JP2001102886A - Method and device for forming electrode for piezoelectric vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device for forming electrode of a piezoelectric vibrator with which the electrode can be formed at low cost in a short time without using a mask for electrodes an wasting a metal part. SOLUTION: Concerning the method for forming electrodes of a piezoelectric vibrator 11, a transparent substrate 13 is arranged between a main body 11a of the piezoelectric vibrator and a laser beam oscillating part 17, a metal part 14 is provided on the transparent substrate on the side of the main body of piezoelectric vibrator and the transparent substrate is irradiated with laser beam from the laser beam oscillating part so that an electrode 18 can be formed on the surface of the main body of piezoelectric vibrator.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for forming electrodes on a piezoelectric vibrating element for forming electrodes on the surface of a piezoelectric vibrating element main body.

[0002]

2. Description of the Related Art A piezoelectric vibrating reed, which is a piezoelectric vibrating element, is configured, for example, as shown in FIG. FIG. 7 (a)
FIG. 7B is a diagram illustrating the surface of the piezoelectric vibrating reed 1, and FIG. 7B is a cross-sectional view of the piezoelectric vibrating reed 1 taken along the line BB ′ in FIG.

A piezoelectric vibrating reed 1 shown in FIG. 7A is formed of, for example, quartz. An electrode 1a is formed on the surface of the piezoelectric vibrating reed 1 as shown in FIG. 7A, and the electrodes 1a are provided on both sides of the piezoelectric vibrating reed 1 as shown in FIG. Is formed.

Such a piezoelectric vibrating reed 1 is provided at one end thereof (FIG. 7A) by a package (not shown).
The lower end is fixed, and the other end (the upper end in FIG. 7A) is arranged as a free end. In this state, when a voltage is applied to the piezoelectric vibrating reed 1 via the electrodes 1a and 1a, the piezoelectric vibrating reed 1 vibrates. When the vibration is input to an integrated circuit (not shown), a signal of a predetermined frequency is generated. It can be taken out and becomes a so-called piezoelectric oscillator.

[0005] Such a piezoelectric vibrating reed 1 has electrodes 1a, 1a formed as follows. FIG. 8 is a view showing a jig 4 used in a conventional piezoelectric vibrating piece electrode forming apparatus.

As shown in FIG. 8, the jig 4 has a piezoelectric vibrating reed 1b on which electrodes are to be provided, and an outer shape mask 3 for positioning the piezoelectric vibrating reed 1b. Also,
It also has electrode masks 2a and 2b for sandwiching both sides of the piezoelectric vibrating reed 1b.

The external mask 3 and the electrode masks 2a and 2b used here have, for example, the shapes shown in FIG.

The jig 4 which positions and sandwiches the piezoelectric vibrating reed 1b in this manner is placed in a machine for depositing or sputtering a metal film, for example. The inside of this machine is maintained in a vacuum, and in this state, metal is deposited or sputtered on the jig 4.

Thereafter, the jig 4 on which the metal film has been deposited or sputtered is taken out in the machine, and the electrode masks 2a, 2b
By removing the external shape mask 3, the piezoelectric vibrating reed 1 having the electrode 1a as shown in FIG. 7 is formed.

[0010]

In the above-described method for forming the electrode of the piezoelectric vibrating reed 1 and the apparatus for forming the electrode of the piezoelectric vibrating reed 1 as described above, a vapor deposition machine for vapor-depositing a metal film or a sputter M / D.
C had to be used, but these vapor deposition machines and sputter M / C were expensive, and the piezoelectric vibrating reed 1
There is a problem that it takes time to form the electrode 1a on the electrode b.

The electrode masks 2a and 2b are expensive,
It is difficult to obtain immediately, and every time the pattern of the electrode 1a of the piezoelectric vibrating reed 1 becomes new, new electrode masks 2a and 2b must be produced, which causes a problem that the cost increases. .

Further, the front and back electrodes 1a of the piezoelectric vibrating reed 1
If the pattern of the electrode 1a is different, different electrode masks 2a and 2b must be manufactured.
a new electrode mask 2 even if a part of the shape of the pattern a is changed.
There was also a problem that it was necessary to recreate the entirety of a and 2b.

Further, in the vapor deposition machine and the sputtering M / C, since the metal of the metal film is deposited on the entire jig 4, the metal is also deposited on the inside of the machine, so that the metal film is wasted and consumed. In particular, there is a problem that these machines and the jig 4 must be cleaned. In view of the above points, the present invention provides a method of forming an electrode of a piezoelectric vibrating element and a piezoelectric vibrator that are low-cost, in a short time, without using an electrode mask, and without wasting metal. An object of the present invention is to provide an electrode forming device for an element.

[0014]

SUMMARY OF THE INVENTION The above object is achieved by the present invention.
According to the invention, a transparent substrate is disposed between the piezoelectric vibrating element main body and the laser beam oscillating section, and a metal portion is provided on the transparent substrate on the side of the piezoelectric vibrating element main body. By irradiating the transparent substrate with an electrode, an electrode is formed on the surface of the piezoelectric vibrating element main body.

According to the first aspect of the present invention, the transparent substrate is disposed between the piezoelectric vibrating element main body and the laser light oscillating section, and a metal portion is provided on the transparent substrate on the piezoelectric vibrating element main body side. By irradiating the transparent substrate with the laser beam from the light oscillating unit, an electrode is formed on the surface of the piezoelectric vibrating element body, so that the electrode is accurately and only on a necessary part without using an electrode mask or the like. Will be transcribed.

Preferably, according to a second aspect of the present invention, there is provided the method for forming an electrode of a piezoelectric vibration element according to the first aspect, wherein the metal portion is formed of a metal film.

According to this configuration, since the metal portion is formed of the metal film, when the transparent substrate is irradiated with the laser beam, the electrode is immediately transferred to the surface of the piezoelectric vibration element main body. Will be.

Preferably, according to a third aspect of the present invention, there is provided a method for forming an electrode of a piezoelectric vibrating element according to the first aspect, wherein the metal portion is formed of a metal foil.

According to this structure, since the metal portion is formed of a metal foil, it can be easily arranged on the transparent substrate.

Preferably, according to a fourth aspect of the present invention, there is provided the electrode forming method of the piezoelectric vibrating element according to any one of the first to third aspects, wherein the transparent substrate is formed of glass.

According to this structure, since the transparent substrate is formed of glass, the laser beam evaporates a metal provided on the glass and the metal is applied to the surface of the piezoelectric vibration element main body. It will be transferred.

Preferably, according to a fifth aspect of the present invention, in the configuration of any one of the first to fourth aspects, the laser light oscillation section is provided with a plurality of branch sections, and the plurality of branch sections are provided. A method of forming an electrode of a piezoelectric vibrating element, wherein the electrode is formed on a surface of a plurality of piezoelectric vibrating element bodies corresponding to the irradiation of the laser light. According to this configuration, a plurality of branch portions are provided in the laser light oscillation portion, and when the laser light is irradiated from the plurality of branch portions, the surface of the plurality of piezoelectric vibration element bodies corresponding to the laser light is irradiated on the laser beam. Since the electrodes are transferred, the electrodes can be quickly formed on the plurality of piezoelectric vibration element bodies.

Preferably, according to a sixth aspect of the present invention, there is provided the method of forming an electrode of the piezoelectric vibrating element according to the fifth aspect, wherein the branch portion is a fiber.

According to this configuration, since the branching portion is a fiber, the laser beam can be easily branched.

Preferably, according to the invention of claim 7, in the structure of any of claims 4 to 6, the glass is provided with a plurality of metal films of different types. This is a method for forming electrodes of a piezoelectric vibration element.

According to this configuration, since a plurality of different types of metal films are provided on the glass, different metals can be transferred to the surface of the piezoelectric vibration element body. Preferably, according to an eighth aspect of the present invention, in the configuration of the fourth aspect, there is provided a method for forming an electrode of a piezoelectric vibrating element, wherein the glass is disposed on a tape-like member that can be wound up at a predetermined interval. .

According to this structure, since the glass is arranged on the tape-shaped member which can be wound up at a predetermined interval, the tape-shaped member on which the glass provided with the metal film is arranged is arranged. By winding the member, the electrodes can be continuously transferred to the piezoelectric vibration element main body.

Preferably, according to the ninth aspect of the present invention, in any one of the first to eighth aspects, the piezoelectric vibrating element main body is disposed in an inert gas atmosphere or in a vacuum. This is a method for forming an electrode.

According to this structure, since the piezoelectric vibration element main body is disposed in an inert gas atmosphere or in a vacuum, the degree of adhesion between the piezoelectric vibration element main body and the metal film is improved,
Since there is no adhesion of impurities or gas, the quality of the piezoelectric vibrating element is improved.

According to a tenth aspect of the present invention, there is provided a piezoelectric vibrating element main body, an external jig for arranging the piezoelectric vibrating element main body, and a metal part disposed on the piezoelectric vibrating element main body side. A transparent substrate comprising: a piezoelectric vibrating element main body and an external jig; and a housing for accommodating the piezoelectric vibrating element main body and the external jig therein; and a laser light oscillator for irradiating the transparent substrate with laser light. This is achieved by an electrode forming apparatus for a piezoelectric vibrating element.

According to this configuration, the piezoelectric vibration element body,
An external jig for arranging the piezoelectric vibrating element main body, a transparent substrate having a metal portion disposed on the piezoelectric vibrating element main body side, and a housing accommodating the piezoelectric vibrating element main body and the external jig therein. Since it has a body and a laser light oscillating portion for irradiating the transparent substrate with laser light, electrodes can be formed accurately and only on necessary portions without using an electrode mask or the like. .

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to FIGS.

Although the embodiments described below are preferred specific examples of the present invention, they are subjected to various technically preferable limitations. However, the scope of the present invention is not particularly limited in the following description. However, the present invention is not limited to these embodiments unless otherwise described. (First Embodiment) FIG. 1 is a schematic view showing an electrode forming apparatus 10 for a piezoelectric vibrating reed, which is a first embodiment of the electrode forming apparatus for a piezoelectric vibrating element according to the present invention.

As shown in FIG. 1, an electrode forming apparatus 10 for a piezoelectric vibrating reed comprises a tank 12 serving as a housing for accommodating a piezoelectric vibrating reed main body 11a having no electrodes serving as a piezoelectric vibrating element main body.
have. The tank 12 has a hollow inside and is formed in a box shape.

An opening is formed in the upper part of the tank 12, and a glass plate 13 as a transparent substrate is placed in the opening, and the inside of the tank 12 is placed by placing the glass plate 13. It is configured to be a closed space.

Inside the glass plate 13, a metal film 14
Are formed by vapor deposition. Metals constituting the metal film 14 include gold (Au), chromium (Cr), nickel (Ni), palladium (Pd), copper (Cu), aluminum (Al), tantalum (Ta), and titanium (Ti). ,
Molybdenum (Mo) and the like can be mentioned.

The metal film 1 made of such a metal
The outer jig 15 is formed to face the outer jig 4. As shown in FIG. 2, the outer shape jig 15 accommodates the piezoelectric vibrating reed main body 11a therein.
The external vibration jig 15 positions the piezoelectric vibrating reed main body 11a.

The external jig 15 is mounted on a mounting table 16 provided in the tank 12.

In this state, the inside of the tank 12 is maintained in the atmosphere, an inert gas atmosphere, or a vacuum atmosphere. Examples of the inert gas include nitrogen.

As described above, the inside of the tank 12 may be air, but by maintaining the inside of the tank 12 in an inert gas or a vacuum atmosphere, the adhesion between the metal film 14 and the piezoelectric vibrating reed main body 11a will be described later. Performance will be improved. In addition, by maintaining an inert gas or a vacuum atmosphere, since there is no attachment of impurities or gases, the quality of the piezoelectric vibrating reed 11 provided with the completed electrode is improved.

On the other hand, above the glass plate 13, for example, a YAG laser 17 which is a laser light oscillating unit is provided.

The electrode forming apparatus 10 for a piezoelectric vibrating reed according to the present embodiment is configured as described above. Hereinafter, a method for forming an electrode of a piezoelectric vibrating reed using the electrode forming apparatus 10 for a piezoelectric vibrating reed will be described. Will be described.

First, as described above, the operator operates the electrode 18.
The piezoelectric vibrating reed main body 11a to form (FIG. 3)
The external jig 15 is placed on the outer surface jig 15 through the opening of the tank 12, and placed on the mounting table 16 provided in the tank 12.

On the other hand, a metal film 14 made of a desired metal is formed on the surface of the glass plate 13 by vapor deposition.

Thereafter, the metal film 1 is placed in the opening of the tank 12.
The glass plate 13 is set so that 4 is disposed in the tank 12.

Thereafter, if necessary, the inside of the tank 12 is set to an inert gas atmosphere or a vacuum atmosphere. This is performed using a known machine (not shown).

Thereafter, the metal film 14 and the glass plate 13
Above the piezoelectric vibrating reed main body 11a positioned by the external jig 15 disposed through
The laser 17 is arranged. And this YAG laser 1
7 is to be formed on the piezoelectric vibrating reed main body 11a.
It will move according to eight patterns.

That is, when the laser beam of the YAG laser 17 is applied to the glass plate 13, the laser beam passes through the glass plate 13 and reaches the metal film 14 deposited on the glass plate 13. Then, the metal film 14 is heated by the laser beam, and is instantaneously evaporated or sublimated.
The metal film 14 on the glass plate 13 is transferred in a desired shape to the surface of the piezoelectric vibrating reed main body 11a on which an electrode is to be formed.

Since this shape becomes the pattern of the electrode 18, a desired electrode 18 pattern is formed on the piezoelectric vibrating reed main body 11a.

The wavelength of the laser beam of the YAG laser 17 in this case is, for example, about 1.06 μm.
The G laser 17 is held and controlled by a known actuator (not shown) and a control device such as a computer.

After the desired electrode 18 pattern is formed on one surface of the piezoelectric vibrating reed 11 in this way, the operator takes out the outer shape jig 15 from the tank 12 and inverts the outer jig 15.
Place on. Then, the glass plate 23 on which the new metal film 24 is deposited is set in the tank 12, and the YA is set as described above.
If the laser beam of the G laser 17 is moved to a desired shape,
A desired electrode 28 pattern is formed on the piezoelectric vibrating reed main body 11a. Thus, the piezoelectric vibrating reed 11 having the patterns of the electrodes 18 and 28 as shown in FIG. 3 is manufactured.

As described above, according to the present embodiment, it is not necessary to use an electrode mask unlike the related art, so that the time required for manufacturing the electrode mask is unnecessary, and the cost for manufacturing the electrode mask is also unnecessary. Therefore, the electrodes 18 and 28 can be formed in a desired shape on the piezoelectric vibrating reed main body 11a in a short time and at low cost.

Since the metal films 14 and 24 deposited on the glass plates 13 and 23 are transferred only to necessary portions of the piezoelectric vibrating reed main body 11a, the metal films 14 and 24 are transferred to the external jig 15 and the like. Since there is no adhesion, there is no need to periodically clean the electrode forming apparatus 10 of the piezoelectric vibrating piece, and maintenance of the electrode forming apparatus 10 of the piezoelectric vibrating piece becomes easy.

(Second Embodiment) FIG. 4 is a schematic view showing a piezoelectric vibrating piece electrode forming apparatus 20 which is a second embodiment of the piezoelectric vibrating element electrode forming apparatus of the present invention. Since the electrode forming apparatus 20 for a piezoelectric vibrating reed according to the present embodiment has substantially the same configuration as the electrode forming apparatus 10 for a piezoelectric vibrating reed according to the above-described first embodiment, the differences will be mainly described below.

In the present embodiment, unlike the first embodiment, for example, three fibers 27 are provided in the YAG laser 17.

The external jig 25 is also configured so that three piezoelectric vibrating reed main bodies 11a can be arranged corresponding to the number of the fibers 27. Therefore, at multiple locations,
For example, a laser beam of a YAG laser can be irradiated simultaneously at three places, and three piezoelectric vibrating piece main bodies 11a, 11
The electrode pattern can be transferred to the piezoelectric vibrating piece main body 11a at the same time, and the electrode forming time can be significantly reduced.

(Third Embodiment) FIG. 5 shows a glass plate 33 and a metal film used in an electrode forming apparatus for a piezoelectric vibrating reed, which is a third embodiment of the electrode forming apparatus for a piezoelectric vibrating element according to the present invention. It is the schematic which shows 44,54. The electrode forming apparatus for a piezoelectric vibrating reed according to the present embodiment has substantially the same configuration as the electrode forming apparatus 10 for a piezoelectric vibrating reed according to the above-described first embodiment, and therefore the following description will focus on the differences.

In this embodiment, for example, two types of different types of metal films 44 and 54 are deposited on the glass plate 33. For example, as shown in FIG. 5, first, for example, gold (Au) is vapor-deposited on a glass plate 33, and chrome (C
r) is deposited to form a two-layer structure.

When the above-described YAG laser is used to irradiate a laser beam using the metal films 44 and 54, the surface of the piezoelectric vibrating reed main body 11a held in the external jig 15 is first made of chromium (Cr). The electrode 18 pattern is transferred,
The gold (Au) electrode 18 pattern is transferred thereon.

Accordingly, the electrode 18 pattern of two layers of chromium (Cr) and gold (Au) is formed on the piezoelectric vibrating reed main body 11a.

On the other hand, if a plurality of different metals are arranged in a single layer on the glass plate 33 and a single-layer metal film on which the plurality of metals are arranged is formed, the plurality of metals can be simultaneously placed in the piezoelectric vibrating piece. It becomes possible to transfer it to the main body 11a.

(Fourth Embodiment) FIG. 6 shows a glass plate 43 and a metal film used in a piezoelectric vibrating reed electrode forming apparatus according to a fourth embodiment of the present invention. FIG. 6 is a schematic view showing a take-up reel and a take-up reel.
The electrode forming apparatus for a piezoelectric vibrating reed according to the present embodiment has substantially the same configuration as the electrode forming apparatus 10 for a piezoelectric vibrating reed according to the above-described first embodiment, and therefore the following description will focus on the differences.

In this embodiment, as shown in FIG. 6, different from the above-described embodiment, a plurality of glass plates 43 are tapes 19a which are tape-like members arranged so as to be wound on the reel 19. It is fixed to. A metal film 64 is disposed on each of the glass plates 43.

The reel 19 and the tape 19a having the glass 43 and the like are arranged near the opening of the tank 12 in FIG. 1 in the first embodiment. When the glass plate 43 is set in the opening of the tank 12, one glass plate 43 approaching the tank 12 and fixed with the tape 19 a is set in the opening of the tank 12.

Thereafter, when the transfer of the metal to the piezoelectric vibrating reed main body 11a is completed as described above, the glass plate 43 is closed.
Is removed from the opening of the tank 12, the reel 19 moves, and another glass plate 43 provided next to the used glass plate 43 is installed in the opening of the tank 12. Then, as described above, the metal is transferred to the piezoelectric vibrating piece main body 11a again.

With this configuration, unlike the first embodiment, the replacement of the glass plate 43 can be performed easily and promptly, and the electrodes of the piezoelectric vibrating reed can be formed in a short time. Will be.

In each of the above embodiments, the metal films 14, 2
4, 34, 44, 54 and 64 are used, but a metal foil may be used instead of the metal films 14, 24, 34, 44, 54 and 64.

Further, if the metal foil itself is formed into a tape shape, and can be wound on a reel, and an electrode pattern is sequentially formed on the piezoelectric vibrating reed by a laser beam, a glass plate becomes unnecessary.

[0069]

As described above, according to the present invention, piezoelectric vibration can be achieved at low cost and in a short time, without using an electrode mask, and without wasting metal parts. An electrode forming method for an element and an electrode forming apparatus for a piezoelectric vibrating element can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of an apparatus for forming an electrode of a piezoelectric vibrating reed according to a first embodiment of the present invention.

FIG. 2 is an enlarged schematic cross-sectional view showing a relationship between an external jig, a piezoelectric vibrating piece, and the like in FIG.

3A is a schematic view showing a piezoelectric vibrating reed on which electrodes are formed by the piezoelectric vibrating reed electrode forming apparatus of FIG. 1; FIG.
(B) It is AA 'sectional drawing of (a).

FIG. 4 is a schematic view illustrating a main part of an electrode forming apparatus for a piezoelectric vibrating reed according to a second embodiment of the present invention.

FIG. 5 is a schematic diagram showing a main part of an electrode forming apparatus for a piezoelectric vibrating reed according to a third embodiment of the present invention.

FIG. 6 is a schematic diagram showing a main part of an electrode forming apparatus for a piezoelectric vibrating reed according to a fourth embodiment of the present invention.

FIG. 7A is a schematic view showing an electrode pattern of a conventional piezoelectric vibrating reed. (B) It is BB 'sectional drawing of (a).

FIG. 8 is a schematic view showing a jig used in a conventional piezoelectric vibrating piece electrode forming apparatus.

FIG. 9 is a schematic view showing an outer shape mask and an electrode mask used in FIG.

[Explanation of symbols]

 10, 20: an electrode forming device for a piezoelectric vibrating piece 11: a piezoelectric vibrating piece 11a: a piezoelectric vibrating piece main body 12: a tank 13, 23, 33, 43 ... a glass plate 14, 24, 34 , 44, 54, 64: Metal film 15, 25: External jig 16: Mounting table 17: YAG laser 18, 28: Electrode 27: Fiber 19: Reel 19a ···tape

Claims (10)

[Claims] 1. A transparent substrate is disposed between a piezoelectric vibrating element main body and a laser light oscillating unit, a metal part is provided on the transparent substrate on the side of the piezoelectric vibrating element main body, and a laser beam is emitted from the laser light oscillating unit. An electrode is formed on the surface of the piezoelectric vibration element main body by irradiating the transparent substrate with an electrode. 2. The method according to claim 1, wherein the metal portion is formed of a metal film. 3. The method according to claim 1, wherein the metal portion is formed of a metal foil. 4. The method for forming an electrode of a piezoelectric vibrating element according to claim 1, wherein said transparent substrate is formed of glass. 5. A plurality of branch portions are provided in the laser beam oscillation portion, and when the laser beam is irradiated from the plurality of branch portions, a surface of the plurality of piezoelectric vibration element bodies corresponding thereto is The method for forming an electrode of a piezoelectric vibration element according to claim 1, wherein the electrode is formed. 6. The method according to claim 5, wherein the branch portion is a fiber. 7. The method for forming an electrode of a piezoelectric vibrating element according to claim 4, wherein a plurality of different types of metal films are provided on the glass. 8. The method according to claim 4, wherein the glass is disposed on a tape-shaped member that can be wound at a predetermined interval. 9. The piezoelectric vibrating element body is disposed in an inert gas atmosphere or in a vacuum.
A method for forming an electrode of a piezoelectric vibrating element according to claim 8. 10. A piezoelectric vibration element main body, an external jig for arranging the piezoelectric vibration element main body, a transparent substrate having a metal portion disposed on the piezoelectric vibration element main body side, An electrode forming apparatus for a piezoelectric vibrating element, comprising: a housing for accommodating an external jig therein; and a laser light oscillator for irradiating the transparent substrate with laser light.