JP2001027336A - Gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve a seal property with reference to a passage by certainly sealing the passage. SOLUTION: This gate valve comprises; a yoke 62 connected to a piston rod 64 of a cylinder system 44; valve rods 24a, 24b integrally displacing with the yoke 62; a valve disc 26 opening/closing a passage formed on a valve box; and displacement systems 28a, 28b provided between valve rods 24a, 24b and the valve disc 26, and making the valve disc 26 to displace in a generally orthogonal direction to axes of the valve rods 24a, 24b.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a transfer passage for transferring a work such as an integrated circuit (IC) or a part thereof from one vacuum processing chamber to another vacuum processing chamber, or a pressure fluid, gas or the like. The present invention relates to a gate valve capable of opening and closing a flow passage or an exhaust passage.

[0002]

2. Description of the Related Art Conventionally, for example, in a processing apparatus for a semiconductor wafer, a liquid crystal substrate, or the like, a semiconductor wafer, a liquid crystal substrate, or the like is taken in and out of various processing chambers through passages. Are each provided with a gate valve for opening and closing the passage.

This gate valve is disclosed, for example, in Japanese Patent No.
As shown in Japanese Patent No. 13171, after the valve disc reaches the position facing the valve seat by the linear motion of the valve rod displaced under the driving action of the cylinder, the valve disc is moved to the valve seat by the tilting motion of the valve rod. The passage formed in the valve box is closed by being pressed and seated.

That is, the gate valve 1 according to the prior art
As shown in FIGS. 13 and 14, the passage 2 is closed by sitting on a valve box 3 in which a passage 2 for taking in and out a work is formed and a valve seat 4 formed in the valve box 3. And a valve rod 6 connected to the valve disk 5 so as to be vertically movable and tiltable.

A block 7 is connected to the upper part of the valve rod 6, and guide grooves 10 (see FIG. 1) formed on both sides of the cylinder tube 9 of a pair of cylinders 8a and 8b are formed on both sides of the block 7. 15) is fixed, and the block 7 is provided so as to vertically move and tilt under the guide action of the guide groove 10 with which the pivot 11 engages. The cylinder tube 9, the block 7, and the pivot 11 are each formed of a metal material.

In other words, the block 7 has a pivot 11
Under the guide action of the guide groove 10 in which the tension spring 12 engages.
Linearly moves along the vertical direction integrally with the yoke 13 through the lower end portion 1 of the guide groove 10.
0a (see FIG. 15) is provided so as to tilt in the direction of arrow A with the pivot 11 supported by fulcrum. Therefore, the valve disc 5 is tilted in the direction of arrow B with the pivot 11 as a fulcrum and seated on the valve seat 4,
The passage 2 is hermetically closed.

Reference numeral 14 designates a plate-like cam having a rhombic cross section. When the inclined plate-like cam 14 is displaced substantially horizontally, the block 7 is moved with the lower end 10a of the guide groove 10 as a fulcrum. It is provided to tilt in the A direction.

[0008]

However, in the above-mentioned gate valve according to the prior art, the valve rod moves up and down and tilts under the driving action of a set of cylinders, and the passage is formed by a valve disk connected to the valve rod. Is provided so as to be closed. For this reason, in the gate valve according to the related art, when the valve disk is seated on the valve seat and closes the passage due to long-term use, the sealing performance of the passage may be deteriorated.

The present invention has been made in consideration of the above-mentioned problems, and prevents generation of dust due to friction by pressing and sealing a valve disc against a valve seat of a valve box from a direction substantially orthogonal to the valve seat. Another object of the present invention is to provide a gate valve capable of improving the sealing performance of a passage by reliably sealing the passage.

[0010]

In order to achieve the above object, the present invention provides a driving source, a yoke connected to a driving shaft of the driving source and displaced under the driving action of the driving source, A valve rod connected to the yoke and displaced integrally with the yoke, a valve disc for opening and closing a passage formed in the valve box under the displacement action of the valve rod, and a valve disc between the valve rod and the valve disc. And a displacement mechanism for displacing the valve disc in a direction substantially orthogonal to the axis of the valve rod.

In this case, the displacement mechanism includes a box fixed to an end of the valve rod, a displacement member disposed to be displaceable in a space in the box, and a valve disk, and the bearing member is connected to the valve member. A connecting member that is supported so as to be displaceable along a direction substantially perpendicular to the axis of the valve rod, and a long hole formed in the displacing member, and the connecting member is axially mounted at a substantially central portion. It may be provided so as to include a pin member.

The displacement mechanism includes a rack coaxially connected to an end of the valve rod, a pair of pinions rotatably supported by a bearing member and meshing with teeth of the rack. And a set of bearing members connected to the valve disc and formed with a female thread to be screwed into the male thread of the pinion.

Further, the displacement mechanism includes a box connected to an end of a valve rod, a cam lever provided in a space in the box and having a cam hole formed therein, and a first lever engaged with the cam hole. A cam rotatably supported by a pin member, a support roller rotatably supported at one end of the cam and rotatable along an inner wall surface of the box, and a second end of the cam and a connecting member. It may be provided so as to include a second pin member to be axially attached.

Preferably, the displacement mechanism is provided inside a valve box.

The valve rod includes a first shaft connected to a yoke and displaced integrally with the yoke;
A second shaft externally fitted to the shaft; and a third shaft externally fitted to the second shaft, wherein the second shaft and the third shaft are inserted into guide holes formed in a base plate. It is provided so as to be held via a rod.

According to the present invention, by providing a displacement mechanism for displacing the valve disk in a direction substantially perpendicular to the axis of the valve rod, separately from the drive source, the passage is reliably closed by the valve disk, and The sealing performance is improved. Also,
Since the valve disc is seated in a direction substantially perpendicular to the valve seat of the valve box to seal the passage, it is possible to prevent dust from being generated due to friction when the seat is seated.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a gate valve according to the present invention will be described below in detail with reference to the accompanying drawings.

In FIG. 1, reference numeral 20 indicates a gate valve according to an embodiment of the present invention.

The gate valve 20 includes a driving unit 22 provided outside a valve box, which will be described later, and a set of valve rods 24 that are displaced in the vertical direction under the driving action of the driving unit 22.
a, 24b, a valve disk 26 for opening and closing a passage (described below) under the action of displacement of the valve rods 24a, 24b, and a valve disk 26 provided between the valve rods 24a, 24b and the valve disk 26; And a displacement mechanism 28a, 28b for moving the actuator toward and away from the passage.

A valve box 32 having a passage 30 for taking in and out a work (not shown) is provided below the drive section 22 (see FIG. 3). The valve box 32 is formed on the inner wall surface of the valve box 32. When the valve disc 26 is seated on the valve seat 34 thus closed, the passage 30 is airtightly closed. A seal member 36 is mounted on the valve disk 26 along an annular groove, and the seal member 36
Is kept airtight when seated on the valve seat 34.

The drive unit 22 includes a base plate 38 fixed to the outer wall surface of the valve box 32 and the base plate 3.
8, and a cylinder mechanism (drive source) 44 fixed through a hole 42 formed in a substantially central portion of the base plate 38.

The base plate 38 is formed with a pair of through-holes having a substantially circular cross-section through which a pair of valve rods 24a, 24b are inserted. A pair of guide holes 50a and 50b into which the holes 48a and 48b are inserted are formed facing each other (see FIG. 2). In the through holes, valve rods 24a, 24
An annular member 53 to which a bellows 52 covering a predetermined portion of b is connected is mounted.

As shown in FIG. 2, the valve box 32 is formed with a pair of holes 46a and 46b through which the pair of valve rods 24a and 24b are inserted.
A seal member 54 is provided between the valve box 8 and the valve box 32 to slide against the outer peripheral surfaces of the valve rods 24a and 24b to prevent dust and the like from entering the valve box 32.

As shown in FIG. 2, the cylinder mechanism 44 has a cylinder tube 56 having one end airtightly fitted into the hole 42 of the base plate 38 and a cylinder chamber 58 in the cylinder tube 56. And a piston rod 64 having one end connected to the piston 60 and the other end connected to a plate-shaped yoke 62.

The piston 60 has a piston packing 66 for airtightly holding an upper cylinder chamber 58a and a lower cylinder chamber 58b, each of which is divided into two parts by the piston 60, and when the piston 60 reaches the displacement end position. And a cushioning member 68 that abuts against the inner wall surface of the cylinder tube 56 to absorb the impact. A bush 70 surrounding the outer peripheral surface of the piston rod 64 and an annular seal member 72 are mounted on the cylinder tube 56.

An annular spring member 74 which engages with a threaded portion of the piston rod 64 at a connection portion between the piston rod 64 and the yoke 62, and a resilient force of the spring member 74 which is screwed into the threaded portion. A nut member 76 to be held is provided. In this case, in the normal state, the spring member 74 is in a state where the substantially central portion is bulged upward as shown in FIG. 7, and the piston rod 64 is lowered and a downward load is applied to the spring member 74. By being provided, as shown in FIG. 8, it is provided so that the substantially central portion is depressed against the elastic force of the spring member 74 so as to be substantially horizontal.

One set of valve rods 24a and 24b is made of the same component, and one end is connected to the yoke 62 via a lock nut 78 and the other end is connected to a displacement member (described later) via a screw. And a second shaft slidably fitted to the first shaft 82.
It has a shaft 84 and a third shaft 86 that is fitted over the second shaft 84.

A plate 89 is fastened to one end of the second shaft 84 via a nut member 88 which is screwed to a screw portion. Guide holes 50a, 5
A pair of guide rods 48a and 48b inserted into the pair of guide rods 48a and 48b are connected. 4 and 5, the other end of the second shaft 84 is connected to the box 90 via a screw portion. An end of the bellows 52 is locked to one end of the third shaft 86, and the other end is provided so as to contact the box 90. Yoke 62 and plate 89
A spring member 94 is interposed along the first shaft 82 between them. The plate 89 and the guide rod 4
8a and 48b may be integrally formed.

In this case, the first to third shafts 82, 84, 86 move up and down integrally under the action of the displacement of the piston 60, and the guide rods 48a, 48b
a, the second shaft 84 and the third shaft
The shaft 86 is fixed, and the first shaft 82 is provided so as to slide with respect to the fixed second shaft 84.

The displacement mechanisms 28a and 28b provided at the ends of the valve rods 24a and 24b are made of the same components, and have a box 90 in which a space 96 having a circular cross section (see FIG. 5) is formed. A pair of guide rods 98a, 98b fixed to the box 90 and projecting upward at predetermined intervals, and connected to the end of the first shaft 82 to be integral with the first shaft 82; A displacement member 100 provided to be displaceable along the vertical direction of the 96;
And a connecting member 104 that is supported so as to be displaceable along a substantially horizontal direction via a bearing member 102.

One end of the connecting member 104 is inserted into a hole of the valve disk 26 and is fixed to the valve disk 26 via a retaining ring 106. A bellows 108 that covers the connecting member 104 is interposed between the box 90 and the valve disk 26.

The displacement member 100 is formed with an elongated hole 110 having an oblong cross section inclined at a predetermined angle and penetrating from one side face to the other side face.
A pin member 112 is provided so as to engage with 10. A connecting member 104 is provided substantially at the center of the pin member 112.
Is connected to the other end of the long hole 11.
It is provided so as to advance and retreat in a substantially horizontal direction toward the side of the passage 30 under the engagement of the pin member 112 with the pin 0.

As shown in FIG. 5, the displacement member 100 has a first hole 114a and a second hole 114b into which a pair of guide rods 98a and 98b are inserted. A third hole 114c for displacing the connecting member 104 is formed between the hole 114a and the second hole 114b. The displacement member 100
An inclined surface 116 that is inclined at a predetermined angle is formed on the upper part of the.

Gate valve 2 according to an embodiment of the present invention
0 is basically formed as described above,
Next, the operation and the effect will be described. In addition,
In the following description, the piston 60 is located at the uppermost position (top dead center) of the cylinder chamber 58 and the passage 3 formed in the valve box 32 is
A description will be given with an open state in which 0 is not closed by the valve disk 26 as an initial position.

In the initial position, a pressurized fluid (for example, compressed air) is supplied from a pressurized fluid supply source (not shown) to the upper cylinder chamber 58a via a tube (not shown). The piston 60 descends under the action of the pressure fluid supplied to the upper cylinder chamber 58a, and the piston rod 64 connected to the piston 60 also descends integrally. In this case, it is assumed that the lower cylinder chamber 58b is open to the atmosphere under the action of a switching valve (not shown).

When the piston rod 64 is lowered, the yoke 62, the pair of valve rods 24a and 24b, the displacement mechanisms 28a and 28b, and the valve disk 26 are lowered together with the piston rod 64. In this case, the first to third shafts 82, 84, 86 constituting the valve rods 24a, 24b respectively descend integrally.

The piston rod 64 descends and the guide rod 4
After the shafts 8a and 48b are inserted into the guide holes 50a and 50b, the second shaft 8 forming the valve rods 24a and 24b is formed.
The fourth and third shafts 86 are provided with guide rods 48a, 48b.
It is supported by and becomes a fixed state. Therefore, the box 90 connected to the ends of the second shaft 84 and the third shaft 86 is also stopped, and the valve disc 26 faces the passage 30 of the valve box 32 (see FIGS. 3 and 4).

From the state shown in FIG. 4, when the piston 60 further descends against the elastic force of the spring member 94 and the piston rod 64 and the yoke 62 descend, the second shaft 8
While maintaining the state in which the fourth and third shafts 86 are supported by the guide rods 48a and 48b, the first shaft 8
Only 2 is displaced (down). Therefore, box 90
Is stationary, only the first shaft 82 is further lowered, whereby the displacement member 100 connected to the end of the first shaft 82 is integrally lowered, and at this time, the connecting member 104 is displaced. Slot 110 formed in member 100
Under the action of the pin member 112 to move toward the passage 30 side. In other words, when the displacement member 100 descends under the guide action of the guide rods 98a and 98b, the pin member 112 is displaced in a substantially horizontal direction along the elongated hole 110 formed in the displacement member 100, and The connecting member 104 pivotally attached to the pin 112 also displaces substantially horizontally with the pin member 112. As a result, the valve disc 26 connected to the connecting member 104 approaches the passage 30 side, the seal member 36 provided on the valve disc 26 sits on the valve seat 34, and the passage 30 is airtightly closed.

The lateral load applied to the valve rods 24a, 24b by pressing the seal member 36 of the valve disk 26 toward the passage 30 under the urging action of the displacement mechanisms 28a, 28b is reduced by the guide holes 50a. , 50b are absorbed by the guide rods 48a, 48b inserted into the guide rods. In this case, the guide rods 48a and 48b are preferably subjected to a low friction treatment.

Next, when opening the passage 30 by separating the valve disk 26 from the valve seat 34, the piston 60 is supplied by supplying a pressurized fluid to the lower cylinder chamber 58b under the switching action of a switching valve (not shown). Rise, and the piston rod 64, the yoke 62, the first shaft 82, and the displacement member 100 rise integrally, so that the valve disc 26
Is displaced in a direction away from the passage 30 to reach a state shown in FIG. When the piston 60 rises, the spring member 9
Since the second shaft 84 and the third shaft 86 are pressed downward under the action of the elastic force of 4, only the first shaft 82 rises, and the second shaft 84 and the third shaft 86 In a state supported by 48a and 48b.

By supplying the pressurized fluid to the lower cylinder chamber 58b to further raise the piston 60, the piston rod 64, the yoke 62, the first to third shafts 8
2, 84, 86 and the displacement mechanisms 28a, 28b rise integrally and return to the initial position. The upper cylinder chamber 58a is open to the atmosphere under the action of a switching valve (not shown).

In the present embodiment, the displacement mechanism 28a, 28b for moving the valve disk 26 in a substantially horizontal direction toward the passage 30 is provided at the end of the valve rods 24a, 24b, so that the valve disk 26 is sealed. The passage 30 is reliably closed by the member 36, and the sealing performance for the passage 30 can be improved. In this case, valve disc 2
Since the seal member 36 of No. 6 is seated from a direction substantially orthogonal to the valve seat 34, it does not slip when the seal member 36 is seated, thereby preventing generation of dust.
As a result, cleanliness in the valve box 32 can be maintained.

In the present embodiment, the displacement mechanism 28
The valve member 26 is provided so that the valve disc 26 advances and retreats toward the passage 30 under the urging action of the a and 28b so that the seal member 36 is seated on the valve seat 34. Therefore, the load applied to the cylinder mechanism 44 can be reduced, and the durability of the cylinder mechanism 44 can be improved. Similarly, since a lateral bias load is not applied to the bellows 52, the durability of the bellows 52 can be improved.

Further, in this embodiment, the driving force of the cylinder mechanism 44 is directly transmitted to the valve disk 26 by providing the spring member 74 having a substantially conical cross section at the connecting portion between the piston rod 64 and the yoke 62. Without being
Moreover, the sealing member 36 of the valve disk 26 seals the valve seat 34 with a substantially constant load.

Next, the displacement mechanism 120a (1
20b) is shown in FIGS. 9 and 10.

The displacement mechanism 120a (12
0b) is coaxially fastened to the end of the first shaft 82 constituting the valve rods 24a and 24b, and is provided integrally with the first shaft 82 so as to be able to move up and down.
First bearing member 124a provided in box 90
And the first pinion 1 rotatably supported by the second bearing member 124 b and meshing with the teeth of the rack 122.
26a and the second pinion 126b and the rack 12
2 and a guide rod 130 inserted along the guide hole 128 formed in the guide hole 130.

The valve disc 26 has the first pinion 1
A pair of bearing members 136a, 136b formed with a female screw portion 134 that is screwed into a male screw portion 132 formed at the end of the second pinion 126b are connected to the pair of bearing members 136a, 136b.
The female screw portions 134 formed on the pair of bearing members 136a and 136b correspond to the male screw portions 132 of the first pinion 126a and the second pinion 126b. Is formed.

The displacement mechanism 120a (120
In b), the rack 122 descends integrally with the first shaft 82, and the teeth of the rack 122 mesh with the first pinion 126a and the second pinion 126b,
The first pinion 126a and the second pinion 126b
Rotate in opposite directions. The first pinion 12
6a and the second pinion 126b rotate, so that the first pinion 126a and the second pinion 126
The valve disk 26 is connected to the passage 3 under the screwing action between the male thread 132 of the bearing member 136b and the female thread 134 of the bearing members 136a and 136b.
0, the seal member 36 is displaced in a substantially horizontal direction,
The passage 30 is closed by sitting on the vehicle.

The displacement mechanism 120a (120
In b), the rack 122 and the first and second pinion 12
6a and 126b, the first shaft 8
No unbalanced load is applied to the two
There is an advantage that the valve disc 26 can be displaced by uniformly rotating the second pinions 126a and 126b.

Next, a displacement mechanism 140a according to another modification example
(140b) is shown in FIG. 11 and FIG.

A displacement mechanism 140a according to another modification example
(140b) is fixed to the end of the first shaft 82 constituting the valve rods 24a and 24b, and has a cam lever 144 formed with a cam hole 142 and a first pin member 146 engaged with the cam hole 142. A cam 148 to be supported, and a box 9 rotatably supported by one end of the cam 148 so as to be rotatable.
0 and a support roller 150 that rotates along the inner wall surface of the first roller. The other end of the cam 148 is rotatably supported by the end of the connecting member 104 via a second pin member 152.

A displacement mechanism 140a (14) according to another modification
0b), the cam lever 1 is integrated with the first shaft 82.
44 is lowered, so that the first
Under the engagement of the pin member 146, the cam 148 is pressed downward. The cam 148 is attached to the box 90
While the support roller 150 rotates along the inner wall surface, the support roller 150 rotates by a predetermined angle about the second pin member 152 as a fulcrum. The cam 148 is displaced toward the passage 30 by the support roller 150 rotating along the inner wall surface of the box 90, and the valve disk 26 is moved toward the passage 30 through the connecting member 104 connected to the cam 148. , And the seal member 36 is seated on the valve seat 34 to close the passage 30.

A displacement mechanism 140a (14) according to another modification
0b), the provision of the cam 148, the cam lever 144, and the like has an advantage that the pressing force against the seat surface of the valve disc 26 with which the seal member 36 contacts can be increased.

[0054]

According to the present invention, the following effects can be obtained.

That is, the passage is reliably closed by the valve disk, and the sealing performance for the passage can be improved. In this case, since the valve disk is seated from a direction substantially orthogonal to the valve seat of the valve box, the valve disk does not slip when seated, and generation of dust can be prevented. As a result, cleanliness in the valve box can be maintained.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a gate valve according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view along the axial direction of the gate valve.

FIG. 3 is a longitudinal sectional view taken along the line III-III in FIG. 2;

FIG. 4 is a partially enlarged view of the displacement mechanism shown in FIG.

FIG. 5 is a longitudinal sectional view taken along the line VV of FIG. 4;

6 is a partially enlarged view showing a state where the valve disc shown in FIG. 4 is displaced in a substantially horizontal direction toward a passage side.

FIG. 7 is a partially enlarged cross-sectional view showing a spring member provided at a connection portion between a piston rod and a yoke.

FIG. 8 is a partially enlarged sectional view showing a state where a load is applied downward from FIG. 7;

FIG. 9 is a partially enlarged sectional view showing a displacement mechanism according to a modification.

FIG. 10 is a longitudinal sectional view taken along line XX of FIG. 9;

FIG. 11 is a partially enlarged sectional view showing a displacement mechanism according to another modification.

12 is a partially enlarged view showing a state where the valve disk shown in FIG. 11 is displaced in a substantially horizontal direction toward a passage.

FIG. 13 is a longitudinal sectional view along an axial direction of a gate valve according to the related art.

FIG. 14 is a longitudinal sectional view along an axial direction of a gate valve according to the related art.

FIG. 15 is a perspective view of a cylinder tube constituting a gate valve according to the related art.

[Explanation of symbols]

Reference Signs List 20 gate valve 22 driving unit 24a, 24b valve rod 26 valve disc 28a, 28b, 120a, 120b, 140a, 14
0b Displacement mechanism 30 Passage 32 Valve box 34 Valve seat 36, 54, 72
... Seal member 38 ... Base plate 44 ... Cylinder mechanism 48a, 48b ... Guide rod 50a, 50b,
128 guide holes 52, 108 bellows 60 piston 62 yoke 64 piston rod 68 cushioning members 74, 94 spring members 76, 88 nut members 78 lock nuts 82, 84, 86 shaft 90 boxes 98a , 98b ... guide rod 100 ... displacement member 102, 136a, 136b ... bearing member 104 ... connecting member 110 ... long hole 112, 146, 152 ... pin member 122 ... rack 126a, 126b ... pinion 142 ... cam hole 144 ... cam lever 148 ... Cam 150: Support roller

Claims (6)

[Claims] 1. A drive source, a yoke connected to a drive shaft of the drive source and displaced under the driving action of the drive source, a valve rod connected to the yoke and displaced integrally with the yoke; A valve disc that opens and closes a passage formed in the valve box under the action of displacement of the valve rod, provided between the valve rod and the valve disc, and moves the valve disc in a direction substantially orthogonal to the axis of the valve rod. A gate valve, comprising: a displacement mechanism for displacing the gate valve. 2. The gate valve according to claim 1, wherein the displacement mechanism comprises a box fixed to an end of a valve rod, a displacement member disposed to be displaceable in a space in the box, and a valve. A connecting member connected to the disk and supported via a bearing member so as to be freely displaceable along a direction substantially perpendicular to the axis of the valve rod; and a substantially central portion engaged with an elongated hole formed in the displacement member. A pin member having a connecting member pivotally mounted on the connecting member. 3. The gate valve according to claim 1, wherein the valve rod is connected to a yoke, and the first shaft is displaced integrally with the yoke, and the second shaft is externally fitted to the first shaft. And a third externally fitted to the second shaft.
A gate shaft, wherein the second shaft and the third shaft are provided so as to be held via a guide rod inserted into a guide hole formed in the base plate. 4. The gate valve according to claim 1, wherein the displacement mechanism is rotatably supported by a rack coaxially connected to an end of a valve rod and a bearing member, and has a tooth portion of the rack. And a pair of bearing members connected to the valve disk and formed with a female thread portion screwed into a male thread portion of the pinion. 5. The gate valve according to claim 1, wherein the displacement mechanism comprises: a box connected to an end of the valve rod; a cam lever provided in a space in the box and having a cam hole formed therein; A cam rotatably supported by a first pin member engaged with the cam hole, a support roller rotatably supported by one end of the cam and rotatable along an inner wall surface of the box; Second connecting the other end of the shaft and the connecting member
A gate valve comprising a pin member. 6. The gate valve according to claim 1, wherein the displacement mechanism is disposed inside a valve box.