JP2001157816A - Exhaust gas treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an exhaust gas treatment device wherein pressure loss is small, discharge spots rarely occur, generation of heat is small, and exhaust gas removal capacity is high. SOLUTION: The exhaust gas treatment device comprises a fan, an air passage through which air taken in by the fan is passed, a pair of electrodes provided along the air passage, an AC or pulse source for impressing high voltage to the pair of electrodes, and a filter of laminated construction which is disposed between the electrodes so as to extend along the air passage, leaving a space between the filter and the electrode, and which is composed principally of a dielectric material.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust gas treatment apparatus for removing odorous gas and harmful gas from air.

[0002]

2. Description of the Related Art Generally, there is known a method of removing a pollutant gas in which a gas is turned into a plasma state by electric discharge and components of odorous gas and harmful gas are decomposed by generated radicals. For example, Japanese Patent Application Laid-Open No. 2-52021 proposes an exhaust gas treatment apparatus using a partial discharge method in which ferroelectric particles are arranged between electrodes to generate discharge. FIG. 10 is a side sectional view of a conventional exhaust gas treatment device disclosed in the publication. In the figure, 1 is a cylindrical tube made of an insulator, 2 is an air inlet, 3 is an air outlet, 4 is an air passage, 5 is a pair of copper electrodes having an air passage hole, 6 is a partition wall, and 7 is titanic acid. This is a gas treatment layer filled with a large number of particles obtained by processing a ferroelectric material such as barium into a spherical shape (particle diameter: about 3 mm). Reference numeral 8 denotes a reaction layer filled with an adsorbent, which acts as a filter in cooperation with the gas treatment layer 7. Reference numeral 9 denotes an AC or pulse power supply for applying a high voltage of about 5 kV to the pair of copper electrodes 5.

[0003] In the above configuration, the air containing the odorous gas component is pumped while a high voltage is applied between the copper electrodes 5,
When the air is introduced into the air passage 4 of the cylindrical tube 1 from the air inlet 2 of the cylindrical tube 1 by a blowing device such as a fan, a part of the air is turned into a plasma state by a discharge generated around the ferroelectric particles. Odor gas components are decomposed into simple odorless and harmless molecules by the reaction of the generated radicals. The odor gas component remaining without being decomposed is adsorbed and removed by the adsorbent filled in the reaction layer 8, and the air from which the odor gas component has been almost completely removed is discharged from the air discharge port 3 of the cylindrical tube 1.

[0004]

The conventional exhaust gas treatment apparatus is configured to remove odorous gas and harmful gas components in the air by utilizing a radical reaction by partial discharge of ferroelectric particles as described above. Have been. However, in order to obtain sufficient deodorizing performance, it is necessary to generate radicals sufficiently, and it is necessary to reduce the particle size of the ferroelectric particles to about several mm and increase the contact area with air. For this reason, the pressure loss in the air passage increases, and it is necessary to use a fan having a high blowing capacity, which causes problems such as an increase in cost, power consumption, apparatus size, and noise during operation.

In addition, since it is difficult to keep ferroelectric particles uniform in the reaction layer, there is a problem that discharge spots occur in the layer and contaminant gas cannot be sufficiently removed. Further, if the discharge is continuously performed for a long time, the heat generated from the ferroelectric particles is large, so that there is a problem that the life of the entire device is shortened and the gas temperature after the treatment increases.

The present invention has been made to solve the above problems, and an object of the present invention is to provide an exhaust gas treating apparatus having a small pressure loss, a small discharge spot and a small calorific value, and a high exhaust gas removing capability. And

[0007]

An exhaust gas treatment apparatus according to the present invention comprises a fan, an air passage through which air taken in by the fan passes, an electrode pair provided along the air passage, and a high voltage applied to the electrode pair. , And a filter having a laminated structure having a gap between the pair of electrodes along the air path and having a ferroelectric material as a main component.

Further, the electrode pair is composed of a flat electrode, and the filter is any one of a flat plate, a corrugated plate, a square plate, a round bar, and a hollow cylinder.
Alternatively, a laminated structure is formed by a combination thereof.

Further, the electrode pair is constituted by a cylindrical electrode and a needle electrode, and the filter has a laminated structure in which a plurality of substantially hollow cylinders having different diameters are concentrically arranged.

The filter is configured such that each layer constituting the laminated structure is in contact with an adjacent layer at a point or a line.

[0011] The filter has a base material of a conductor or an insulator and a part or all of the surface thereof coated with a ferroelectric material.

The filter is formed by coating a conductor or an insulator as a base material, a part of the surface thereof with a ferroelectric substance, and coating the remaining part with a catalyst, an adsorbent, or a composite thereof. .

The ferroelectric material has a relative dielectric constant of 1000.
The above is used.

Further, the filter has a gap of 1 m for the laminated structure.
m and 5 mm or less.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIGS. 1 and 2 are a side sectional view and an air outlet sectional view, respectively, showing Embodiment 1 of an exhaust gas treatment apparatus according to the present invention. The same or corresponding parts as those in the conventional example are denoted by the same reference numerals, and description thereof will be omitted. The different parts will be described. In FIG. 1, 10 is a fan, 11 is an air path 4
A pair of flat electrodes 12 are disposed inside and opposed to each other so as to be parallel to the flow of wind. Reference numeral 12 denotes a ferroelectric flat plate formed by sintering and molding a mixture of barium titanate and calcium zirconate.
As shown in FIG. 2, the cross section of the air path 4 is rectangular, and the flat width of the flat plate 12 is set to substantially match the horizontal width of the air path 4, and the vertical width is set to a length in consideration of the maximum wind speed. I have. Further, a flat plate 10 having the same shape is provided between the planar electrodes 11.
A plurality of filters are arranged at equal intervals t along 1 to constitute a filter.

The operation of the exhaust gas treatment apparatus having the above configuration will be described with reference to the drawings. In FIG. 1, air containing odorous gas and harmful gas is guided to the gap between the plate electrodes 11 and the plate 12 and the gap between the plate 12 by the suction operation of the fan 10 at the subsequent stage through the air inlet 2. Since the flat plate 12 is made of a ferroelectric material, when an AC voltage is applied, polarization occurs in the flat plate 12 and a pulse discharge occurs between the flat plates 12. This discharge forms a plasma state in the space in each gap, and generates radicals. Since radicals have extremely strong oxidizing power, oxidative decomposition of odorous gas and harmful gas is rapidly performed, and the radical changes to odorless and harmless substance. In this way, the discharge space formed by the flat plate 12 functions as a filter for purifying air, and by passing therethrough, odor gas and harmful gas are removed. The clean air after passing through is discharged to the outside of the apparatus via the air discharge port 3.

Here, the pulse discharge between the flat plates 12 is uniformly generated like a shower from the entire surface of each flat plate 12, so that the radical concentration in the discharge space becomes constant, and contaminated air passing through the air passage 4 and contaminated air. Evenly mixed. Therefore, the gas phase reaction between the radical and the odor gas component proceeds smoothly, and a high removal effect is realized despite the low pressure loss structure in which air flows along the flat plate 12 through the gap between the flat plates 12.

On the other hand, in the conventional method in which the air path is filled with particles made of a ferroelectric substance, a short path of discharge (short path) is formed, and radicals are generated only in the vicinity of the short path. In order to obtain, a large number of short paths must be generated by increasing the packing density or the filling amount, resulting in a structure having a large pressure loss.

This point will be described based on specific experimental results. Table 1 compares the first embodiment and the conventional example by measuring the removal effect and the pressure loss by experiments. Here, the size of the plate electrode 11 was 250 mm long, 40 mm wide and 0.5 mm thick, and the size of the plate 12 was 200 mm long, 40 mm wide and 2 mm thick. Flat plate 12
Were used, and the gap t was set to 5 mm. Two plate electrodes 1
During 1, a voltage of 10 kV was applied by the AC power supply 9.

In the first embodiment and the conventional example, the volume of the ferroelectric material in the discharge space is set to be the same. Acetaldehyde was used as the odorous substance, and the concentration in the air was adjusted to about 20 ppm. A ferroelectric material having a relative dielectric constant of 3000 was used as the ferroelectric material forming the flat plate 12, the flow velocity and the flow rate were set to 1 m / sec and 1 cubic m / min, respectively, and the pressure loss was measured by a differential pressure gauge.

[0021]

[Table 1]

Here, the removal efficiency (%) is given by the following equation from the air inlet concentration and the air outlet concentration. Removal efficiency = (air inlet concentration−air outlet concentration) / air inlet concentration × 100 Equation (1) Therefore, when the results of Table 1 are substituted into this equation, the removal efficiency in the first embodiment and the conventional example is 76. 0.6%,
74%, which is almost the same. On the other hand, the pressure loss in the first embodiment is 22.3% of the conventional example.
(= 12.7 / 56.9 × 100), which is greatly reduced. That is, it can be seen that the configuration of the first embodiment achieves a higher removal efficiency with a lower pressure loss than the conventional example.

Table 2 shows the change in odor gas concentration when the relative dielectric constant of the ferroelectric is changed. The one having a relative dielectric constant of 5 used a copper electrode coated with mica, and the other used a ferroelectric material mainly composed of calcium titanate and barium titanate. The experimental conditions were the same as those set in Table 1, except for the specification of the ferroelectric.

[0024]

[Table 2]

When the removal efficiency is calculated by substituting the result of Table 2 into the equation (1), 21.4% is obtained in ascending order of the dielectric constant.
46.2%, 75.1%, and 76%. Therefore, the removal efficiency increases with an increase in the relative dielectric constant,
It can be seen that saturation occurs from around. From this, it is considered that the ferroelectric used for the flat plate 12 preferably has a relative dielectric constant of 1000 or more.

Table 3 shows the pressure loss and the discharge state when the distance t between the flat plates 12 is changed. The experimental conditions were the same as those set in Table 1, except for the specification of the ferroelectric.

[0027]

[Table 3] ×: no discharge current, Δ: small discharge current, ○: medium discharge current, ◎: large discharge current

The removal effect has a correlation with the discharge state. As is clear from Table 3, when the interval t is 30 mm, no discharge occurs and there is no removal effect. As the interval t becomes narrower, the discharge state becomes better and the removal effect increases, but conversely, the pressure loss increases. In particular, when the interval t becomes smaller than 1 mm, it increases rapidly. Therefore, the interval t is determined by the balance (trade-off) between the discharge state and the pressure loss. Deemed desirable.

When the cross section of the air passage 4 is circular, the cylindrical electrode 13 as shown in FIG. Using a pair, instead of the flat plate 12, a hollow cylinder 15 made of a ferroelectric material.
A similar effect can be obtained by forming a concentric laminated structure using the above.

Second Embodiment FIG. 4 is a sectional view of an exhaust gas outlet of an exhaust gas treating apparatus according to a second embodiment of the present invention. The same or corresponding portions as those in the conventional example or the first embodiment are denoted by the same reference numerals, and description thereof is omitted. The different parts will be described. In the figure, reference numeral 16 denotes a corrugated plate having the same width and length as the flat plate 12, and a plurality of corrugated plates are arranged between the flat electrodes 11 at equal intervals along the flat electrodes 11. Compared to the flat plate 12 of the first embodiment, the corrugated plate 16 has a larger surface area and the contact efficiency with odorous gas and harmful gas is increased, so that a higher removal effect is achieved. Further, by forming the corrugated plate 16 in a net shape, the contact efficiency is further improved, and a further removing effect is achieved.

Although the corrugated plate 16 has been described as an example here, a square plate 17 having a triangular shape like a saw tooth shown in FIG. 5 can achieve a higher removal effect than the flat plate 12 for the same reason. Is done.

The removing operation and effect of the apparatus are the same as those of the first embodiment, and the description is omitted.

Third Embodiment FIG. 6 is a sectional view showing an exhaust gas discharge port of an exhaust gas treating apparatus according to a third embodiment of the present invention. The same or corresponding portions as those in the conventional example or the first and second embodiments are denoted by the same reference numerals, and description thereof is omitted. The different parts will be described. In the figure, the corrugated plate 16 is configured to be in point contact or line contact with an adjacent corrugated plate 16 at a convex or concave portion corresponding to a peak or a valley. With such a configuration, there is an advantage that discharge easily occurs in a contact portion between the corrugated plates 16 and discharge also easily occurs in a gap between the corrugated plates 16.

In FIG. 6, instead of a structure in which the corrugated plates 16 are in contact with each other, a structure integrally formed may be used. In this case, the mechanical strength is increased by the integration, and the handling becomes easy. However, on the other hand, the electric discharge in the gap between the corrugated plates 16 is less likely to occur, and the removing effect is slightly reduced. Here, the structure in which the corrugated plates 12 are in contact with each other by the convex or concave portions has been described as an example, but the rectangular plate 17 or an appropriate plate that periodically repeats the concave and convex may be used. Even in the case of a corrugated honeycomb structure in which 17 is alternately superimposed on the flat plate 12, the same effect can be obtained because the flat plate 12 comes into contact with the corrugated plate 12 or the convex or concave portion of the square plate 17.

For the same reason, in the first embodiment as well, a spacer such as a round bar, a square bar, or a sphere made of a ferroelectric material and having a size corresponding to the interval t is used.
If it is properly inserted and arranged so as to come into contact with, the discharge between the flat plates 12 is promoted, and the removal effect is increased.

The removing operation and effect of the apparatus are the same as those of the previous embodiments, and the description is omitted.

Fourth Embodiment FIG. 7 is a sectional view of an air discharge port showing an exhaust gas treatment apparatus according to a fourth embodiment of the present invention. The same or corresponding portions as those in the conventional example or the first, second, and third embodiments are denoted by the same reference numerals, and description thereof is omitted. The different parts will be described. In the figure, reference numeral 18 denotes a round bar made of a ferroelectric material, which constitutes a filter by being stacked in a laminated shape. With such a configuration, the round bar 18 has a low pressure loss.
Partial discharge can be caused in the gap between them. As shown in FIG. 8, a hollow cylinder 19 made of a ferroelectric material may be used instead of the round bar 18. In this case, the pressure loss is lower, but on the other hand, the removal effect is slightly reduced.

The removing operation and effect of the apparatus are the same as those of the embodiments described above, and the description is omitted.

Fifth Embodiment In the fifth embodiment, the flat plate, corrugated plate or the like in the above embodiments is made of a ferroelectric material comprising a copper plate as a base material and a mixture of barium titanate and calcium zirconate on its surface. Is manufactured by a coating method. As a coating method, a sputtering method by plasma deposition is optimal from the viewpoint of the strength and uniformity of the film, but is not necessarily limited thereto, and there are other methods that can form a strong and uniform film at a low cost. Not a cigarette.
Here, in the sputtering method, a film thickness of about 0.1 μm is possible, and the flatness of the flat plate is maintained higher than in the case where the ferroelectric substance is sintered into a flat plate shape. Can be generated. Also,
Since the inside is not ferroelectric but a conductor, excessive heat generation does not occur, and the life of the device can be extended.

Further, a normal dielectric such as glass may be used as the base material. A normal dielectric can be regarded as almost an insulator like a ferroelectric, but is different in that the relative dielectric constant is 1/10 or less, there is a large difference in the degree of polarization of the crystal, and there is no spontaneous polarization property. Therefore, when a normal dielectric material is used as a base material, heat generation is extremely small, which is advantageous in terms of life.

As the base material, an adsorbent material such as activated carbon, zeolite, porous ceramic, activated alumina, silica gel, clay or the like, or a mixture thereof may be used. In this case, it is advantageous to coat the ferroelectric substance partially instead of coating the entire surface of the base material in order to utilize the adsorption capability of the base material.

The removing operation of the apparatus is the same as that of the above-described embodiments, and a description thereof will be omitted.

Sixth Embodiment In a sixth embodiment, a ferroelectric material such as barium titanate is coated on the surface in the fifth embodiment.
Coating a composite of manganese dioxide and copper and zeolite. Manganese dioxide and copper act as catalysts, and zeolite acts as an adsorbent for adsorbing the remaining odorous substances that are not completely decomposed by the gas phase reaction with radicals.

Since the removing operation is the same as that of the above-described embodiments, the description will be omitted, and only different parts will be described. The manganese dioxide and copper coated on the plate act as catalysts, promoting the reaction between radicals and odorous gas, and increasing the removal efficiency. At the same time, it decomposes harmful ozone and nitrogen oxides generated during discharge.

On the other hand, the remaining odorous substances which are not completely decomposed by the radicals are adsorbed by the zeolite. The adsorbed odorous substance is gradually decomposed by radicals generated from the discharge part, converted into simple molecules and re-emitted into the atmosphere. This regenerates the zeolite adsorption sites,
It can be prepared for the capture of the next odorant.

Table 4 shows a comparison of the removal effect of the catalyst and the zeolite complex according to the sixth embodiment by experiments with respect to the catalyst with and without the catalyst. Here, ammonia was used as the odorant. Other conditions are the same as those set in Table 1.

[0047]

[Table 4]

When the removal efficiency was calculated based on the result of Table 4 from the equation (1), it was 97.5% for the catalyst impregnated with the zeolite composite and 97.5% for the non-impregnated composite.
60%, indicating that the removal efficiency is improved by the catalytic action.

Seventh Embodiment In a seventh embodiment, the surface of the flat plate or corrugated plate in the above embodiments is coated in a stripe shape as shown in FIG. In the figure, reference numeral 20 denotes a ferroelectric coating portion, and reference numeral 21 denotes a catalyst / zeolite composite coating portion. Such processing is performed by alternately masking each part and coating the corresponding part with a ferroelectric or a composite of manganese dioxide, copper and zeolite.

The site for generating radicals as described above,
Since the site that adsorbs the odor gas component and promotes the reaction with the radical is adjacent to and alternately arranged, (1) adsorption of the odor gas component, (2) decomposition of the odor gas component, (3) A series of cycles of regeneration proceeds smoothly, and contaminant gas can be removed reliably, stably, and quickly.

Although a striped pattern is taken as an example here, a checkered pattern may be used, and a ferroelectric coating portion and a catalyst and zeolite coating portion may be alternately adjacent to each other. Obviously, a similar effect can be obtained. Note that the other parts are the same as those in the above-described embodiments, and thus description thereof is omitted.

[0052]

Since the present invention is configured as described above, it has the following effects.

A fan, an air path through which air taken in by the fan passes, an electrode pair installed along the air path, an AC or pulse power supply for applying a high voltage to the electrode pair, Since a filter having a laminated structure having a gap along an air passage and having a ferroelectric material as a main component is provided, an exhaust gas treatment device having a low pressure loss and a high removal efficiency can be obtained.

The electrode pair is composed of a flat electrode, and the filter is any one of a flat plate, a corrugated plate, a square plate, a round bar and a hollow cylinder.
Alternatively, since the laminated structure is formed by a combination of these, an exhaust gas treatment apparatus having a low pressure loss and a high removal efficiency can be obtained with a simple configuration.

Further, since the electrode pair is composed of a cylindrical electrode and a needle electrode, and the filter has a laminated structure in which a plurality of substantially hollow cylinders having different diameters are concentrically arranged, the pressure loss is low and the removal efficiency is high. An exhaust gas treatment device can be obtained with a simple configuration.

Further, since each layer constituting the laminated structure is configured to be in contact with an adjacent layer at a point or a line, an exhaust gas treatment apparatus having a low pressure loss and a high removal efficiency can be obtained with a simple configuration. .

Further, since the filter is formed such that a conductor or an insulator is used as a base material and a part or all of the surface thereof is coated with a ferroelectric material, an exhaust gas treatment apparatus having a low pressure loss and a high removal efficiency is provided. , With a simple and inexpensive configuration. In addition, since the calorific value is small,
A longer life is realized.

Further, the filter is formed such that a conductor or an insulator is used as a base material, a part of the surface is coated with a ferroelectric substance, and the remaining part is coated with a catalyst, an adsorbent, or a composite thereof. As a result, an exhaust gas treatment device with low pressure loss and high removal efficiency can be realized with a simple and inexpensive configuration. In addition, since the calorific value is small, a long life is realized.

The ferroelectric substance has a relative dielectric constant of 1000.
By using the above, an exhaust gas treatment device with high removal efficiency can be obtained.

Further, the gap of the laminated structure should be 1 mm or more and 5 m or more.
m or less, it is possible to obtain an exhaust gas treatment device with low pressure loss and high removal efficiency.

[Brief description of the drawings]

FIG. 1 is a side sectional view showing Embodiment 1 of an exhaust gas treatment apparatus according to the present invention.

FIG. 2 is a sectional view of an air discharge port showing the first embodiment of the exhaust gas treatment apparatus according to the present invention.

FIG. 3 is a sectional view of another air discharge port showing the first embodiment of the exhaust gas treatment apparatus according to the present invention.

FIG. 4 is a cross-sectional view of an air discharge port of an exhaust gas treatment apparatus according to Embodiment 2 of the present invention.

FIG. 5 is a cross-sectional view of another air discharge port showing the second embodiment of the exhaust gas treatment apparatus according to the present invention.

FIG. 6 is a sectional view of an air discharge port showing an exhaust gas treatment apparatus according to Embodiment 3 of the present invention.

FIG. 7 is a sectional view of an air discharge port showing an exhaust gas treatment apparatus according to Embodiment 4 of the present invention.

FIG. 8 is a cross-sectional view of another air discharge port showing the fourth embodiment of the exhaust gas treatment apparatus according to the present invention.

FIG. 9 is a diagram showing a surface state of a flat plate or a corrugated plate showing Embodiment 5 of the exhaust gas treatment apparatus according to the present invention.

FIG. 10 is a side sectional view showing a conventional exhaust gas treatment device.

[Explanation of symbols]

1 cylindrical tube, 2 air inlet, 3 air outlet,
4 air passage, 5 copper electrode, 6 partition wall, 7 gas treatment layer, 8 reaction layer, 9 AC power supply, 10 fan, 11 plate electrode, 12 plate, 13 cylindrical electrode, 14 needle electrode, 15 hollow cylinder, 16 Corrugated plate, 17 square plate, 18 round bar, 19 hollow cylinder, 2
0 Coated part of ferroelectric, 21 Coated part of catalyst and zeolite composite

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Naoki Nakatsugawa 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F-term within Mitsubishi Electric Corporation (reference) 4D002 AA13 AA32 AB02 BA04 BA07 BA20 CA11 CA13 DA11 DA23 DA24 DA45 DA70 EA03 EA07 4D048 AA22 AB03 BA28X BA35X BA41X BB03 BB05 BB06 CA01 CC32 CC40 EA03 EA04 4G069 AA03 AA08 BA07A BA07B BB02A BB02B BB04A BB04B BC31A BC31B BC62A BC62B CA10 CA17 EA06 Z03

Claims (8)

[Claims] A fan, an air passage through which air taken in by the fan passes, an electrode pair provided along the air passage, an AC or pulse power supply for applying a high voltage to the electrode pair, An exhaust gas treatment apparatus comprising a filter having a laminated structure having a gap between the electrode pairs along the air path and having a ferroelectric material as a main component. 2. The method according to claim 1, wherein the pair of electrodes comprises a planar electrode, and the filter has a laminated structure of any one of a flat plate, a corrugated plate, a square plate, a round bar, a hollow cylinder, or a combination thereof. Item 7. An exhaust gas treatment apparatus according to Item 1. 3. The filter according to claim 1, wherein said pair of electrodes comprises a cylindrical electrode and a needle electrode, and said filter has a laminated structure in which a plurality of substantially hollow cylinders having different diameters are concentrically arranged. Exhaust gas treatment equipment. 4. The exhaust gas according to claim 1, wherein the filter is configured such that each layer constituting the laminated structure is in contact with an adjacent layer at a point or a line. Processing equipment. 5. The filter according to claim 1, wherein a part of or the entire surface of the filter is coated with a ferroelectric substance using a conductor or an insulator as a base material. An exhaust gas treatment device as described in the above. 6. The filter according to claim 1, wherein a conductor or an insulator is used as a base material, a surface of the filter is coated with a ferroelectric substance, and the remaining part is coated with a catalyst, an adsorbent, or a composite thereof. The exhaust gas treatment device according to any one of claims 1, 2, 3, and 4, wherein: 7. The ferroelectric substance has a relative dielectric constant of 1000.
Claims 1 and 2 characterized by using the above.
An exhaust gas treatment apparatus according to any one of 3, 4, 5, and 6. 8. The filter according to claim 1, wherein a gap of the laminated structure is 1 mm.
Claims 1, 2, and 5 mm or less.
An exhaust gas treatment apparatus according to any one of 3, 4, 5, 6, and 7.