JP2001056002A - Fluid pressure actuator with cushioning mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To absorb impact applied on a reciprocating table at the time of advancing the reciprocating table. SOLUTION: A table storage groove 12 is formed on a cylinder main body 11, and a cylinder chamber is formed along the table storage groove 12 on both side parts of the cylinder main body 11. A reciprocating table 32 is installed in the table storage groove 12 free to reciprocate, and a connecting plate 41 is fixed on its head end part. A driving plate 43 is installed on a head end part of a piston rod projected from a head end surface of the cylinder main body 11, and an engagement pin 46 is fixed on the reciprocating table 34 so as to transmit retreating movement of the driving plate 43 to the reciprocating table 34. A coil spring 50 to transmit advancing movement of the piston rod to advancing movement of the reciprocating table 34 through the connecting plate 41 is installed between the driving plate 43 and the connecting plate 41, and it is possible to control spring force of the coil spring.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reciprocating table mounted on a cylinder body so as to be reciprocally movable in a linear direction by a piston rod. The piston rod is moved forward by a reciprocating table via a coil spring. The present invention relates to a fluid pressure actuator with a shock absorbing mechanism adapted to transmit.

[0002]

2. Description of the Related Art A reciprocating table is moved by a fluid pressure such as air pressure in order to move a workpiece, that is, a work, from a certain position to another position in a linear direction or to reciprocate a workpiece such as a jig in a linear direction. A hydraulic actuator with a reciprocating table is used to drive the actuator in a linear direction.

When an object to be conveyed such as a work placed on a reciprocating table is moved when the piston rod is advanced, an impact force is applied to the object when the piston rod is activated or when the piston rod reaches the forward end position. Sometimes. In order to buffer the impact force, a fluid pressure actuator with a buffer mechanism has been developed which transmits the forward movement of the piston rod to a reciprocating table via a coil spring.

[0004]

An example of this type of fluid pressure actuator is disclosed in Japanese Patent Application Laid-Open No. H7-158611. In this case, a piston is mounted on a buffer block fixed to a reciprocating table. The rod is penetrated, a receiving hole for receiving the coil spring is formed in the buffer block, and the coil spring is incorporated therein. For this reason, the coil spring cannot be easily replaced, and the piston rod slides in a state where the spring holding member having the same outer shape as the through hole is attached to the tip of the through hole formed in the buffer block. In addition, the reciprocating table cannot be driven smoothly due to sliding friction, and power transmission loss occurs.

As this type of fluid pressure actuator, there is one disclosed in Japanese Patent Application Laid-Open No. 9-291908. In this case, a connecting plate is fixed to a reciprocating table, and a driving plate is attached to the tip of a piston rod. Fix, fix the connection shaft that penetrates the drive plate to the connection plate,
A coil spring is mounted on the connecting shaft. Also in this case, there is a problem that the coil spring cannot be easily replaced. Furthermore, in this type,
The connecting shaft slides into the through hole formed in the connecting plate, and the sliding friction of this portion makes it impossible to drive the reciprocating table smoothly, resulting in power transmission loss.

On the other hand, when a fluid pressure actuator is used, it is necessary to change the cushioning force applied to the reciprocating table when the piston rod is moved forward. Not only cannot the coil spring be easily replaced, but also the spring force of the coil spring cannot be adjusted.

SUMMARY OF THE INVENTION It is an object of the present invention to make it possible to drive the reciprocating table smoothly by driving the reciprocating table backward by a driving member fixed to a piston rod.

Another object of the present invention is to be able to absorb the impact applied to the reciprocating table when the reciprocating table is advanced.

Another object of the present invention is to make it possible to easily replace a coil spring in a shock absorbing mechanism for absorbing a shock.

[0010] Another object of the present invention is to make it possible to change the shock absorbing force of the shock absorbing mechanism.

[0011]

In the fluid pressure actuator with a shock absorbing mechanism of the present invention, a table accommodation groove extending from one end to the other end is formed at the center in the width direction on the front side, and cylinder chambers are formed at both sides. A cylinder body, and a reciprocating table in which a connecting plate is fixed at a tip portion so as to be reciprocally movable in the table storage groove, and attached to a piston that reciprocates in each of the cylinder chambers,
A piston rod protruding from the distal end surface of the cylinder body, and a driving member attached to the distal end of the piston rod and the reciprocating table; and a reciprocating table for reciprocating the piston rod. An engagement member that transmits the movement, and a coil spring that is mounted between the drive member and the connection plate and that transmits the forward movement of the piston rod to the forward movement of the reciprocating table via the connection plate. It is characterized by having.

A fluid pressure actuator with a shock absorbing mechanism according to the present invention includes a cylinder body having a cylinder chamber formed therein, a reciprocating table mounted on the cylinder body so as to be capable of reciprocating in a linear direction, and having a connecting plate fixed at the end. A piston rod attached to a piston that reciprocates in the cylinder chamber and protrudes from a distal end surface of the cylinder body, and is disposed between a driving member fixed to a distal end portion of the piston rod and the reciprocating table, An engaging member for transmitting the reciprocating movement of the piston rod to the reciprocating movement of the reciprocating table is mounted between the driving member and the connection plate, and the forward movement of the piston rod is performed via the connection plate. And a coil spring that transmits the forward movement of the reciprocating table.

The fluid pressure actuator with a shock absorbing mechanism of the present invention has a tool insertion hole formed in the connection plate and supporting an end of the coil spring and communicating with a front surface of the connection plate. The coil spring can be removed by pushing a tool from the tool insertion hole. Further, a plurality of spring support holes are formed so as to be opposed to the connection plate and the drive member, so that the number of coil springs mounted between the connection plate and the drive member can be changed. It is characterized by the following.
Further, a plurality of stopper mounting grooves are formed on an inner peripheral surface of a support hole formed on the connection plate and supporting an end of the coil spring, so that the position of the stopper supporting the coil spring can be changed. It is characterized by the following. Further, the engaging member is fixed to the reciprocating table, and the driving member comes into contact with the engaging member when the piston rod moves backward. Further, the engaging member is fixed to the driving member, and a sliding groove in which the engaging member slides is formed in the reciprocating table. Is characterized in that it is adapted to engage.

[0014]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIGS. 1 to 7 show a fluid actuator with a buffer mechanism according to an embodiment of the present invention.

As shown in FIG. 1, this fluid pressure actuator has a short height dimension and a thin overall rectangular parallelepiped shape, and the thickness of the cylinder body 11 at the center in the width direction is larger than the thickness at both sides. Formed thinly, the surface 11a and the bottom 11
b and both side surfaces 11c and 11d. A table housing groove 12 is formed extending from one end to the other end at the center in the width direction on the surface 11a side of the cylinder body 11, and the cylinder body 11 has a U-shaped cross section.

As shown in FIG. 2, through-holes are formed on both sides of the thickness of the cylinder body 11, and end covers 13a, 13a are attached to the rear end of the cylinder body 11.
13b and a rod cover 14 attached to the tip end
The cylinder chambers 15a and 15b are formed in parallel with each other by the respective through holes.

As shown in FIG. 2, pistons 16a and 16b are reciprocally mounted in the cylinder chambers 15a and 15b, respectively.
16b, two piston rods 17a,
Reference numeral 17b protrudes outward from the distal end of the cylinder body 11, and the respective piston rods 17a and 17b move linearly so as to perform forward movement in a direction protruding from the front end surface of the cylinder body 11 and retreat movement in a direction of entering the inside. Reciprocating freely.

As shown in FIG. 2, pneumatic chambers 18a, 18b on the front side of the pistons 16a, 16b and pneumatic chambers 19 on the rear side are provided in the respective cylinder chambers 15a, 15b.
a and 19b. Supply / discharge port 21a formed at the front end of one side surface 11c of cylinder body 11
Is communicated with the pneumatic chamber 18a and also through the communication passage 22 with the pneumatic chamber 18b. Side 11c
The supply / discharge port 21b formed at the rear end of the pneumatic chamber 1
9a, and also communicates with the pneumatic chamber 19b via the communication passage 23.

As shown in FIG. 2, a supply / discharge port 24a communicating with the pneumatic chambers 19a and 19b is formed on the back surface of the cylinder body 11, and the pneumatic chambers 18a and 18b are formed.
A supply / discharge port 24b communicating with the cylinder body 11 via a communication passage 25 is formed, so that the supply / discharge flow path can be connected to either the side surface or the back surface of the cylinder body 11. In the illustrated embodiment, as shown in FIG. 5, the supply / discharge ports 24a and 24b formed on the back face
6 so that air can be supplied to and discharged from the pneumatic chamber through supply / discharge ports 21a and 21b formed on the side surfaces. When the air pressure is supplied / discharged from the supply / discharge ports 24a, 24b, the supply / discharge ports 21a, 21b are closed by the closing plug 26.

As shown in FIGS. 3 and 7, a guide member 31 extending in the longitudinal direction of the table housing groove 12 is attached to the cylinder body 11 by a screw member 32. The guide member 31 has a U-shaped cross section. A rail groove 33 extending in the longitudinal direction is formed in the central portion in the width direction. As shown in FIG. 3, a guide rail 35 slidable along the guide member 31 is attached to the reciprocating table 34 stored in the table storage groove 12 by a screw member 36. Since a large number of balls in contact with the V-shaped grooves formed on the side surface of the guide rail 35 are incorporated in the guide member 31 so as to circulate,
Reciprocating table 34 with guide rail 35 attached
The sliding resistance can be reduced, and the reciprocating table 34 can be moved smoothly.

The surface of the reciprocating table 34 is shown in FIGS.
As shown in FIG. 3, the jig and the like mounted on the surface of the reciprocating table 34 slightly protrude from the surface 11a of the cylinder body 11 so as not to contact the surface 11a of the cylinder body 11. A screw hole 37 for attaching a jig or the like is provided on the surface of
As shown in FIG.

The reciprocating table 34 is provided with the table storing groove 12.
The width of the guide rail 3 is smaller than the width of the guide rail 31 as shown in FIG.
Since 5 is fixed to the bottom surface of the reciprocating table 34, the narrow reciprocating table 34 is reinforced by the guide rail 35. Therefore, the guide member 31 shorter than the guide rail 35 is moved to the reciprocating table 34.
The reciprocating table 34 is longer than the guide member 31 in comparison with the case where
Therefore, warpage or deformation due to external force applied to the reciprocating table can be prevented from occurring.

The reciprocating table 34 is provided with the table storing groove 12.
As shown in FIG. 7, the bottom surface of the reciprocating table 34 is disposed in the cylinder body 11 with respect to the cylinder chambers 15a and 15b located on both sides of the table.
Are overlapped or overlapped by the dimension H in the thickness direction of the fluid pressure actuator, and the thickness dimension of the fluid pressure actuator can be reduced to make it thinner.

As shown in FIG. 1, a connecting plate 41 is fixed to a tip end surface of the reciprocating table 34 by a screw member 42. The connecting plate 41 is also provided with a jig for supporting an object to be transferred. A plurality of screw holes 38 for attachment are formed. On the other hand, as shown in FIG. 2, a driving plate 43 as a driving member is fixed to the tip of each of the piston rods 17a and 17b by a screw member 44, and the head of the screw member 44 is formed on the driving plate 43. Is accommodated in the recessed portion 45. The drive plate 43 is located between the connection plate 41 and the tip end surface of the cylinder body 11, and has two piston rods 17a, 17b.
Are linked.

When the piston rods 17a and 17b are moved backward, the reciprocating movement is directly transmitted to the reciprocating movement of the reciprocating table 34. Therefore, as shown in FIG. Engagement pin 46 projecting from
Are fixed as engaging members. Instead of the engaging pin 46, a screw member or a block member fixed with a screw member may be used as the engaging member. Therefore, when the piston rods 17a and 17b move backward, the drive plate 43 comes into contact with the engagement pins 46, and the reciprocating table 34 is driven in the backward direction by the drive plate 43. On the front end face of the cylinder body 11,
A rubber shock absorbing member 47 with which the drive plate 43 at the retreat limit position comes into contact is attached.

As shown in FIG. 2, the drive plate 43 is provided at a position corresponding to the center of the reciprocating table 34 in the width direction.
A spring support hole 48 with a bottom is formed.
Reference numeral 8 denotes an opening facing the connection plate 41. The connection plate 41 is opposed to the spring support hole 48 and the spring support hole 4
The compression coil spring 50 is mounted between the connection plate 41 and the drive plate 43 such that both ends are supported by the spring support holes 48 and 49.

Therefore, the piston rods 17a, 17
When b moves forward, the drive plate 43 is directly driven, and the forward movement is transmitted to the connection plate 41 via the coil spring 50, and the reciprocating table 34 is driven forward. As a result, the reciprocating table 34 is driven forward through the coil spring 50, and the power of the piston rods 17a and 17b in the forward direction is buffered and transmitted to the reciprocating table 34, so that the reciprocating table 34 is conveyed. It is also possible to absorb the forward limit position error without applying a large impact force to the object.

As shown in FIGS. 2 and 3, a stopper plate 51 for supporting the end face of the coil spring 50 is disposed in the spring support hole 49 formed through the connecting plate 41. In order to attach the stop ring 52 for fixing the spring to the inner peripheral surface of the spring support hole 49, four stopper mounting grooves 53a to 53d with which the stop ring 52 engages are formed on the inner peripheral surface of the spring support hole 49. The retaining ring 52 has four stopper mounting grooves 5.
3a to 53d.
Stopper mounting grooves 53a-5 to which the retaining ring 52 is engaged
By changing the position of 3d, the spring force applied between the connection plate 41 and the drive plate 43 can be changed, and the buffering force for reducing the impact force applied between them can be changed. .

The number of stopper mounting grooves may be many, for example, one or four. In addition, a method other than the position change by the retaining ring 52, the stopper plate 51, and the stopper mounting groove 53, for example, by screwing a spring support hole opening portion and adjusting with a bolt and a nut, can be used.

Further, since the spring support hole 49 is a through hole and is also opened at the front surface of the connecting plate 41, the retaining ring 52 is removed, and the stopper plate 51 is removed, so that the coil spring 50 from the front can be removed. In addition, the coil spring 50 can be easily replaced by inserting a tool from the front side with the opening side as a tool insertion hole. At that time, the coil spring 50 can be removed by pushing the stopper plate 51 with a rod-shaped tool.

As described above, the reciprocating table 34 is moved forward by the piston rods 17a,
17b, the reversing movement is driven by the contact between the drive plate 43 and the engagement pin 46, and the table storage groove 12 formed in the cylinder body 11 is formed.
The reciprocating table 34 enters into the inside, and the actuator is thin overall, as shown in FIG.
The distance L ₁ between the centers of the piston rods 17 a and 17 b and the center of the reciprocating table 34 and the drive plate 43
Of it is possible to shorten the distance L ₂ between the contact portion with respect to the engagement pin 46, the piston rod 17a, it is possible to reduce the bending moment applied to the reciprocating table 34 when driving the reciprocating table 34 by 17b, Even if the thickness of the reciprocating table 34 is reduced, the piston thrust can be reliably transmitted to the reciprocating table.

FIGS. 4 to 7 show the surface of the cylinder body 11.
As shown in the figure, two sensor mounting grooves 54 having a U-shaped cross section are provided.
a, 54b are formed, and sensor mounting grooves 55a, 55b having a similar cross-sectional shape are also formed on the side surface of the cylinder body 11. Sensors for detecting the position of the piston in response to the magnetic force of the permanent magnet provided on the piston 16b are mounted in the respective sensor mounting grooves. For example, the forward limit position and the retreat limit position of the piston are set. And two sensors for detecting any one of them can be installed by selecting one or two out of a total of four sensor grooves according to the use condition of the fluid pressure actuator.
In addition, one or three or more sensors may be used to detect that the piston has reached an intermediate position between the forward limit position and the retreat limit position, as well as a plurality of sensors in one sensor groove. You may make it attach.

The cylinder body 11 is adapted to be mounted on a member to be mounted such as various devices or machines by a mounting member such as a screw member. The table housing groove 12 of the cylinder body 11 has a table housing groove 12 as shown in FIG. , Guide member 31
Between both end faces of the cylinder body 11 and
The mounting hole 56 is displaced to the side of the table storage groove 12.
Are formed in total.

In correspondence with each mounting hole 56, the reciprocating table 34 has four through holes 5 as shown in FIG.
7 are formed. When the reciprocating table 34 is in the retreat limit position as shown in FIG. 1, the four through holes 57 respectively match the positions of the mounting holes 56, and in this state, as shown in FIG. The screw member 58 through the through hole 57
From the mounting hole 56. A male screw may be formed in each of the mounting holes 56. In this case, the head of the screw member 58 is not positioned in the table housing groove 12 and the screw member 58 is mounted on the member side to which the cylinder body 11 is mounted. Head can be positioned.

In this fluid pressure actuator, a guide rail 35 is attached to a reciprocating table 34. Since the guide member 31 having a shorter dimension than the guide rail 35 is attached to the cylinder body 11, the guide rail 35 is provided. The cylinder main body 11 can be attached to the member to be mounted using the outer portions of both end surfaces of the guide member 31 without forming a through hole through which the screw member 58 penetrates. Accordingly, it is not necessary to form a through hole in the guide rail 35, and the processing cost of the through hole can be reduced. Moreover, a total of 4
Since two mounting holes 56 are formed, the cylinder body 1
1 can be attached to the member to be mounted at a position separated in the longitudinal direction and a position separated in the width direction, and the mounting strength can be increased. Furthermore, the cylinder body 11 can be mounted on the mounted member using at least two of the four mounting holes 56 according to the mounting position of the mounted member. Conversely, the number of mounting holes 56 can be increased to more firmly fix the cylinder body.

As described above, in the illustrated fluid pressure actuator with a shock absorbing mechanism, when the object to be transported disposed on the reciprocating table 34 or the connecting plate 41 is transported by the forward movement of the piston rods 17a, 17b. Means that the reciprocating table 34 has the piston rods 17a, 1
Since the driving force of 7b is buffered and transmitted via the coil spring 50, it is possible to prevent a large impact force from being applied to the transferred object at the time of starting. Further, even if the connecting plate 41 collides with the stopper at the forward limit position, it is possible to prevent a large impact force from being applied to the transferred object. The spring force for cushioning can be changed stepwise by changing the position of the retaining ring 52.

FIG. 8 is a sectional view showing a portion of a fluid pressure actuator according to another embodiment of the present invention similar to that of FIG. 2 of the above embodiment, except for the structures of the drive plate 43 and the connection plate 41. , Are the same as those of the above embodiment.

In this fluid pressure actuator, three spring support holes 48a to 48c are formed in the drive plate 43, and three spring support holes 49a to 49c are formed in the connection plate 41 corresponding to these spring support holes. 49c are formed, and the ends are supported by the respective spring support holes, and between the drive plate 43 and the connection plate 41,
The three coil springs 50a to 50c can be mounted.

Therefore, between the drive plate 43 and the connecting plate 41, one coil spring 50b is mounted, two coil springs 50a, 50c are mounted,
By mounting the three coil springs 50a to 50c, the spring force applied to both plates, that is, the cushioning force can be changed. In this case, as in the case shown in FIG. 2, the position of each retaining ring 52 may be changed. In addition, about the number of coil springs mounted between both plates,
The number is not limited to three and may be any number.

FIG. 9 shows a fluid pressure actuator according to still another embodiment of the present invention.
It is sectional drawing which shows the part similar to, and is the same as said each embodiment except the structure of the drive plate 43 and the connection plate 41.

In this fluid pressure actuator, a coil spring 50 is housed in a recess 45 for accommodating the head of a screw member 44 for fixing the respective piston rods 17a, 17b to the drive plate 43. To support the end. The spring support hole 49 formed in the connection plate 41 facing the recess 45 is a stepped hole, and the spring support plug 59 is arranged in the large diameter hole. The end face of the support plug 59 is exposed to a small-diameter tool insertion hole 60 communicating with the large-diameter hole.
By pushing the rod-shaped tool through the tool insertion hole 60, the coil spring 50 can be easily removed.

FIGS. 10 to 13 are views showing a fluid pressure actuator according to still another embodiment of the present invention. The surface 11a of the cylinder body 11 has a horizontal plane parallel to the bottom surface 11b and an inclined surface. As shown in FIG. 13, the height of one side surface 11c is shorter than the other side surface 11d.

A guide rail 35 is attached to the inclined surface of the cylinder body 11 by a screw member 36. The guide rail 35 is mounted on the guide rail 35 so as to be reciprocally movable. A sliding guide member 31 is attached by a screw member 32. The reciprocating table 34 is provided on the bottom surface 1 of the cylinder body 11.
1b, and a side surface 34b substantially flush with the side surface 11c of the cylinder body 11. The cylinder body 11 and the reciprocating table 34 have a generally long cross section in the vertical direction. It is a rectangle having dimensions and a reduced width dimension.

As shown in FIG. 11, the cylinder body 11 has a bottomed cylinder chamber 15 opened at the rear end face thereof.
An end cover 13 is fixed to the rear end of the cylinder chamber 15, and a piston rod 17 projecting from the front end of the cylinder body 11 is attached to a piston 16 reciprocally mounted in the cylinder chamber 15. Is attached. The cylinder chamber 15 is partitioned into an air pressure chamber 18 on the front side of the piston 16 and an air pressure chamber 19 on the rear side of the piston 16.
A supply / discharge port 24 a communicating with the air pressure chamber 8 and a supply / discharge port 24 b communicating with the pneumatic chamber 19 are formed on the bottom surface 11 b of the cylinder body 11, respectively.

A drive plate 43 is attached to the distal end of the piston rod 17. The drive plate 43 is attached by a nut 61 which is screwed to a male screw formed on the distal end of the piston rod 17. It is housed in a recess 45 formed in the plate 43.

A connecting plate 41 is attached to a tip end surface of the reciprocating table 34 by a screw member 42.
A spring support hole 49 is formed in the connection plate 41 so as to face the recess 45, and a coil spring 50 is mounted between the connection plate 41 and the drive plate 43 while being supported by the recess 45 and the spring support hole 49. I have. This coil spring 50
The movement of the piston rod 17 in the forward direction is transmitted to the movement of the reciprocating table 34 in the forward direction via.

Surface 34a and side 3 of reciprocating table 34
4b is formed with a screw hole 37 to which a jig for supporting the transferred object is attached, and the transferred object can be transferred using any of these surfaces. The connection plate 41 is also formed with a screw hole 38 to which a jig for supporting the transported object is attached, so that the transported object can be transported even at the connection plate 41 portion.

An engaging pin 46 as an engaging member is fixed to the drive plate 43, and a step 62 with which the engaging pin 46 comes into contact when the piston rod 17 moves backward is formed on the reciprocating table 34. When the piston rod 17 moves forward, the engagement pin 46 slides along the guide groove 63 formed in the reciprocating table 34.

In the connecting plate 41, a spring supporting hole 49 may be communicated with the front side of the connecting plate 41 to form a tool insertion hole 60 as shown by a broken line. By pushing the tool, the coil support 50 can be easily removed by pushing the spring support plug 59.

In the case shown in FIGS. 10 to 13, the engaging pins 46 may be attached to the reciprocating table 34 so that the engaging pins 46 come into contact with the driving plate 43.
1 to 8, the engagement pin 46 may be fixed to the drive plate 43.

The present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the scope of the present invention.

[0053]

The forward movement of the piston rod is transmitted to the reciprocating table via the coil spring, and the reciprocating movement of the piston rod is directly driven by the engaging member. The reciprocating table can be driven smoothly, and when the reciprocating table moves forward, the table can be driven smoothly without applying an impact thereto. The coil spring for absorbing the impact can be easily replaced. The impact absorbing force of the coil spring can be changed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a fluid actuator with a buffer mechanism according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA in FIG.

FIG. 3 is a sectional view taken along line BB in FIG. 2;

FIG. 4 is a sectional view taken along line CC in FIG. 2;

FIG. 5 is a rear view as seen from the direction of line DD in FIG. 2;

FIG. 6 is a sectional view taken along line EE in FIG. 2;

FIG. 7 is a sectional view taken along line FF in FIG. 3;

FIG. 8 is a cross-sectional view showing a portion similar to FIG. 2 in a fluid pressure actuator according to another embodiment of the present invention.

FIG. 9 is a cross-sectional view showing a portion similar to FIG. 2 in a fluid pressure actuator according to still another embodiment of the present invention.

FIG. 10 is a perspective view showing a fluid actuator with a buffer mechanism according to still another embodiment of the present invention.

FIG. 11 is a partially cutaway side view of FIG. 10;

FIG. 12 is a sectional view taken along line GG in FIG. 11;

FIG. 13 is a rear view as viewed from the direction of the line HH in FIG. 11;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Cylinder main body 12 Table storage groove 15, 15a, 15b Cylinder chamber 16, 16a, 16b Piston 17, 17a, 17b Piston rod 21a, 21b Supply / discharge port 31 Guide member 34 Reciprocating table 35 Guide rail 41 Connecting plate 43 Drive plate 48 , 48a, 48b Spring support holes 49, 49a to 49c Spring support holes 50, 50a to 50c Coil spring 52 Stop ring 60 Tool insertion hole

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Michinobu Sakata 3-2-3 Marunouchi, Chiyoda-ku, Tokyo Co., Ltd. Koganei Co., Ltd. (72) Shinichi Saito 3-2-2-3 Marunouchi, Chiyoda-ku, Tokyo F-term (reference) in Koganei Shikisha 3H081 AA02 AA05 BB03 CC15 DD18 HH04

Claims (7)

[Claims] 1. A cylinder main body having a table storage groove extending from one end to the other end formed at the center in the width direction on the front side, and a cylinder chamber formed on both sides, and reciprocally movable in the table storage groove. A reciprocating table fixed to a connecting plate at a distal end thereof; a piston rod attached to a piston reciprocating in each of the cylinder chambers and protruding from a distal end surface of the cylinder body; and a distal end of the piston rod. An engagement member disposed between the driving member attached to the portion and the reciprocating table, for transmitting the reciprocating movement of the piston rod to the reciprocating movement of the reciprocating table; A coil spring that is mounted in between and transmits forward movement of the piston rod to forward movement of the reciprocating table via the connection plate; Buffering mechanism with fluid pressure actuator, characterized in that it comprises a. 2. A cylinder body in which a cylinder chamber is formed, and mounted on the cylinder body so as to be reciprocally movable in a linear direction,
A reciprocating table having a connecting plate fixed to a tip thereof; a piston rod attached to a piston reciprocating in the cylinder chamber, protruding from a tip surface of the cylinder body; and a driving member fixed to a tip of the piston rod. An engagement member disposed between the drive member and the connection plate, the engagement member being arranged between the reciprocating table and transmitting the reciprocating movement of the piston rod to the reciprocating movement of the reciprocating table; A coil spring for transmitting the forward movement of the rod to the forward movement of the reciprocating table via the connection plate. 3. A fluid pressure actuator with a shock absorbing mechanism according to claim 1 or 2, wherein a tool is inserted into a spring support hole formed in said connection plate and supporting an end of said coil spring and communicating with a front surface of said connection plate. Forming a hole,
A hydraulic actuator with a shock absorbing mechanism, wherein the coil spring can be removed by pushing a tool from the tool insertion hole. 4. The fluid pressure actuator with a shock absorbing mechanism according to claim 1, wherein a plurality of spring support holes are formed so as to oppose each other to said connection plate and said drive member, A fluid pressure actuator with a shock absorbing mechanism, wherein the number of coil springs mounted between a connection plate and the driving member can be changed. 5. The fluid pressure actuator with a shock absorbing mechanism according to claim 1, wherein a plurality of support holes formed on the connection plate and supporting an end of the coil spring are provided on an inner peripheral surface of the support hole. Wherein the stopper mounting groove is formed so that the position of the stopper supporting the coil spring can be changed. 6. The fluid pressure actuator with a shock absorbing mechanism according to claim 1, wherein the engaging member is fixed to the reciprocating table, and the driving member is moved when the piston rod retreats. A fluid pressure actuator with a buffer mechanism, wherein the fluid pressure actuator is configured to come into contact with the engagement member. 7. The fluid pressure actuator according to claim 1, wherein the engaging member is fixed to the driving member, and the engaging member slides on the reciprocating table. A fluid pressure actuator with a shock-absorbing mechanism, wherein a sliding groove is formed so that the engaging member engages with the reciprocating table when the piston rod moves backward.