JP2001035827A - 高濃度オゾン水、同オゾン水の調製方法、および同オゾン水を使用した洗浄方法 - Google Patents
高濃度オゾン水、同オゾン水の調製方法、および同オゾン水を使用した洗浄方法Info
- Publication number
- JP2001035827A JP2001035827A JP11203741A JP20374199A JP2001035827A JP 2001035827 A JP2001035827 A JP 2001035827A JP 11203741 A JP11203741 A JP 11203741A JP 20374199 A JP20374199 A JP 20374199A JP 2001035827 A JP2001035827 A JP 2001035827A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- acids
- ozone
- organic
- ozone water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 238000004140 cleaning Methods 0.000 title claims abstract description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims description 28
- 238000000034 method Methods 0.000 title claims description 21
- 238000002360 preparation method Methods 0.000 title claims description 4
- 239000002253 acid Substances 0.000 claims abstract description 51
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229910021642 ultra pure water Inorganic materials 0.000 claims abstract description 34
- 239000012498 ultrapure water Substances 0.000 claims abstract description 34
- 150000007524 organic acids Chemical class 0.000 claims abstract description 33
- 239000000203 mixture Substances 0.000 claims abstract description 15
- 238000007664 blowing Methods 0.000 claims abstract description 10
- 238000007865 diluting Methods 0.000 claims abstract description 5
- 150000001991 dicarboxylic acids Chemical class 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 14
- 235000005985 organic acids Nutrition 0.000 claims description 13
- 150000007513 acids Chemical class 0.000 claims description 9
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 9
- 229930195729 fatty acid Natural products 0.000 claims description 9
- 239000000194 fatty acid Substances 0.000 claims description 9
- 150000004665 fatty acids Chemical class 0.000 claims description 9
- 229920006395 saturated elastomer Polymers 0.000 claims description 9
- 150000001413 amino acids Chemical class 0.000 claims description 7
- 125000004432 carbon atom Chemical group C* 0.000 claims description 7
- -1 aromatic carboxylic acids Chemical class 0.000 claims description 6
- 150000002763 monocarboxylic acids Chemical class 0.000 claims description 6
- 150000004670 unsaturated fatty acids Chemical class 0.000 claims description 6
- 235000021122 unsaturated fatty acids Nutrition 0.000 claims description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 abstract description 21
- 239000002904 solvent Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 6
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 11
- 229940093915 gynecological organic acid Drugs 0.000 description 8
- 239000000243 solution Substances 0.000 description 6
- 235000015165 citric acid Nutrition 0.000 description 5
- 235000001014 amino acid Nutrition 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 150000001735 carboxylic acids Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- RWSXRVCMGQZWBV-WDSKDSINSA-N glutathione Chemical compound OC(=O)[C@@H](N)CCC(=O)N[C@@H](CS)C(=O)NCC(O)=O RWSXRVCMGQZWBV-WDSKDSINSA-N 0.000 description 2
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- SIOXPEMLGUPBBT-UHFFFAOYSA-N picolinic acid Chemical compound OC(=O)C1=CC=CC=N1 SIOXPEMLGUPBBT-UHFFFAOYSA-N 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- XVOUMQNXTGKGMA-OWOJBTEDSA-N (E)-glutaconic acid Chemical compound OC(=O)C\C=C\C(O)=O XVOUMQNXTGKGMA-OWOJBTEDSA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- WLAMNBDJUVNPJU-UHFFFAOYSA-N 2-methylbutyric acid Chemical compound CCC(C)C(O)=O WLAMNBDJUVNPJU-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- WHUUTDBJXJRKMK-UHFFFAOYSA-N Glutamic acid Natural products OC(=O)C(N)CCC(O)=O WHUUTDBJXJRKMK-UHFFFAOYSA-N 0.000 description 1
- 108010024636 Glutathione Proteins 0.000 description 1
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 1
- WHUUTDBJXJRKMK-VKHMYHEASA-N L-glutamic acid Chemical compound OC(=O)[C@@H](N)CCC(O)=O WHUUTDBJXJRKMK-VKHMYHEASA-N 0.000 description 1
- 235000021314 Palmitic acid Nutrition 0.000 description 1
- 101000701286 Pseudomonas aeruginosa (strain ATCC 15692 / DSM 22644 / CIP 104116 / JCM 14847 / LMG 12228 / 1C / PRS 101 / PAO1) Alkanesulfonate monooxygenase Proteins 0.000 description 1
- 101000983349 Solanum commersonii Osmotin-like protein OSML13 Proteins 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 235000011054 acetic acid Nutrition 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- 239000000783 alginic acid Substances 0.000 description 1
- 229960001126 alginic acid Drugs 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 150000004781 alginic acids Chemical class 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 239000011260 aqueous acid Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 235000010323 ascorbic acid Nutrition 0.000 description 1
- 229960005070 ascorbic acid Drugs 0.000 description 1
- 239000011668 ascorbic acid Substances 0.000 description 1
- 235000003704 aspartic acid Nutrition 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 239000000174 gluconic acid Substances 0.000 description 1
- 235000012208 gluconic acid Nutrition 0.000 description 1
- 235000013922 glutamic acid Nutrition 0.000 description 1
- 239000004220 glutamic acid Substances 0.000 description 1
- 229960003180 glutathione Drugs 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 1
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 229940081066 picolinic acid Drugs 0.000 description 1
- IUGYQRQAERSCNH-UHFFFAOYSA-N pivalic acid Chemical compound CC(C)(C)C(O)=O IUGYQRQAERSCNH-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 235000003441 saturated fatty acids Nutrition 0.000 description 1
- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/39—Organic or inorganic per-compounds
- C11D3/3942—Inorganic per-compounds
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/08—Acids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/265—Carboxylic acids or salts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- Emergency Medicine (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
(57)【要約】
【課題】 高濃度のオゾンを含有する超純水の提供、同
超純水の調製方法の提供、および同超純水を使用した作
業効率に優れたウェーハの洗浄方法の提供。 【解決手段】 クエン酸、酢酸、蟻酸などの特定の酸に
オゾンを吹き込み、このものを超純水で希釈するか、ま
たは、所定量の酸を含有する超純水にオゾンを吹き込む
ことにより達成。
超純水の調製方法の提供、および同超純水を使用した作
業効率に優れたウェーハの洗浄方法の提供。 【解決手段】 クエン酸、酢酸、蟻酸などの特定の酸に
オゾンを吹き込み、このものを超純水で希釈するか、ま
たは、所定量の酸を含有する超純水にオゾンを吹き込む
ことにより達成。
Description
【0001】
【発明の属する技術分野】 本発明は、高濃度オゾン
水、同オゾン水の調製方法、および同オゾン水を使用し
た洗浄方法、特に、シリコンウェーハの洗浄方法に関す
る。
水、同オゾン水の調製方法、および同オゾン水を使用し
た洗浄方法、特に、シリコンウェーハの洗浄方法に関す
る。
【0002】
【従来の技術】 近年、半導体デバイスの高集積化に伴
うチップサイズの大型化が進むに従って、各種ウェー
ハ、特にシリコンウェーハ表面の清浄度に加えて、大面
積にわたって耐圧不良のない電気的絶縁性の優れた高品
質の酸化膜の形成に対する要求がますます厳しくなって
いる。デバイスの酸化膜耐圧等の電気的特性に大きな影
響を与える原因の一つとされている遷移金属不純物(F
e,Cu,Cr,Ni等)や有機物の除去、表面の保護
膜としての酸化膜形成にオゾン水が使用されることがあ
る。
うチップサイズの大型化が進むに従って、各種ウェー
ハ、特にシリコンウェーハ表面の清浄度に加えて、大面
積にわたって耐圧不良のない電気的絶縁性の優れた高品
質の酸化膜の形成に対する要求がますます厳しくなって
いる。デバイスの酸化膜耐圧等の電気的特性に大きな影
響を与える原因の一つとされている遷移金属不純物(F
e,Cu,Cr,Ni等)や有機物の除去、表面の保護
膜としての酸化膜形成にオゾン水が使用されることがあ
る。
【0003】 しかし、オゾン水による洗浄では、上記
のような金属不純物や、有機物の洗浄除去には必ずしも
満足できる結果が得られていない。充分な洗浄効果が得
られない主要な原因として、オゾンの超純水に対する溶
解度が低いことが上げられる。例えば、いわゆるワンウ
ェイ洗浄に使用される場合には、超純水中のオゾン濃度
は、常温で、高々30ppm程度、循環洗浄槽に使用す
る超純水中のオゾン濃度は、40から50ppm程度で
あり、そのためには、所望とする洗浄度を上げるには、
処理時間を長くする必要があるなどの作業性の上での問
題があった。また、循環洗浄槽などに使用する場合に
は、オゾンは水中では比較的不安定なために、絶えず分
解するので、所定の濃度を維持するためには、常時オゾ
ンを補給する必要があった。
のような金属不純物や、有機物の洗浄除去には必ずしも
満足できる結果が得られていない。充分な洗浄効果が得
られない主要な原因として、オゾンの超純水に対する溶
解度が低いことが上げられる。例えば、いわゆるワンウ
ェイ洗浄に使用される場合には、超純水中のオゾン濃度
は、常温で、高々30ppm程度、循環洗浄槽に使用す
る超純水中のオゾン濃度は、40から50ppm程度で
あり、そのためには、所望とする洗浄度を上げるには、
処理時間を長くする必要があるなどの作業性の上での問
題があった。また、循環洗浄槽などに使用する場合に
は、オゾンは水中では比較的不安定なために、絶えず分
解するので、所定の濃度を維持するためには、常時オゾ
ンを補給する必要があった。
【0004】
【発明が解決しようとする課題】 本発明は上記した従
来の課題に鑑みてなされたものであり、その目的とする
ところは、高濃度のオゾンを含有する超純水の提供、同
超純水の調製方法の提供、および同超純水を使用した作
業効率に優れたウェーハの洗浄方法を提供するものであ
る。
来の課題に鑑みてなされたものであり、その目的とする
ところは、高濃度のオゾンを含有する超純水の提供、同
超純水の調製方法の提供、および同超純水を使用した作
業効率に優れたウェーハの洗浄方法を提供するものであ
る。
【0005】
【課題を解決するための手段】 本発明者は、上記の目
的を達成するために、種々検討の結果、特定の酸にオゾ
ンを吹き込み、このものを超純水で希釈するか、あるい
は、同酸を特定量超純水に添加したものにオゾンを吹き
込むことで、超純水中のオゾン濃度が、少なくとも55
ppm、好ましくは60ppmを超える超純水が得られ
ることを見いだして、本発明を完成させたものである。
すなわち、本発明によれば、オゾンを少なくとも55p
pm含むオゾン水が、好ましくは、さらに少なくとも
0.005重量%以上の酸を含むオゾン水が、より好ま
しくは、酸が炭素数20またはそれ以下の有機酸、塩
酸、または有機酸と塩酸の混合物であるオゾン水が、さ
らに好ましくは、有機酸が飽和モノカルボン酸類;高級
脂肪酸類;不飽和脂肪酸類;ハロゲン化酸類;不飽和ジ
カルボン酸類(光学異性体を含む);オキシモノまたは
ジカルボン酸類(光学異性体を含む);アミノ酸類;芳
香族カルボン酸類;その他の有機酸から選ばれた少なく
とも一種であるオゾン水が提供される。
的を達成するために、種々検討の結果、特定の酸にオゾ
ンを吹き込み、このものを超純水で希釈するか、あるい
は、同酸を特定量超純水に添加したものにオゾンを吹き
込むことで、超純水中のオゾン濃度が、少なくとも55
ppm、好ましくは60ppmを超える超純水が得られ
ることを見いだして、本発明を完成させたものである。
すなわち、本発明によれば、オゾンを少なくとも55p
pm含むオゾン水が、好ましくは、さらに少なくとも
0.005重量%以上の酸を含むオゾン水が、より好ま
しくは、酸が炭素数20またはそれ以下の有機酸、塩
酸、または有機酸と塩酸の混合物であるオゾン水が、さ
らに好ましくは、有機酸が飽和モノカルボン酸類;高級
脂肪酸類;不飽和脂肪酸類;ハロゲン化酸類;不飽和ジ
カルボン酸類(光学異性体を含む);オキシモノまたは
ジカルボン酸類(光学異性体を含む);アミノ酸類;芳
香族カルボン酸類;その他の有機酸から選ばれた少なく
とも一種であるオゾン水が提供される。
【0006】 さらに、酸にオゾンを吹き込み、このも
のを超純水で希釈するか、少なくとも0.005重量%
以上の酸を含む超純水にオゾンを吹き込むことにより、
オゾンを少なくとも55ppm含むオゾン水の調製方法
が、好ましくは、有機酸が炭素数20またはそれ以下の
有機酸であるオゾン水の調製方法が、より好ましくは、
有機酸が飽和モノカルボン酸類;高級脂肪酸類;不飽和
脂肪酸類;ハロゲン化酸類;不飽和ジカルボン酸類(光
学異性体を含む);オキシモノまたはジカルボン酸類
(光学異性体を含む);アミノ酸類;芳香族カルボン酸
類;その他の有機酸から選ばれた少なくとも一種である
オゾン水の調製方法が提供される。加えて、ウェーハ表
面の洗浄方法において、オゾンを少なくとも55ppm
含むオゾン水を使用して、ウェーハを洗浄することより
なるウェーハの洗浄方法が、好ましくは、該オゾン水
が、さらに少なくとも0.005重量%以上の酸を含む
オゾン水を使用するウェーハの洗浄方法が、より好まし
くは、酸として炭素数20またはそれ以下の有機酸、塩
酸または、塩酸と有機酸との混合物を使用したオゾン水
を使用したウェーハの洗浄方法が、さらに好ましくは、
有機酸として飽和モノカルボン酸類;高級脂肪酸類;不
飽和脂肪酸類;ハロゲン化酸類;不飽和ジカルボン酸類
(光学異性体を含む);オキシモノまたはジカルボン酸
類(光学異性体を含む);アミノ酸類;芳香族カルボン
酸類;その他の有機酸から選ばれた少なくとも一種を使
用して調製したオゾン水を使用してウェーハの洗浄方法
が提供される。
のを超純水で希釈するか、少なくとも0.005重量%
以上の酸を含む超純水にオゾンを吹き込むことにより、
オゾンを少なくとも55ppm含むオゾン水の調製方法
が、好ましくは、有機酸が炭素数20またはそれ以下の
有機酸であるオゾン水の調製方法が、より好ましくは、
有機酸が飽和モノカルボン酸類;高級脂肪酸類;不飽和
脂肪酸類;ハロゲン化酸類;不飽和ジカルボン酸類(光
学異性体を含む);オキシモノまたはジカルボン酸類
(光学異性体を含む);アミノ酸類;芳香族カルボン酸
類;その他の有機酸から選ばれた少なくとも一種である
オゾン水の調製方法が提供される。加えて、ウェーハ表
面の洗浄方法において、オゾンを少なくとも55ppm
含むオゾン水を使用して、ウェーハを洗浄することより
なるウェーハの洗浄方法が、好ましくは、該オゾン水
が、さらに少なくとも0.005重量%以上の酸を含む
オゾン水を使用するウェーハの洗浄方法が、より好まし
くは、酸として炭素数20またはそれ以下の有機酸、塩
酸または、塩酸と有機酸との混合物を使用したオゾン水
を使用したウェーハの洗浄方法が、さらに好ましくは、
有機酸として飽和モノカルボン酸類;高級脂肪酸類;不
飽和脂肪酸類;ハロゲン化酸類;不飽和ジカルボン酸類
(光学異性体を含む);オキシモノまたはジカルボン酸
類(光学異性体を含む);アミノ酸類;芳香族カルボン
酸類;その他の有機酸から選ばれた少なくとも一種を使
用して調製したオゾン水を使用してウェーハの洗浄方法
が提供される。
【0007】
【発明の実施の形態】 本発明に係る高濃度のオゾンを
含有する超純水は、特定の酸にオゾンを吹き込み、この
ものを超純水で希釈するか、あるいは、同酸を所定量以
上含む超純水にオゾンを吹き込むことで得ることができ
る。すなわち、酸そのもの、あるいは、酸と超純水の混
合物をオゾンの溶媒として使用することにより、酸の種
類、量により変動はあるものの、従来は得られなかった
オゾンを少なくとも55ppm、好ましくは60ppm
を超える範囲内であれば任意の量で、かつ高濃度で含む
超純水を調製することができる。溶媒として使用可能な
酸は、炭素数20またはそれ以下の有機酸、塩酸、有機
酸と塩酸の混合物が挙げられる。有機酸と塩酸との混合
物を使用する場合には、両者の混合比は、任意でよく、
その混合比は、最終使用目的に応じて選択すればよい。
この混合物を使用するとより一層の洗浄効果の向上が期
待される。
含有する超純水は、特定の酸にオゾンを吹き込み、この
ものを超純水で希釈するか、あるいは、同酸を所定量以
上含む超純水にオゾンを吹き込むことで得ることができ
る。すなわち、酸そのもの、あるいは、酸と超純水の混
合物をオゾンの溶媒として使用することにより、酸の種
類、量により変動はあるものの、従来は得られなかった
オゾンを少なくとも55ppm、好ましくは60ppm
を超える範囲内であれば任意の量で、かつ高濃度で含む
超純水を調製することができる。溶媒として使用可能な
酸は、炭素数20またはそれ以下の有機酸、塩酸、有機
酸と塩酸の混合物が挙げられる。有機酸と塩酸との混合
物を使用する場合には、両者の混合比は、任意でよく、
その混合比は、最終使用目的に応じて選択すればよい。
この混合物を使用するとより一層の洗浄効果の向上が期
待される。
【0008】 有機酸としては、より具体的には、蟻
酸、酢酸、プロピオン酸、酪酸、n−バレリン酸、i−
バレリン酸、メチルエチル酢酸、トリメチル酢酸、カプ
ロン酸、クエン酸等の飽和モノカルボン酸類(低級脂肪
酸ともいう);パルミチン酸、ステアリン酸等の高級脂
肪酸類;オレイン酸、リノール酸、リノレン酸等の不飽
和脂肪酸類;上記カルボン酸類または高級脂肪酸類のハ
ロゲン化酸類;蓚酸、マロン酸、琥珀酸、アジピン酸等
の飽和ジカルボン酸類;グルタコン酸、マレイン酸、フ
マール酸等の不飽和ジカルボン酸類(光学異性体を含
む);乳酸、クエン酸、リンゴ酸、酒石酸等のオキシモ
ノまたはジカルボン酸類(光学異性体を含む);アスパ
ラギン酸、グルタミン酸等のアミノ酸類;安息香酸、サ
リチル酸、フタール酸、テレフタール酸、イソフタール
酸、ピコリン酸、プロカテチュ酸等の芳香族カルボン酸
類;アスコルビン酸、グルコン酸、アルギン酸、グルタ
チオン等のその他の有機酸などが挙げられる。これらの
有機酸は、単独で使用しても、あるいは、2種以上混合
して使用してもよい。これらの中で、オキシカルボン酸
類、中でも、クエン酸が好ましい。特に、クエン酸と塩
酸との混合物を溶媒として使用すると、一層の洗浄効果
の向上が期待されるので好ましい。
酸、酢酸、プロピオン酸、酪酸、n−バレリン酸、i−
バレリン酸、メチルエチル酢酸、トリメチル酢酸、カプ
ロン酸、クエン酸等の飽和モノカルボン酸類(低級脂肪
酸ともいう);パルミチン酸、ステアリン酸等の高級脂
肪酸類;オレイン酸、リノール酸、リノレン酸等の不飽
和脂肪酸類;上記カルボン酸類または高級脂肪酸類のハ
ロゲン化酸類;蓚酸、マロン酸、琥珀酸、アジピン酸等
の飽和ジカルボン酸類;グルタコン酸、マレイン酸、フ
マール酸等の不飽和ジカルボン酸類(光学異性体を含
む);乳酸、クエン酸、リンゴ酸、酒石酸等のオキシモ
ノまたはジカルボン酸類(光学異性体を含む);アスパ
ラギン酸、グルタミン酸等のアミノ酸類;安息香酸、サ
リチル酸、フタール酸、テレフタール酸、イソフタール
酸、ピコリン酸、プロカテチュ酸等の芳香族カルボン酸
類;アスコルビン酸、グルコン酸、アルギン酸、グルタ
チオン等のその他の有機酸などが挙げられる。これらの
有機酸は、単独で使用しても、あるいは、2種以上混合
して使用してもよい。これらの中で、オキシカルボン酸
類、中でも、クエン酸が好ましい。特に、クエン酸と塩
酸との混合物を溶媒として使用すると、一層の洗浄効果
の向上が期待されるので好ましい。
【0009】 勿論、超純水に上記酸を所定量加えたも
のも溶媒として使用可能である。超純水と上記酸との混
合物をオゾンの溶媒として使用するに際しては、上記酸
を少なくとも0.005重量%含んで居れば充分であ
る。上限については特に制限はなく、酸を100重量%
使用してもよいが、洗浄液として使用する時には、洗浄
条件などを考慮して、適宜、酸濃度を調整する必要があ
ることはいうまでもない。酸として0.005重量%未
満の濃度では、所望とする量のオゾンを溶解させられな
いことがあるので好ましくない。
のも溶媒として使用可能である。超純水と上記酸との混
合物をオゾンの溶媒として使用するに際しては、上記酸
を少なくとも0.005重量%含んで居れば充分であ
る。上限については特に制限はなく、酸を100重量%
使用してもよいが、洗浄液として使用する時には、洗浄
条件などを考慮して、適宜、酸濃度を調整する必要があ
ることはいうまでもない。酸として0.005重量%未
満の濃度では、所望とする量のオゾンを溶解させられな
いことがあるので好ましくない。
【0010】 高濃度でオゾンを含む超純水の調製は、
上述のごとく、酸そのものに飽和量のオゾンを吹き込ん
で、高濃度のオゾンを含む酸溶液を調製し、使用時に高
濃度のオゾンを含む酸溶液を超純水で所望の濃度に薄め
て使用してもよく、あるいは、所定量の酸を含む超純水
溶液にオゾンを吹き込んで調製してもよいことは勿論で
ある。なお、酸には、予め、酸水溶液として販売されて
いるものもあるが、そのようなものの場合には、半導体
製造用グレードであれば、そのものをそのまま使用して
もよい。
上述のごとく、酸そのものに飽和量のオゾンを吹き込ん
で、高濃度のオゾンを含む酸溶液を調製し、使用時に高
濃度のオゾンを含む酸溶液を超純水で所望の濃度に薄め
て使用してもよく、あるいは、所定量の酸を含む超純水
溶液にオゾンを吹き込んで調製してもよいことは勿論で
ある。なお、酸には、予め、酸水溶液として販売されて
いるものもあるが、そのようなものの場合には、半導体
製造用グレードであれば、そのものをそのまま使用して
もよい。
【0011】 以下実施例を挙げて本発明を説明するが
本発明はこれらの実施例により何ら制限されるものでは
ない。
本発明はこれらの実施例により何ら制限されるものでは
ない。
【0012】 (高濃度オゾン含有超純水の調製例)ク
エン酸を0.01重量%含む超純水に、オゾンを6リッ
ター/分の割合で吹き込み、オゾン濃度が70ppmの
超純水を調製した。このものを使用してウェーハの表面
に意図的に塗布した有機物と金属を除去しても、充分な
効果が認められる。
エン酸を0.01重量%含む超純水に、オゾンを6リッ
ター/分の割合で吹き込み、オゾン濃度が70ppmの
超純水を調製した。このものを使用してウェーハの表面
に意図的に塗布した有機物と金属を除去しても、充分な
効果が認められる。
【0013】
【発明の効果】 以上の説明から明らかなように、本発
明に係る高濃度のオゾンを含む超純水の調製方法によれ
ば、特定の酸を溶媒または溶媒の一部として使用するこ
とにより、高濃度オゾン超純水を提供することができる
ことが判明した。かくして、酸の金属除去作用とオゾン
の有機物分解能を有する洗浄液を容易に提供できるとい
う効果を発揮することとなる。
明に係る高濃度のオゾンを含む超純水の調製方法によれ
ば、特定の酸を溶媒または溶媒の一部として使用するこ
とにより、高濃度オゾン超純水を提供することができる
ことが判明した。かくして、酸の金属除去作用とオゾン
の有機物分解能を有する洗浄液を容易に提供できるとい
う効果を発揮することとなる。
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Claims (11)
- 【請求項1】 オゾンを少なくとも55ppm含むオゾ
ン水。 - 【請求項2】 さらに、少なくとも0.005重量%以
上の酸を含む請求項1に記載のオゾン水。 - 【請求項3】 酸が炭素数20またはそれ以下の有機
酸、塩酸または、塩酸と有機酸との混合物である請求項
2に記載のオゾン水。 - 【請求項4】 有機酸が飽和モノカルボン酸類;高級脂
肪酸類;不飽和脂肪酸類;ハロゲン化酸類;不飽和ジカ
ルボン酸類(光学異性体を含む);オキシモノまたはジ
カルボン酸類(光学異性体を含む);アミノ酸類;芳香
族カルボン酸類;その他の有機酸から選ばれた少なくと
も一種である請求項3に記載のオゾン水。 - 【請求項5】 酸にオゾンを吹き込み、このものを超純
水で希釈するか、あるいは、少なくとも0.005重量
%以上の酸を含む超純水にオゾンを吹き込むことからな
る、オゾンを少なくとも55ppm含むオゾン水の調製
方法。 - 【請求項6】 酸が炭素数20またはそれ以下の有機
酸、塩酸または、塩酸と有機酸との混合物である請求項
5に記載のオゾン水の調製方法。 - 【請求項7】 有機酸が飽和モノカルボン酸類;高級脂
肪酸類;不飽和脂肪酸類;ハロゲン化酸類;不飽和ジカ
ルボン酸類(光学異性体を含む);オキシモノまたはジ
カルボン酸類(光学異性体を含む);アミノ酸類;芳香
族カルボン酸類;その他の有機酸から選ばれた少なくと
も一種である請求項6に記載のオゾン水の調製方法。 - 【請求項8】 ウェーハ表面の洗浄方法において、 オゾンを少なくとも55ppm含むオゾン水を使用し
て、ウェーハを洗浄することよりなるウェーハの洗浄方
法。 - 【請求項9】 オゾン水が、さらに少なくとも0.00
5重量%以上の酸を含むオゾン水である請求項8に記載
のウェーハの洗浄方法。 - 【請求項10】 酸が炭素数20またはそれ以下の有機
酸、塩酸または、塩酸と有機酸との混合物である請求項
9に記載のウェーハの洗浄方法。 - 【請求項11】 有機酸が飽和モノカルボン酸類;高級
脂肪酸類;不飽和脂肪酸類;ハロゲン化酸類;不飽和ジ
カルボン酸類(光学異性体を含む);オキシモノまたは
ジカルボン酸類(光学異性体を含む);アミノ酸類;芳
香族カルボン酸類;その他の有機酸から選ばれた少なく
とも一種である請求項10に記載のウェーハの洗浄方
法。
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JP11203741A JP2001035827A (ja) | 1999-07-16 | 1999-07-16 | 高濃度オゾン水、同オゾン水の調製方法、および同オゾン水を使用した洗浄方法 |
PCT/US2000/019444 WO2001005702A1 (en) | 1999-07-16 | 2000-07-17 | An acidic ozone solution having a high ozone content, a method for preparing the solution, and a cleaning method using the solution |
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JP11203741A JP2001035827A (ja) | 1999-07-16 | 1999-07-16 | 高濃度オゾン水、同オゾン水の調製方法、および同オゾン水を使用した洗浄方法 |
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JP (1) | JP2001035827A (ja) |
WO (1) | WO2001005702A1 (ja) |
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