JP2001037201A - Motor device, stage equipment and exposure device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a motor device excellent in controllability which can reduce a cost by miniaturization and improvement of efficiency of assembling work. SOLUTION: An armature coil 44 is so wound that both end portions 64a, 64b of a coil winding exist outside the coil. Terminal pins 65a, 65b are collectively formed integrally with the coil 44 interposing a molding member 49, and both of the end portions 64a, 64b are connected with the terminal pins 65a, 65b. On a retaining member 12 on which the coil is mounted, sockets 22 are arranged corresponding to the respective terminal pins. Only by connecting the terminal pins 65a, 65b with the corresponding sockets 22, fixing and electrical connection of the coil is completed in one-shot action. An armature unit is constituted of a large number of the coils 44 and generates thrust excellent in linearlity by electromagnetic mutual action with a magnetic pole unit.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motor device, a stage device, and an exposure device, and more particularly, to a high-efficiency motor that generates a driving force by an electromagnetic interaction generated between an armature unit and a magnetic pole unit. The present invention relates to an apparatus, a stage device provided with the motor device, and an exposure apparatus provided with the stage device.

[0002]

2. Description of the Related Art Conventionally, in a lithography process for manufacturing a semiconductor device, a liquid crystal display, or the like, a pattern formed on a mask or a reticle (hereinafter, collectively referred to as a “reticle”) is exposed to a resist or the like via a projection optical system. There is used an exposure apparatus that transfers an image onto a substrate such as a wafer or a glass plate (hereinafter, appropriately referred to as “wafer or substrate”) on which is coated. In recent years, as such an exposure apparatus, a sequentially moving projection exposure apparatus such as a so-called stepper or a so-called scanning stepper has been mainly used. In this type of exposure apparatus, a substrate stage that holds the wafer and moves two-dimensionally is provided because it is necessary to sequentially transfer the pattern formed on the reticle to a plurality of shot areas on the wafer.
In addition, in this type of exposure apparatus, it is important that the reticle and the wafer are superimposed with high accuracy. Therefore, the wafer is placed on a wafer holder provided on the stage so that the wafer does not shift during the movement of the stage. It is held thereon by vacuum suction or electrostatic suction.

Conventionally, as a driving device for a substrate stage,
A contact-type driving device that combines a rotary motor and a feed screw or a ball screw has been used. In order to control the position with high accuracy without being affected by the precision of the guide surface, etc., and to avoid mechanical friction and extend the life, the stage (table) on which the wafer is mounted is contacted in two-dimensional directions. A stage device that drives the motor has been developed. As a drive source of such a non-contact drive stage device, a one-axis linear motor is two-dimensionally arranged, or a magnetic levitation type or air levitation type two-dimensional linear actuator (plane motor) that directly drives a stage two-dimensionally. Is used.

There are a variable reluctance drive method and a Lorentz electromagnetic force drive method as a drive method of a linear motor or a planar motor. In recent years, however, the variable drive is performed by paying attention to the fact that the generated thrust is large and the miniaturization is easy. The magnetoresistive drive method was the mainstream.

[0005] Subsequently, with the advancement of the performance of permanent magnets, electromagnetic force driven linear motors that can easily design magnetic circuits and have small thrust ripples and thus enable high-resolution position control have been reviewed. A planar motor in which a linear motor is developed in a two-dimensional direction has also been proposed (for example, see US Pat. No. 519,745). The electromagnetic drive method is easy to theoretically design based on Lorentz force, has good linearity of current and thrust up to the high band, and has excellent controllability, especially when there is no iron core, since there is little uneven thrust. There is,
In order to realize a linear motor or a planar motor of an electromagnetic drive type that generates a driving force comparable to that of the variable reluctance drive system, a higher performance permanent magnet is indispensable. For the realization of such an electromagnetic drive motor, the emergence of higher performance permanent magnets has been anticipated. However, recently, high performance magnets having an energy product of 40 MGOe or more have begun to appear on the market. The electromagnetic drive system has once again attracted the limelight.

[0006]

As is well known, an electromagnetic force-driven flat motor or the like includes a magnetic pole unit and an armature unit, and the armature unit is disposed on either the stator side or the mover side. Also have a plurality of armature coils. This is because, for example, when the armature unit is on the stator side, it is necessary to arrange many armature coils over the entire stroke range of the mover, and when the armature unit is on the mover side. This is because a plurality of armature coils are required to continuously generate a stable driving force.

Conventionally, a coreless armature coil has a process in which a conductive wire (coil winding) is wound around a core from the inside to the outside, and then the core is removed from the wound wire. Inevitably, one end of the wire connected to the current supply circuit for power reception (hereinafter, appropriately referred to as “power reception end”) is located inside the armature coil (hollow portion). And the other was to be outside the armature coil. For this reason, in order to increase the efficiency of the wiring work, if it is attempted to arrange both the power receiving ends outside (or inside) the coil, the inside (or outside) power receiving end is placed outside (or inside) through the upper space of the coil. ) Or a groove is formed in the coil supporting member that supports the coil, and the groove must be disposed outside (or inside) through the internal space of the groove. In the former case, it is necessary to secure an extra wiring space above the coil, which results in an increase in the size of the armature unit. In the latter case, this does not cause an increase in the size of the armature unit, but since the above-described concave grooves must be formed as many as the number of coils, the number of work steps increases, and the cost increases accordingly. .

SUMMARY OF THE INVENTION The present invention has been made under such circumstances, and a first object of the present invention is to provide a motor device which enables cost reduction by downsizing and efficient assembly work, and which is excellent in controllability. To provide.

A second object of the present invention is to provide a stage device which can facilitate the assembling work and reduce the cost, and can improve the controllability of the position of the stage.

A third object of the present invention is to provide an exposure apparatus capable of improving both the exposure accuracy and the throughput and reducing the cost.

[Means for Solving the Problems]

According to the first aspect of the present invention, a driving force in a predetermined direction is generated by an electromagnetic interaction generated between an armature unit (61) including a plurality of armature coils (44) and the armature coil. Magnetic pole unit with magnet (5
1), each of the armature coils is provided at both ends (64a, 6a) of the coil winding (64).
4b) is characterized by being wound so as to be present outside or inside the coil.

According to this, since each armature coil is wound so that both ends (power receiving ends) of the coil winding are present outside or inside the coil, no difficulty is involved. Instead, both the power receiving ends can be arranged outside (or inside) the coil, and the wiring work can be made more efficient. In this case, it is not necessary to secure the wiring space above the coil and to form the concave groove below the coil. Further, since an electromagnetic force driving method for generating a driving force by electromagnetic interaction between the armature unit and the magnetic pole unit is employed, the controllability is excellent. Therefore, according to the present invention, it is possible to reduce the cost by reducing the size and increasing the efficiency of the assembling work (wiring work), and to ensure excellent controllability by the electromagnetic force driving method.

[0013] In this case, each armature coil may be composed of a single segment.
May have a plurality of stacked segments (42), the segments are bonded together, and the ends of the coil windings forming the segments of the adjacent layer are connected to each other. In such a case, by determining the number of segments (the number of layers) in accordance with the space that is to be arranged as the space for arranging one armature coil, it is possible to create a coil that matches the shape of the space. it can. In addition, segments having an arbitrary thickness are mass-produced by a conventional method. For example, each segment is alternately turned upside down, an even number of layers are stacked, and the segments are bonded to form an end portion of a coil winding that forms a segment of an adjacent layer. By connecting them together, it is possible to easily manufacture a coil that is put in and put out and a coil that is put in and out.

[0014] In this case, the ends of the coil windings forming the segments of the adjacent layer may be connected at desired positions. For example,
By connecting the ends of the coil windings forming the segments of the adjacent layers at an arbitrary position outside each segment, the efficiency of the connection operation is improved. In particular, when the ends of the coil windings forming the segments of the adjacent layers are connected at the four outer corner positions of each segment, for example, in a planar motor device or the like, a plurality of armature coils of a planar-viewing type are arranged adjacent to each other. When arranging in a matrix, the protrusion of the solder at the connection part can be located in the dead space generated between adjacent coils,
Armature coil arrangement density can be improved,
As a result, space efficiency can be improved.

In the motor device according to each of the first to third aspects of the present invention, the coil winding (electric wire) of each armature coil.
May be an electric wire having a circular cross section, but it is preferable that the coil winding of each armature coil is a flat rectangular electric wire as in the invention according to claim 4. In such a case, a flat rectangular flat wire having a rectangular cross section is used as the coil winding of each armature coil, so that adjacent coil windings make surface contact with each other and adjacent wires make line contact with each other. As compared with the case where the electric wire is used, the space factor of the electric wire in the armature coil is improved, and the current density can be improved accordingly. As a result, the generated thrust (generated Lorentz electromagnetic force) can be improved.

In the motor device according to each of the first to fourth aspects of the present invention, as in the fifth aspect of the present invention, each of the armature coils is made of an electrical insulator and a pair of A molded member (49) integrally provided with the power receiving terminals (65a, 65b) may be attached, and both ends of the coil winding may be connected to the pair of power receiving terminals, respectively. In such a case, when assembling each armature coil, only the power receiving terminal is connected to the corresponding power supply terminal, and the electrical connection for power supply to the armature coil is completed. It is not necessary to connect the power receiving terminal and the end of the armature coil by using such a method, and the assembling work (wiring work) is facilitated.

In this case, the invention further comprises a support member (12) for supporting the plurality of armature coils (44), wherein the support member includes a support member for each of the armature coils. The pair of power receiving terminals (65a, 65b)
It is preferable that a plurality of sockets (22) having power supply terminals (24) corresponding to the respective power supply terminals and to which the power reception terminals are detachably connected be provided at predetermined intervals. In such a case, by simply fitting the power receiving terminal provided on the armature coil to the socket provided on the support member, the one-touch operation of fixing the armature coil to the support member and wiring for supplying current are performed. Are completed, the work of assembling the armature coil and the work of assembling the device can be facilitated.

Further, in this case, as in the invention according to claim 7, the support member has a printed board (66) on which a power supply pattern to each of the armature coils is formed, and the socket is It is desirable that the power supply pattern be provided for each of the power supply patterns. In such a case, it is possible to perform a very efficient operation when supplying power to each armature coil, as compared with the operation of connecting the end of each armature coil and the terminal of the current supply device by a conductive wire. Becomes

In the motor device according to each of the first to seventh aspects of the present invention, as in the eighth aspect of the invention, the plurality of armature coils are arranged at predetermined intervals along a predetermined uniaxial direction. Alternatively, as in the ninth aspect, the plurality of armature coils may be arranged in a matrix. In the former case, an armature unit and a magnetic pole unit can be constituted by an electromagnetic force drive type linear motor that relatively drives the armature unit and the magnetic pole unit in the predetermined uniaxial direction by the Lorentz electromagnetic force. Unit and magnetic pole unit by Lorentz electromagnetic force
It is possible to configure a planar motor of an electromagnetic force drive system that performs relative drive in a two-dimensional plane.

According to a tenth aspect of the present invention, there is provided a stage device including the motor device according to the eighth or ninth aspect; and a stage driven by the motor device.

According to this, the stage is driven by the electromagnetic drive type motor device which can reduce the cost by facilitating the assembling work and is excellent in controllability.
In addition to facilitating the assembling work and reducing the cost, the position controllability of the stage can be improved.

According to the eleventh aspect of the present invention, the mask (R)
An exposure apparatus for transferring a pattern formed on a substrate (W) onto a substrate (W), wherein the stage device according to claim 10 is provided as a driving device for at least one of the mask and the substrate.

According to this, the stage device according to claim 10 is provided as a driving device for at least one of the mask and the substrate.
The cost can be reduced by facilitating the assembling work, and the position controllability of at least one of the mask and the substrate can be improved. For example, by improving the position controllability of the mask, it is possible to improve the synchronization accuracy between the mask and the substrate in the case of a scanning type exposure apparatus, thereby improving the exposure accuracy (overlay accuracy) and reducing the synchronization settling time to improve the throughput. Can be improved. Further, for example, by improving the position controllability of the substrate, it becomes possible to improve the exposure accuracy (overlay accuracy) by improving the positioning accuracy of the substrate, and to improve the throughput by shortening the positioning time.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment A first embodiment of the present invention will be described below with reference to FIGS.

FIG. 1 shows an exposure apparatus 10 according to the first embodiment.
0 is shown schematically. The exposure apparatus 100 is a step-and-scan type scanning exposure apparatus, that is, a so-called scanning stepper. As described later, in the present embodiment, the projection optical system P
Since L is provided, the reticle R as a mask and the wafer W as a substrate are scanned relative to each other in a plane orthogonal to the optical axis AX of the projection optical system PL in the Z-axis direction. The direction will be described as a Y-axis direction, and a direction orthogonal to these Z-axis and Y-axis as an X-axis direction.

The exposure apparatus 100 includes an illumination system 10, a reticle stage RST as a mask stage for holding the reticle R, a projection optical system PL, and a substrate stage as a stage device for driving the wafer W in XY two-dimensional directions within an XY plane. The device 30 includes a control system and the like.

The illumination system 10 is disclosed in, for example, JP-A-9-3
As disclosed in JP-A-20956, a light source unit,
It comprises a shutter, a secondary light source forming optical system, a beam splitter, a condenser lens system, a reticle blind, an image forming lens system and the like (all not shown), and has a substantially uniform illuminance distribution toward the mirror M in FIG. Emit illumination light for exposure. The light path of the illumination light is bent vertically downward by the mirror M, and illuminates the rectangular (or arc-shaped) illumination area IAR on the reticle R with uniform illuminance.

A reticle R is fixed on the reticle stage RST by, for example, vacuum suction. Also,
The reticle stage RST can be driven on a reticle base (not shown) by a reticle driving unit (not shown) composed of a linear motor or the like at a scanning speed designated in the Y-axis direction, which is the scanning direction. I have.

A movable mirror 15 for reflecting a laser beam from a reticle laser interferometer (hereinafter, referred to as a "reticle interferometer") 16 is fixed on the reticle stage RST. Is, for example, 0.5 to 1 nm by the reticle interferometer 16.
It is always detected with a resolution of the order.

The position information of the reticle stage RST from the reticle interferometer 16 is sent to the stage control system 19 and the main controller 20 via the stage control system 19, and the stage control system 19 sends the reticle stage RST in response to an instruction from the main controller 20. R
Reticle drive unit (not shown) based on ST position information
Drives the reticle stage RST via the.

The projection optical system PL is arranged below the reticle stage RST in FIG. 1 and is a reduction system that is telecentric on both sides here, and is arranged at predetermined intervals along the optical axis AX direction (Z-axis direction). A refractive optical system including a plurality of lens elements is used. The projection magnification of the projection optical system PL is, for example, 1/4, 1/5 or 1/6. Therefore, when the illumination area IAR of the reticle R is illuminated by the illumination light from the illumination system 10, the illumination light passing through the reticle R causes the projection optical system PL to emit light.
A reduced image (partially inverted image) of the circuit pattern in the illumination area IAR of the reticle R via the exposure area I conjugate to the illumination area IAR on the wafer W coated with the photoresist on the surface
A is formed.

The substrate stage device 30 includes a base 21
And a substrate table 18 as a stage which is levitated and supported by an air slider (not shown) via a clearance of about several μm above the upper surface of the base 21, and the substrate table 18 is moved in a two-dimensional direction in the XY plane. And a driving device 50 for driving the motor. Here, the driving device 50 includes a stator 60 provided (embedded) on the base 21 and a mover 51 fixed on the bottom (base facing surface side) of the substrate table 18. Are used. The mover 51 and the base 21 (including the stator 60) constitute a planar motor device as a motor device. In the following description, the driving device 50 is referred to as a planar motor 50 for convenience.

A wafer W is fixed on the substrate table 18 by, for example, vacuum suction. A movable mirror 27 for reflecting a laser beam from a wafer laser interferometer (hereinafter, referred to as “wafer interferometer”) 31 is fixed on the substrate table 18. The position of the X.18 in the XY plane is always detected with a resolution of, for example, about 0.5 to 1 nm.

Here, in practice, as shown in FIG. 2, a movable mirror 27Y having a reflecting surface orthogonal to the Y-axis direction, which is the scanning direction, and the X-axis direction, which is the non-scanning direction, are provided on the substrate table 18. Is provided, and the wafer interferometer 31 is provided with one axis in the scanning direction and two axes in the non-scanning direction. In FIG. , Wafer interferometer 31. The position information (or speed information) of the substrate table 18 is sent to the stage control system 19 and the main controller 20 via the stage control system 19, and the stage control system 19 sends the position information (or speed information) in response to an instruction from the main controller 20. Based on the information, the movement of the substrate table 18 in the XY plane (including rotation about the Z axis, that is, θz rotation) is controlled via the plane motor 50.

As shown in FIG. 2, the substrate table 18 has a support mechanism 32a including a voice coil motor and the like on the upper surface (the surface opposite to the surface facing the base 21) of the mover 51 constituting the planar motor 50. , 32b, 32c at three different points. These support mechanisms 32a
1 to 32c are not shown in FIG. 1, but are actually connected to a stage control system 19 in FIG.
, The substrate table 18 is minutely driven in the Z-axis direction and the tilt direction (θx direction, θy direction) with respect to the XY plane. That is, in the present embodiment, the substrate table 18 has six degrees of freedom (X, Y, Z, θx, θ
(y, θz directions).

In the exposure apparatus of the present embodiment, although not shown, the exposure area I on the surface of the wafer W is actually
The Z direction (the optical axis AX direction) of the portion inside A and the area in the vicinity thereof
A multipoint focus position detection system, which is one of oblique incident light type focus detection systems (focus detection systems) for detecting the position of the projection optical system PL, is provided on a holding member (not shown) that holds the projection optical system PL. This multipoint focus position detection system has an irradiation optical system and a light receiving optical system.
The same configuration as that disclosed in Japanese Patent Publication No. 3 is used. ,

The stage control system 19 controls the support mechanisms 32a to 32c based on the output of the multi-point focus position detection system at the time of scanning exposure, which will be described later, or the like.
8 is driven in a Z-tilt manner so that the surface of the wafer W matches the range of the depth of focus of the projection optical system PL. That is, the stage control system 19 performs the auto focus / auto leveling in this manner.

As described above, the movable table 51 is provided on its upper surface with the substrate table 18 via the support mechanisms 32a, 32b, and 32c shown in FIG. A magnetic pole unit composed of a magnetic member 59 (see FIG. 3) and a large number of magnets arranged in a matrix on the surface of the magnetic member 59 facing the stator 60 (the bottom surface of the mover 51). I have. In the following description, this mover 51 will also be appropriately referred to as “magnetic pole unit 51”. The magnetic pole unit 51 is integrally provided with an air slider (not shown).
Pressurized air is blown toward the upper surface of the base 21 from a large number of gas static pressure bearings provided on the air slider, and pressurized gas between the upper surface of the base 21 and the magnetic pole unit 51,
For example, the substrate table 18 including the magnetic pole unit 51 is levitated and supported in a non-contact manner by the static pressure of pressurized air (so-called gap pressure).

Here, an example of the magnetic pole unit 51, that is, an example of the mover 51 will be described in more detail. FIG. 3A is a bottom view of the mover 51 (a plan view as viewed from the −Z direction).
3B is a side view of the mover 51 as viewed from the + Y direction, and FIG. 3C is a view of the mover 51 shown in FIG.
A sectional view taken along line -B is shown. The mover 51 includes a flat magnetic member 59 and a stator 60 of the magnetic member 59.
3A, the permanent magnets 52N, 52 arranged in a matrix on the surface (the upper surface in FIG.
S, 53N, 54N, and 54S. here,
The permanent magnets 52N, 53N, and 54N are magnets whose N-pole surface is opposed to the stator 60.
S and 54S are magnets whose surfaces facing the stator 60 are S-pole surfaces. The dimensions of each permanent magnet are as shown in FIG. 3A, where P (see FIG. 2) is the length of one side of an armature coil described later. The interval between adjacent permanent magnets is P / 3.

The base 21 including the stator 60 is
As shown in FIG. 4 which is a schematic vertical cross-sectional view thereof, a rectangular container 69 in a plan view having two stepped concave portions having an open upper surface is formed, and the center of the container 69 in the height direction is slightly lower. A coil support member 12 as a flat plate-like support member, which is engaged from above with the lower step portion and extends substantially parallel to the bottom surface, and is arranged on the upper surface of the coil support member 12 in a matrix as shown in FIG. Multiple (here 8 × 8 = 64)
And a guide made of a non-magnetic non-conductive material such as ceramic integrally attached to the armature coil 44 so as to close the upper opening, and pressurized air from the gas static pressure bearing is blown on the upper surface thereof. And a flat member 68 having a surface formed.

In this embodiment, as shown in FIG. 4, a plurality of armature coils 44 constitute a flat coil group 61 as an armature unit.
1 and the coil support member 12 constitute the stator 60 of the flat motor 50 described above.

The coil supporting member 12 includes a plate-shaped magnetic member 62 made of a magnetic material having a plurality of armature coils 44 fixed on the upper surface thereof in contact therewith, and the plate-shaped magnetic member 6.
And a printed circuit board 66 attached to a surface of the second armature coil 44 opposite to the armature coil 44.

Next, the armature coil 44 and its mounting structure to the coil support member 12 and the like, which are features of the present embodiment, will be described in detail.

As the armature coil 44, a coil having a substantially square shape in a plan view is used (see FIG. 2). As shown in FIG. 6 (C), the armature coil 44 is composed of a four-layer winding in which two segments of a two-layer winding are stacked in two stages. Both ends (power receiving end) 64 of the armature coil 44
Both a and 64b exist outside the armature coil 44.

Here, referring to FIGS. 6A to 6C,
A method of manufacturing the armature coil 44 will be briefly described.

First, as a first step, as shown in FIG. 6A, the cross section is substantially square, and the length of one side of the square is the length of one side of the armature coil 44 to be finally manufactured. With the rectangular parallelepiped shaft member 40 as an axis, the coil winding 64 made of a flat rectangular wire with a rectangular cross section is turned from the longitudinal center portion 41 so as to be opposite to each other on both upper and lower sides. Are wound by a predetermined number of turns. As a result, one segment 42 composed of the two-layer winding shown in FIG. 6B is formed. In this segment 42, the coil is wound so that both ends of the coil winding are present on the outside, but in this embodiment,
Since the armature coil 44 having a four-layer winding composed of two-stage segments is used in consideration of the installation space of the armature coil 44, as shown in FIG. The two segments 42 are vertically stacked with the four corners of the square aligned, and the segments are bonded with an adhesive or the like, and the ends of the coil windings 64 forming each segment 42 are shown in FIG. Are connected by solder 43 or the like so as to be connected. This completes the armature coil 44 shown in FIG. 6C, which is composed of four layers of coil windings in which both ends 64a and 64b of the coil windings 64 are present on the outside.

In this case, as is apparent from FIG. 6C, since the connection work using the solder 43 is performed outside the armature coil 44, the connection between the segments 42 can be performed very easily. it can. Further, since the connection position in this case can be set to an arbitrary position, for example, by setting it to any one of the four corners, the coil supporting member 12 can be set.
When the four armature coils 44 are arranged in a matrix on the upper side, the connection positions of the respective coils are designated by reference numerals 6 in FIG.
The four armature coils 44, denoted by 5 or 65 ', can be concentrated in the originally wasted space (dead space) between them. Normally, the connection position rises (swells outward), so that the adjacent armature coils 44 can be in close contact with each other, and the space efficiency can be improved.

As shown in FIG. 5, each armature coil 44 manufactured as described above has a square bottom surface (X
(A plane parallel to the Y plane), and is formed in a prismatic shape having a hollow portion 47 penetrating in the Z direction near a central axis CX parallel to the Z axis. The cross-sectional shape of the hollow portion 47 is a square shape whose length is one-third (P / 3) of the length P of one side of the armature coil 44. This armature coil 4
Prior to mounting on the coil support member 12, a mold member 49 made of an electrical insulator such as a resin having an opening 49a formed in a part as shown in FIG.
Is attached integrally to one of the corners,
Both are integrated. The mold member 49 is integrally provided with a pair of terminal pins 65a and 65b as a pair of power receiving terminals on one surface (a lower surface in FIG. 5) in advance. Therefore, after attaching the mold member 49 to the armature coil 44, the end (power receiving end) 64a is formed through the opening 49a.
And terminal pin 65a, end (power receiving end) 64b and terminal pin 6
By soldering each of the armature coils 5b to the armature coil 44, current can be supplied to the armature coil 44 via the terminal pins 65a and 65b.

Further, in this embodiment, the coil supporting member 1
2, the terminal pins 65a, as shown in FIG.
A socket 22 is provided corresponding to the terminal pin 65b so that each of the terminal pins 65a and 65b can be detachably connected.

This will be described in more detail.
As shown in FIG. 4, the magnetic member 62 constituting the coil supporting member 12 is embedded in a circular opening formed facing the terminal pin 65a (or 65b), and the terminal pin 65a (or 65b) is embedded therein. ) Is formed of a resin-made cylindrical member having a receptacle which can be detachably connected to the socket 22. A power supply pattern formed in the through hole formed in the printed board 66 is formed on the bottom surface of the socket 22. Is provided with a power supply terminal 24 connected to the power supply terminal.

In the present embodiment, as shown in FIG. 5, each of the armatures is placed at a portion where corners R of four armature coils 44 arranged in two rows and two columns are concentrated. A total of eight pins are provided in a concentrated manner corresponding to the terminal pins 65a and 65b integrally provided at the corners of the coil 44 via the molding member 49, respectively. Correspondingly, on the bottom surface of the printed board 66, as shown in FIG. 7, a power supply pattern 26 which is individually connected to each socket 22 via a power supply terminal 24 is formed.

Accordingly, when mounting each armature coil 44 on the coil supporting member 12, the terminal pins 65a, which are integrated with the armature coil 44 via the molding member 49 and are electrically connected, are provided. 65b is simply connected (fitted) to the corresponding socket 22, and the coil support member 12 of each armature coil 44 can be connected with one touch.
The physical fixing on the upper side and the electrical connection to the power supply terminal 24 connected to the current supply device (not shown) via the power supply pattern 26 can be completed. Therefore, it is not necessary to fix the armature coil 44 to the coil support member 12 (magnetic member 62) with an adhesive, and a lead wire (lead) for electrically connecting each armature coil 44 to the current supply device. Wiring) using a wire is not required.

As described above, each armature coil 44 is mounted on the coil support member 12 and then the flat member 6
8 is placed on the container 19, etc.
After that, the assembly of the substrate stage device 30 is completed through a predetermined procedure such as a work of mounting the substrate table 18 on the mover 51.

After the assembly of the base 21 or the assembly of the substrate stage device 30 is completed, the power supply pattern 2 on the printed board 66 is supplied from a current supply device (not shown).
6, when a current is supplied via the power supply terminal 24 and the terminal pins 65a and 65b, the supplied current is substantially uniform around the central axis CX shown in FIG. ). In the exposure apparatus 100 of the present embodiment, the stage control system 19 controls at least one of the current value and the current direction of the current flowing from the current supply device (not shown) to the armature coil 44, and thereby the substrate table 1
8 in the XY plane is controlled.

Here, a method of controlling the driving of the substrate table 18 by the stage control system 19 will be briefly described, including the driving principle.

The armature coil 44 facing the magnetic pole unit 51 has the maximum absolute value at a position corresponding to the center point of the permanent magnets 52N and 52S shown in FIG.
It is arranged in a situation where there is a magnetic flux density distribution shaped in a direction that can be approximated by a sine function. When a current is supplied to such an armature coil 44, a Lorentz electromagnetic force is generated in the armature coil 44. The reaction force of the Lorentz electromagnetic force acts on the magnetic pole unit 51, and the substrate table 18 (wafer W) is driven.

The magnitude and direction of the Lorentz electromagnetic force generated in the armature coil 44 depend on the armature coil 44
Depends on the magnitude and direction of the current supplied to the magnetic pole unit 51 and the positional relationship between the magnetic pole unit 51 and the plate-shaped coil group 61. However, when driving the substrate table 18 in the X direction, the stage control system 19 A pair of two armature coils 44 adjacent to each other in the X direction is selected according to the X position of 51, and each pair of armature coils 44 is mutually connected according to the positional relationship between the magnetic pole unit 51 and the plate-shaped coil group 61. By supplying sinusoidal currents having the same amplitude and different phases by 90 °, the X component of the resultant force of the Lorentz electromagnetic force is controlled to be constant regardless of the X position of the magnetic pole unit 51. In this case, the stage control system 19 adjusts the current flowing through each armature coil 44 so that the force for driving the magnetic pole unit 51 in the X direction and the rotational force become zero as a whole. In the stage control system 19, each armature coil 4
By controlling the amplitude and the direction of the sinusoidal current supplied to 4, the magnitude and direction of the force driving the magnetic pole unit 51 are controlled.

In the stage control system 19, the magnetic pole unit 5
In the same manner as in the case of driving in the X direction, the magnetic pole unit 51 is driven by a constant driving force regardless of the Y position.

In the stage control system 19, a current of a pattern in which the current pattern for driving the magnetic pole unit 51 in the X direction and a current pattern for driving the magnetic pole unit 51 in the Y direction are superposed at an appropriate ratio is applied to each stage. Armature coil 44
, The magnetic pole unit 51 can be driven with an arbitrary driving force in an arbitrary direction along the XY plane.

Further, in the stage control system 19, the magnetic pole unit 51 is driven without canceling the rotational force, so that the magnetic pole unit 5 is driven in a desired rotational direction and a desired rotational force.
1 can be performed.

As described above, the exposure apparatus 10 of the present embodiment
0, the stage control system 19 causes the substrate table 18
The current supplied to the armature coil 44 is controlled in accordance with the XY position and the θz rotation (the amount of yawing), and the position of the substrate table 18 and thus the wafer W is controlled.

The supply of the current to the armature coil 44 causes the armature coil 44 to generate heat.
When the wafer W is transmitted to the substrate table 18 via the substrate table 8, the wafer W held on the substrate table 18 is thermally deformed, and the atmosphere around the substrate table 18 fluctuates (temperature fluctuation). May cause a detection error of the wafer interferometer 31 which detects the position of the wafer interferometer. For this reason, although not shown, the exposure apparatus 1 of the present embodiment is not shown.
00, water or fluorine-based space is not contained in the space inside the base 21 (the closed space surrounded by the flat plate member 68, the container 69, and the coil support member 12, and the closed space surrounded by the container 69 and the coil support member 12). Cooling liquid (refrigerant) such as active liquid
And cooling is performed simultaneously from the upper surface side and the lower surface side of the armature coil 44.

Next, the flow of the exposure operation in the exposure apparatus 100 including the stage device 30 will be briefly described with reference to FIG.

First, a reticle loader and a wafer loader (not shown) load a reticle and a wafer under the control of the main controller 20.
Reticle alignment, baseline measurement (distance from the detection center of the alignment detection system to the optical axis of the projection optical system PL) using a fiducial mark plate on the substrate table 18 and an off-axis alignment detection system (both not shown) Preparatory work such as measurement) is performed according to a predetermined procedure.

Thereafter, main controller 20 executes wafer alignment measurement such as EGA (enhanced global alignment) using an alignment detection system (not shown). In such an operation, when the movement of the wafer W is necessary, the stage control system 19 changes at least one of the current value supplied to the armature coil 44 and the current direction in accordance with an instruction from the main controller 20. By controlling, the substrate table 18 holding the wafer W integrally with the mover 51 is moved in a predetermined direction. After the completion of the alignment measurement, the exposure operation of the step-and-scan method is performed as follows.

In this exposure operation, first, the wafer W
The substrate table 18 is moved such that the XY position of the substrate table becomes the scanning start position for exposing the first shot area (first shot) on the wafer W. At the same time, reticle stage RST is moved such that the XY position of reticle R becomes the scanning start position. Then, based on an instruction from main controller 20, stage control system 19 determines whether or not XY position information of reticle R detected by reticle interferometer 16 and XY position information of wafer W detected by wafer interferometer 31. Scanning exposure is performed by synchronously moving the reticle R and the wafer W via the illustrated reticle driving unit and the plane motor 50. The movement of the wafer W is performed by the stage control system 19 in response to an instruction from the main controller 20, the current value supplied to the armature coil 44,
And controlling at least one of the current directions.

When the transfer of the reticle pattern to one shot area is completed in this way, the substrate table 18 is stepped by one shot area, and scanning exposure is performed on the shot area. In this way, the stepping and the scanning exposure are sequentially repeated, and the required number of shot patterns are transferred onto the wafer W.

As described above, according to the exposure apparatus 100 of the present embodiment, the magnetic circuit is easy to design, the thrust ripple is small, and the linearity of the current and the thrust is good up to a high band. When the driving device of the substrate table 18 as a stage is configured by the Lorentz electromagnetic force driving type planar motor 50 that can perform the driving, the driving device of the substrate table 18 is configured by a combination of a rotary motor and a feed screw. Of course, the substrate table 18
The position controllability of the substrate table 18 is improved as compared with the case where a variable motor driving type flat motor or the like is used as a driving device for the reticle stage RST and the substrate table 18.
Exposure accuracy (overlay accuracy) can be improved by improving the synchronization accuracy with the camera and the positioning accuracy at the time of stepping between shots, and the throughput can be improved by shortening the synchronization settling time and positioning settling time. Become.

Further, since a flat rectangular flat wire is used as the coil winding 64 of each armature coil 44 constituting the stator 60, the adjacent coil windings 64 make surface contact with each other, and As compared with the case where a wire having a round cross section in which wires make line contact with each other is used, the armature coil 44
The space factor of the electric wire in is improved. Accordingly, the size of the planar motor device can be reduced by reducing the size of the armature coil 44, and the current density can be improved by improving the space factor. As a result, the generated thrust (generated Lorentz electromagnetic force) can be reduced. Can be improved. The improvement in the generated thrust allows the substrate table 18 to be driven with higher acceleration, and in this respect, the throughput can be improved.

In this embodiment, each armature coil 4
4 are both ends (power receiving ends) 64a, 64 of the coil winding 64
b is wound so as to be present outside the armature coil 44, so that both the power receiving ends can be arranged outside the coil without any difficulty.
Wiring work can be made more efficient. In this case, it is not necessary to secure the wiring space above the coil and to form the concave groove below the coil.

In addition, each armature coil 44 has two segments 42 laminated in accordance with the height of the space provided in the container 69 for the armature coil 44, and the segments 42 are adhered to each other. A four-layer winding formed by connecting the ends of the coil windings 64 forming the segments 42 is used. In this case, since the ends of the coil windings 64 forming the segments 42 are connected at positions outside the respective segments, connection work such as soldering can be easily performed. .

Further, in this embodiment, prior to mounting each armature coil 44 on the coil support member 12, a mold member 49 having a pair of terminal pins 65a, 65b integrally provided on its bottom surface is attached. , Coil winding 64
Of the pair of terminal pins 65a, 65b.
b. Also, the coil support member 12
Is configured to include a printed board 66 on which a power supply pattern 26 to each armature coil 44 is formed, and the coil support member 12 has a power supply terminal 24 corresponding to each power supply pattern 26. The sockets 22 to which the terminal pins 65a or 65b of each armature coil 44 are detachably connected are provided at predetermined intervals. For this reason, terminal pins 65a, 65b provided on each armature coil 44 are mounted on the socket 22 provided on the coil support member 12.
The coil support member 12
The fixing of the armature coil 44 to the armature and the wiring for current supply are completed. Thereby, the armature coil 4 made of adhesive is
4, fixing work to the coil support member 12 (magnetic member)
In addition, a troublesome wiring operation using a conductive wire (lead wire) for electrically connecting each armature coil 44 to the current supply device becomes unnecessary. Therefore, the work of assembling and wiring the armature coils 44 can be made more efficient, and the work of assembling the base 21 becomes easier.
Furthermore, the assembling work of the exposure apparatus 100 can be facilitated, and thus the cost can be reduced. In particular, as in the present embodiment, a large number of armature coils are required with the armature unit as the stator side. Efficient wiring work has a significant effect on shortening equipment assembly time and cost.

The arrangement of the terminal pins 65a and 65b described in the first embodiment is merely an example. For example, mold members are attached to separate corners of the armature coil 44, and the terminal pins 65a and With the provision of the terminal pins 65b, the terminal pins 65a and 65b may be arranged at different corners of the armature coil 44. In such a case, the fixing of the armature coil 44 to the coil support member 12 becomes more stable. Of course, in this case, it is necessary to match the arrangement of the power supply pattern, the arrangement of the socket, and the like with the terminal pins.

<< Second Embodiment >> Next, a second embodiment of the present invention will be described with reference to FIGS. here,
The same reference numerals are used for the same or equivalent components as those in the first embodiment, and the description thereof will be simplified or omitted. The exposure apparatus according to the second embodiment differs from the exposure apparatus according to the first embodiment only in the configuration of the stator 60 of the planar motor 50 constituting the substrate stage device 30. Therefore, the following description focuses on the different points.

FIG. 8 shows the armature coil 44 'according to the second embodiment in a state where a part thereof is cut off. In the armature coil 44 ', a coil winding composed of a flat rectangular flat wire is wound, and both ends (power receiving ends) 64a, 64b of the coil winding are soldered to terminal pins 65a, 65b as power receiving terminals. Is similar to the above-described armature coil 44, but both ends 64a and 64b of the coil winding are present inside the armature coil 44 ', that is, in the central hollow portion 47. Member 49 'made of an electrically insulating material such as a resin in which the coil winding is wound and the terminal pins 65a and 65b are integrally provided corresponding to the wound coil winding.
However, they differ in that they are integrally mounted in the hollow portion 47.

Here, a method of manufacturing the armature coil 44 'according to the second embodiment will be described with reference to FIG.

First, as a first step, a segment consisting of a coil winding having a square shape in a plan view, in which a coil winding 64 made of a flat rectangular flat wire is sequentially wound in a predetermined direction from the inside to the outside in the same manner as in the prior art. Are prepared.

Next, as shown in FIG. 9, a clockwise segment 48A ₁ composed of a coil winding 64 wound clockwise from an apparently inner side to an outer side, and from the inner side to the outer side. counterclockwise segment 48B ₁ including a coil winding 64 wound counter-clockwise, clockwise segment 48A _2, stacked in this order counterclockwise segment 48B _2. During this stacking, the first layer of segments 48A ₁ and segment 48B ₁ of the second layer, and connecting the ends of the outer coil winding 64 with solder or the like, of the second layer segments 48B ₁ and 3 the segment 48A ₂ layers th and connect the ends of the inner coil winding 64, the outer ends of the coil winding 64 is 3-layer segments 48A ₂ and the fourth layer of the segment 48B ₂ By connecting and adhering the adjacent segments with an adhesive, both ends (power receiving ends) 64a and 64b of the desired inner and inner 4 are present in the inner hollow portion.
An armature coil 44 'consisting of layers of coil windings is completed.

However, in practice, it is technically necessary to perform a wiring work such as soldering inside the coil, so that technical skill is required. Therefore, in the second step, the soldering is performed after the lamination of the segments is completed. Instead of segment 4 of the second layer
8B ₁ and advance connection between the third layer segments 48A _2, then the first layer of segments 48A ₁ and second layer segment 48B ₁ segment 48A ₂ of connection and the third layer 4 or the connection segments 48B ₂ layers th or it is desirable to continue to at any time connected with stacking the segments upward in the order of the first layer to fourth layer.

[0080] Incidentally, the second layer, in order to omit the connection by soldering or the like on the inside between the third layer segments may be used a segment 42 of the first embodiment, instead of the segment 48A _2, 48B ₁ . In such a case, 1
By using the segments 48A ₁ and 48B ₂ as they are for the fourth layer and the fourth layer, it is possible to perform all the connection work using solder or the like outside.

Then, a mold member 49 'is attached to each armature coil 44' manufactured as described above, and both ends 64a, 64b of the coil winding and terminal pins 65a,
By making the connection with the terminal pin 65b, the armature coil 44 'integrated with the terminal pins shown in FIG. 8 is completed.

Although not shown, the coil supporting member 12 used in the second embodiment is basically configured in the same manner as in the first embodiment, except that the terminal pins 65a, The socket 22 is located at a position corresponding to the position 65b.
And a power supply pattern 26 is formed on the printed board 66 so as to correspond to each of the power receiving terminals 24 connected to the socket 22.

Therefore, when mounting each armature coil 44 ′ on the coil support member 12, the terminal which has been integrated with each armature coil 44 ′ via the molding member 49 ′ and has been electrically connected is completed. By simply connecting (fitting) the pins 65a and 65b to the corresponding sockets 22, respectively, the armature coils 44 'are physically fixed to the coil support member 12 via the power supply pattern 26 with one touch. Power supply terminal 2 connected to a current supply device (not shown)
4 can be completed.

The configuration, operation, and the like of the other parts are the same as those of the first embodiment.

According to the exposure apparatus of the second embodiment configured as described above, the same effects as those of the above-described first embodiment can be obtained. Both ends 64a, 64b and two terminal pins 65
a, 65b are present, so that the adjacent armature coils 4
4 ′ can be arranged on the coil supporting member 12 in a state of being brought closer to each other, and each armature coil 4 ′
4 'is fixed to the coil supporting member 12 at the hollow portion 47, so that the armature coils 44, 44'
Has an effect that it is difficult to separate from the coil support member 12.

In the first and second embodiments, the case where the coil supporting member 12 includes the printed board 66 on which the power supply pattern 26 is formed, and the socket 22 is provided for each power supply pattern 26 will be described. However, the present invention is not limited to this, and the power supply terminal 24 connected to each socket 22 and the current supply device may be electrically connected by a lead wire or the like without providing a printed circuit board. good. Even in such a case, the plurality of armature coils 4
4 is provided on a supporting member for supporting the power supply terminals 4 corresponding to a pair of terminal pins of each armature coil, and a plurality of sockets 22 to which the terminal pins are detachably connected are provided at predetermined intervals. Socket 2 provided on member
2. Terminal pins 65a, 6 provided on the armature coil 44
Just by fitting 5b, one-touch fixation of the armature coil to the support member and wiring for current supply are completed. Can be.

The socket 2 described in the above embodiment
2 need not necessarily be provided. That is, each armature coil is made of an electrical insulator and a pair of power receiving terminals (terminal pins 65a, 65
b) is attached, and if both ends of the coil winding 64 are respectively connected to a pair of power receiving terminals, the power receiving terminals are connected to each other when assembling each armature coil. By simply connecting to the power supply terminal corresponding to the above, the electrical connection for power supply to the armature coil is completed, and the power receiving terminal and the end of the armature coil are connected using solder or the like at the time of assembly. This is because the work of (1) becomes unnecessary, and the assembling work (wiring work) becomes easy.

Further, it is not always necessary to provide the mold member described in each of the above embodiments. That is, for example, the ends of the coil windings 64 that form the segments 42 of the adjacent layers constituting the armature coil 44 according to the first embodiment are placed at desired outside positions, for example, at the four outside corners of each segment. When the plurality of armature coils are arranged adjacent to each other in the form of a matrix in the same manner as in the above embodiment, the dead space (the corners of the four armature coils) This is because the protrusion of the solder of the connection portion can be located in the space where the portion is concentrated), so that the density of the arrangement of the armature coils can be improved, and as a result, the space efficiency can be improved. .

In the first and second embodiments, the case where a four-layer armature coil is used has been described. However, the present invention is not limited to this.
The number of segments (the number of layers) may be determined in accordance with the space that is to be arranged as the arrangement space per armature coil. By doing so, it is possible to create a coil that matches the shape of the space. In addition, segments having an arbitrary thickness are mass-produced by a conventional method. For example, each segment is alternately turned upside down, an even number of layers are stacked, and the segments are bonded to form an end portion of a coil winding that forms a segment of an adjacent layer. By connecting them together, it is possible to easily manufacture a coil that is put in and put out and a coil that is put in and out.

In the first and second embodiments, the flat rectangular electric wire is used for the coil winding of the armature coil. However, for example, if there is room in space, the coil winding is inexpensive. An electric wire having a round cross section may be used.

In each of the above embodiments, a case has been described in which pressurized air is blown out to the guide surface as pressurized gas from a gas static pressure bearing constituting an air slider that levitates and supports the mover 51. Not limited to this, for example, Ar
In an environment in which an F excimer laser or an F ₂ laser is used as an exposure light source and nitrogen or helium is filled in a chamber of the exposure apparatus, these gases may be used as a pressurized gas.

In each of the above embodiments, the case where the present invention is applied to an electromagnetic force driving type flat motor and armature coils are arranged in a matrix has been described. However, the present invention is not limited to this. The present invention is also applicable to a linear motor in which coils are arranged at predetermined intervals along a predetermined uniaxial direction.

FIG. 10 shows a cylindrical linear motor (shaft motor) 73 as another embodiment of the motor device according to the present invention. This shaft motor 73 is
The magnetic pole unit 72 includes a plurality of cylindrical permanent magnets, and an armature unit 71 mounted around the magnetic pole unit 72 and driven along the magnetic pole unit 72 by Lorentz electromagnetic force generated between the magnetic pole unit 72 and the magnetic pole unit 72. As the armature coil 44 constituting the armature unit 71, an armature coil having both ends of the coil winding outside the coil is used.

In the shaft motor 73 shown in FIG. 10, unlike the armature coil used in the conventional linear motor, one end is not drawn out from the inside to the outside, and wiring is not performed. The distance between the child coils can be reduced, and the thrust generated by the shaft motor 73 can be improved. Therefore, if the shaft motor 73 is arranged in the XY two-dimensional directions to form a driving device for driving the stage, a stage device that can perform high acceleration driving and has excellent stage position controllability is realized. And, by using this stage device, for example, as a drive device of a mask or a substrate of a scanning type exposure apparatus similar to the above-described embodiment, an improvement in exposure accuracy and an improvement in throughput are realized as in the above-described embodiment. can do.

Note that even if an armature coil in which both ends of the coil winding exist inside the armature coil is used for the shaft motor, the shaft using the armature coil in which the above two ends exist outside the armature coil. An effect equivalent to that of the motor 73 can be obtained.

Further, in the first and second embodiments, the case where the motor device and the stage device according to the present invention are applied to the driving device of the substrate of the scanning stepper has been described. The motor device and the stage device according to the present invention can be applied to a reticle driving device. In addition, the motor device and the stage device according to the present invention are not limited to a scanning exposure device such as a scanning stepper, but are also applicable to a substrate driving device in a static exposure type exposure device such as a step-and-repeat type stepper. it can. In such a case, the cost can be reduced by facilitating the assembly work, the exposure accuracy (overlay accuracy) can be improved by improving the positioning accuracy of the substrate, and the throughput can be improved by shortening the positioning time.

The present invention can be applied to a proximity exposure apparatus for transferring a mask pattern onto a substrate by bringing the mask and the substrate into close contact without using a projection optical system.

The present invention also relates to a DU as exposure illumination light.
Not only to an exposure apparatus using V light, ArF excimer laser light or _{F 2} laser beam (wavelength: 157 nm) or the like of the vacuum ultraviolet (V
Not only an exposure apparatus using UV light, but also an exposure apparatus using light in the soft X-ray region (so-called EUV light) having a wavelength of about 5 to 30 nm, and an exposure apparatus such as a charged particle beam exposure apparatus such as an electron beam exposure apparatus It can also be applied suitably.

The magnification of the projection optical system may be not only a reduction system but also any of an equal magnification and an enlargement system. As the projection optical system,
When far ultraviolet rays such as an excimer laser are used, a material that transmits far ultraviolet rays such as quartz or fluorite is used as the glass material.
_{2 When} using a laser or X-ray, use a catadioptric or reflective optical system (use a reticle of a reflective type). When using an electron beam, use an electron lens and deflector as the optical system. An electron optical system may be used.
It goes without saying that the optical path through which the electron beam passes is in a vacuum state.

The application of the exposure apparatus is not limited to an exposure apparatus for manufacturing a semiconductor. For example, an exposure apparatus for a liquid crystal for exposing a liquid crystal display element pattern to a square glass plate or a thin film magnetic head may be used. It can be widely applied to an exposure apparatus for manufacturing.

Further, the motor device and the stage device according to the present invention can be suitably applied to devices other than the exposure device, for example, devices having a stage such as an inspection device and a substrate transfer device.

The illumination optical system and the projection optical system composed of a plurality of lenses are incorporated in the main body of the exposure apparatus for optical adjustment, and the stage apparatus 30 incorporating the reticle stage RST and the armature coil 44 or 44 ′ is exposed. The exposure apparatus according to each of the above-described embodiments can be manufactured by attaching the apparatus to the apparatus main body, connecting wirings and pipes, and further performing comprehensive adjustments (electric machine adjustment, operation confirmation, and the like). It is desirable that the manufacture of the exposure apparatus be performed in a clean room in which the temperature, cleanliness, and the like are controlled.

The semiconductor device has a step of designing the function and performance of the device, a step of manufacturing a reticle based on the design step, a step of manufacturing a wafer from a silicon material, and a predetermined step by the exposure apparatus of each of the above-described embodiments. Is manufactured through a step of transferring the pattern to a wafer, a step of assembling a device (including a dicing step, a bonding step, and a package step), an inspection step, and the like.

[0104]

As described above, according to the first to ninth aspects of the present invention, it is possible to reduce the cost by reducing the size and increasing the efficiency of the assembling work, and to provide a motor device excellent in controllability. Can be provided.

According to the tenth aspect of the present invention,
It is possible to provide a stage device capable of facilitating the assembling work and reducing the cost and improving the controllability of the position of the stage.

Further, according to the eleventh aspect of the present invention,
An exposure apparatus capable of improving both the exposure accuracy and the throughput and reducing the cost can be provided.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a schematic configuration of an exposure apparatus according to a first embodiment.

FIG. 2 is a plan view showing the stage device of FIG.

FIG. 3A is a bottom view showing a magnetic pole unit, and FIG.
3B is a side view of FIG. 3A viewed from the −Y direction, and FIG.
FIG. 3C is a sectional view taken along line BB of FIG.

FIG. 4 is a longitudinal sectional view showing an internal configuration of the base of FIG. 1;

FIG. 5 is a diagram for explaining a method of mounting an armature coil on a support member.

FIGS. 6A to 6C are diagrams for explaining a method of manufacturing the armature coil according to the first embodiment.

FIG. 7 is a diagram illustrating an example of a power supply pattern formed on a printed circuit board.

FIG. 8 is a partially cutaway perspective view showing an armature coil according to a second embodiment.

FIG. 9 is a view for explaining a method for manufacturing an armature coil according to the second embodiment.

FIG. 10 is a view showing another embodiment of the motor device according to the present invention.

[Explanation of symbols]

12: coil support member (support member), 18: substrate table (stage), 21: base (part of motor device),
Reference numeral 22: socket, 24: power supply terminal, 26: power supply pattern, 30: substrate stage device (stage device), 42 ...
Segment, 44: Armature coil, 49: Mold member, 51: Mover (magnetic pole unit, part of motor device), 61: Flat coil group (armature unit), 64
... Coil winding, 65a, 65b ... Terminal pins (power receiving terminals), 66 ... Printed circuit board, 100 ... Exposure device, R ... Reticle (mask), W ... Wafer (substrate).

Continued on the front page F-term (reference) GG29 HH03 HH05 HH11 JA06 JB05

Claims (11)

[Claims] 1. A motor device comprising: an armature unit including a plurality of armature coils; and a magnetic pole unit having a magnet that generates a driving force in a predetermined direction by an electromagnetic interaction generated between the armature coils. The motor device, wherein each of the armature coils is wound such that both ends of the coil winding are present outside or inside the coil. 2. Each of the armature coils includes a plurality of stacked segments, the segments are bonded to each other, and formed by connecting ends of coil windings forming segments of adjacent layers. The motor device according to claim 1, wherein: 3. The motor device according to claim 2, wherein the ends of the coil windings forming the segments of the adjacent layers are connected at desired positions. 4. A coil winding of each armature coil,
The motor device according to any one of claims 1 to 3, wherein the motor device is a flat rectangular electric wire. 5. Each of the armature coils is provided with a mold member made of an electrical insulator and integrally provided with a pair of power receiving terminals on one predetermined surface, and both end portions of the coil winding. 5. The motor device according to claim 1, wherein the motor device is connected to the pair of power receiving terminals. 6. 6. A power supply terminal corresponding to each of the pair of power receiving terminals of each of the armature coils, further comprising a support member for supporting the plurality of armature coils, The motor device according to claim 5, wherein a plurality of sockets to which the power receiving terminal is detachably connected are provided at predetermined intervals. 7. The power supply device according to claim 1, wherein the support member has a printed circuit board on which a power supply pattern to each of the armature coils is formed, and the socket is provided for each of the power supply patterns. 7. The motor device according to 6. 8. The motor device according to claim 1, wherein the plurality of armature coils are arranged at predetermined intervals along a predetermined uniaxial direction. 9. The motor device according to claim 1, wherein the plurality of armature coils are arranged in a matrix. 10. A stage device comprising: the motor device according to claim 8; and a stage driven by the motor device. 11. An exposure apparatus for transferring a pattern formed on a mask onto a substrate, comprising: the stage device according to claim 10 as a driving device for at least one of the mask and the substrate. Exposure equipment.