JP2001035760A - System, method and recording medium for automatically managing semiconductor production bay - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a system and a method for efficiently managing a semiconductor production bay by classifying a storage means and data in the management of the semiconductor production bay, and to provide a recording medium for realizing them. SOLUTION: In this system, there are included many process equipment 700 for processing lots and generating real-time process data associated with the process in response to the lot data, at least one production managing means 620 for generating a control instruction associated with the process from a semiconductor production bay and receiving real-time process data from each process equipment, an equipment control means 640 for controlling the process equipment and transmitting the real-time process data to the production managing means, data storage means 160 for storing data associated with the process and a robot in the semiconductor production bay, and a history managing means 400 for managing the history of the process equipment and of each wafer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system, a method, and a recording medium for automatically managing a semiconductor production bay. It relates to systems and methods.

[0002]

2. Description of the Related Art Semiconductor factory automation systems generally utilize a number of semiconductor production bays. Each semiconductor production bay is provided with a number of specialized process equipment such as etching equipment, photolithography equipment, and the like.

[0003] In an automated semiconductor production bay, a cassette provided to the production bay and a processed cassette are loaded using a stocker. Each cassette is a container on which a predetermined number of wafers called a lot can be placed.

In order to manage data related to a process, a network system has been used in a conventional automation system of a semiconductor factory.

A conventional network system comprises a host computer, a number of terminals, and a database connected to the host computer. The host computer processes all data related to the manufacture of semiconductor wafers and controls the process equipment in a conventional semiconductor factory automation system.

[0006] The network system reduces the number of workers managing the process and ultimately minimizes impurities on the wafer. Further, data related to semiconductor wafer fabrication is processed quickly.

However, conventional processors do not classify storage means and overall control over data, so that many workers are involved in the steps performed in the semiconductor production bays, thereby effectively saving all semiconductor production bays. It was difficult to manage. Therefore, there is a problem that the production efficiency of the semiconductor device is reduced.

[0008]

SUMMARY OF THE INVENTION Accordingly, the present invention has been proposed to solve the above-mentioned various problems. In managing a semiconductor production bay, storage means and data are used. It is an object of the present invention to provide a system and a method for classifying and efficiently managing a semiconductor production bay and a recording medium for realizing the same.

[0009]

To achieve the above object, the present invention provides a system for automatically managing semiconductor production bays, which processes a lot indicating a predetermined number of semiconductor wafers and responds to the lot data. A plurality of process equipment for generating real-time process data related to the process, and at least one production management means for generating a control command related to the process from the semiconductor production bay and receiving the real-time process data from each process equipment And equipment control means for controlling the process equipment in response to the control signal and transmitting the real-time process data to the production management means; and in a semiconductor production bay in response to a command output from the production management means. A data storage unit for storing data related to a process and a lot, and the control command output from the production management unit In response, characterized by comprising a history management means for managing a history of each of the process equipment and the wafer.

The present invention also provides a method for automatically managing a semiconductor production bay, comprising: generating a cassette provision instruction using first lot data transmitted from a production control means; (A) transmitting to a plurality of process equipment and automatic transport means, processing a lot contained in a cassette using the process equipment (b), and real-time process data generated during the progress of the process (C) storing the cassette in the data storage means via the data collection means, and loading the cassette on the cassette loading means using the automatic transport means (d).
And (e) storing the real-time process data stored in the history management means in the history storage means.

Further, according to the present invention, in order to automatically manage a semiconductor production bay, a cassette providing command is generated by using the first lot information transmitted from the production control means, and then the cassette providing command is transmitted to a plurality of cassette providing commands. A first function for transmitting to a process equipment and an automatic transfer means, a second function for processing a lot contained in a cassette using the process equipment, and data collection of real-time process data generated during the process. A third function of storing the cassette in the cassette loading means using the automatic transport means, a third function of storing the cassette in the cassette loading means via the means, and the real-time process data stored in the history management means. Provided is a computer-readable recording medium recording a program for realizing a fifth function stored in a history storage unit.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

To manufacture semiconductor devices, a number of semiconductor production bays are typically installed in a semiconductor factory automation system, and the semiconductor production bays are connected to a production management system via a common communication line. For convenience, the present invention will describe only one semiconductor production bay.

Referring to FIG. 1, there is shown a schematic view of a semiconductor factory automation system using a system for automatically managing a semiconductor production bay according to an embodiment of the present invention.

As can be seen from FIG. 1, the automation system of a semiconductor factory comprises a semiconductor production bay including a predetermined number of, for example, four, semiconductor production bays and at least one cell. , Stocker 89
0 and one or more AGVs (automati
c guide vehicle) 880. Each process equipment 700 processes a semiconductor wafer to obtain a semiconductor device. The process equipment includes, for example, etching equipment, photolithography equipment, and the like. The stocker temporarily stores the cassette. Each cassette has a predetermined number of semiconductor wafers called a lot. The cassette is selectively transported to the process equipment by the AGV880. Cassettes processed by the process equipment (hereinafter referred to as processed cassettes or processed lots) are AGVs.
At 880, it is transferred to another process equipment or stocker 890. The processed cassette stored in the stocker 890 is transported to another semiconductor production bay.

Each process equipment is connected to a common communication line 10 such as Ethernet (registered trademark) via an equipment control unit 600. The stocker 890 and the AGV are also connected to the common communication line 10.

The automation system of the semiconductor factory also includes a cell management unit 100, a real-time database 200 connected to the cell management unit 100, a temporary storage unit 300 connected to the cell management unit 100, and a history connected to the temporary storage unit 300. The management unit 400 includes a history database 500 connected to the history management unit 400. The cell management unit 100, the history management unit 400, and the history database 500 are respectively connected to the common communication line 10 for communication between them.

Via the Ethernet cable 10,
The cell management unit 100 communicates with the equipment control unit 600 for controlling the process equipment 700, the transport control unit 800 for controlling the stocker 890, and the AGV 860.

The history database 500 is connected to the reporting unit 900 via the common communication line 10.

The cell management unit 100 includes an operator interface server (hereinafter, referred to as OIS), a cell management server (hereinafter, referred to as CMS) that generates control commands, and process data related to lots in a real time database 2
00 includes a data collection server (hereinafter referred to as DGS).

The OIS 120 is a graphic user interface.
face). The operator can use lot data related to the lot to be processed, for example, a lot identifier (ideni).
fier, I.S. D. ), The cassette identifier including the lot, etc. can be initially input to the OIS 120. OIS1
The lot data input to 20 is transmitted to the CMS 140 and then input to the real-time database 200 via the DGS 160. In this case, the CMS 140
Based on a process schedule stored in the real-time database 200 in advance, a cassette providing command or a cassette collecting command is generated as a control command. The instructions are sent over a common communication line, Ethernet,
The information is supplied to the transport control unit 800 in the form of a rnet message and displayed on the screen of the OIS 120.

The CMS 140 receives real-time process data from the equipment control unit 700 in the form of an Ethernet message and stores the real-time process data in the temporary storage unit 30.
Store at 0. In this case, the temporary storage unit 300 stores the real-time process data for a predetermined time.

The history management unit 400 receives the real-time process data from the temporary storage unit 300 and stores the received real-time process data in the history database 500 based on a command from the CMS 140. ) 420.

The equipment control unit 600 includes the common communication line 10
Equipment server (hereinafter referred to as EQS) 6
20 includes an equipment communication server (hereinafter, referred to as ECS) 640 for causing the process equipment 700 to communicate with the EQS 620. The ECS 640 converts the process data output from the process equipment 700 into a semiconductor equipment communication standard (semiconductor).
toe equipment communicati
on standard) (hereinafter referred to as SECS) message. SECS is a communication protocol for communication between servers of the present system. EQS620
Transmits the control command output from the CMS 140 to the ECS 6
The data is transmitted to the process equipment 700 via the control unit 40. Also, EQS
620 receives the process data output from the process equipment 700 via the ECS 640 and receives the process data from the CMS 140.
To be transmitted.

The transport control unit 800 includes a stocker control server (hereinafter referred to as SCS) 820 for controlling the stocker 890, an intrabay control server (hereinafter referred to as ICS) 840 connected to the SCS 820, and an ICS8.
An AGV controller (hereinafter, referred to as AGVC) connected to the control unit 40 is included.

The ICS 840 receives the control command output from the CMS 140 and receives the control command from each of the SCS 820 and the AGVC 8.
The control command is transmitted to 60. The SCS 820 controls the stocker 890 based on the received control command to retrieve or provide the selected cassette.

The AGVC 860 generates a transport control signal based on the received control command and converts the transport control signal to an AGV signal.
880. Thereafter, the AGV 880 transports the selected cassette in response to the transport control signal.

The reporting unit 900 receives the data from the history database 500 and generates a report. The reporting server 920 and the reporting server 92 generate the report.
And a report database 940 that stores the reports generated by 0.

The servers may be implemented using software, and each unit may be implemented using one or more of a personal computer, a workstation, a microprocessor, and the like.

FIG. 2 is a drawing showing the structure of the history database in the system according to the present invention.

As shown in FIG. 2, the history database 5
00 is a lot data table 510, an equipment data table 520, a reticle and cassette data table 530, and a process data table 540.
By

The lot data table 510 includes a lot state table 511, a lot history table 512, a lot deletion history table 513, a lot attribute table 514,
Work instruction table 515, process table 516, lot rejection (rejection) table 51
7, a lot reprocessing table 518 and a lot error table 519.

The lot status table 511 stores data such as the steps to be performed on the lot, the number of wafers in the lot, and the wafer status in the lot. The lot history table 512 stores data indicating a process performed on the lot, a change in the number of wafers in the lot, and the like. The lot deletion history table 513 stores data indicating the lot history deleted by the history deletion command, the deletion time, the worker at that time, and the like. The lot attribute table 514 stores data indicating lot attributes defined by the operator. The work instruction table 515 stores data indicating work instructions used in each process. Process table 516
Stores data generated during each step. The lot rejection table 517 stores data indicating a process in which a lot rejection occurred, a reason for the rejection, a management history for the rejection, and the like. The lot re-processing table 518 stores data indicating a reason for the need for re-processing the lot. When an error occurs in a lot, data indicating the reason of the error, the management history of the error, and the like are stored.

FIG. 4 is a view showing the structure of the equipment data table 520 related to the process equipment in FIG.

As shown in FIG. 4, the equipment data table 520 includes an equipment status table 521, an equipment history table 522, an equipment maintenance information table 523, an equipment work table 524, and an equipment command history table 525.

The equipment status table 521 stores data indicating the current status of the process equipment 700 in progress. The equipment history table 522 stores data indicating an error that has occurred in the process equipment 700. Equipment maintenance information table 52
3 stores information related to the maintenance information of the process equipment 700. The equipment work table 524 stores data related to a process performed by the process equipment 700 and data related to the process equipment 700. When the process equipment 700 fails, the equipment command history table 525 stores the commands processed by the process equipment 700.

FIG. 5 is a view showing the structure of the reticle and the cassette data table 530 associated with the reticle of each wafer contained in the cassette in FIG.

As shown in FIG. 5, the reticle and cassette data table 530 includes a reticle history table 53.
1 and a reticle instruction history table 532.

When at least one reticle error occurs, the reticle history table 531 stores data indicating an error occurred in the reticle. When at least one reticle error occurs, the reticle command history table 532 stores data indicating a command processed by the fixed device 700.

FIG. 6 is a diagram showing the structure of a process data table related to the process being processed in FIG.

As shown in FIG. 6, the process data table 540 includes a process status table 541 and a process history table 542.

The process status table 541 stores status information on a wafer or lot being processed. The process history table 542 stores data indicating the number of wafers processed by the process equipment 700 and the time required for processing.

In one embodiment of the present invention, the semiconductor factory automation system has been described as having one cell management unit 100, one history management unit 400, and one real-time database 200. However, two or more cell management units are provided. 100, the history management unit 400, and the real-time database 200 can also be embodied.

The data stored in the table is stored in the temporary storage unit 300 in the form of a file. After a predetermined time, the data file is stored in the history database 500. The cell management unit 100 and the history management unit 400 operate in parallel.

FIGS. 7 to 9 are flowcharts illustrating a method for automatically managing a semiconductor production bay according to an embodiment of the present invention. Hereinafter, description will be given based on a flowchart.

First, an operator operates the OIS 120 graphic user interface (GUI: Graph).
A lot to be processed is generated by inputting the first lot data associated with the lot using ic User Interface). The lot data related to the lot includes a lot identifier (ID), a process performed on the lot, the number of wafers in the lot, and an identifier (ID) of a cassette including the lot (step S).
300). At the same time, the CMS 140 receives the first lot data, and thereafter issues a cassette providing command (step S310). The CMS 140 transmits the cassette providing command to the process equipment 700 and the ICS 840 in the form of a message (steps S320 and S330).

ICS 840 issues a cassette supply instruction to the SCS
820 and the AGVC 860. The cassette providing instruction includes control data including a cassette identifier (ID), a position where the cassette is provided, and a position where the cassette is provided (step S340).

AGVC 860 outputs the AGV control signal to AG
V880, and the SCS 820 transmits the stocker control signal to the stocker 890. Then, stocker 89
0 selects a cassette containing a lot to be processed by the AGV 880 (step S350).

The AGV 880 transports the cassette provided from the stocker 890 to the target process equipment (step S360).

Thereafter, the target process equipment is AGV88.
0 processes the lots contained in the cassette conveyed by the CMS 1 and outputs real-time process data including process data related to the process and equipment data related to the process equipment to the CMS 1.
40 (step S370). In this case, CM
In step S140, the real-time process data is recorded in the real-time database 200 via the DGS 160 (step S380).

Thereafter, when the target process equipment completes the process, the target process equipment sends a request signal requesting the collection of the completed cassette via the equipment control unit 600 to the CM.
This occurs at S140 (step S390).

Thereafter, the CMS 140 generates a cassette collection command and transmits the cassette collection command to the target process equipment and the ICS 840 in the form of a message. The cassette collection instruction includes an identifier (ID) of a cassette to be collected,
Control data including the process equipment for collecting the cassette and the next target process equipment is included (step S40).
0, S410). The ICS 840 transmits a cassette collection command to the AGVC 860. At the same time, process equipment 700
Puts the processed lot on the cassette and waits for the next operation (step S420).

AGVC 860 transmits the AGV control signal to AGV 880 using the wireless communication network (step S430). AGV880 is a process equipment 70
The cassette is collected from 0 and loaded on the stocker 890 (step S440).

The SCS 820 transmits the new position information for the newly loaded cassette to the CMS 140 (step S450), and the CMS 140 replaces the previous position information for the newly loaded cassette stored in the real-time database 200 with the new position information. The information is updated using the information (step S460).

Thereafter, the CMS 140 receives the process data stored in the real-time database 200, and records the received process data in the temporary storage unit 300 as a process data file (step S470). After that, CM
In operation S140, file information indicating that the temporary storage unit 300 stores the process data is transmitted to the HIS 420. Next, the HIS 420 receives the process data file from the temporary storage unit 300 and records the process data in the history database 500 (Step S480).

The operator confirms through the OIS 120 whether or not another operation is necessary for the CMS 140 (Step S).
490), and then if other work is needed,
The CMS 140 returns to step S310 for generating a cassette providing command. On the other hand, when other work is unnecessary, the reporting unit 900 determines whether there is a report request for the completed process (step S50).
0).

If there is a report request, reporting server 920 receives the data stored in history database 500 (step S510), and outputs a report (step S520). Next, the reporting server 920 stores the report data of the report in the report database 940.

On the other hand, if there is no report request, S
Return to step 490.

FIG. 10 is a flowchart showing a step in which the CMS shown in FIG. 7 transmits a cassette providing command to the target process equipment 700.

The CMS 140 transmits the cassette providing command to the EQS 620 in the form of a message (step S32).
1). Next, the EQS 620 sends a cassette providing instruction to the E
The information is transmitted to the CS 640, and the ECS 640 converts the cassette providing command into a control signal for controlling the process equipment 700 (step S322). Next, the ECS 640 transmits a control signal corresponding to the cassette providing command to the process equipment 700 (step S323). In this case, the process equipment 700
It is ready to wait for a cassette.

FIG. 11 is a flowchart showing steps in which the AGV 880 provides a cassette to the target process equipment.

The SCS 820 transmits a stocker control signal to the stocker 890 (step S361), and the stocker 890 prepares to provide a target car set in response to the control signal (step S362).

Next, the AGV 880 is connected to the AGVC 860
, The AGV control signal corresponding to the cassette providing command is received (step S363), and moves to the stocker 890 to acquire the target cassette (step S364).
Next, the AGV 880 moves to the target process equipment 700 that provides the cassette (step S365), and provides the target cassette to the target process equipment 700 (step S366).

FIG. 12 is a flowchart showing steps for recording process data in a real-time database.

The process equipment 700 transmits real-time process data via the ECS 640 (step S38).
1). Next, the ECS 640 converts the real-time process data into the SECS message, and transmits the converted real-time process data to the EQS 620 (Step S382).

The EQS 620 transmits the converted real-time process data to the CMS 140 via the common communication line 10.
(Step S383). Next, CMS140
Transmits real-time process data to DGS160,
The GS 160 records the real-time process data in the real-time database 200 (Step S384).

FIG. 13 is a flow chart showing steps in which the process equipment requests cassette collection.

The process equipment 700 completes the process (step S391), and requests the ECS 640 to collect the cassette (step S392).

Next, the ECS 640 converts the cassette collection request into an SECS message and transmits the converted cassette collection command to the EQS 620 (step S39).
3). Next, the EQS 620 transmits the cassette collection command to the CMS 140 via the common communication line 10 (step S394). In response to the cassette collection command, the CM
S140 generates a cassette collection command (step S3).
95).

FIG. 14 is a flowchart showing steps in which the CMS transmits a cassette collection command to the process equipment.

The CMS 140 sends the cassette collection command to the
The data is transmitted to S620 (step S401), and the EQS620
Transmits a cassette collection command to the ECS 640 (step S402).

Next, the ECS 640 converts the cassette recovery command in the form of an SECS message into an equipment control signal (step S403), and transmits the equipment control signal to the process equipment 700 (step S404).

Next, the process equipment 700 places the processed lot on a cassette and waits for the next command (step S4).
05).

FIG. 15 is a flowchart showing steps in which the AGV collects the cassette from the process equipment and stores the cassette in the stocker.

The AGV 880 receives the AGV control signal corresponding to the cassette collection command and moves to the process equipment 700 (Step S441). Next, the AGV 880 collects the processed cassette from the process equipment 700 (Step S442). Next, the AGV 880 moves to the stocker 890 and loads the cassette on the stocker 890 (step S443). In this case, the target device can be another process equipment.

The present invention described above is not limited by the above-described embodiments and the accompanying drawings, and various substitutions and modifications may be made without departing from the technical spirit of the present invention.
Modifications and alterations are apparent to those skilled in the art to which the present invention pertains.

[0077]

According to the present invention, various processes and control data generated in a semiconductor production bay are automatically stored in a real-time database and a history database in real time, so that the entire management of the semiconductor production bay is effectively performed. Thereby, the production efficiency of the semiconductor device is remarkably improved.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an automation system of a semiconductor factory using a system for automatically managing a semiconductor production bay as one embodiment according to the present invention.

FIG. 2 is a diagram showing a structure of a history database in FIG.

FIG. 3 is a diagram showing a structure of a lot data table related to a lot in FIG. 2;

FIG. 4 is a view showing a structure of an equipment data table related to process equipment in FIG. 2;

FIG. 5 is a view illustrating a structure of a reticle and a cassette data table associated with each reticle of a semiconductor wafer included in the cassette of FIG. 2;

FIG. 6 is a diagram showing a configuration of a process data table related to an ongoing process in FIG. 2;

FIG. 7 is a flowchart illustrating a method for automatically managing a semiconductor production bay according to the present invention.

FIG. 8 is a flowchart illustrating a method for automatically managing a semiconductor production bay according to the present invention.

FIG. 9 is a flowchart illustrating a method for automatically managing a semiconductor production bay according to the present invention.

FIG. 10 is a flowchart showing a step of transmitting a cassette providing command to a device by the CMS in FIG. 7;

11 is a flowchart showing steps in which the AGV in FIG. 7 provides a cassette to the process equipment.

FIG. 12 is a flowchart showing a step of recording process data in FIG. 8 in a real-time database.

13 is a flowchart showing steps in which the process equipment in FIG. 8 requests cassette collection.

FIG. 14 is a flowchart showing a step in which the CMS in FIG. 8 transmits a cassette collection command to the process equipment.

FIG. 15 is a flowchart showing steps in which the AGV in FIG. 8 collects a cassette and loads it on a stocker.

[Explanation of symbols]

Reference Signs List 10 common communication line 100 cell management unit 120 worker interface server (OIS) 140 cell management server (CMS) 160 data collection server (DGS) 200 real-time database 300 temporary storage unit 400 history management unit 420 history information server (HIS) 500 history Database 600 Equipment control unit 620 Equipment server (EQS) 640 Equipment communication server (ECS) 700 Process equipment 800 Transport control unit 820 Stocker control server (SCS) 840 Intrabay control server (ICS) 860 AGV controller (AGVC) 880 AGV ( automatic guide
(vehicle) 890 stocker 900 reporting unit 920 reporting server 940 report database

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor ▲ Cho ▼ Yin-Hsoo 136-1 Gami-ri, Gwangbuk-eup, Icheon-si, Gyeonggi-do, Republic of Korea (72) Inventor Zhang Jin-ho Incheon, Gyeonggi-do, Republic of Korea 136-1 Famiri Satoyama

Claims (31)

[Claims] 1. A system for automatically managing a semiconductor production bay, comprising: a plurality of processes for processing a lot representing a predetermined number of semiconductor wafers and generating real-time process data associated with the process in response to the lot data; Equipment, at least one production management means for generating a control command related to a process from a semiconductor production bay and receiving the real-time process data from each of the process equipment, and controlling the process equipment in response to the control signal. Equipment control means for transmitting the real-time process data to the production management means, and data storage means for storing data relating to a process and a lot in a semiconductor production bay in response to a command output from the production management means. Each history of the process equipment and the wafer in response to the control command output from the production management means System for automatically managing the semiconductor production bay, characterized by comprising a history management means for managing. 2. The apparatus according to claim 1, further comprising a cassette transport unit that transports a cassette including a lot to target equipment in response to the control signal output from the production management unit. A system for automatically managing semiconductor production bays. 3. The system for automatically managing a semiconductor production bay according to claim 1, further comprising reporting means for receiving data stored in said data storage means and generating a report. 4. The apparatus according to claim 1, further comprising: cassette loading means for loading a cassette containing a processed lot and a lot to be processed in response to the control command output from the production management means. A system for automatically managing the described semiconductor production bays. 5. The production management means includes: an interface means having a graphic user interface for inputting the lot data; a cassette providing command based on the lot; and a cassette responding to a request from the equipment control means. Issue a recall order,
5. The method according to claim 1, further comprising: a production control unit that receives real-time process data output from the process equipment; and a data collection unit that stores the real-time process data in the data storage unit. A system for automatically managing semiconductor production bays. 6. The equipment control means includes: a process equipment control means for controlling the process equipment in response to a command output from the production control means; a cassette providing instruction output from the production control means and a cassette collection. Receiving the command, converting the command into an equipment control signal, converting real-time process data output from the process equipment into a semiconductor equipment communication standard (SECS) message, and transmitting the real-time process data to the equipment control means; The system for automatically managing a semiconductor production bay according to claim 1 or 5, further comprising an equipment communication means. 7. The cassette transport means, an intrabay control means for receiving the cassette supply instruction and the cassette collection instruction output from the production control means, and the cassette supply instruction and the cassette via the intrabay control means. A stocker control means for generating a stocker control signal used for controlling the cassette loading means in response to a collection command; a cassette conveyance control means for generating a conveyance control signal corresponding to the cassette providing command and the cassette collection command; Responding to the transport control signal corresponding to the cassette providing command and the cassette collecting command, respectively, taking out the target cassette from the cassette loading means, providing the target cassette to the target process equipment, and removing the target cassette from the target process equipment. Take out the target System for automatically managing the semiconductor production bay according to claim 2, 4 or 5, wherein the comprising conveying means for providing a cassette in the cassette loading unit. 8. The data storage means, a real-time data storage means for storing the real-time process data, a temporary storage means for temporarily storing the real-time process data in a file, and under a control of the history management means after a predetermined time. A history storage unit for classifying and storing the real-time process data stored in the temporary storage unit; and a report storage unit for storing a report generated by the reporting unit. Or a system for automatically managing the semiconductor production bay according to 3. 9. The lot data includes a lot identifier (ID), a process performed on the lot, a number of wafers in the lot, and a cassette identifier (ID) for a cassette including the lot. The system for automatically managing a semiconductor production bay according to claim 1, wherein: 10. The real-time process data includes a lot status, a lot-related instruction, a lot-related process data, a state of the process equipment, an operation data related to the process equipment, and an instruction related to the process equipment. And the state of the performed step.
A system for automatically managing the described semiconductor production bays. 11. The history storage means includes a lot data table associated with a processed lot, an equipment data table associated with the process equipment, a reticle and cassette data table associated with a reticle of each wafer included in a cassette, And a process data table related to the processed process.
A system for automatically managing the described semiconductor production bays. 12. The lot data table includes: a lot status table for storing data indicating a process performed on the lot, the number of wafers in the lot, and a wafer status in the lot; and data for indicating a change in the number of wafers in the lot. Lot history table to store, Lot deletion history table to store deleted lot history, Lot attribute table to store lot attribute defined by operator, Work order to store work order to progress the process A table, a process table for storing data generated during the progress of the process, a lot reject table for storing data indicating the process in which the lot was rejected, the reason for the rejection, and a management history of the rejection, A lot reprocessing table that stores data indicating the reason; 12. The semiconductor production bay according to claim 1, further comprising, if an error occurs in the lot, a lot error table storing a reason for the error and a management history of the error. System. 13. The equipment data table may be associated with a current state of the process equipment in progress, an equipment history table storing data indicating an error occurred in the process equipment, and maintenance information of the process equipment. An equipment maintenance information table for storing information, an equipment work table for storing performed processes and data related to the process equipment, and an equipment command for storing a command processed by the process equipment when the process equipment fails. The system for automatically managing a semiconductor production bay according to claim 1 or 11, further comprising a history table. 14. The reticle and cassette data table includes a reticle history table for storing data indicating an error occurring in the cassette and the reticle when an error occurs in at least one of the cassette and the reticle. 12. A system for automatically managing a semiconductor production bay according to claim 11. 15. The process data table related to a process, a process status table for storing status information on an ongoing wafer or lot, and the number of wafers processed by the process equipment and a time required for the process. 12. The system for automatically managing a semiconductor production bay according to claim 1, further comprising a process history table for storing data. 16. A step of generating a cassette providing command using the first lot data transmitted from the production control means, and transmitting the cassette providing command to a plurality of process equipment and automatic transport means (a); (B) processing a lot contained in a cassette using the process equipment; and (c) storing real-time process data generated during the process in a data storage unit via a data collection unit. (D) loading the cassette on the cassette loading means using the automatic transport means, and (e) storing the real-time process data stored in the history pipe means in the history storage means. A method for automatically managing a semiconductor production bay, comprising: 17. Providing a report related to data stored in the history storage unit in response to a report request transmitted from outside (f), and storing the report in the reporting storage unit (g). 17. The method for automatically managing a semiconductor production bay according to claim 16, further comprising the steps of: 18. The step (a), wherein the first lot data is inputted to an interface means (a1), and a cassette providing command is generated from the production control means having received the first lot data (step (a)). a2) transmitting the cassette providing command to the process equipment and the intrabay control means (a3); transport control means for controlling the automatic transport means and stocker control means for controlling the cassette loading means; Transmitting a cassette providing instruction and a second lot data (a4); and transmitting the cassette providing instruction from the transport control means to the cassette transmitting means by wireless communication (a5). Item 18. A method for automatically managing a semiconductor production bay according to Item 16. 19. The step (a2) of transmitting the cassette providing command from the production control means to the equipment control means (a21), and transmitting the cassette providing command from the equipment control means to the equipment communication means. (A22), converting the cassette providing instruction into a machine language by the equipment communication means (a23), and transmitting the cassette providing instruction converted into the machine language to the process equipment via a medium. 19. The method for automatically managing a semiconductor production bay according to claim 18, comprising: (a24) a step; and (a25) waiting for the process equipment. 20. The first lot data includes: a lot identifier (ID), a process first proceeding to the lot, the number of wafers in the lot, and an identifier (ID) of a cassette including the lot. 19. A method for automatically managing a semiconductor production bay according to claim 16 or claim 18. 21. The semiconductor production bay according to claim 18, wherein the second lot data includes a cassette identifier (ID), a position at which the cassette is provided, information on a position at which the cassette is provided, and the like. A way to automatically manage 22. The step (b), wherein the stocker control means transmits the second lot data to the cassette loading means via a common mediation means.
1) step, preparing the provision of a cassette based on the second lot data (b2), transmitting the cassette provision command and the second lot data from the transport control means to the automatic transport means (b3). (B4) acquiring the cassette from the cassette loading means and moving the cassette to a process equipment provided with the cassette (b4); providing the cassette to the process equipment (b5); The process proceeds to the lot included in the cassette (b
20. The method for automatically managing a semiconductor production bay according to claim 16 or 18, comprising the steps of: 23. The step (c): transmitting the real-time process data to the equipment communication means via the command mediating means; and converting the real-time process data into a semiconductor equipment communication standard message. Then, transmitting the converted real-time process data to the equipment control means (c2); transmitting the converted real-time process data to the production control means (c3); and the converted process data. To the data collection means,
The converted real-time process data is stored in the data storage unit via the data collection unit (c4).
17. The method for automatically managing a semiconductor production bay according to claim 16, comprising: 24. The method according to claim 24, wherein the step (d) comprises: transmitting a cassette collection request to the production control means when the processing for the lot is completed by the processing equipment; (D2) transmitting the cassette collection command to the process equipment and the intrabay control means, and performing the transfer control using the intrabay control means. (D3) transmitting the cassette collection command including the third lot information to the automatic conveyance, wherein the automatic conveyance control unit transmits the cassette collection command including the third lot information. (D5) transmitting the cassette from the process equipment using the automatic transfer means, Loading the cassettes into the cassette loading means (d6). D. 25. The step (d1), wherein when the process equipment has completed the process, transmitting the cassette recovery request to the equipment communication means via the command mediating means (d11); Converting the request into the semiconductor equipment communication standard message and transmitting the converted request to the equipment control means (d12); and transmitting the converted request to the production control means (d12).
13) The method for automatically managing a semiconductor production bay according to claim 24, comprising the steps of: 26. The step (d2), wherein the production control means generates the cassette collection command and transmits the cassette collection command to the equipment control means (d21). Transmitting a cassette recovery instruction to the equipment communication means (d22); converting the cassette recovery instruction into a machine language; and transmitting the instruction to the process equipment via the instruction mediating means (d23).
25. The method for automatically managing a semiconductor production bay according to claim 24, comprising the steps of: (d24) transmitting the cassette collection command to the intrabay control means. 27. The third lot data includes data indicating an identifier (ID) of a cassette to be collected, equipment for collecting the cassette, and process equipment for providing the cassette. 24. A method for automatically managing a semiconductor production bay according to claim 24. 28. The step (d6), wherein a cassette collection command including the third lot data is transmitted from the transfer control means to the automatic transfer means (d61).
Collecting the cassette from the process reserve based on the third lot data (d62); and loading the cassette on the cassette loading means (d6).
3) transmitting the position information of the cassette loaded in the cassette loading means to the production control means (d64); and storing the previous position information of the cassette stored in the data storage means in the cassette loading means. Updating the position information of the cassette loaded in the storage device (d65). 25. The method according to claim 24, further comprising the step of: 29. The step (e), receiving the real-time process data stored in the data storage means and storing the real-time process data in the temporary storage means, and (e1) storing the real-time process data in the temporary storage means. Transmitting the stored real-time process data to the history management unit (e2); receiving the real-time process data from the temporary storage unit and recording the real-time process data in the history storage unit (e3); 17. The method for automatically managing a semiconductor production bay according to claim 16, comprising: 30. In order to automatically manage a semiconductor production bay, a cassette providing command is generated by using the first lot information transmitted from the production control means, and then the cassette providing command is transmitted to a plurality of process equipments and an automatic process. A first function of transmitting a lot contained in a cassette using the process equipment, a first function of transmitting the lot to the transport means, and a real-time process data generated during the progress of the process via the data collection means. A third function of storing data in the data storage means, a fourth function of loading the cassette on the cassette loading means using the automatic transport means, and a transfer of the real-time process data stored in the history management means to the history storage means. A computer-readable recording medium on which a program for realizing the stored fifth function is recorded. 31. A sixth function of providing a report related to data stored in the history storage unit in response to a report request transmitted from outside, and a seventh function of storing the report in the reporting storage unit.
31. A computer-readable recording medium recording a program according to claim 30, further comprising a function.