q. The shape of its own is intermittently adjusted by turning on and off, but in addition to this, for example, by applying an AC current and voltage, the shape of itself is synchronized with the AC time constant and continuously changed. You may.

Further, as a fourth embodiment of the present invention, there is provided an elastomer dielectric between matching electrodes R which can adjust its shape by displacing an intermolecular force due to fluctuations of applied voltage and current. The electrostrictive polymer Q is vibrated by an elastic vibrator to generate a surface vibration wave by a traveling wave, and the vibration energy is used to continuously and linearly and rotationally move a moving body brought into pressure contact with the elastic vibrator. It can also be used as the elastic vibrator itself in the vibration type driving device 300 to be driven, or as a substitute for a piezoelectric element adhered to the elastic vibrator.

As a specific vibration type driving device 300,
For example, a surface wave type motor, a ring type motor, a linear type motor, a disk type motor, and the like can be considered. In the case of a surface wave type motor, a surface wave traveling in one direction of an elastic vibrator made of an electrostrictive polymer Q is excited. When the slider is brought into close contact with the surface, a propulsive force is exerted by a frictional force in the direction opposite to the traveling direction of the surface wave. For example, in the case of a ring type motor, as shown in FIG. 22, the stator 301 is formed in a ring shape as an elastic vibrator made of the electrostrictive elastic polymer Q,
A plurality of compatible electrodes R are vertically interposed so as to partition the stator 301 at equal intervals along the circumference, and voltages are applied to these compatible electrodes R with a phase shift of 90 degrees with respect to each other. For example, the bending vibration that progresses by alternately repeating the expansion and contraction states in one direction perpendicular to the ring surface is excited, and the moving body, for example, a disk-shaped rotor 302, which is brought into pressure contact with the stator 301, is rotated. .

As another example of a ring type motor, as shown in FIG. 23, a stator 301 is formed in a ring shape as an elastic vibrator made of an electrostrictive polymer Q, and one side of the stator 301 is grounded. On the side surface, when an AC voltage having a different phase is applied to a matching electrode R formed by branching a plurality of electrodes into a ring shape, a bending vibration that proceeds on the ring surface is excited, and the moving body is brought into pressure contact with the stator 301. The disk-shaped rotor 302 is frictionally propelled. At this time, a number of slit portions 303 are provided in a comb-like shape on the upper surface of the stator 301 except for the compatible electrode R with which the rotor 301 contacts, and the neutral axis of the stator 301 is bent by the stator 30.
1 may be moved to the lower surface side to increase the fluctuation of the contact surface between the rotor 302 and the stator 301. Further, if necessary, at least one of the contact surfaces between the rotor 302 and the stator 301 is provided with a friction material 304 having a large friction coefficient and excellent in wear resistance for efficiently converting vibration energy into rotational movement energy. It may be fixed.

In another embodiment of the present invention, the light transmittance, that is, the light transmission intensity and the illuminance of the light source are changed by changing the film thickness in accordance with the expansion and contraction of the light source due to the fluctuation of the applied voltage and current. An electrostrictive stretchable polymer Q (see FIG. 1) based on an elastomeric dielectric between compatible electrodes R, which can be adjusted continuously and in a short time, is used for, for example, a photographing device, an optical switch device, an optical sensor device, an optical illumination device, and a display device. And a shutter device of an optical mechanism such as a photochemical reaction device. For example, in the case of a photographing device, the above-described electrostrictive stretchable polymer Q is used as an exposure device disposed in the photographing optical path, and when the corresponding electrode R is not energized, the film itself becomes thick and emits light toward the exposure medium. Keep it out of the way,
In the short-time energizing state of the corresponding electrode R, the electrode itself is instantaneously made thin, and light is transmitted for a short time to expose the exposure medium. In this way, a shutter device having an optical mechanism that can be controlled simply and at high speed using the electrostrictive polymer Q is formed.

Although not shown in the drawings, another embodiment of the present invention is based on an elastomer dielectric which can convert an intermolecular force into a fluctuating voltage and a fluctuating current by fluctuating its own shape. The electrostrictive polymer Q can be used as a sensor element of various sensor devices such as a pressure sensor, a force sensor, a speed sensor, an acceleration sensor, an angle sensor, an angular acceleration sensor, and an angular speed sensor.

Alternatively, an electrostrictive stretchable polymer Q based on an elastomer dielectric, which can be converted into a fluctuating voltage and a fluctuating current by displacing an intermolecular force by a fluctuating shape change of itself.
Can also be used as a power generation element of a power generation device that converts mechanical energy into electrical energy.

[0056]

As described above, according to the present invention, high efficiency can be achieved at the same time as miniaturization, weight reduction and energy saving of the apparatus itself, and high-speed control can be performed.

That is, according to the present invention, the electrostrictive elastic member (Q) based on the elastomer dielectric between the compatible electrodes, whose shape can be adjusted by the fluctuation of the applied voltage and current, is provided by the operating member of the driving device. As a result, electric energy and mechanical energy conversion can be performed with high efficiency and high-speed reaction, and control at a higher speed than that of a conventional drive device becomes possible. Moreover,
The entire control system of the drive unit can be made compact.

The drive device is a two-way valve, a three-way valve, and a five-way valve that adjusts the flow velocity and flow rate of the fluid and switches the flow path using the electrostrictive expansion member (Q) as a valve or a movable portion supporting the valve. Since the valve device 1 has a structure such as a valve, it is possible to adjust the flow rate and flow rate of the fluid and to switch the flow path with high efficiency and high speed.

The driving device moves the electrostrictive elastic member (Q) to the movable portion 3 supporting the diaphragm valve 34 or the diaphragm valve 44.
Since the diaphragm type pump device 31 sends out the liquid and the gas used as 5, the liquid and the gas can be fed with high efficiency and high speed.

The driving device comprises a motor, an electrostrictive elastic member (Q),
Reciprocating linear motion used as a driving element such as a cylinder,
Since the actuator device 51 generates power such as reciprocating rotary motion, combined linear rotary motion, and reciprocating bending motion, high-efficiency and high-speed power can be generated for driving elements such as a motor and a cylinder.

The drive unit is driven by the fluid substance 103, which is pressurized and depressurized by the bending motion of the electrostrictive elastic member (Q), through the valve element of the valve unit, the diaphragm valve of the pump unit, the piston cylinder or the actuator of the actuator unit. Rose 101
Power to the driving elements such as
The adaptive electrode R is bent by generating high-efficiency and high-speed power such as expansion and contraction and bending motion in the driving element through the fluid substance 103 which is pressurized and depressurized by the bending motion of the electrostrictive elastic member (Q). In this case, the life can be prevented from being shortened due to friction with other members at the same time, and the compatible electrode R itself can be protected. In addition, the diameter of the drive element such as the valve body of the valve device, the diaphragm valve of the pump device, the piston cylinder of the actuator device, or the bellows 101 is increased or decreased together with the electrostrictive expansion member (Q) to bend the drive element itself. An extremely efficient driving force can be generated by adjusting the expansion / contraction stroke or dispersing and arranging the driving device itself.

The driving device vibrates the elastic vibrator by using the electrostrictive elastic member (Q) as the elastic vibrator itself or as a piezoelectric element adhered to the elastic vibrator to generate a bending traveling wave. A vibratory drive device that generates a surface vibration wave and continuously and linearly and rotationally moves a moving body that has been brought into pressure contact with an elastic vibrating body with its vibration energy, so it is easy to make it thinner and lighter. It is possible to obtain a vibration-type driving device that can achieve high efficiency and can perform high-speed control comparable to a conventional ultrasonic driving method using PZT ceramics or single-layer crystal PZN-PT as a piezoelectric element.

An electrostrictive elastic material (Q) based on an elastomer dielectric, which can be converted into a voltage and a current which fluctuates due to a change in its shape, was used as a conversion element of a driving device for converting mechanical energy into electrical energy. Therefore, the conversion efficiency from mechanical energy to electrical energy via the conversion element can be increased.

The driving devices are various sensor devices such as a pressure sensor, a force sensor, a speed sensor, an acceleration sensor, an angle sensor, an angular acceleration sensor, and an angular speed sensor using the electrostrictive elastic material (Q) as a sensor element. Pressure, force, speed, measured through the sensor element,
Sensor sensitivity and accuracy of acceleration, angle, and angular velocity can be improved.

Since the driving device is a power generation device using the electrostrictive elastic member (Q) as a power generation element, it is possible to obtain power generation with high efficiency and high speed.

The driving device is a shutter device using an electrostrictive elastic member (Q) that changes the light transmittance based on a change in film thickness due to the expansion and contraction of the driving device. Optical mechanisms such as an optical switch device, an optical sensor device, an optical illumination device, a display device, and a photochemical reaction device can be obtained.

[Brief description of the drawings]

FIG. 1 is an overall perspective view for explaining the principle of an electrostrictive elastic polymer according to the present invention.

FIG. 2 is a schematic sectional view showing a valve device having a two-way valve structure according to the first embodiment of the present invention.

FIG. 3 is a schematic sectional view showing another example of a valve device having a two-way valve structure according to the first embodiment of the present invention.

4A and 4B are schematic cross-sectional views including a partially enlarged view showing a valve device having a three-way valve structure according to the first embodiment of the present invention, wherein FIG. 4A is a state after energization, and FIG. Indicates the status.

FIG. 5 is a schematic sectional view showing another example of the valve device having the three-way valve structure according to the first embodiment of the present invention.

FIG. 6 is a schematic sectional view showing a pump device according to a second embodiment of the present invention.

FIG. 7 is a schematic sectional view showing another example of the pump device according to the second embodiment of the present invention.

FIG. 8 is a schematic sectional view showing another example of the pump device according to the second embodiment of the present invention.

FIG. 9 is a schematic sectional view showing a bimorph type actuator device according to a third embodiment of the present invention.

FIGS. 10A and 10B are schematic cross-sectional views showing another example of the cylinder type actuator device according to the third embodiment of the present invention, wherein FIG. 10A shows a state before energization and FIG. 10B shows a state after energization.

11A and 11B are schematic cross-sectional views showing another example of a cylinder type actuator device according to the third embodiment of the present invention, wherein FIG. 11A shows a state in which only the inner electrostrictive elastic polymer is energized, and FIG. This shows a state in which only the outer electrostrictive elastic polymer is energized.

12A and 12B are schematic cross-sectional views illustrating another example of a piston-cylinder type actuator device according to a third embodiment of the present invention, wherein FIG. 12A illustrates a state before energization, and FIG. 12B illustrates a state after energization. .

FIGS. 13A and 13B are partially omitted schematic cross-sectional views showing another example of a piston-cylinder type actuator device according to the third embodiment of the present invention, in which FIG.
(B) shows a state after energization.

FIG. 14 is a schematic sectional view showing a pressure-type actuator device using a fluid substance according to a third embodiment of the present invention.

FIG. 15 is a schematic sectional view showing a pressure-type actuator device using a fluid substance according to another example of the third embodiment of the present invention.

FIG. 16 is a schematic sectional view showing a pressure type actuator device using a fluid substance according to another example of the third embodiment of the present invention.

FIG. 17 is a schematic sectional view showing a pressure-type actuator device using a fluid substance according to another example of the third embodiment of the present invention.

FIG. 18 is a schematic sectional view showing a pressure-type actuator device using a fluid substance according to another example of the third embodiment of the present invention.

FIG. 19 is a schematic sectional view showing a pressure type actuator device using a fluid substance according to another example of the third embodiment of the present invention.

FIG. 20 is a schematic sectional view showing a pressure type actuator device using a fluid substance according to another example of the third embodiment of the present invention.

FIG. 21 is a schematic sectional view showing a pressure type actuator device using a fluid substance according to another example of the third embodiment of the present invention.

FIG. 22 is a schematic plan view showing a vibration type driving device according to a fourth embodiment of the present invention.

FIG. 23 is an exploded perspective view showing another example of the vibration type driving device.

[Explanation of symbols]

Q: Electrostrictive elastic polymer Q1: Lower electrostrictive elastic polymer Q2: Upper electrostrictive elastic polymer R: Compatible electrode EP: Elastomer polymer 1: Valve device 2: Valve housing 3: Valve chamber 4: Valve seat 5: Support recess DESCRIPTION OF SYMBOLS 6 ... Seal material 7 ... Valve seat 8 ... Fixing seat part 11 ... 1st valve seat 12 ... 2nd valve seat 13 ... Pushing operation rod 14 ... Poppet valve body 15A, 15B ... Support recess 16 ... Operation spring spring 17 ... Guide body 18 ... Abrasion resistant material 19 ... Lid 21 ... Long cylindrical projection 22 ... Short cylindrical projection 23 ... First valve seat 24 ... Second valve seat 25 ... Switching valve 28 ... Fixing seat 31 ... Diaphragm type Pump device 32 ... Pump housing 33A ... First chamber 33B ... Second chamber 33C ... Third chamber 34 ... Diaphragm valve 35 ... Return spring 36 ... Suction port 36A ... Stepped part 37 ... Discharge port 37A ... Stepped part 38 ... Suction Valve body 3 9: Discharge valve element 44: Diaphragm valve 44A: Guide part 44B: Actuating valve part 44C: Flexible membrane member 45: Movable part 46: Communication path 47: Lid part 51: Actuator device 52: Base part 53: Rod 54 ... holding frame 55 ... support part 56 ... bellows part 61 ... inner cylindrical member 62 ... outer cylindrical member 63, 64 ... rolling roller 65 ... flange part 66 ... stopper pin 67 ... small hole 71 ... outwardly directed annular projection part 72 ... Inward annular projection 73 ... guide member 73A ... stopper head 74 ... through hole 81 ... cylinder 82 ... piston rod 83, 84 ... rolling roller 85, 86 ... flange 87 ... small hole 91 ... cylinder 91A ... inward annular projection 92: piston rod 92A: flange portion 93, 94: rolling roller 100: actuator device 101, 101a, 101b: bellows Reference numeral 102: lid 103: fluid substance 104: guide 105: support recess 106: cylinder 108: rolling rollers 109a: first chamber 109b: second
Chamber 110: Internal spring 111: External spring 112: Coil spring 113: Stopper 201: Housing 202: Cylinder 203: Rolling roller 204: Sealing material 300: Vibration type driving device 301: Stator 302: Rotor 303 Slit 304: friction member

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) // F16K 31/02 H01L 41/08 BU

Claims (10)

[Claims] 1. An electrostrictive member based on an elastomeric dielectric material between adaptive electrodes whose shape can be adjusted by fluctuations in applied voltage and current is used as an operating member of a driving device. Driving device using electrostrictive elastic material. 2. A two-way valve, a three-way valve, and a five-way valve for adjusting a flow rate, a flow rate, and the like of a fluid using an electrostrictive elastic member as a valve body or a movable part supporting the valve body and switching a flow path. A drive device using the electrostrictive elastic member according to claim 1, which is a valve device according to claim 1. 3. The drive using the electrostrictive elastic member according to claim 1, wherein the driving device is a diaphragm pump device that sends out a liquid or a gas using the electrostrictive elastic member as a diaphragm valve or a movable portion supporting the diaphragm valve. apparatus. 4. The actuator device according to claim 1, wherein the driving device generates power such as linear motion, rotary motion, linear-rotation combined motion, and bending motion using the electrostrictive elastic member as a driving element such as a motor or a cylinder. A driving device using the electrostrictive elastic member according to the above. 5. The driving device includes a valve body of a valve device, a diaphragm valve of a pump device, a piston cylinder or a bellows of an actuator device, and the like through a fluid substance that is pressurized and depressurized by the bending motion of the electrostrictive elastic member. 5. A driving apparatus using the electrostrictive elastic member according to claim 1, wherein the driving element generates power. 6. The driving device according to claim 1, wherein the electrostriction expandable member is used as the elastic vibrating body itself or used as a piezoelectric element adhered to the elastic vibrating body to vibrate the elastic vibrating body to bend the surface due to the traveling wave. 2. A driving device using an electrostrictive elastic member according to claim 1, wherein the driving device is a vibration-type driving device that generates a vibration wave and continuously and linearly and rotationally moves a moving body that is brought into pressure contact with the elastic vibration body with the vibration energy. . 7. An electrostrictive elastic material based on an elastomer dielectric, which can be converted into a voltage and a current which fluctuates due to a change in its shape, is used as a conversion element of a drive device for converting mechanical energy into electrical energy. A driving device using an electrostrictive elastic material. 8. The driving device is any of various sensor devices such as a pressure sensor, a force sensor, a speed sensor, an acceleration sensor, an angle sensor, an angular acceleration sensor, and an angular velocity sensor using an electrostrictive elastic member as a sensor element. A driving device using the electrostrictive elastic member according to the above. 9. The driving device according to claim 7, wherein the driving device is a power generation device using the electrostrictive elastic member as a power generating element. 10. The drive using an electrostrictive elastic member according to claim 1, wherein the driving device is a shutter device using an electrostrictive elastic member that changes light transmittance based on a change in film thickness accompanying expansion and contraction of itself. apparatus.