JP2001179579A - Work machining system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a work machining system capable of machining a large- diameter work in a small installation area. SOLUTION: This work machining system having a transverse-axis-type double-end grinding machine 1 for grinding the work W in a vertical state always machines the work W in the vertical state. The system comprises a cleaning device 4 for cleaning the work W in the vertical state, a drying device 5 for drying the work W in the vertical state, and a conveying device 2 for conveying the work W in the vertical state. Even when the work W is a large- diameter silicon wafer, the work W is machined in the vertical state, and thus the work machining system requires only smaller installation floor area.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-headed grinding machine for processing a disk-shaped work such as a silicon wafer or a glass disk, and a work processing system provided with a device for loading and unloading the work to and from the double-headed grinding machine. In relation to.

[0002]

2. Description of the Related Art Conventionally, a double-headed grinding machine has been known as an apparatus for processing a disk-shaped thin work. This double-headed grinding machine is provided with a pair of cup-shaped grindstones that rotate coaxially in opposition to each other, and can simultaneously grind both front and back surfaces of a work. The double-headed grinding machine has a vertical axis in which the rotation axes of the two grinding wheels are arranged perpendicular to the floor surface, and a horizontal axis in which the rotation axes of the two grinding wheels are horizontally arranged with respect to the floor surface. There is a type. One vertical axis type double-headed grinding machine grinds a horizontally arranged work. The other horizontal shaft type double-headed grinding machine is
Grind a vertically arranged workpiece. Here, when the work is horizontal, the work has its surface oriented parallel to the floor, and when the work is vertical, the work has its surface oriented perpendicular to the floor. I have.

[0003] Usually, such a double-headed grinding machine is used in combination with a transfer device for transferring a work, a washing device for washing a ground work, and a drying device for drying the washed work. In other words, these double-sided grinding machines, transport devices,
The cleaning device and the drying device cooperate with each other to function as a work processing system.

FIG. 11 is a schematic plan view showing a conventional work processing system provided with a vertical-type double-headed grinding machine 81.
An unprocessed work storage device 82, a loading robot 83, a loader / unloader 84, an unloading robot 85, a cleaning device 86, and a processed work storage device 87 are installed near the double-headed grinding machine 81. ing.

[0005] When processing is performed in this work processing system, the work W previously stored horizontally in the unprocessed work storage device 82 is taken out by the robot 83 and placed horizontally on the loader / unloader 84. Is done. The loader / unloader 84 inserts the placed work W between the grinding wheels of the double-headed grinding machine 81 in a horizontal state. In this state, the double-sided grinding machine 81 grinds the work W with the two grinding wheels. When the grinding is completed, the loader / unloader 84 removes the ground work W from between the two grindstones. Then, the robot 85
The work W is taken out and the cleaning device 86 is placed in a horizontal state.
Insert into Then, the cleaning device 86 cleans the work W. The cleaned work W is taken out by the robot 85, dried by a drying device (not shown), and stored horizontally in the processed work storage device 87 by the robot 85.

FIG. 12 is a schematic diagram showing a conventional work processing system provided with a horizontal-axis double-headed grinding machine 91.
FIG. 12A is a plan view of the work processing system. FIG. 12B is a cross-sectional view taken along line BB in FIG.

This work processing system comprises an unprocessed work storage device 92, a loading robot 93, a loading reversing device 94, a loader / unloader 95, an unloading reversing device 96, an unloading robot 97, a cleaning device. An apparatus 98 and a processed work storage apparatus 99 are further provided.

[0008] When processing is performed in this work processing system, the work W previously stored horizontally in the unprocessed work storage device 92 is taken out by the robot 93 and placed horizontally on the reversing device 94. You. The reversing device 94 vertically stands the work W placed horizontally. Then, the loader / unloader 95 loads the work W
Is taken out and inserted between the two grindstones 91a of the double-headed grinding machine 91 in a vertical state.

In this state, the double-headed grinding machine 91 grinds the workpiece W by the two grindstones 91a, 91a. When the grinding is completed, the loader / unloader 95 removes the ground work W from between the two grindstones 91a and 91a and transfers the work W to the reversing device 96 in a vertical state. This reversing device 9
6 arranges the workpiece W in a vertical state horizontally. Then, the robot 97 takes out the horizontal work W and inserts it horizontally into the cleaning device 98. And
The cleaning device 98 cleans the work W. The cleaned work W is taken out by the robot 97, dried by a drying device (not shown), and stored in the processed work storage device 99 by the robot 97.

[0010]

In the work processing system provided with the above-described vertical-type double-headed grinding machine 81, the work W is horizontal in all the steps. On the other hand, in a work processing system provided with a horizontal axis type double-headed grinding machine 91,
The work W is oriented vertically only in the grinding process by the double-headed grinding machine 91, and in other processes, the work W
Is always processed horizontally.

However, since the diameter of the work W has been increasing in recent years, assuming that the large-diameter work is to be processed in a horizontal state, the work floor area in each process is increased, and the work processing system as a whole is increased. The installation area of the device also becomes large.

For example, when the work to be processed is a silicon wafer, the entire work processing apparatus must be housed in a clean room in order to prevent impurities from adhering to the silicon wafer. In this case, when the installation area of the work processing apparatus becomes large, a large clean room is required, and the initial cost required for installation and the running cost required for operation increase.

It is an object of the present invention to provide a work processing system in which the floor area required for installation is reduced.

[0014]

The work processing system according to the present invention employs the following configuration in order to solve the above problems.

That is, the work processing system includes a processing device having a pair of working surfaces that face each other in parallel and rotate about a predetermined axis that is horizontal to the floor.
A work holding device for inserting a disc-shaped work to be machined between both working surfaces in the machining device, and a pair of cassettes for storing the work in a state perpendicular to a floor surface,
A transfer device that has a work grip portion that grips the work in a state perpendicular to the floor surface, and that moves the work between the work holding device, each of the cassettes, the cleaning device, and the drying device; It is characterized by having.

Further, the work processing system includes a cleaning device for cleaning the processed work perpendicular to the floor, and a drying device for drying the cleaned work perpendicular to the floor. And a device.

Then, the transfer device takes out the unprocessed work previously stored in one of the cassettes and transfers the unprocessed work to the work holding device by using the work grip portion, and the processed work has been removed from the work holding device. The work is taken out and transported to the washing device, the washed work is taken out from the washing device and carried to the drying device, and the dried work is taken out from the drying device and stored in the other cassette. .

With such a configuration, in all the processing in the work processing system, the work is in a state perpendicular to the floor surface, and the floor area required for the processing is small. It is.

Further, the work processing system may further include a work buffer capable of supporting the work in a state perpendicular to the floor. Further, the transfer device includes a first robot having the work grip portion,
And a second robot having the work grip part. In this case, the transporting device has its first
The unprocessed work previously stored in one of the cassettes is taken out by the work grip portion of the robot and transported to the work buffer, and is supported by the work buffer by the work grip portion of the second robot. The work is conveyed to the work holding device, and the processed work is taken out of the work holding device, transferred to the cleaning device, and the work grip portion of the first robot is used to clean the work from the cleaning device. The work is taken out and transported to the drying device, and the dried work is taken out from the drying device and stored in the other cassette.

Further, the second robot in the transfer device may have a pair of work grips. In this case, the transfer device removes the unprocessed work from the work buffer by one of the work grips of the second robot and holds the work, and holds the work by the other work grip of the second robot. The processed work is taken out from the apparatus, and the unprocessed work is transferred to the work holding device by one of the work grips.

Further, the work processing system may include a turntable device for mounting the two cassettes and reversing the positions of the two cassettes.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A work processing system according to an embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a plan view of the work processing system. As shown in FIG. 1, this work processing system comprises a vertical-type double-headed grinding machine 1, a transfer device 2, a turntable device 3, a washing device 4, a drying device 5, and a work buffer 6.
Is provided. FIG. 2 is a view of the transport device 2 in FIG. 1 as viewed in a direction II. FIG. 3 is a sectional view taken along the line III-III in FIG. However, in FIG. 3, only the left side portion in FIG. 1 of the double-headed grinding machine 1 is shown.

First, the double-sided grinding machine 1 will be described. The double-headed grinding machine 1 includes a pair of spindle devices 11, 11,
And a work holding device 12. Each spindle device 11 has an output shaft that rotates at high speed,
Cup-type grindstones 11a, 11a are respectively attached to these output shafts. And each spindle device 11,
Numeral 11 is installed on the bed so that the grinding action surfaces of the grinding wheels 11a, 11a are coaxially opposed to each other. In addition,
Each of the spindle devices 11, 11 has its own grindstone 11a, 11
a can be respectively displaced in the direction of the rotation axis. That is,
The gap between the grinding surfaces of the grinding wheels 11a, 11a can be adjusted freely.

As shown in FIG. 3, the work holding device 1
Reference numeral 2 includes a work holder 121 for holding the work W, a support part 122 for supporting the work holder 121, and a moving mechanism 123 for sliding the support part 122.

The moving mechanism 123 is a slide table which can be slid parallel to the floor from the vicinity of the two grinding wheels 11a, 11a in the double-headed grinding machine 1 to a predetermined position on the side (left side in FIG. 3). have. In addition,
The slide table is connected to a ball screw (not shown), and the two grindstones 11a, 11a are arranged in a plane horizontal to the floor at a height near the lower part of the grindstones 11a, 11a.
It can slide in a direction perpendicular to the rotation axis of a.

The support portion 122 has a substantially inverted L-shape outer diameter, and the protruding portion at the upper portion thereof is formed by the two grinding wheels 11a, 11a.
The lower part thereof is fixed to the slide table of the moving mechanism 123 so as to be perpendicular to the rotation axis.

The work holder 121 has a frame in which a notch-shaped portion facing a substantially half-periphery region on the edge of the work W is formed. This frame includes a substantially “C” -shaped portion having the cutout portion formed therein, and a base end portion protruding outward from the vicinity of the center of the substantially “C” -shaped portion. The work holder 121 has a plurality of support rollers attached to the frame.

The work holder 121 can accommodate the work W by rotatably abutting each support roller on the edge of the work W. Further, the work holder 121 has a pair of static pressure pads facing each of the front and back surfaces of the work W accommodated in this manner. Each of these static pressure pads ejects a fluid to the work W, and regulates the displacement of the work W in the central axis direction by the static pressure generated by the fluid. Then, in a state where each static pressure pad holds the work W via the fluid static pressure film,
As each of the support rollers is driven to rotate, the work W that has come into contact with the support roller rotates about its central axis.

The work holder 121 is supported at its base end by a protruding portion of the support portion 122. The support unit 122 has a drive mechanism (not shown).
The work holder 121 is rotated within a predetermined angle range. That is, when the work W is held by the work holder 121, the work W
Can rotate in a plane parallel to the grinding action surface between the grinding action surfaces. Then, the work holder 121 rotates counterclockwise in the plane of the paper of FIG. 3, and rotates upward in the upward direction with the opening of the cutout portion of the frame or clockwise in the plane of the paper of FIG. Thus, the frame can be in any position of a downward posture in which the opening of the cutout portion is directed sideward (to the right in FIG. 3).

The position of the work holder 121 when the moving mechanism 123 moves the slide table away from the double-headed grinding machine 1 is referred to as a retracted position. On the other hand, the position of the work holder 121 when the moving mechanism 123 brings the slide table close to the double-headed grinding machine 1 is called a grinding position. FIG. 3 shows the work holder 121 in a state where the work holder 121 has moved to the retracted position and has taken a rising posture. FIG. 3 also shows the work holder 121 ′ in a state of moving to the grinding position and taking a lowered posture.

Next, the transfer device 2 will be described. The transfer device 2 includes a first robot 21 and a second robot 2
2, a slide mechanism 23 is provided. As shown in FIG. 1, the slide mechanism 23 includes a guide rail 23
1, the first table 232, and the second table 233
Having. The guide rail 231 of the slide mechanism 23 is formed in an elongated shape, and guides the tables 232 and 233 slidably in the longitudinal direction.

As shown in FIG. 1, this guide rail 231 has its longitudinal direction aligned with both spindle devices 11 and 11.
Are arranged on the base 234 in such a manner as to be parallel to the rotation axis and to face one of the spindle devices 11 (the left side in FIG. 1) at a predetermined interval.
Note that this guide rail 231 has one end thereof
Both spindle devices 11, 1 in the work holding device 12
1 and is arranged close to the end on the side away from 1. The guide rail 231 is arranged in a plane parallel to the floor below the two grinding wheels 11a, 11a of the double-headed grinding machine 1.

The tables 232 and 233 are respectively mounted on the guide rails 231.
The guide rail 231 is slidable in the longitudinal direction within a plane parallel to the floor. And
On one table 232, a first robot 21 is attached, and on the other table 233, a second robot 21 is attached.
Robots 22 are attached.

FIG. 4 is an explanatory diagram showing the first robot 21. The first robot 21 includes a work grip portion G for gripping the work W, and the work grip portion G.
M that supports the arm M, the base 21 that supports the arm M
One.

As shown in FIG. 4, the base 211
Is a flat plate formed in a substantially parallelogram shape. However, the base portion 211 has a shape in which an acute angle portion in the upper part of the parallelogram is further protruded. The base 211 has its surface directed perpendicular to the rotation axis of the double-headed grinding machine 1, and its protruding portion directed to the double-headed grinding machine 1. 232.

The arm M is formed in an elongated shape that is gently curved at the center. The arm M is supported at its base end by a protruding portion of the base 211. In addition, this arm M has a centrally protruding side that is loosely protruded toward a side opposite to the double-headed grinding machine 1.
The double-headed grinding machine 1 is attached to the base 211 so as to be rotatable in a plane perpendicular to the central axis.
The arm M is driven by a drive mechanism (not shown) attached to the base 211, and can rotate within a predetermined angle range.

The work grip portion G has an opening / closing mechanism G1, a pair of grips G2, G2, and two pairs of rollers G3. The opening / closing mechanism G1 has a support substrate formed in a strip shape. Each of the grips G2 and G2 is formed in a long shape that is gently curved, with the gently protruding portion facing outward, and pivotally supported at the base end near both ends of the support substrate of the opening / closing mechanism G1. Have been. Opening / closing mechanism G
1 has a drive mechanism (not shown) for rotating and displacing each of the grips G2 and G2. And each grip G2, G2
Are rotatable within a predetermined angle range so as to approach or separate from each other in the same plane.

One of the two pairs of rollers G1 is pivotally supported near the tip of each of the grips G2 and G2, respectively.
The other pair is pivotally supported near the base end of each grip G2, G2, respectively. Each of these rollers G1 moves the work W in a state where both grips G2 and G2 are close to each other.
The workpiece W can be gripped by rotatably contacting the edge of the workpiece W. The work grip portion G is pivotally supported at the center of the opening / closing mechanism G1 at the tip of an arm M. Then, each grip G2, G of the work grip portion G
2 are rotationally displaced in a plane parallel to the plane on which the arm M rotates.

The state of the work grip portion G when the arm M rotates counterclockwise in the plane of FIG. 4 is referred to as a rising posture. On the other hand, the state of the work grip portion G 'when the arm M rotates clockwise in the plane of FIG.

The second robot 22 is the first robot 2
1 has two sets of the work grip portion G and the arm M. Further, as shown in FIG. 3, the robot 22 has a lifting base 221 and a lifting mechanism 222. The elevating mechanism 222 has a long external shape, and the longitudinal direction of the elevating mechanism 222 is perpendicular to the floor surface.
Is fixed on the second table 233. And
The elevating mechanism 222 can move the elevating base 221 protruding toward the double-headed grinding machine 1 in a plane horizontal to the floor surface to the ascending position or the descending position.

The arms M, M are pivotally supported at their base ends by a lifting base 221. Each of the arms M, M rotates in a pair of planes parallel to the plane on which the arm M of the first robot 21 rotates, so that each of the work grip portions G, G is raised or lowered. Can take a posture. The left side of the work grips G in FIG. 2 is referred to as a left work grip G, and the right is referred to as a right work grip G.

In the state where the lifting base 221 has moved to the lowering position, when each of the work grips G, G assumes a rising posture or a lowering posture, the respective work grips G, G are moved.
The height of G from the floor is equal to the height of the work grip G from the floor when the work grip G of the first robot 21 is in the ascending posture or the descending posture.

Then, as shown in FIG. 3, when one of the work grips G, G takes a rising posture and a descending posture in a state where the lifting base 221 has moved to the rising position, the work grip is moved. The section G can transfer the work W to and from the work holder 121 of the work holding device 12.

Next, the turntable device 3 will be described. As shown in FIG. 1, the turntable device 3 is disposed between the spindle device 11 and the transfer device 2 on the side away from the work holding device 12.
The drying device 5, the cleaning device 4, and the work buffer 6
Are arranged between the turntable device 3 and the work holding device 12 in order toward the side closer to the work holding device 12.

FIG. 5 is a plan view of the turntable device 3 and is an enlarged view of the turntable device 3 in FIG. 6 and 7 are explanatory diagrams of the turntable device 3. FIG. FIG. 6 corresponds to FIG. 5 as viewed in the direction VI, and FIG. 7 corresponds to FIG. 5 as viewed in the direction VII.

As shown in FIG. 5, the turntable device 3 has a disk-shaped table 31 and a drive mechanism (not shown) for rotating the table 31. Then, on each semicircular area in the table 31,
A pair of cassettes C for storing the work W are removably mounted. When each of the cassettes C, C is placed on the table 31, the portion of the table 31 immediately below each of the cassettes C, C is opened in a rectangular shape. Then, the table 31 is driven by a driving mechanism and rotates 180 ° about a center axis thereof in a plane parallel to the floor, so that the positions of the cassettes C, C can be reversed.

Each of the cassettes C has a box-like overall shape. However, each of the cassettes C, C has an upper surface and a lower surface open, respectively, and the inside thereof is divided into a plurality of storage spaces by a plurality of partition walls C1. As shown in FIG. 7, each of the partition walls C1 has a substantially semicircular shape, and is arranged in parallel with each other below the cassettes C, C with their arc-shaped edges facing upward. These partition walls C1 are integrally fixed to the side walls of the cassettes C, C at both ends.

Each of these cassettes C, C
1, each pair of upper support members C2, C2 and each pair of lower support members C3, C3
have. Each of the upper support members C2, C2 and the lower support members C3, C3 has a groove formed therein, and in a state where half or more of the lower area of the work W is stored in the storage space, The work W can be stored by inserting the edge of the work W into the groove. The work W is stored in each of the storage spaces, with the lower two portions of the edge being held by the lower support members C3 and C3, respectively. In this state, each upper supporting member C
2 and C2 respectively hold the left end and the right end of the work W in FIG.

Further, the turntable device 3 comprises a pair of work lifting / lowering mechanisms 3 arranged below the table 31.
2,32. Each of these work lifting mechanisms 32, 32
Has a rectangular plate-shaped lift 321, a support frame 322, and an air cylinder 323.

Each of the elevating tables 321 and 321 has a plurality of comb-shaped guides T1 protruding from the upper surface thereof. Each of the comb-shaped guides T is in the form of a strip having a predetermined thickness, and is arranged in two rows along opposite sides on the upper surface of the elevating table 321.

Further, each of the elevating tables 321 and 321 moves the work W between the adjacent comb-shaped guides T1 and T1 and each of the comb-shaped guides T1 arranged opposite to the comb-shaped guides T1 and T1. , T1 and a plurality of holding guides T2 each having a groove formed therein for holding the lower end of the work W.

Each of the air cylinders 323 and 323 is
It has a piston movable in a direction perpendicular to the floor. Each of the support frames 322 and 322 has a substantially right triangular shape having two sides of an inverted L shape, and is fixed to the lower surfaces of the lift tables 321 and 321 at the upper side. In addition, each of these support frames 321 and 321 has a lower portion thereof with each of the air cylinders 323 and 323.
Connected to the piston. The air cylinders 323 and 323 can move the lift tables 321 and 321 to the raised position or the lowered position via the support frames 321 and 321 by raising and lowering the pistons thereof. In FIG. 7, a solid line indicates the elevator 321 at the ascending position, and a two-dot chain line indicates the elevator 321 'at the descending position.
It is.

When the elevators 321 and 321 are at their lowered positions, the upper end of each of the comb-shaped guides T1 is located slightly below the surface of the table 31. From this state, the air cylinders 323 and 323 are
When each of the workpieces 1 and 321 is raised, each work W is sandwiched in the gap between the comb-shaped guides T1 and T1. Then, when the lower end of each work W comes into contact with each holding guide T2 of each of the elevating tables 321 and 321, each of these works W is held by the comb tooth guide T1 and each of the holding guides T2, and It rises with 321 and 321. FIG. 7 shows a work W when the lift 321 is at its raised position and a work W 'when the lift 321 is at its lowered position.

Next, the cleaning device 4 will be described. FIG.
FIG. 4 is an explanatory view showing the cleaning device 4. This cleaning device 4
A cleaning chamber 41 for cleaning the ground work W and an upper lid 42 are provided. The cleaning chamber 41 is formed in a flat box shape.
The guide rail 231 is arranged perpendicular to the longitudinal direction. The upper part of the cleaning chamber 41 is open. The cleaning chamber 41 has a pair of long brushes 411 and 411 and a plurality of support rollers 412.

The cleaning chamber 41 is arranged at a position where it does not interfere with the sliding movement of the robot 21 when the work grip portion G of the robot 21 is in the ascending posture while holding the work W. In addition, the cleaning chamber 41 is held by the work grip portion G when the robot 21 changes the work grip portion G from the rising posture to the descending posture while holding the work W on the work grip portion G. It is arranged so that the work W can be stored.

The respective supporting rollers 412 of the cleaning device 41
When the work grip portion G holds the work W and assumes the lowered posture, the work grip portions G rotatably contact the lower edge portions of the work W, respectively.

The brushes 411, 4 of the cleaning device 41
Numerals 11 are each formed to be longer than the diameter of the work W, are arranged so that their longitudinal directions are parallel to each other in a plane parallel to the floor surface, and their brush tips face each other. However, FIG. 8 shows only one of them.

Then, each of these brushes 411, 411
Are arranged so as to face a diameter portion of the work W when the work grip portion G takes a lowered posture while holding the work W. Further, each of the brushes 411 and 411 is connected to a drive mechanism (not shown), and is spaced apart from each other by a predetermined distance, or the brush tip is brought into contact with both the front and back surfaces of the work W. Can be taken. And each brush 41
1, 411 can eject pure water for cleaning onto the work W.

The upper lid 42 is formed in a rectangular shape capable of sealing the upper opening of the cleaning chamber 41. The upper lid 42 is pivotally supported by the cleaning chamber 41 at an end on the side away from the transport device 2 and can be opened and closed by being driven by a drive mechanism (not shown). Further, the upper lid 42 has a pair of support rollers 421 and 421 disposed on the lower surface thereof. When the work W is sandwiched between the two brushes 411 and 411 of the cleaning chamber 41 and the lower edge portion thereof is in contact with each support roller 412 of the cleaning chamber 41, the upper cover 4
When 2 is closed, the respective support rollers 421 and 421 rotatably abut on the upper edge portion of the workpiece W.

Each of the support rollers 421 of the cleaning chamber 41 can rotate by being connected to a drive mechanism (not shown). Then, the work W is sandwiched between the brushes 411 and the edges thereof are supported by the support rollers 412 and 42.
When the support roller 421 rotates in a state where the workpiece W is in contact with the workpiece 1, the work W rotates in the cleaning device 4. At this time, when pure water for cleaning is ejected from each of the brushes 411 and 411 toward the work W, the entire area on both the front and back surfaces of the work W is cleaned by each of the brushes 411 and 411 and the pure water.

Next, the drying device 5 will be described. FIG.
FIG. 4 is an explanatory view showing a drying device 5. This drying device 5
Is formed in a flat box shape having an open upper part, and is disposed with a pair of wide surfaces thereof being perpendicular to the longitudinal direction of the guide rail 231 of the transport device 2. And
The drying device 5 includes a work grip portion G of the robot 21.
Is located at a position that does not interfere with the sliding movement of the robot 21 when the robot 21 is in the ascending posture while holding the work W. Moreover, this drying device 5
When the robot 21 moves the work grip portion G from the raised position to the lowered position while holding the work W on the work grip portion G, the work grip portion G and the work W can be stored. Are located.

The drying apparatus 5 has a pair of nozzles 51 formed in a long shape. Each nozzle 5
The lengths of the workpieces 1 and 51 are longer than the diameter of the workpiece W, and are disposed in parallel with and opposed to each other on the upper portion of the drying device 5. Note that these nozzles 51, 51 can jet dry air at a high speed obliquely downward.

Then, while the work grip portion G moves from the lowered position to the raised position while the work grip portion G is holding the work W, high-speed dry air is applied to the front and back surfaces of the work G. And the work W is dried. In addition, the drying device 5 has an exhaust duct 52 communicating with a mist collector (not shown) below the drying device. The air blown to the front and back surfaces of the work W and the mist scattered from the work W are sucked by the mist collector through the exhaust duct 52.

Next, the work buffer 6 will be described.
The work buffer 6 has a plurality of support members corresponding to the upper support members C2 and C2 and the lower support members C3 and C3 in the cassette C, and can hold one work W vertically. it can. That is, the work buffer 6 is configured to move the surface of the work W to the guide rail 2 of the transfer device 2.
In a state facing in a plane perpendicular to the longitudinal direction of 31,
The work W can be held. Robot 2
When the first work grip portion G is in the lowered posture, the edge of the work W held by the work grip portion G comes into contact with each support member of the work buffer 6.
In this state, when the work grip portion G is opened,
The work W is held vertically only by the work buffer 6.

Next, a control system of the work processing system will be described with reference to FIG. The work processing system includes the spindle devices 11, 11 and the work holding device 1
2, transfer device 2, turntable device 3, cleaning device 4,
And a control device 7 connected to the drying device 5. The control device 7 controls each of the spindle devices 1
1, 11, the work holding device 12, the transfer device 2, the turntable device 3, the cleaning device 4, and the drying device 5 can be controlled to execute the respective steps of grinding, cleaning, and drying the work W. .

The operation of this embodiment will be described below. In advance, the operator inserts the cassette C storing a plurality of unprocessed works W into the table 31 of the turntable device 3.
It is placed at the upper left position in FIG. The operator places the empty cassette C at a position on the table 31 on the right side in FIG. Then, the operator operates the control device 7 to instruct the control device 7 to start the operation of the work processing system.

In response to this instruction, the control device 7 starts machining the work W. First, the control device 7 moves each of the lifts 321 and 321 of the turntable device 2 to the raised position. Then, the work W in the cassette C on the side where the work W is stored rises together with the lift 321. In addition, the control device 7 moves the work holder 121 of the work holding device 12 to the retracted position and takes a rising posture.

In this state, the control device 7 sets the work grip portion G of the robot 21 to the rising posture, and moves the robot 21 to the position of the cassette C in which the work W is stored. The control device 7 controls the robot 21
The work grip portion G is set in a descending posture in a state where the work grip portion G is opened. Further, the control device 7
The work grip portion G of the robot 21 is closed to grip the work W, and the work grip portion G is set to the rising posture. Then, the control device 7 moves the work grip portion G to the position of the work buffer 6. And robot 2
1 moves the work W to the work buffer 6 by releasing the work grip portion G after the work grip portion G is in the lowered posture.

Next, the control device 7 moves the work grip portion G of the robot 21 to the position of the cassette C in which the work W is stored, and raises the work grip portion G of the robot 21 again.
The work W from The control device 7 causes the second robot 22 to retrieve the work W placed on the work buffer 6 while operating the first robot 21 in this manner. That is, the control device 7 moves the elevating base 221 of the robot 22 to the lowered position, and sets the two work grips G, G in the ascending posture. Then, the control device 7 moves the robot 22 to the position of the work buffer 6, and brings the robot 22 into a lowered posture with the right work grip portion G opened. Further, the control device 7 closes the right work grip portion G to grip the work W, and sets the right work grip portion G to the rising posture. Then,
The control device 7 moves the elevating base 221 of the robot 22 to the ascending position, and moves the robot 22 to the work holding device 12.
To the position.

As described above, since the robot 22 has taken out the work W from the work buffer 6, the work buffer 6 is empty. Note that the control device 7 controls the second
While the work W is taken out of the work buffer 6 by the robot 22, the next work W is taken out of the cassette C by the first robot 21. Therefore,
The control device 7 can place the next work W on the work buffer 6 by the first robot 21 immediately after taking out the work W from the work buffer 6 by the second robot 22.

On the other hand, the control device 7 controls the work holding device 12
The work W is transferred to the work holder 121 of the work holding device 12 by the robot 22 moved to the position shown in FIG.
That is, the control device 7 sets the right work grip portion G of the robot 22 to the descending posture. In this state, the work W gripped by the right work grip portion G is held by the work holder 121. Therefore, the control device 7
The work W can be transferred to the work holder 121 by opening the right work grip portion G and raising the work posture.

Next, the control device 7 controls the work holding device 12
Is ground. That is, the control device 7
Moves the work holder 121 to the grinding position and sets the work holder 121 to the lowered posture. Then, the control device 7 causes the work wheels W to be rotated by the work holder 121, and causes the grindstones 11a, 11a of the spindle devices 11, 11 to come close to each other while being rotated at a high speed. In addition, both whetstones 11
When a and 11a reach a predetermined interval, the control device 7 ends the grinding.

The control device 7 causes the robot 22 to pick up the next work W while the work W is being ground by the double-headed grinding machine 1. That is, the control device 7 moves the elevating base 221 of the robot 22 to the descending position, and
2 is moved to the position of the work buffer 6. The next work W conveyed by the first robot 21 is already placed in the work buffer 6. Therefore, the second
Can take out the workpiece W immediately. In addition, the control device 7 includes the work buffer 6.
As soon as is empty, the robot 21 causes the work buffer 6 to be refilled with a new unprocessed work W as described above.

Then, as described above, the control device 7 causes the right work grip portion G of the robot 22 to grip the work, raises the elevating base 221 thereof, and sets each of the work grip portions G to the rising posture. . Further, the control device 7 moves the robot 22 in this state to the position of the work holding device 12.

On the other hand, when the grinding of the work W by the double-headed grinding machine 1 is completed, the control device 7 moves the work holder 121 to the retracted position and sets the work holder 121 to the raised position. And
The control device 7 controls the left work grip portion G of the robot 22.
As a result, the ground work W is taken out of the work holder 121. That is, the control device 7 sets the robot 22 in the lowered posture with the left work grip portion G of the robot 22 opened.
Then, the control device 7 closes the left work grip portion G to grip the ground work W, and sets the left work grip portion G to the rising posture.

Further, the controller 7 adjusts the position of the robot 22 with respect to the work holder 121 in accordance with the right work grip portion G, and the right work grip portion G grips the right work grip portion G as described above. The unprocessed work W is transferred to the work holder 121.

Next, the control device 7 cleans the ground work W held by the left work grip portion G of the robot 22. That is, the control device 7 moves the robot 22 to the position of the cleaning device 7, moves the elevating base 221 to the lowered position, sets the left work grip portion G to the lowered posture, and opens it. Then, the ground work W is stored in the cleaning device 4. Then, the control device 7 causes the two brushes 411, 411 and the pure water to wash the work W while rotating the work W in the washing device 4. Note that the robot 22 is controlled so as to immediately transfer the unprocessed work W to the work buffer 6 as described above, after transferring the ground work W to the cleaning device 4.

As soon as the cleaning of the work W in the cleaning device 4 is completed, the control device 7 moves the first robot 21 to the position of the cleaning device 4 and descends with the work grip portion G opened. Posture. Then, the control device 7 controls the work grip portion G of the robot 21.
Is closed, the cleaned work W is gripped, and the work grip portion G is set in the raised posture.

Further, the control device 7 moves the robot 21 to the position of the drying device 5, temporarily lowers the work grip portion G, and then slowly moves the work grip portion G to the upward posture. Go on. During this time, the control device 7 blows dry air from the nozzles 51 of the drying device 5 onto the work W to dry the work W.

Then, the control device 7 controls the robot 21 to
The cassette is moved to the position of the empty cassette C. Then, the control device 7 stores the dried work W in the empty cassette C by opening the work grip portion G of the robot 21 in the lowered posture.

As described above, one cassette C arranged on the left side of FIG. 1 is used for storing the unprocessed work W, while the other cassette C arranged on the right side of FIG. C is used to store a processed work W on which all of the grinding, cleaning, and drying processes have been completed.

When all of the unprocessed works W are taken out from one of the cassettes C by repeating the above-described processing, the control device 7 rotates the table 31 of the turntable 3 to rotate the two cassettes C. , C are interchanged. Then, the cassette C storing the processed work W moves to the right side in FIG. In this state, the operator takes out the cassette C containing the processed work W arranged on the right side of FIG.
The cassette C in which the unprocessed work W is stored is placed.

As described above, in each of the grinding, cleaning, and drying processes in the work processing system, the work W is set to be always vertical, and when the work W is transported in a vertical state, the work processing system is installed. Required floor space. For example, if the work W has a diameter of 40
In the case of a silicon wafer of 0 mm, the work processing system of the present embodiment requires less than 1/3 of the floor area required for installation, as compared with the conventional work processing system in which the work W is processed horizontally.

[0084]

As described above, the work processing system of the present invention configured as described above processes the work in a vertical state in all the processes, so that the floor area required for transferring and processing the work is reduced. Become smaller. Therefore, the installation floor area of the entire work processing system is reduced.

[Brief description of the drawings]

FIG. 1 is a plan view of a work processing system according to an embodiment of the present invention.

FIG. 2 is a view of the transport device in FIG. 1 as viewed in a direction II.

FIG. 3 is a sectional view taken along the line III-III in FIG. 1;

FIG. 4 is an explanatory view showing a first robot.

FIG. 5 is a plan view showing a turntable device.

FIG. 6 is an explanatory view showing a turntable device.

FIG. 7 is an explanatory view showing a turntable device.

FIG. 8 is an explanatory view showing a cleaning device.

FIG. 9 is an explanatory view showing a drying device.

FIG. 10 is a block diagram schematically showing a control system of the work processing system.

FIG. 11 shows a conventional work processing system.

FIG. 12 shows a conventional work processing system.

[Description of Signs] 1 Double-ended grinding machine 11 Spindle device 12 Work holding device 2 Transfer device 21 First robot 22 First robot 3 Turntable device 4 Cleaning device 5 Drying device 6 Work buffer 7 Control device G Work grip part W work

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Kazutaka Hara 63-30 Yuyugaoka, Hiratsuka-shi, Kanagawa Prefecture Sumitomo Heavy Industries Machinery Co., Ltd. No.2 Sumitomo Heavy Industries, Ltd. Niihama Works (72) Inventor Morio Maeda 5-2 Sokai-cho, Niihama-shi, Ehime F-term (reference) 3C043 BC08 CC04 DD06 5F031 CA01 CA02 FA01 FA07 FA12 FA18 GA10 GA14 GA15 GA43 GA47 GA49 HA73 MA22 MA23

Claims (6)

[Claims] 1. A processing device having a pair of working surfaces facing each other parallel to each other and rotating about a predetermined axis horizontal to a floor surface, and a circle to be processed between the two working surfaces in the processing device. It has a work holding device for inserting a plate-shaped work, a pair of cassettes for storing the work in a state perpendicular to the floor, and a work grip portion for gripping the work in a state perpendicular to the floor. And a transfer device for moving the work between the work holding device and each of the cassettes. 2. A washing apparatus for washing the processed work in a state perpendicular to the floor, and a drying apparatus for drying the washed work in a state perpendicular to the floor, The transfer device transfers the work to the work holding device,
The workpiece processing system according to claim 1, wherein the workpiece is moved between each of the cassettes, the cleaning device, and the drying device. 3. The transfer device according to claim 1, wherein the work grip portion takes out the unprocessed work stored in one of the cassettes and transfers the work to the work holding device. The work is taken out and transported to the washing device, the washed work is taken out from the washing device and carried to the drying device, and the dried work is taken out from the drying device and stored in the other cassette. The work processing system according to claim 2, wherein: 4. A work buffer capable of supporting the work in a state perpendicular to a floor surface, wherein the transfer device includes a first robot having the work grip, and the work grip. Having a second robot having the first robot, the work grip portion of the first robot takes out the unprocessed work previously stored in one of the cassettes, and transports the work to the work buffer;
By the work grip part of the second robot, the work supported by the work buffer is transferred to the work holding device, and the processed work is taken out from the work holding device and transferred to the cleaning device. The work grip portion of the first robot takes out the cleaned work from the cleaning device, transports the work to the drying device, takes out the dried work from the drying device, and stores the work in the other cassette. The work processing system according to claim 2, wherein: 5. A second robot in the transfer device,
The transfer device has a pair of work grip portions, and the transfer device takes out an unprocessed work from the work buffer by one work grip portion of the second robot and holds the work, and the other of the second robot has the other work grip portion. The work processing system according to claim 4, wherein the processed work is taken out of the work holding device by the work grip portion, and the unprocessed work is transferred to the work holding device by one of the work grip portions. 6. The work processing system according to claim 1, further comprising a turntable device for mounting the two cassettes and reversing the positions of the two cassettes.