JP2001202117A - Process management system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a process management system capable of executing effective process management. SOLUTION: The process management system is provided with a central control part 1, an information management part 2, a batch information setting part 4, a reference process processing history setting part 5, and a product number reader 20. Before the execution of batch assembly work, various management data are integrated into a batch information management part 15 from another system on the basis of temporary batch ID. Batch sampling number data are stored in the setting part 4. Even when the system runs down, number sampling can be executed by data stored in the setting part 4. Information concerned with the batch ID is transferred to the central control part 1 after restoration from a trouble.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process control system and, more particularly, to a configuration capable of realizing crisis dispersion due to computer trouble and improvement of reliability.

[0002]

2. Description of the Related Art In a factory where a plurality of manufacturing apparatuses are operated to manufacture products, a computer system for controlling the plurality of apparatuses is generally introduced in recent years. FIG. 17 is a block diagram showing an outline of a conventional process management system. As shown in FIG. 17, a conventional process management system includes a central control unit 101, an information management unit 102, a history information storage unit 103, a batch information setting unit 104, a batch information search unit 106, a process processing history search unit 107, A data relay unit 108, a data definition unit 117, and a definition information storage unit 119 are provided.

[0003] Processing information of a product processed by each device 9 in the process is transmitted to a data relay unit 108 through a communication cable 11.
Sent to. The data relay unit 108 transmits the data received from the device 9 to the central control unit 101 via the network cable 10.

[0006] The central control unit 101 includes a batch information control unit 1.
12. Product information control unit 113 and definition information control unit 11
8 inclusive. The information transmitted to the central control unit 101 is analyzed and processed by each control unit in the central control unit 101. Each control unit checks the content of the data received through the network cable 10 and performs a process according to the content of the data. For example, the batch information control unit 112 whose received data is update target information for the batch information checks and processes the received information. The processing target is data in each management unit in the information management unit 102, and among them, the product information management unit 1
14 is a management item in the batch information management unit 115 and a batch ID, which is one of the management items in the management server 14.

[0005] The information management unit 102 is composed of a memory that stores various information. The information management unit 2 plays a role of recording real-time information of a product that is being processed in-process, which requires real-time processing, and sends back a reply as needed, because the search speed is high.

[0006] More specifically, the information management section 102 includes a product information management section 114 and a batch information management section 115.

[0007] A plurality of records exist in the product information management unit 114 and the batch information management unit 115, and management items exist in the records. For example, the product information management unit 114 stores reference process history (1), reference process history (2),... As management items.

As shown in FIG. 18, the batch information management unit 115 has a plurality of records storing each piece of batch information. Each record has a unique batch ID, batch ID, Creation date and time, process flow I
D and processing conditions (recipe ID) are set.

[0009] The recipe ID is represented by a combination of numbers or alphabets. In FIG. 18, as an example, “001” is stored for the process A and “001” is stored for the process B. Each recipe ID
Corresponds to product conditions (rotation speed of apparatus side motor, conveyor moving speed, water temperature, used raw materials, etc.). In the process of managing these recipes by computer, the same recipe ID and recipe Processing conditions for the ID are held.

From the central control unit 101 to the data relay unit 108
In accordance with the recipe ID transmitted to the device 9 through the device, the device side starts the processing of the product. Without a recipe ID for a product, it is not possible to specify the processing conditions for that product. Therefore, it is necessary for the operator to perform the setting of the recipe ID for the product, that is, the batch information setting operation by the batch information setting unit 104 before starting the processing of the product. At the same time as this work, a function is often provided for checking whether or not products to be supplied are previously batch-assembled in the first step of product processing.

Here, the batch assembling operation will be described. The products being processed in a factory can be in the thousands or tens of thousands, and it is very difficult to manage them one by one. Some lump of these products
Managing as a batch is extremely beneficial for workers and managers. Therefore, the batch assembling work is performed to manage a plurality of products as one block.
At the time of batch assembly work, the process flow ID and the processing conditions (recipe) for the products in the batch are determined.
Products in the same batch are selected so that the same process is processed under the same processing conditions (recipe).

Further, since such a batch assembling operation is an essential function before product processing, another process is often performed by using this as a trigger. For example, a process for taking over product data from the central control unit 101 in another process management system may be performed. If these processes rely on the trigger issuance by the operator, there is a possibility that the issuance timing is delayed or the issuance is forgotten. Therefore, handover by an operator is very dangerous. On the other hand, in the case of automation, it is very difficult to determine when to take over data. On the other hand, since it is most efficient to transfer the product data before processing the product, the process of transferring the product data is usually performed at the timing of setting the batch.

Here, a procedure for taking over product data from another system by batch assembly processing in a conventional process management system will be described with reference to FIG. First,
At the same time as taking over the product from another line, the product data for the product is taken over from another system (step S1).
01). However, the inherited product data is not incorporated in the product information management unit 114. After that, the batch assembling work is performed before the worker puts the product in the line (step S102). At the same time, batch information management data and product information management data are created (step S1).
03). At the timing when the data is created, an operation of incorporating the product data taken over from another system into the product information management unit 114 is performed (step S104). Through these processes, product data transferred from another system is
It can be used in the system at the takeover destination.

The product information management unit 114 has records (product information records) for the number of products being processed in the process. There are a plurality of management items in the product information record, and each management item is information unique to the corresponding product. For example, as shown in FIG. 20, one record includes a product number (product ID), a process flow ID, a final information step, a final processing end time, a processing condition in each step, or a processing history in each step (refer to FIG. 20). Process history) is included as a management item. Here, the product number is a number (ID) assigned to uniquely identify each product in a process, and the process flow ID is an ID representing a flow of a product processing process (process). It is. The product is processed according to the flow of the processing process (process) defined by the process flow ID. The process flow ID and the process (step) are defined by the computer administrator using the data definition unit 117, and the definition information is stored in the definition information storage unit 119 through the definition information control unit 118.

The process flow ID, which is a management item in the product information management unit 114, and the process, which is a management item in the batch information management unit 115, are the definitions stored in the definition information storage unit 119 at the time of batch setting work. Created based on data.

The final processing step and the final processing end time included in the record in the product information management unit 114 are management items that hold the final processing step and the processing end time of the product.

The processing information of the product processed by each device 9 is as follows:
The management items transmitted to the central control unit 101 through the data relay unit 108 and stored in the information management unit 102 are stored in the central control unit 1.
01 is sequentially updated on the basis of the information transmitted in step S01.

The reference process history, which is a management item in the product information management unit 114, is a part for storing a product process history in each process. More specifically, the information includes a process machine No., process data, and a good / bad product determination. The process data here means various measurement data at the time of product processing in each device, and the water temperature at the time of product processing, the rotation speed of the motor, and the measurement results after processing (line width, displacement, etc.) are given as examples. Can be Since these are closely related to the accuracy of products and the causes of defective products, etc., their allowable ranges (upper limit, lower limit, etc.) are usually defined. These various types of data are stored in the reference process history. Usually, the number of the reference process history, the content of the reference process history data, and the storage location of the reference process history data in the management items are stored. Is often determined at the design stage.

[0019]

Since the conventional process management system is configured as described above, the central control unit 1 performs batch information setting work for a product.
When a failure occurs in the 01 or other parts, there is a problem that the operator cannot execute the batch information setting operation for the product.

If the batch information setting operation cannot be performed on the product before the introduction, (1) it becomes impossible to refer to the next processing step of each product, and (2) the processing conditions (recipe) in each step.
(3) Product in-process information (information indicating which stage of the process is being processed) in batch units becomes impossible, (4) Product data from another system In such a case, troubles such as the inability to take over the work may occur, which may increase the work load of workers in the process.

Also, the batch setting operation is essentially an indispensable operation before product processing. Therefore, the timing of the batch setting work is likely to be a trigger for taking over important data from another system. However, if the batch information setting work before product introduction becomes impossible due to the occurrence of troubles in the central control unit 101 or the like, the product data cannot be handed over at the same time as the batch information setting. Will do.

On the other hand, as for the reference process history, which is a management item of the product information management unit 114, the stored reference process history data is secured at the design stage for each management item. Change is difficult. For example, the reference process history 1 in the product information management unit 114 shown in FIG. 20 stores the process start time in the process A of the product, and the reference process history 3 stores the process start time in the process B of the product. The time is stored, but it cannot be changed to store other processing history data.

For this reason, these process history reference functions are effectively operated at the beginning of operation. However, when the items to be referred to change due to a change in the in-process specifications or the like, the product information management unit 1
It is necessary to change the reference process history item 14 and refer to the process history to perform an operation such as improving the function of the process history search unit 107.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a process capable of normally carrying out product information transfer and batch information setting work from another system even when a trouble occurs. To provide a management system.

Still another object of the present invention is to provide a process management system having a configuration in which a process history item can be easily changed in accordance with a change in a process specification or the like.

[0026]

A process management system according to one aspect of the present invention is a process management system for batch-assembling a plurality of products and managing a processing process of the batch-assembled products. Relay unit for inheriting data from the outside, an information management unit for managing information related to batch sets, a data definition unit for defining each data in the information management unit, and a definition information storage unit for storing information related to the definition A central control unit for managing and controlling the processing steps, a central control unit, a data relay unit,
A network cable for connecting each of the information management unit, the data definition unit, and the definition information storage unit, and creates temporary batch information separately from the batch information created after the batch assembly, based on the temporary batch information. It is characterized in that information of products can be stored in advance in the information management unit before batch assembly.

In this way, even when a trouble occurs in the central control unit or the like, product information is transferred from another system, so that risk distribution for computer troubles and improvement in reliability are realized. In addition, the line in the factory can be operated stably.

Preferably, the apparatus further comprises a batch information setting unit connected to the central control unit via a network cable, wherein the batch information setting unit has a function of setting, changing, and storing batch information.

This makes it possible to normally perform the batch information setting operation in a section different from the central control section.

In particular, the apparatus further includes a product number reading unit connected to the batch information setting unit via a communication cable and capable of reading a product number of the product. An area is provided for storing information on batch numbering performed based on a product number, and the batch group can be executed even when a trouble occurs in the central control unit.

Thus, even when a trouble occurs in the central control unit or the like, the batch information setting work is performed normally, so that the risk distribution for computer troubles and the improvement in reliability are realized.

[0032] Preferably, the information management unit is characterized by having a process processing history unit capable of changing the definition and storing information on the process. In particular, it further includes a process history setting unit connected to the central control unit via a network cable, wherein the process history setting unit has a function of changing settings and definitions of the process history unit. .

This makes it possible to easily change the processing history (process data) of the product to be referred to.

[0034] A process management system according to a further aspect of the present invention is a process management system for batch-assembling a plurality of products and managing the processing steps of the batch-assembled products. A data relay unit, an information management unit for managing information related to the batch group, a data definition unit for defining each data in the information management unit, a definition information storage unit for storing information related to the definition, and a processing step. A central control unit for controlling, a central control unit, and a network cable for connecting each of the data relay unit, the data definition unit, the definition information storage unit, and the information management unit. And a process processing history section that can change the definition and stores information on the process processing.

As described above, the processing history (process data) of the product to be referred to can be easily changed, and the effective use of the data area of the computer system, the cost reduction for the specification change, and the work accompanying the specification change are unnecessary. Become.

Preferably, the apparatus further comprises a process history setting unit connected to the central control unit via a network cable, wherein the process history setting unit has a function of changing settings and definitions of the process history unit. It is characterized by.

As a result, the definition of the reference step processing history storage section can be easily changed.

[0038]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A process management system according to the present invention will be described with reference to the drawings. In the drawings, the same reference numerals and corresponding parts have the same reference characters allotted, and description thereof will not be repeated.

A process management system according to an embodiment of the present invention will be described with reference to FIG. As shown in FIG. 1, a process management system according to an embodiment of the present invention includes a central control unit 1, an information management unit 2, a history information storage unit 3, a batch information setting unit 4, and a reference process history setting unit 5. , Batch information reference section 6, process processing history reference section 7, data definition section 1
7, a definition information storage unit 19 and a data relay unit 8.

The central control unit 1 and each of these units are connected by a network cable 10. The processing information of the product processed by each device 9 in the process is transmitted to the data relay unit 8 through the communication cable 11. Data relay unit 8
Transmits the data received from the device 9 to the central control unit 1 through the network cable 10.

The central control unit 1 includes a batch information control unit 12,
It includes a product information control unit 13 and a definition information control unit 18.
The information management unit 2 includes a product information management unit 14 and a batch information management unit 15. The product information management unit 14 includes a reference process log history storage unit 16 as a management item, and the batch information management unit 15 includes a batch ID and a temporary batch ID as management information.

Various definitions for the product and the treatment process are performed by the data definition unit 17 and stored in the definition information storage unit 19 through the definition information control unit 18. Batch information setting for the product is performed from the batch information setting unit 4, and the setting contents are transmitted to the batch information control unit 12 in the central control unit 1 via the network cable 10. The batch information control unit 12 having received the setting content newly creates, changes, or creates management data based on the setting content received with respect to the batch information management unit 15 in the information management unit 2 and the definition information in the definition information storage unit 19. Perform the deletion.

The reference process history setting unit 5 for storing the process history of each process of the product is also set from the reference process history setting unit 5. 1 is transmitted to the product information control unit 13. The product information control unit 13 that has received the setting contents is a product information management unit 14 in the information management unit 2.
Perform new creation, change, or deletion of management data based on the setting contents received from.

Various management data in the information management unit 2 is also updated by transmission data from the data relay unit 8. The data relay unit 8 is connected to the device 9 by a communication cable 11,
The processing information of the product is received from the device 9. Thereafter, the data is transferred to the central control unit 1, and the central control unit 1 updates the management data in the product information management unit 14 and the batch information management unit 15 in the information management unit 2 based on the content of the received data. The batch information setting unit 4 also stores a product number (product I
D) The reading device 20 is connected by the communication cable 11.

The batch information control unit 12 and the product information control unit 3 store the processing history information in the history information storage unit 3 as necessary at the same time as performing the above-mentioned operation on the information management unit 2.

The information collected and accumulated from each process can be referred to from the batch information reference unit 6 and the process processing history reference unit 7. When a quick and true processing history data is required, such as referring to the processing history data (process data) of the product currently being processed and determining the next processing based on the processing history data (process data) reference result. In other words, the central control unit 1 refers not to the history information storage unit 3 but to the reference process log storage unit 16 in the product information management unit 14 in the information management unit 2 as described above.

Various management data in the batch information management unit 15 and the product information management unit 14 are deleted from the various management units when the corresponding product is completed and no longer exists in the processing plant.

Here, the procedure of the batch ID setting method relating to the temporary batch ID according to the embodiment of the present invention will be described with reference to FIG. First, information (product data) on a product is received from another process management system (step S0). A temporary batch ID is set (step S1). Create product information management data based on the temporary batch information management data (step S
2). Here, the temporary batch information management data means a record in which temporary batch ID information existing in the batch information management unit 15 is stored, and the product information management data exists in the product information management unit 14. It means a record that manages each product information in the process.

The structure of the temporary batch information management data is the same as that of FIG. 18, and the system of the batch ID has the structure of a temporary batch ID described later. The product information management data has a configuration shown in FIG. 11 described later.

Another system is a computer system, which controls a pre-processing line for a product processing line to be implemented. If the processing steps before completion from the raw material to the product are very long, the processing steps are divided into a plurality of processing steps, each of which is managed by a subsystem (particularly, a TFT liquid crystal panel or an IC chip production line, etc.).

For the created product information management data,
A process of incorporating product data (processing history data) for a product from another system is performed (step S3). Then, a batch assembling operation is performed on the product (step S4), and the temporary batch information management data portion is replaced with the batch-assembled batch information management data and the batch information management data is created using the product number as a key. (Step S5).

In the conventional system, product management data is created for the first time at the time of batch assembly (performing batch information setting work). Therefore, the work of incorporating the processing history data into the product from another system has been performed only after the batch assembling. However, according to the embodiment of the present invention, since the product management data is created based on the temporary batch information management data that has already been set even when the batch assembly processing has not been performed, the processing history data from another system is also included in the product management data. Can be taken over at any time. As a result, it is possible to prevent the occurrence of a double trouble such that the batch information cannot be set and the product data cannot be transferred as in the related art, and the risk can be dispersed.

Here, the transfer of the processing history data between the systems will be described by taking the manufacturing process of the TFT liquid crystal panel as an example. The TFT liquid crystal panel has a structure in which liquid crystal is injected into a TFT panel and a CF panel that are bonded together. The manufacturing process (manufacturing line) of the TFT liquid crystal panel is large, and as shown in FIG.
110), CF substrate production line (step S117),
LCD line (step S124), inspection line (step S127) and mounting line (step S128)
Divided into

TFT substrate manufacturing line (step S11)
In step 0), a TFT substrate on which a TFT panel is based is created. As shown in FIG. 4A, a plurality of panels P1 to P6 exist on one substrate 50. By dividing one substrate 50 in the dividing step included in the line, a plurality of independent panels P1, P2,..., P6 are obtained as shown in FIG. As described above, in order to improve the takt time of the apparatus and to make the quality of production uniform, processing is performed for each substrate at the beginning of production, and TF is used.
After bonding the T substrate and the CF substrate, the substrate is divided to produce a plurality of panels.

Referring to FIG. 3, TFT substrate manufacturing line S
Reference numeral 110 denotes a TFT substrate first layer forming step (step S11).
1), wire disconnection inspection (1) (step S112), T
FT substrate second layer forming step (step S113), wiring disconnection inspection (2) (step S114),..., TFT substrate N layer forming step (step S115) and wiring disconnection inspection (N) (step S116) Including. The CF substrate manufacturing line (step S117) is the first layer of the CF substrate (RE).
D) Creation process (step S118), inspection of wiring state (1) (step S119), CF substrate second layer (GRE)
EN) forming step (step S120), inspection of wiring state (2) (step S121),..., CF substrate fourth layer (B
LACK) creation step (step S122) and wiring state inspection (4) (step S123). LCD
The line (Step S124) includes a TFT substrate and CF substrate bonding step (Step S125) and a substrate cutting step (Step S126).

In both the TFT substrate production line and the CF substrate production line, the production of each layer and the inspection of the produced layer are repeated. The inspection content includes a non-defective / defective judgment for each panel. Such information needs to be transferred to the LCD line dividing process. This is because, when the processing unit is a substrate, even if the determination of one panel in the substrate is defective, if the substrate is discarded, other non-defective panels will also be discarded. Therefore, in order to avoid discarding non-defective panels, the board is cut into panels in the cutting process,
Substrate processing must be continued until only defective panels can be discarded. Also, in order to increase the probability that a non-defective panel can be obtained, it is necessary to bond the TFT substrate and the CF substrate with non-defective or defective products.
In order to make these possible, it is necessary to pass the panel non-defective result information on the TFT substrate production line and the CF substrate production line to the LCD line.

The batch assembling process in the LCD line (step S124) is performed before the substrate is put into the LCD line. At this point, the TFT substrate manufacturing line and the CF
It is necessary to transfer the result of panel non-defective judgment in the board production line between systems. As described above, in the conventional system configuration, the processing history data is taken over at the time of performing the batch assembling process. Therefore, if the batch assembling process cannot be performed, the non-defective product determination result cannot be taken over. However, according to the system according to the embodiment of the present invention, the processing history data can be delivered before the batch assembling process by introducing the temporary batch ID.

Here, the temporary batch ID according to the embodiment of the present invention will be described with reference to FIGS. 5 (A) and 5 (B). The temporary batch ID includes a model-specific batch ID and a default batch ID. Batch I by model
D is the default batch I for each model ID of the product
D, which is equivalent to the number of product models. Where model ID
Means a number for uniquely distinguishing a product model. The model is used to distinguish product specifications, and is distinguished by use, size, or processing method.
Such a model ID is usually incorporated in a part of a product ID (product number) for uniquely distinguishing a product.

For example, in the above-described TFT liquid crystal panel manufacturing process, the first three digits (the first to three digits) of the product ID are used.
(Digit) corresponds to the model ID. The model-specific batch ID includes the corresponding model ID (three digits), the third digit from the beginning is the model ID, and the fourth and subsequent digits are, for example, the same character string ("Z" Column).

The default batch ID has a space symbol in the third digit from the beginning and has the same configuration as the model-specific batch ID in the fourth and subsequent digits.

As the temporary batch ID, a process flow ID and a recipe ID for each process are set in the same manner as a normal batch ID. In a normal production line,
If the processing steps and processing conditions (recipes) are the same, the products that have acquired the model-specific batch ID can be operated with almost no problem in normal product processing because they have the same model ID.

Here, a method of setting the default batch ID will be described with reference to FIG. It is determined whether or not a model-specific batch ID having a product model ID transmitted from another system already exists in the batch information management unit 15 (step S22). If it already exists, a product information record in the product information management unit 14 is created using the model-specific batch ID (step S23). At this time, the model ID (three digits) of the product is compared with the first three digits of the model-specific batch ID. If the corresponding batch ID does not exist, the default batch I
D is used to create a product information record (step S
24).

The batch information control unit 12 and the product information control unit 13 perform an operation for the information management unit 2 to create a product information record having the temporary batch ID as the batch ID in the product information management unit 14. . at the same time,
The processing history information is stored in the history information storage unit 3 as needed.

The stored information can be referred to from the batch information reference section 6 and the process history reference section 7. When a quick return of the reference result is requested, such as the product data currently being processed (process process history data reference) at the time of data reference, the central control unit 1 sets the history information storage unit 3
The data reference and data return are performed from various management data in the information management unit 2 without going through.

Various data in the batch information management unit 15 and the product information management unit 14 are erased from the memory when the corresponding product no longer exists. Temporary batch ID
Is a process flow ID and a recipe for each process as in the case of the normal batch ID, and a recipe for each process for each model is set in the model-specific batch ID. For this reason, for a product having a batch ID by model, normally, the in-process information, the processing procedure, the processing recipe, and the like can be normally referenced, except that it is not possible to refer to information in batch ID units. Therefore, the processing itself proceeds normally.

The default batch ID is a batch for taking over the processing history from another system, and is created temporarily instead of the model-specific batch ID. Therefore, it is necessary to stop each process and check the recipe and the like. However, usually, the types of the model IDs of the products to be processed in the factory are known, and the batch IDs corresponding to the model IDs correspond to the model IDs.
Are registered almost completely, so that a model-specific batch ID is substantially obtained.

Note that such a temporary batch ID
The advantage of using the method is that the risk distribution can be realized as described above, and the normal batch ID can be set even when a trouble occurs in the computer system including the central control unit 1. This means
In addition to the advantages of the temporary batch ID, this can be realized by causing the batch ID setting terminal to hold the batch ID numbering data.

As in the conventional system, the normal batch ID
If only batch IDs are used and the batch ID numbering data is held in the batch information management unit, if the batch ID setting operation cannot be performed at the time of product introduction, the batch ID setting operation must be performed after recovery from the trouble.

However, in order to perform this operation, it is necessary for the operator to remember which products have been processed as the same batch, which is practically difficult. On the other hand, in the process management system according to the embodiment of the present invention, the creation of the product information management data and the transfer of the product data from another system can be performed at a minimum by employing the temporary batch ID. Further, when the batch ID numbering data is set in the terminal for the batch information setting unit 4, the batch information can be set even when a trouble occurs in the central control unit 1 or the like.

Therefore, in the process management system according to the embodiment of the present invention, the batch information setting unit 4 includes an input unit for inputting data, an output (display) unit for outputting and displaying data, and A memory unit for storing, a communication unit for performing communication with the outside, and a control unit for controlling each unit. The memory unit of the batch information setting unit 4 stores batch ID numbering data for setting a batch ID. Set to the hard disk area to be configured. Then, the batch information setting unit 4 and the product number reading device 20 are connected to the communication cable 1.
Connect to 1. The product number is read by the product number reader 20 for the product received from another system,
The product number is stored in the hard disk area in the batch information setting section 4.

As a result, the product number before the batch information setting target is input can be obtained from the hard disk area in the batch information setting unit 4, so that the product number can be selected regardless of the occurrence of a trouble in the central control unit 1. It becomes possible. Based on the batch ID numbering data stored in the terminal for the batch information setting unit 4, batch ID numbering is performed for the batch ID before input (a unique batch ID is created for the batched product blocks).

At this time, if the central control unit 1 is operating normally, the set batch information is transmitted in real time to the central control unit 1.
When a trouble is occurring, the batch ID numbering data for the product number is temporarily stored in the hard disk area of the batch information setting unit 4. The temporary storage data is transmitted at the time of trouble recovery, and the central control unit 1 can normally reflect the batch ID information in the management data based on the transmitted information. The batch numbering data is composed of, for example, year (4 digits) + month (2 digits) + line (1 digit) + serial number (4 digits), and the serial number is counted up.

The procedure for newly creating and updating various types of management data after recovery from a trouble will be described in comparison with a conventional system. In the conventional process management system, as shown in FIG. 7, information on a list of product numbers before input is acquired from a central control unit, and a product to be input is selected in a batch information setting unit (batch combination) (step S1).
31). If the central control unit is normal (step S13)
2) The product number and the batch information for the product number are transmitted to the central control unit (step S133). Further, the central control unit newly creates and updates various management data based on the received product number and batch information (batch ID) (step S135).

However, if a trouble has occurred in the central control unit (step S132), the batch assembling operation becomes impossible (step S134).

On the other hand, in the process management system according to the embodiment of the present invention, as shown in FIG. 8, the product number reading device 20 is connected to the batch information setting section 4, and the product number before input is changed to the product number. The reading is performed using the reading device 20 (step S31). The read product number is stored in the hard disk area of the batch information setting unit 4 (Step S32). Using the information stored in the batch information setting unit 4, a product to be input is selected (batch set) (step S3).
3). If no trouble has occurred in the central control unit 1 (step S34), the product number and the batch information corresponding thereto are transmitted to the central control unit 1 (step S3).
5). If a trouble has occurred in the central control unit 1 (step S34), the batch group information is temporarily stored in the batch information setting unit 4 (step S36). Then, at the time of trouble recovery, the data stored in the batch information setting unit 4 is transferred to the central control unit 1 (step S37).

Then, the central control unit 1 newly creates and updates various management data based on the received product number and batch information (batch ID) (step S3).
8).

As described above, in the conventional system, the information on the product number before introduction obtained from the central control unit can be referred to by the batch information setting unit 4. In the conventional process management system, since the central control unit holds the batch ID numbering data, if the central control unit goes down, it becomes impossible to number the batch IDs, and the batch assembling work also becomes impossible. It was impossible. However, in the process management system according to the embodiment of the present invention, since the batch ID numbering data is held in the batch information setting unit 4, even if a trouble occurs in the central
Numbering of D becomes possible.

As described above, since the batch IDs need to be uniquely distinguished from each other, serial numbers are usually held in several digits (see FIG. 5). For example, if the serial number portion of the batch ID of the immediately preceding batch is “010”, the next batch ID is “011”. In this way, by counting up the serial number portion one by one, it is possible to determine the order of batch assembly. Thereby, each batch ID can be uniquely distinguished. In the process management system according to the embodiment of the present invention, such a unique batch ID can be numbered not only during normal operation but also when a trouble occurs. The batch set information is temporarily stored in the batch information setting unit 4 when a trouble occurs, and is transferred to the central control unit 1 after the trouble is recovered.

Next, a process processing history reference function in the process management system according to the embodiment of the present invention will be described. First, FIGS. 9 and 10 show a list of processes included in an LCD line in a TFT liquid crystal panel production line and process data for each process. 9 and 10
Shows target items, target data, formats, and units for the target items. For example,
In the bonding step, the processing execution time (format and unit: YYYYMMDHDHMMSS) and the processing machine (format and unit: 2 integers) are the target data.

The process data is a value that serves as a mark for non-defective judgment of the panel. When the process data is a numeral, an upper limit / lower limit is set, and when the process data is a time, an upper limit time / lower limit time is set. Etc. are set. Actual process data is the set reference value (upper limit value, lower limit value)
If the value is out of the range, there is a high possibility that the product will be defective. Further, if the processing time between the respective steps also exceeds a certain time frame, a defect is likely to occur. Therefore, these data are frequently referred to during product processing. Therefore, it takes a long time to refer from the history information holding unit 3 that holds all the histories. Therefore, it is held in the product information management unit 14.

In the conventional process management system, the area for holding these data is determined at the time of determining the system specifications, so that an area capable of storing a larger amount of data than expected in advance is secured. In addition, when a specification change such as a change of an item to be stored later occurs, a new cost is generated due to the change of the area.

On the other hand, in the process management system according to the embodiment of the present invention, the change and utilization of the reference process history data can be performed quickly and effectively as shown below. Here, the product information management unit 14 according to the embodiment of the present invention will be described with reference to FIG. FIG.
As shown in FIG. 1, the manufacturing information management unit 14 has a plurality of records. Each record includes a product number, a batch ID, a process flow ID, a final processing step, a final processing unit, a final processing end time, a next processing scheduled step, and a reference processing history storage unit 16 (1) to 16 (N). Including.

Reference process history log storage units 16 (1) to 16 (1)
6 (N) does not store a fixed processing history (process data) for each field as in the conventional reference process processing history, but a processing history set by the reference process processing history setting unit 5. Is stored. A plurality of reference process history storage units are prepared in the manufacturing information management unit 14,
The maximum number of process process histories that can be referred to is determined by the maximum number.

Each of the reference process processing history storages is
The definition can be changed by external input. For example, in FIG.
(1) stores the cleaning step and the processing time, and the rubbing step and the cloth rotation speed are stored in the reference step processing history storage unit 16 (2). However, when the reference process history storage unit 16 (1) is no longer used, it can be redefined as a storage unit for another process history.

Therefore, considering long-term operation, not only space saving than the conventional fixed type can be realized, but also a process processing history which cannot be predicted at the beginning of the design as in the conventional system is set and referred to. Can be done easily.

Next, a method of setting the storage process history (process data) in the reference process history storage unit 16 in the reference process history setting unit 5 will be described with reference to FIGS. FIG. 12 shows a setting flow, and FIG.
Indicates a screen displayed on the display unit provided in the present system in correspondence with each step of FIG.

First, a target process is selected (step S4).
1). A list of defined processes is displayed on the screen (S48). Select the target process from the displayed process list. More specifically, the target processes in FIGS. 9 and 10 are displayed as a process list. The selection method is, for example, “2. PI printing process” using a mouse or a keyboard.
Select

The process data (and format) to be referred to is selected from the process data managed in the selected process (step S42). A list of process data and formats registered for the PI printing process selected as the target process is displayed on the screen (S49). The target process data is selected from the displayed data (see FIGS. 9 and 10 for a list of the process data). For example, in the PI printing process, “1. Processing execution time (format: YYYYM
MDDHHMMSS) ".

The location of the reference process log storage unit 16 (1) to 16 (N) in the product information management unit 14 is selected (step S43). The screen displays the current registration status for each storage location in the reference process history storage (S50). At this time, the maximum number of storable areas in the reference process processing history storage unit (the value of N in FIG. 11)
Is 10 records, the storage status for 10 records is displayed. If the selected storage unit is a “3. unregistered” record, that is, if no processing history (process data) is stored in the storage location, select the process data and then select the registration button (S51). Then, registration is performed (step S44). As a result, a new processing history (process data) is additionally stored in the area.

However, if another processing history is already stored, a warning message is displayed once. If registration is selected despite the warning message being displayed, the data at the selected storage location is rewritten with a new processing history (process data). Normally, when there is an unregistered area, additional registration is performed on the unregistered area, and when overwriting registration is performed on a storage location that has already been registered, it is assumed that the registered processing history is not already used. Confirm and perform overwrite registration.

In the example of FIG. 13, after selecting an unregistered area, the registration button is pressed. As a result, the processing execution time in the PI printing process is registered in the reference process history storage unit 16 (3) as the storage position. Registration work is completed (step S
45) After that, the screen displays the reference process history storage 1
The processing execution time of the PI printing process is displayed at the third position of No. 6 (S52).

When the process in the PI printing process is performed after registration, the reference process history storage 16 for the processed product
In (3), the processing execution time in the PI printing step is stored in a designated format (YYYYMMDHDHMMSS).

Next, referring to FIG. 14 and FIG. 15, a reference procedure in the process history reference section 7 for referring to the process data stored in the reference process history storage section 16 will be described. FIG. 14 shows a processing flow, and FIG. 15 shows a screen displayed in each step of FIG.

First, it is set at which position the data stored in the reference process history storage unit 16 of the product information management unit 14 is to be referred to (step S60). On the screen, a list of processing history data managed in the reference process history storage unit 16 is displayed (S68). Select one item from the displayed items. For example, the cloth rotation speed of “2. Rubbing step” is selected. When selecting,
Selection of only matching items or selection of a plurality of items is possible. According to the screen (S69), whether the data is single data or combination data is selected (step S61). Select whether to use the selected data for display only or to display it with additional judgment.

In the case of single data, it is possible to select only display or discrimination (step S62).

In the case of combination data, a display mode is selected in the case of display. For example, "A-
When "A-B" is selected when "B", "A + B", "A * B", and "A / B" are selectable, the first selected processing history (process data) A and later selected The difference between each numerical value and the processed history (process data) B is displayed.

For example, when a predetermined time or more has elapsed before the substrate processed in the PI printing process is subjected to the rubbing process, it is necessary to perform the cleaning process again in the cleaning process. In such a case, the processing execution time in the PI printing process is selected as the processing history (process data) B, and the processing execution time in the rubbing process is set as the processing history (process data) A, and the display format “AB When "" is selected, the difference between the processing execution times in both steps is displayed.

In the display format “A + B”, the sum of the two processing histories is used. In the case of “A * B”, the product of the two processing histories is used.
In the case of "A / B", the product of two processing histories is displayed. In this case, the selected processing histories A and B
Must be numeric.

In the case of the judgment condition selection, "A AND
If “B” is selected, the result is true if both of the processing histories A and B are true, and if “A OR B” is selected, the result is true if either one is true. For example, if the number of processed substrates after tool replacement in each process exceeds the set upper limit value, it is necessary to perform some processing before performing the next processing. On the other hand, when the determination condition of “A OR B” is selected, for example, the numerical value of the average application amount in the spacer application step is within a specified range, or If the number of processed sheets after replacement of the syringe in the seal printing process is less than or equal to a predetermined value, the product is highly likely to be non-defective, these are selected as processing histories A and B, and the determination condition “A OR B "is selected .

If the judgment is not made (step S64), the flow proceeds to the setting end processing (step S67). When the judgment is selected, the judgment type is selected. Here, it is assumed that a numerical value is selected as the processing history, and one of the upper limit value, the range, and the lower limit value is selected and the set value is input (step S65). For example, when the number of processed substrates after replacement in each process is selected as the processing history, when the number of times of processing exceeds a certain upper limit, the occurrence rate of defective products tends to increase. Therefore, as the determination type,
Select the upper limit setting and enter a numerical value for it according to the format. When the percentage of non-defective products is the highest when the value falls within a certain specified range, such as the average application amount in the spacer application step, the user selects the range setting and inputs both the upper limit value and the lower limit value.

Finally, "false" is determined for each selection judgment.
Then, a warning method for setting what kind of warning should be performed when the determination is made is selected (step S66). Examples of the warning method include a device stop, an alarm occurrence, and lighting of a patrol light (red). In addition, the device stop is
When the device and the process history reference unit 7 are connected by a communication cable, a stop signal is transmitted from the process history reference unit 7 to the device. A plurality of warning methods can be selected, and the setting ends after the selection (step S67). FIG. 16 shows a setting content confirmation screen at the time of completion of the setting in the process processing history reference section 7. In FIG. 16, setting items and setting contents are displayed. The setting items include reference target process, target process data, display format and unit, processing history storage location, single or combination, display or determination, determination type, and warning method. As the setting contents, values and conditions for the setting items are displayed.

Mainly, in the inspection process, when the operator uses the material as a judgment material for judging whether the panel is good or bad, the display is selected, and the apparatus is stopped when passing through the panel which has a high possibility of occurrence of a defect in the moving processing apparatus. , Select the judgment. In addition, the display format or the determination condition shown here is an example, and the characteristics of the factory and the characteristics of the product to be used are analyzed in detail, and a selection variation corresponding to the characteristics is registered.

The embodiments disclosed this time are merely examples in all respects, and should be considered restrictive and restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description of the embodiments, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[0104]

As described above, according to the process management system of the present invention, even when a trouble occurs in the central control unit or the like,
Since the transfer of the product information from another system and the batch information setting work are performed normally, the risk distribution for computer troubles and the improvement of reliability are realized. Further, from these results, the line in the factory can be operated stably.

Further, by introducing a reference process history log storage unit whose definition can be changed, it is possible to easily change the process history (process data) of the product to be referenced, and to make the data area of the computer system effective. There is no need for cost reduction for use and specification changes, and work associated with specification changes.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an overall configuration of a process management system according to an embodiment of the present invention.

FIG. 2 is a flowchart illustrating a procedure of a batch ID setting method in the process management system according to the embodiment of the present invention.

FIG. 3 is a flowchart showing a TFT liquid crystal panel manufacturing line.

FIGS. 4A and 4B are conceptual diagrams for explaining the relationship between a substrate and a panel in a TFT liquid crystal panel production line.

FIGS. 5A and 5B are conceptual diagrams for explaining the contents of a normal batch ID and a temporary batch ID.

FIG. 6 is a flowchart illustrating a method of setting a temporary batch ID according to the embodiment of the present invention.

FIG. 7 is a flowchart showing a procedure of a batch set in a conventional process management system.

FIG. 8 is a flowchart illustrating a procedure of a batch set in the process management system according to the embodiment of the present invention.

FIG. 9 is a diagram for explaining each process and process data for each process in an LCD line.

FIG. 10 is a diagram for explaining each process and process data for each process in an LCD line.

FIG. 11 is a conceptual diagram showing management items of a product information management unit 14 in the process management system according to the embodiment of the present invention.

FIG. 12 is a flowchart illustrating a setting method of a reference process history storing unit according to the embodiment of the present invention.

FIG. 13 is a conceptual diagram showing a screen image associated with the settings shown in FIG.

FIG. 14 is a flowchart illustrating a reference procedure in a process history reference unit 7 in the process management system according to the embodiment of the present invention.

15 is a conceptual diagram for describing a screen image displayed in the procedure shown in FIG.

FIG. 16 is a conceptual diagram illustrating a setting content confirmation screen at the time of completion of setting in the process processing history reference unit 7 according to the embodiment of the present invention.

FIG. 17 is a block diagram illustrating a configuration of a main part of a conventional process management system.

FIG. 18 is a conceptual diagram showing management items of a batch information management unit in a conventional process management system.

FIG. 19 is a flowchart illustrating a procedure of a process when a batch assembling operation is performed in a conventional process management system.

FIG. 20 is a conceptual diagram showing the contents of a product information management unit in a conventional process management system.

[Explanation of symbols]

Reference Signs List 1 Central control unit, 2 information management unit, 3 history information storage unit, 4 batch information setting unit, 5 reference process processing history setting unit, 6 batch information reference unit, 7 process processing history reference unit, 8 data relay unit, 9 Device, 10 network cable, 11 communication cable, 12 batch information control unit, 13 product information control unit, 14 product information management unit, 1
5 Batch information management unit, 17 data definition unit, 18 definition information control unit, 19 definition information storage unit, 20 product number reading device.

Claims (7)

[Claims] 1. A process management system for batch-assembling a plurality of products and managing a processing process of the batched products, comprising: a data relay unit for inheriting data on the products from outside; An information management unit for managing information about the group; a data definition unit for defining each data in the information management unit; a definition information storage unit for storing the information on the definition; and managing and controlling the processing steps. And a network cable for connecting the central control unit, the data relay unit, the information management unit, the data definition unit and the definition information storage unit. Temporary batch information is created separately from the batch information created after assembling, and the information management is performed based on the temporary batch information. Characterized in that it previously stores information of said product in said batch set previously part,
Process control system. 2. The apparatus according to claim 1, further comprising a batch information setting unit connected to the central control unit via the network cable, wherein the batch information setting unit has a function of setting, changing, and storing the batch information. The process management system according to claim 1, wherein 3. A product number reading unit connected to the batch information setting unit via a communication cable and capable of reading a product number of the product, wherein the batch information setting unit includes a product number reading unit. Receiving the product number to be output and having an area for storing information on batch numbering performed based on the product number, wherein the batch group can be executed even when a trouble occurs in the central control unit. The process management system according to claim 2, which performs the process. 4. The process management system according to claim 3, wherein the information management unit has a process process history unit that can change a definition and stores information on the process process. 5. A process processing history setting unit connected to the central control unit via the network cable, wherein the process processing history setting unit changes a setting and a definition of the process processing history unit. The process management system according to claim 4, comprising: 6. A process management system for batch-assembling a plurality of products and managing a processing process of the batched products, wherein a data relay unit for inheriting data on the products from outside, and the batch An information management unit for managing information about the group; a data definition unit for defining each data in the information management unit; a definition information storage unit for storing the information on the definition; and managing and controlling the processing steps. And a network cable for connecting the central control unit, the data relay unit, the data definition unit, the definition information storage unit, and the information management unit. The management unit includes a process processing history unit that can change the definition and stores information related to the process processing. Management systems. 7. A process processing history setting unit connected to the central control unit via the network cable, wherein the process processing history setting unit has a function of changing settings and definitions of the process processing history unit. The process management system according to claim 6, comprising: