JP2001021793A - Auto-focusing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an auto-focusing device preventing light harmful to a human body from outgoing directly outside an optical instrument, and preventing a light source from being lit uselessly. SOLUTION: This auto-focusing device is provided with a light source 2 for projection and built in or post-attached to an optical instrument 1. The device is provided with a detection means 13 for detecting the presence of an objective lens 6 on a optical path, and an auto-focus controlling means 15 for conducting auto-focusing control and turning off an electric power source for the light source 2 to stop the auto-focusing control when no objective lens 6 exists on the optical path based on a detected result of the detection means 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic focusing device used for automatic focusing when observing a sample in an optical device such as a microscope or an optical measuring device.

[0002]

2. Description of the Related Art Conventionally, as a means for facilitating observation of a sample by an optical microscope, a measurement light flux from a light source (for example, a semiconductor laser) different from a light source for observation is focused on the sample via an objective lens. Then, there is an automatic focusing device that receives the reflected light again through the objective lens, receives the reflected light with a light receiving device, and adjusts the focus of the sample based on the focused state.

A focusing device of this kind is disclosed in Japanese Patent Laid-Open No. 5-1424.
No. 62 discloses this. This focusing device is an active type autofocus (hereinafter, AF) unit using a semiconductor laser as a light source. In an apparatus using such a laser, the laser light output leaking to the outside of the apparatus is regulated by various standards, and even if the laser light is out of the standards, considering the adverse effect on the human body, the laser light may not leak to the outside of the apparatus. It is necessary to suppress as much as possible.

[0004]

In order to solve the above-mentioned problems, an interlock mechanism is conceivable in which the laser light output is turned off or a shutter is turned on when the objective lens is removed during observation. As such an interlock mechanism, it is conceivable to apply a shutter mechanism to a microscope like a laser scanning device disclosed in Japanese Patent Application Laid-Open No. 6-250458. This is expensive and disadvantageous in terms of cost.

In the above-described focusing device, the life of the semiconductor laser greatly affects the product life of the focusing device itself.

An object of the present invention is to provide an automatic focusing device that prevents light harmful to the human body from directly coming out of an optical device and also prevents unnecessary lighting of a light source.

[0007]

In order to solve the above-mentioned problems and achieve the object, an automatic focusing apparatus according to the present invention is configured as follows.

(1) An automatic focusing device according to the present invention includes a light source for projecting light, and detecting means for detecting presence / absence of an objective lens on an optical path in an automatic focusing device built in or retrofitted into optical equipment; Automatic focusing control for performing automatic focusing control and turning off the power of the light source for projection when the objective lens is not on the optical path based on the detection result of the detecting means and stopping the automatic focusing control. Means.

(2) The automatic focusing apparatus according to the present invention has the above-mentioned (1).
And a revolver that has a plurality of mounting holes for the objective lens and switches and arranges an arbitrary mounting hole on the optical path, and is currently disposed on the optical path while performing rotation control of the revolver. Revolver control means for recognizing the mounting holes, and setting means for setting in advance whether or not an objective lens exists for each of the mounting holes, further comprising:
The presence / absence of the objective lens on the optical path is determined based on the set value regarding the presence / absence of the objective lens set by the setting unit and the recognition information of the mounting hole on the optical path from the revolver control unit.

(3) The automatic focusing apparatus according to the present invention includes a light source for projecting light, and has an automatic focusing built in or retrofitted into a microscope having at least one of a revolver for switching an objective lens and a cube turret for switching a microscopic method. In the apparatus, while performing automatic focusing control, an automatic focusing control means for performing control for turning off the light source for projection and stopping the automatic focusing control, and an automatic focusing control operation by the automatic focusing control means. Setting means for setting the presence or absence of the enforcement for at least one of the respective microscopic methods selected by the respective objective lens mounting holes of the revolver and the cube turret,
A device control means for controlling the operation of at least one of the revolver and the cube turret, and recognizing at least one of a mounting hole of the revolver currently on the optical path and a microscopic method currently selected by the cube turret. The automatic focusing control means includes a setting value relating to whether or not the automatic focusing control operation set by the setting means is performed, and the mounting hole or the currently selected mounting hole on the current optical path recognized by the device control means. The automatic focusing control is executed or stopped based on the microscopic method.

[0011]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) The first embodiment constitutes a microscope system in which an AF unit as an automatic focusing device is attached to an optical microscope equipped with an electric revolver device. The AF unit includes an AF optical system, an AF control unit for controlling AF, an electric focusing motor for automatic focusing, setting of presence / absence of an objective lens for each hole of the electric revolver, and A
It is composed of a hand switch for operating ON / OFF of the F and switching of the objective lens.

FIG. 1 is a diagram showing the overall configuration of a microscope system according to the first embodiment. Hereinafter, a normal microscopy method in this microscope system will be described.

The microscope system shown in FIG. 1 comprises a microscope main body 1, a stage receiver 49 connected to a focusing mechanism movable vertically with respect to the main body 1, and a stage receiver 4
The stage 9 includes a stage 9 disposed on the stage 9 and the light source 2 for illuminating a sample (sample) S which is a subject mounted on the stage 9. Illumination light from the light source 2 is applied to the sample S via an aperture stop 3, a field stop 4, a corner cube (for example, a half mirror) 5, and an objective lens 6.

The light from the sample S passes through the objective lens 6 and the lens barrel 7.
The observer operates the XY handle 10 to move the stage 9 in a direction horizontal to the optical axis to perform observation.

Hereinafter, a microscopy method using AF will be described. The AF optical system 14 and the AF control unit 15 are built in the AF sensor head 48, and are arranged as an intermediate lens barrel on the optical system of the normal microscope described above.

FIG. 2 is a diagram showing the configuration of the AF optical system. 2, the same parts as those in FIG. 1 are denoted by the same reference numerals. In addition, detailed description of the optical system, such as the polarization state of light at each location, is omitted.

Laser diode 18 as light source for light projection
Is converted into a parallel light beam by the collimator lens 19, becomes a half light beam by the stopper 20, passes through the polarizing beam splitter 21, the λ / 4 plate 22, and enters the observation light path by the dichroic mirror 23. Then, the light passes through one side of the corner cube 5 and one of the pupils of the objective lens 6 and is focused on the sample S.

The reflected light from the sample S passes through the other side of the pupil of the objective lens 6, is reflected by the dichroic mirror 23, passes through the λ / 4 plate 22, the polarization beam splitter 21, and then passes through the imaging lens 24. The light is condensed on the split detector 25.

Here, if the spot light focused on the sample S is not properly focused on the sample surface, the two-part detector 25
The upper spot light is similarly shifted, and the shift amount is detected as a signal amount. The AF control unit 15 adjusts the electric focusing motor 1 attached to the focusing mechanism of the optical microscope according to the amount of the shift.
The sample 6 is driven to focus on the sample S.

The IR cut filter 50 is for removing the infrared light component of the laser light so that the infrared light component does not proceed to the observer who observes the eyepiece lens 8 for observation.

FIGS. 3A and 3B are external views of the hand switch 17, wherein FIG. 3A is a rear view and FIG. 3B is a plan view. Hereinafter, the electric circuit system will be described with reference to FIGS. The observation of the sample S is performed by the focusing handle 26 in the hand switch 17 which can operate the objective lens conversion and the vertical drive of the stage.
Is detected by a control circuit 13a in the control unit 13, and the stage 9 is driven in the optical axis direction via a stage receiver 49 by an electric focusing motor 16 attached to the focusing unit.

The objective lens 6 is a hand switch 1
7, the control circuit 13a detects the operation of the speculum, and in response to the operation, the revolver motor 12a built in the electric revolver device 11 electrically rotates the revolver under the control of the control circuit 13a. Inserted above.

The electric revolver device 11 has a revolver hole (an objective lens mounting hole) located on the observation optical path.
Revolver hole identification sensor 1 that sends out signals according to the type of
2b is provided. The identification sensor 12b is connected to a control circuit 13a, which can recognize the type of the revolver hole currently positioned on the optical path.

Similarly, the control circuit 13a detects the operation of the speculum by turning on / off the AF control and switching between the speculum methods (in the case of the electric cube turret shown in the fourth embodiment). AF control is turned ON / OFF according to the operation,
The speculum method is switched.

The setting of the presence or absence of an objective lens for each revolver hole is performed by switching between a setting mode and a normal mode by a dip switch 27. The set value for each revolver hole set in the setting mode is stored in the control circuit 13a in the control unit 13, and the set value is sent to the AF control unit 15 when converting the objective lens or when starting the AF control. The power supply 13b is a power supply for the entire microscope system.

The rotation of the focusing handle 26 causes the stage 9 to rotate.
Is driven in the direction of the optical axis, and by pressing the objective lens conversion button 28, the conversion operation of the objective lens is performed electrically. Also, by pressing the microscopic method switching button 29,
Switching to each microscopy method is performed (note that the microscopy method is switched when an electric cube turret is provided). Pressing the AF button 30 starts / stops AF control.

The setting of presence / absence of the objective lens in the setting mode by switching the dip switch 27 is performed, for example, by selecting each revolver hole on the right side (→) of the objective lens conversion button 28 in FIG. 3 and pressing the left side (←) button. Select the presence or absence. Then, the stage down button 3 at the upper right of the hand switch 17
In step 1, the presence / absence setting is determined and stored. As described above, the setting function is assigned to each button.

The display unit 32 indicates the current revolver hole number, an error message, and the like, and informs the examiner of the state of the microscope.

In the microscope system having the above-described configuration, the presence or absence of the objective lens is set for each revolver hole by the hand switch 17 in the setting mode by switching the dip switch 27 before performing the microscopy using the AF. And
The control unit 13 stores the set value.

During the microscopy, the revolver hole on the optical path when the AF button 30 is pressed to start the AF control or the revolver hole converted on the optical path during the conversion of the objective lens during the AF microscopy is set to have no objective lens. If so, the control unit 13 detects this, and sends a signal to stop AF to the AF control unit 15. As a result, the power of the laser diode 18 is turned off by the AF control unit 15, and the position of the stage 9 is set to A
It is fixed at the position before the start of the F control, or at the position before the conversion when the objective lens is converted. Thereafter, an error message indicating that AF control is impossible is displayed on the display unit 32.

FIG. 4 is a flowchart showing the operation procedure of AF control in the microscope system according to the first embodiment. Hereinafter, the AF control will be described with reference to FIG.

During the normal microscopy, when the AF button 30 of the hand switch 17 is pressed in step S1 to start the AF control, in step S2, the control unit 13 checks the presence or absence of the objective lens in the current revolver hole. If there is an objective lens, the process directly proceeds to AF control in step S3.

If there is no objective lens in step S2, the flow does not shift to the AF control, and the AF control is stopped in step S8. In this case, the power of the laser diode 18 is turned off, the position of the stage 9 is fixed at the position before the start of the AF control, and the display unit 32 indicates that the AF control is impossible.
Is displayed as an error message (this is referred to as error processing).

Next, in step S4, when the objective lens is converted during the AF microscopy, in step S5, the control unit 13
Checks the presence or absence of the objective lens in the revolver hole after the conversion, and if the objective lens exists, proceeds to the AF control as it is in step S6. If there is no objective lens, the flow does not shift to the AF control, and the AF control is stopped in step S7. In this case, the power of the laser diode 18 is turned off, the position of the stage 9 is fixed at the position before the conversion of the objective lens, and an error message indicating that AF control is impossible is displayed on the display unit 32 by an error message. Error processing).

According to the first embodiment, even when the revolver hole on which the objective lens is not mounted is located on the optical path during the AF microscopy by the AF unit, the power supply of the laser diode is turned off and the AF is performed. Control is automatically stopped,
The laser beam can be prevented from directly exiting the microscope from the hole of the revolver. Thereby, safety against laser light harmful to the human body is improved. In addition, in the case of the above-mentioned hole, useless lighting of the laser diode can be prevented,
The life of the laser diode can be extended.

In the present embodiment, the type of the revolver hole on the optical path is recognized based on the signal from the revolver hole identification sensor 12b. By holding the rotation amount in the hand switch 17 or the control circuit 13a, the type of the revolver hole on the optical path can be recognized.

(Second Embodiment) FIG. 5 is a diagram showing the overall configuration of a microscope system according to the second embodiment. In FIG. 5, the same parts as those in FIG. 1 are denoted by the same reference numerals.

The configuration of the microscope system shown in FIG. 5 is obtained by adding a detection unit 33 to the configuration shown in FIG. 1 in the first embodiment. The detection unit 33 is detachable from the microscope system. Detection unit 33 and AF control unit 1
5 is conducting, a detection signal indicating the presence or absence of the objective lens on the optical path is sent from the detection unit 33 to the AF control unit 15. In the second embodiment, the presence / absence of an objective lens on the optical path is directly detected by the detection unit 33 to further enhance the safety against laser light harmful to the human body.

FIG. 6 is a diagram showing the configuration of a revolver provided with the detection unit 33. As shown in FIG. 6, a photo reflector 34 is used for the detection unit 33. The photo reflector 34 is attached to the sensor support 35 by bonding or the like. The photo reflector 34 is mounted on the cylindrical side surface of the objective lens so as to emit the sensor light 34b from the light emitting portion 34a and to receive the sensor light reflected on the cylindrical side surface of the objective lens by the light receiving portion 34c.

The sensor support 35 is fixed to the revolver cover 36 by a sensor fixing screw 37 and a female screw 36a provided on the revolver cover 36 so that the sensor support 35 is located near the optical axis. And the control unit 13.

In the microscope system having the above configuration, when the objective lens does not exist on the optical path during the AF inspection, the sensor light 34b of the photoreflector 34 does not return to the light receiving section 34c because there is no objective lens. When the objective lens exists, the sensor light 34b is reflected on the side surface of the objective lens and returns to the light receiving unit 34c.

The AF controller 15 includes a photo reflector 34
Is constantly detected, and when the sensor light 34b does not return to the light receiving section 34c, it is determined that there is no objective lens on the optical path. As a result, the power of the laser diode 18 is immediately turned off by the AF control unit 15, the position of the stage 9 is fixed at the position before conversion when the objective lens is converted during the AF speculum, and the AF control from the normal speculum is performed. At the start, it is fixed at the stage position before the start of the AF control. The control unit 13
Also detects the signal from the photoreflector 34, and A
As in the case of the F control unit 15, if it is determined that there is no objective lens on the optical path, an error message indicating that AF control is impossible is displayed on the display unit 32.

According to the second embodiment, similarly to the first embodiment, even when the revolver hole without the objective lens is positioned on the optical path during the AF speculum, the power supply of the laser diode is switched off. When the switch is turned off, the AF control is automatically stopped, and it is possible to reliably prevent the laser beam from directly going out of the microscope from the hole of the revolver. Thereby, the safety against laser light harmful to the human body is further improved. In addition, useless lighting of the laser diode at the time of a hole can be prevented, and the life of the laser diode can be extended.

Further, since the presence or absence of the objective lens is directly detected, the safety against laser light can be further improved.

In addition, since the detection unit is detachable, it can be easily added as needed.

In the second embodiment, the electric revolver is provided, but the same effect can be obtained in the case of an ordinary manual revolver. The second
In the embodiment, the photoreflector 34 as the detecting unit 33 is attached to the revolver cover 36 as the non-rotating part of the revolver. However, if there is no obstacle to the microscopic operation, the non-operating part (arm part etc.) of the microscope It may be attached to.

Further, in the second embodiment, the detecting unit 3
Although the configuration in which the detector 3 is added later is adopted, there is no problem even if the detection unit 33 is incorporated in the revolver unit from the beginning. As an example, in the second embodiment, the detection unit 33
Although a photoreflector was used, a sensor light projecting part and a light receiving part for receiving it are arranged with the objective lens on the optical path in between, and the objective lens itself blocks the sensor light, so the presence or absence of the objective lens on the optical path , A configuration using a photo interrupter or the like is also conceivable.

(Third Embodiment) The third embodiment is directed to a detector 3 for directly detecting the presence or absence of an objective lens on the optical path.
In the configuration of the second embodiment in which 3 is detachable,
When the outer diameter of the objective lens 6 is different for each mounted objective lens (for example, when a bright field dedicated objective lens and a bright / dark field objective lens are mixed. The outer diameter of the bright / dark field objective lens is larger. ) Is characterized in that an adjusting mechanism corresponding to the change in the outer diameter is provided. That is, even if the type of the objective lens is different, the presence of the objective lens is reliably detected, and the presence or absence of the objective lens on the optical path is more reliably detected.

FIG. 7 is a view showing a configuration of a revolver provided with a detecting section with an adjusting mechanism for changing the outer diameter of the objective lens according to the third embodiment. 7, the same parts as those in FIG. 6 are denoted by the same reference numerals. In the third embodiment, a conduction sensor whose conduction is turned ON / OFF by contact of a contact element is used for the detection unit 33 '.

As shown in FIG. 7, a sensor column 38 having a contact element 38a whose conduction is turned ON / OFF by contact and a contact member 39 for contacting the objective lens 6 with a contact element 39a are formed by a rotating shaft. The sensor support 38 is fixed to the revolver cover 36 by a sensor fixing screw 37 and a female screw portion 36a provided on the revolver cover 36 so that the sensor support 38 is positioned near the optical axis. The two contact elements 38a and 39a are AF
The control unit 15 and the control unit 13 are connected.

FIGS. 8A and 8B are diagrams showing in detail the structure of the detecting section 33 ', wherein FIG. 8A is a front sectional view, FIG.
(C) is a sectional plan view. The rotating shaft 40 is constituted by a shaft fixing screw 40 a and a bearing 41 so as to be rotatable through the sensor support 38 and the contact member 39. Also,
When there is no objective lens on the optical path, the two contact elements 38a and 39a are in contact with each other by the spring hooks 42 and the springs 43 provided on the sensor support 38 and the contact member 39, respectively.

In the detection section with the adjustment mechanism having the above-described configuration, when there is no objective lens on the optical path, the two contact elements 38a and 39a come into contact with each other, so that the conduction sensor is turned on. The AF control unit 15 constantly detects the signal from the conduction sensor, and determines that there is no objective lens on the optical path when the conduction is ON. The operation when there is no objective lens is the same as that of the second embodiment.

FIGS. 9A and 9B are side sectional views showing a configuration in which the detection unit 33 'is applied to objective lenses having different outer diameters. As shown in FIGS. 9A and 9B, even if the outer diameter of the objective lens 6 to be mounted is different,
Is present on the optical path, the two contact elements 38a and 39a are separated irrespective of the insertion direction, and the conduction sensor
The state becomes FF. When the conduction is in the OFF state, the AF control unit 15 determines that the objective lens exists on the optical path,
Control becomes possible.

According to the third embodiment, in addition to the effects of the second embodiment, even if the outer diameter of the objective lens differs for each mounted objective lens, the existence of the objective lens is ensured. And the presence or absence of the objective lens on the optical path can be detected more accurately.

(Modifications of Second and Third Embodiments) This modification is characterized in that the contact member itself with the objective lens is a resilient contact element, and it is possible to cope with a change in outer diameter. The adjusting mechanism can be easily configured.

FIGS. 10A and 10B are diagrams showing in detail the configuration of the conduction sensor section in this modification, in which FIG.
(B) is a plan view. It should be noted that the second embodiment, the third embodiment
The description of the same parts as those of the first embodiment will be omitted. The contact member 44, which itself is a contact element and is highly resilient to external force, with the objective lens is a sensor support 4 having two contact elements 45a, 45a with the contact member 44 interposed therebetween.
5 is fixed by bonding or the like. The contact elements 45a and 45a of the sensor support 45 and the contact member 44
It is connected to the F control unit 15 and the control unit 13.

In the continuity sensor having the above structure, when there is no objective lens on the optical path, the contact element 45a of the sensor support 45 does not contact the contact member 44 due to the elasticity of the contact member 44. The sensor is turned off. In this case, the AF control unit 15 and the control unit 13 determine that there is no objective lens on the optical path because the conduction sensor is in the OFF state. In addition, in FIG. 10B, when the objective lens is on the optical path like the contact member 44 shown by a dotted line, the contact member 44 and one contact element 45a come into contact with each other.
The conduction sensor is turned on, and it is determined that the objective lens is on the optical path.

The operation after the presence or absence of the objective lens is determined is the same as that of the third embodiment.

According to the present modification, in addition to the effects of the third embodiment, an adjusting mechanism for a change in the outer diameter of the objective lens can be easily configured.

(Fourth Embodiment) In a fourth embodiment, a microscope system to which an AF unit is attached is equipped with an electric revolver device and an electric cube turret device.
By setting whether or not to perform AF control for each revolver hole of the electric revolver and for each cube of the electric cube turret, from among the types of microscopy with the objective lens and each cube inserted on the optical path, It is possible to arbitrarily set whether or not to execute the AF control.

FIG. 11 is a diagram showing the overall configuration of a microscope system according to the fourth embodiment. In FIG. 11, the same portions as those in FIG. 1 are denoted by the same reference numerals, and the description of the same portions as those in the first embodiment will be omitted.

The microscope system shown in FIG. 11 has a built-in motorized cube turret device 46 for electrically switching between microscopy methods in the microscope system of the first embodiment. The electric cube turret device 46 is controlled by the control unit 13 similarly to the electric revolver device. Further, the control unit 13 detects the operation of the speculum operator on the hand switch 17 and controls the driving of the turret motor 47 a built in the electric cube turret device 46 in accordance with the operation. Thereby, the selected microscopic cube is inserted into the optical path.

As in the case of the electric revolver, a cube identification sensor 47b for outputting a signal corresponding to the type of the selected microscopic cube is provided. This identification sensor 47b is also connected to the control circuit 13a,
a can recognize the type of the currently selected microscopic cube.

In the case of the electric cube turret device, similarly to the electric revolver device, the rotation direction and the amount of rotation from the origin are stored in the hand switch 17 or the control circuit 13a by using the sensor 47b as the origin detection sensor, so that the microscope can be used. You may make it identify a cube.

The setting of whether or not the AF control is performed for each revolver hole is performed by switching the setting mode and the normal mode by the DIP switch 27 as in the first embodiment.
The set value for each revolver hole set in the setting mode is stored in the control unit 13, and the set value is sent to the AF control unit 15 at the time of conversion of the objective lens or at the start of the AF control.

The setting of whether or not AF control is performed for each cube is similarly performed in the setting mode, and the set value for each cube is stored in the control unit 13 so as to be used when the microscopic method is switched or A
The set value is sent to the AF control unit 15 at the start of the F control.

As in the first embodiment, the setting of whether or not AF control is to be performed for each revolver hole in the setting mode by switching the dip switch and for each microscopy method is similar to that of the first embodiment.
Step 7 For example, in FIG. 3, each revolver hole is selected on the right side (→) of the objective lens conversion button 28, each cube (microscope method) is selected with the microscopic method switching button 29, and the operation is performed with the left (←) button. The hand switch 17 and press the stage down button 31
A setting function is assigned to each button, such as storing.

Thus, in the case of a certain objective lens (revolver hole) of a certain microscopic method, designation of performing AF control,
Setting with a high degree of freedom is possible, such as performing all in the case of a certain microscopic method and performing all in the case of a certain objective lens.

The display unit 32 displays the current revolver hole number, the microscopic method, an error message, and the like, and informs the microscopic person of the microscopic state.

In the microscope system having the above configuration, the dip switch 27 is provided before the microscopy using the AF.
The hand switch 1 determines whether or not AF control is to be performed for each revolver hole and for each microscopy method in a setting mode by switching the mode.
7 and the control unit 13 stores the set value.

During the examination, the AF button 30 is pressed to
When the F control is started, if the current speculum method and the revolver hole on the optical path are set so as not to perform the AF control, the control unit 13 detects that, and a signal for stopping the AF is sent to the AF control. The AF control unit 15 turns the laser diode 18 off, and the position of the stage 9 is fixed at the position before the start of the AF control.

Also, when the microscopy method is switched or the objective lens is converted during the AF microscopy, similarly, the revolver hole on the optical path after the switching and after the conversion does not perform the AF control. Is set to AF by the control unit 13.
Is sent to the AF controller 15, the power of the laser diode 18 is turned off by the AF controller 15, and the position of the stage 9 is fixed at the position before the conversion of the objective lens or before the switching of the cube.

Thereafter, an error message indicating that AF control is impossible is displayed on the display section 32.

According to the fourth embodiment, the execution of AF control can be set arbitrarily for each microscopy method and each objective lens.
Even if various conditions such as an objective lens that does not require F control and a speculum method that does not allow AF control are selected, unnecessary AF control is not performed and the power supply of the laser diode is turned off.
Therefore, unnecessary lighting of the laser diode can be prevented, and the life of the laser diode can be extended. In addition, unnecessary AF control is not performed, so that the microscopic efficiency can be increased.

(Modification of the Fourth Embodiment)
AF when switching to an objective lens that does not perform
If the objective lens before the switching and the objective lens after the switching are subjected to the parfocal correction, the AF
Even when the objective lens is switched to an object lens that does not perform the above, it is possible to keep the focus substantially on. According to such a modification, even if the objective lens does not support AF (cannot perform AF) or the objective lens does not need AF control, observation can be performed with almost in-focus, so that the microscopic efficiency is improved. .

The parfocal correction means that the focus deviates before and after the objective lens is switched due to individual differences in the distance from the mounting surface of the objective lens to the revolver to the focal position of the objective lens (parfocal deviation). ) Is corrected so that the focus is not deviated before and after switching the objective lens. In this case, a parallax correction controller 13c is provided in the controller 13 of FIG. The parallax correction control unit stores the parallax correction data of each objective lens, and calculates the amount of parfocal deviation of each objective lens before and after switching when switching objective lenses, or
Alternatively, the electric focusing motor 16 is read out from the table, and the electric focusing motor 16 is controlled so that the focusing unit is moved by the parallax amount and the parallax deviation is corrected.

(Fifth Embodiment) The fifth embodiment is a combination of the third and fourth embodiments, and directly detects the presence or absence of an objective lens on the optical path. In this way, it is possible to reliably prevent laser light from leaking out of the microscope at the time of empty holes, and to set whether or not to perform AF control arbitrarily for each revolver hole and for each microscopic method. This eliminates unnecessary lighting and extends the laser life and improves the efficiency during AF microscopy.

FIG. 12 is a diagram showing the overall configuration of a microscope system according to the fifth embodiment. In FIG. 12, the same parts as those in FIGS. 1 and 11 are denoted by the same reference numerals, and description of the same parts as those in the third and fourth embodiments will be omitted.

The microscope system shown in FIG. 12 is different from the fourth embodiment in that a detection unit 33 'for directly detecting the presence or absence of an objective lens on the optical path shown in the third embodiment is provided. is there. The operation during the normal microscopy and the AF microscopy is the same as that of the fourth embodiment, and in addition, when the AF control is started or when the objective lens is converted during the AF microscopy. Then, the operation of the third embodiment is performed prior to the operation of the fourth embodiment.

According to the fifth embodiment, by directly detecting the presence or absence of the objective lens on the optical path, it is possible to reliably prevent the laser light from directly out of the microscope when the hole is empty, By arbitrarily setting whether or not to execute the AF control for each microscopic method, unnecessary lighting of the laser diode can be eliminated. As a result, it is possible to improve the safety against laser light harmful to the human body, extend the laser life, and improve the efficiency during AF microscopy.

In each of the above embodiments, the AF unit is configured to be retrofitted to an ordinary optical microscope. However, the same effect can be obtained by a microscope system in which the AF unit is originally built in the microscope. .

The present invention is not limited to the above embodiments, but can be implemented with appropriate modifications without departing from the scope of the invention. The parfocal correction described as a modification of the fourth embodiment may be combined with the other first, second, third, and fifth embodiments.

(Summary of Embodiments) According to each of the above embodiments, the following configuration, operation, and effects are provided.

(Structure) [1] In an AF unit (automatic focusing device) provided with a light source for light projection built in or attached to an optical microscope, detection means for judging the presence or absence of an objective lens on an optical path, and this detection An AF control unit for automatically turning off the power of the light source for projection and stopping the auto focus control when the objective lens is not on the optical path during the microscopy according to a signal from the means. A unique AF unit.

In the AF unit, when the detecting means determines that the objective lens is not on the optical path, a signal for stopping the AF control is sent from the detecting means to the AF control section, whereby the AF unit is controlled. The power of the light source for projection is turned off, and the AF control is stopped. Thereby, the safety against the laser light emitted from the light source for projection is improved, and the life of the laser can be extended.

[2] In the case where the optical microscope is provided with an electric revolver device, the detecting means sets the presence / absence of an objective lens for each revolver hole in advance, and sets the setting value by the setting means. The AF unit according to [1], further comprising a revolver control unit for storing and rotating the revolver, and transmitting a presence / absence signal of an objective lens on an optical path to the AF control unit.

In the AF unit, the setting means sets and stores the presence / absence of an objective lens for each revolver hole. When the revolver hole where no objective lens is inserted in the speculum is located on the optical path, Then, a signal for stopping the AF control is sent from the revolver control unit that controls the electric revolver device to the AF control unit, and the power of the light source for projection in the AF unit is turned off to stop the AF control. With this, the presence or absence of an objective lens for each revolver hole is set in advance,
The AF unit can be easily added to a normal electric revolver.

[3] The setting means is a hand switch which is electrically connected to the revolver control section and is provided with a setting operation section for setting the presence or absence of an objective lens for each revolver hole. An AF unit according to [1].

In the AF unit, the presence / absence of an objective lens is set and stored for each revolver hole by a hand switch that electrically connects the setting means and the revolver control unit, and the objective lens is inserted into the microscope. If the revolver hole position is not on the optical path, a signal for stopping the AF control is sent from the hand switch to the AF control unit, the power of the light source for light emission of the AF unit is turned off, The AF control is stopped. By performing setting and control with a hand switch in this manner, the configuration of the electric revolver often includes an HS (hand switch), but is easily realized.

[4] The above-mentioned [1], wherein the detecting means is provided in a non-operating portion of the optical microscope and has a detecting portion for directly detecting the presence or absence of an objective lens on an optical path during the microscopic examination. The described AF unit.

In the AF unit, when the objective lens does not exist on the optical path, the detecting section directly detects the presence or absence of the objective lens on the optical path during the speculum. Is sent to stop A
Turn off the power of the light source for light emission of the F unit,
Stop F control. Thereby, the presence or absence of the objective lens on the optical path can be directly detected, and the safety is further improved.

[5] The AF unit according to the above [4], wherein the detection unit is detachable from a portion other than the revolver rotation unit of the optical microscope.

In the AF unit, a detection unit for directly detecting the presence or absence of the objective lens on the optical path during the inspection is attached to a part other than the revolver rotation part of the optical microscope when necessary.
If the objective lens does not exist on the optical path, a signal for stopping the AF control is sent from the detection unit to the AF control unit, and the power of the light source for the light emission of the AF unit is turned off to perform the AF control. To stop. When not necessary, the detection unit is removed. In this way, the detection unit can be attached to and detached from the optical microscope as needed.
Retrofitting is also easy.

[6] The detecting section includes: a light projecting section for emitting sensor light from the optical axis direction to the cylindrical side surface of the objective lens;
The AF unit according to [4] or [5], wherein the AF unit is a photoreflector including a light receiving unit that receives sensor light reflected on a side surface of the objective lens.

In the AF unit, when there is no objective lens on the optical path during the microscopic examination, the photoreflector is in the sensor OFF state. The AF control unit detects the sensor state, and when the sensor is in the OFF state, turns off the power of the light projecting light source of the AF unit and stops the AF control.

[7] The above-mentioned [4] or [5], wherein the detecting section is provided with an adjusting mechanism capable of adjusting a relative distance to an objective lens inserted on an optical path. AF unit.

In the AF unit, even when the outer diameter of the objective lens inserted on the optical path differs depending on the type (for example, a bright field objective lens and a bright / dark field objective lens), the relative position between the detection unit and the objective lens is appropriate. And the presence or absence of the objective lens on the optical path is directly detected. When the objective lens does not exist on the optical path during the speculum, a signal for stopping the AF control is sent from the detection unit to the AF control unit, and the power supply of the light source for projection of the AF unit is turned off. Then, the AF control is stopped. In this manner, control corresponding to the change in diameter (BF / DF) of the objective lens can be performed.

[8] The detection section is held by the adjustment mechanism, and has a contact member whose position is moved by the objective lens when the objective lens is on the optical path. The AF unit according to any one of the above [4], [5], and [7], wherein the AF unit is a conduction sensor having two or more contact portions whose conduction is turned on / off.

In the AF unit, when the objective lens is on the optical path during the microscopy, the contact member moves due to the presence of the objective lens, so that the contact portion is separated and the conduction sensor is turned off. Further, the AF control unit detects a sensor state, and when the conduction sensor is in the OFF state, turns off the power of the light source for light emission of the AF unit and stops the AF control. When the objective lens is inserted on the optical path,
There is also a configuration in which the conduction sensor is turned on. In that case, the AF control is stopped while the conduction sensor is turned on.

[9] In an AF unit provided with a light source for light projection built in or attached to an optical microscope, when the optical microscope is provided with an electric revolver device and / or an electric cube turret device An autofocus control unit for turning off the power of the light source for projection and stopping the autofocus control, and whether or not a control operation is performed by the autofocus control unit.
With respect to the objective lens for each revolver hole and the cube at each turret position, setting means that can be set arbitrarily, and the setting values stored by the setting means are stored, and an insertion operation of inserting various optical elements into the optical path is performed, An AF unit comprising: an electric device control unit that transmits a control operation execution signal based on a preset value of an optical element inserted on an optical path to the autofocus control unit.

In the AF unit, the setting means arbitrarily sets and stores whether or not AF control is performed for the objective lens and the cube at each turret position for each revolver hole, and performs AF control during microscopy. When an optical element set not to be performed is inserted in the optical path, a signal for stopping the AF control from the electric device control unit that controls the electric revolver device and the electric cube turret device to the AF control unit. Is sent, the power of the light source for light emission of the AF unit is turned off, and the AF control is stopped. Thereby, the life of the laser is extended, and the efficiency at the time of observation is improved.

[10] The setting means is a hand switch provided with a setting operation section which is electrically connected to the electric device control section and which sets whether or not to execute the control operation. [9] 2. The AF unit according to 1.

In the AF unit, whether or not the control operation is performed is set by a hand switch.

[11] In an automatic focusing device provided with a light source for projection and built in or retrofitted into an optical apparatus, a detecting means for detecting the presence or absence of an objective lens on an optical path, automatic focusing control, and Automatic focusing control means for turning off the light source for projection when the objective lens is not on the optical path during the microscopy based on the detection result of the detecting means, and suspending the automatic focusing control. An automatic focusing device, characterized in that:

According to the above-mentioned automatic focusing apparatus, when there is no objective lens on the optical path, the power of the light source for projection is turned off and the automatic focusing control is automatically stopped. It can be prevented from going out directly. Further, when there is no objective lens on the optical path, it is possible to prevent the light emitting light source from being wasted, and to prolong the life of the light emitting light source.

[12] The detecting means sets in advance the presence or absence of an objective lens for each hole of the revolver in the optical device, controls the rotation of the revolver, and sets the set value by the setting means. Revolver control means for sending to the automatic focus control means, wherein the automatic focus control means performs automatic focus control according to the presence or absence of an objective lens on the optical path indicated by the set value. The automatic focusing device according to the above [11].

According to the automatic focusing device, when the revolver hole in which the objective lens is not inserted is located on the optical path during the microscopic examination, the power of the light source for projection is turned off, and the automatic focusing control is performed. Can be stopped. Thus, the presence or absence of an objective lens for each revolver hole can be set in advance, and the automatic focusing device can be easily added to a normal electric revolver.

[13] In an automatic focusing device which is provided with or attached to an optical device having at least one of a revolver and a cube turret, a light source for light projection is provided. Automatic focusing control means for performing control for turning off the power and stopping the automatic focusing control, and whether or not the automatic focusing control operation is performed by the automatic focusing control means is determined by each of the holes of the revolver and the cube turret. Setting means for setting at least one of the mirror method, and device control means for performing operation control of at least one of the revolver and the cube turret and transmitting a set value by the setting means to the automatic focusing control means. The automatic focus control means controls the automatic focus control in each of the holes or the microscopy on the optical path indicated by the set value. Automatic focusing apparatus characterized by performing automatic focus control in accordance with the presence or absence of enforcement.

According to the above-mentioned automatic focusing apparatus, it is possible to reliably prevent the light at the time of the empty hole from directly coming out of the microscope, and to perform the automatic focusing control for each revolver hole and each microscopic method. Is set arbitrarily, it is possible to eliminate unnecessary lighting of the light source for light projection. As a result, it is possible to improve the safety against harmful light to the human body, extend the life of the light source for projection, and improve the efficiency at the time of automatic focusing speculum.

(Operation and effect) [1] to [8] (first to first)
According to the AF unit of the third and fifth embodiments), even when the revolver hole without the objective lens is positioned on the optical path during the AF microscopy, the laser diode power is turned off and the A
The F control is automatically stopped, and it is possible to prevent laser light harmful to the human body from directly out of the microscope. Further, when the revolver hole on the optical path is empty, useless lighting of the laser diode can be prevented, and the life of the laser diode can be extended.

According to the AF units [4] to [8] (the second and third embodiments), the presence / absence of the objective lens is directly detected, so that the safety against laser light is further improved. Can be. Further, since the detection unit is detachable, it can be easily added as necessary.

According to the AF units of [7] and [8] (the third and fifth embodiments), even if the outer diameter of the objective lens differs for each mounted objective lens, the objective lens can be reliably formed. Can be detected, and the presence or absence of the objective lens on the optical path can be detected more accurately.

According to the AF units [9] and [10] (fourth embodiment), the execution of AF control can be set arbitrarily for each microscopy method and each objective lens. Even if various conditions such as an objective lens that does not support AF control, an objective lens that does not require AF control, and a speculum method that does not allow AF control are selected, unnecessary AF control is not performed and the laser diode Since the power is turned off, unnecessary lighting of the laser diode can be prevented, and the life of the laser diode can be further extended. In addition, unnecessary AF control is not performed, so that the microscopic efficiency can be increased.

According to the AF units [1] to [10] (fifth embodiment), it is possible to reliably prevent the laser beam in the empty hole from directly coming out of the microscope, and to prevent the laser beam from being emitted from each of the revolver holes. By setting arbitrarily whether or not AF control is to be performed for each microscopic method, unnecessary lighting of the laser can be eliminated. As a result, it is possible to improve the safety against laser light harmful to the human body, extend the laser life, and improve the efficiency during AF microscopy.

[0116]

According to the present invention, in an active type automatic focusing apparatus, safety against harmful light leakage to a human body which can occur because an optical element such as an objective lens is not mounted on an optical path is provided. Can be enhanced. In addition, it is possible to provide an active-type automatic focusing device with a long product life at a minimum necessary cost by eliminating unnecessary lighting of the laser.

[Brief description of the drawings]

FIG. 1 is a diagram showing an overall configuration of a microscope system according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of an AF optical system according to the first embodiment of the present invention.

FIG. 3 is an external view of a hand switch according to the first embodiment of the present invention.

FIG. 4 is a flowchart showing an operation procedure of AF control in the microscope system according to the first embodiment of the present invention.

FIG. 5 is a diagram illustrating an overall configuration of a microscope system according to a second embodiment of the present invention.

FIG. 6 is a diagram showing a configuration of a revolver provided with a detection unit according to a second embodiment of the present invention.

FIG. 7 is a diagram showing a configuration of a revolver provided with a detection unit with an adjustment mechanism corresponding to a change in outer diameter of an objective lens according to a third embodiment of the present invention.

FIG. 8 is a diagram showing in detail a configuration of a detection unit according to a third embodiment of the present invention.

FIG. 9 is a side sectional view showing a configuration in which a detection unit is applied to objective lenses having different outer diameters according to a third embodiment of the present invention.

FIG. 10 is a diagram showing in detail a configuration of a conduction sensor unit according to a modification of the second and third embodiments of the present invention.

FIG. 11 is a diagram showing an overall configuration of a microscope system according to a fourth embodiment of the present invention.

FIG. 12 is a diagram showing an overall configuration of a microscope system according to a fifth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Microscope main body 2 ... Light source 3 ... Aperture stop 4 ... Field stop 5 ... Corner cube 6 ... Objective lens 7 ... Lens barrel 8 ... Eyepiece 9 ... Stage 10 ... XY handle 11 ... Electric revolver device 12a ... Revolver motor 12b ... Revolver Hole identification sensor 13 ... Control unit 13a ... Control circuit 13b ... Power supply 14 ... AF optical system 15 ... AF control unit 16 ... Electric focusing motor 17 ... Hand switch 18 ... Laser diode 19 ... Collimator lens 20 ... Stopper 21 ... Polarizing beam splitter Reference Signs List 22 λ / 4 plate 23 Dichroic mirror 24 Imaging lens 25 Two-part detector 26 Focusing handle 27 Dip switch 28 Objective lens conversion button 29 Microscope switching button 30 AF button 31 Stage Down button 32 ... Display unit 33, 33 '... Detection unit 4 Photoreflector 34a Light-emitting part 34b Sensor light 34c Light-receiving part 35 Sensor support 36 Revolver cover 36a Female screw part 37 Sensor fixing screw 38 Sensor support 38 38a Contact element 39 Contact member 39a Contact Member 40 ... Rotating shaft 40a ... Shaft fixing screw 41 ... Bearing 42 ... Spring hook 43 ... Spring 44 ... Contact member 45 ... Sensor support 45a, 45b ... Contact element 46 ... Electric cube turret device 47a ... Turret motor 47b ... Cube identification sensor 48 AF sensor head 49 Stage receiver 50 IR cut filter

Claims (3)

[Claims] 1. An automatic focusing device provided with a light source for light projection and built in or retrofitted into optical equipment, detecting means for detecting the presence or absence of an objective lens on an optical path, performing automatic focusing control, and performing the detection. Based on a detection result of the means, when the objective lens is not on the optical path, the power of the light source for projection is turned off, and the automatic focusing control means for stopping the automatic focusing control is provided. Automatic focusing device. 2. A revolver having a plurality of mounting holes for the objective lens and arbitrarily mounting holes on the optical path, and controlling the rotation of the revolver and the mounting holes currently disposed on the optical path. Revolver control means for recognizing the object, and setting means for presetting the presence or absence of an objective lens for each of the mounting holes, further comprising: 2. The automatic focusing device according to claim 1, wherein presence or absence of an objective lens on an optical path is determined based on recognition information of a mounting hole on the optical path from the revolver control unit. 3. An automatic focusing device built in or retrofitted into a microscope having a light source for projecting light and having at least one of a revolver for switching an objective lens and a cube turret for switching a microscopy method. Automatic focus control means for performing control for turning off the power of the light source for projection and stopping automatic focus control; and determining whether or not the automatic focus control operation is performed by the automatic focus control means for each object of the revolver. Setting means for setting at least one of the microscopy methods selected by the lens mounting hole and the cube turret; and controlling the operation of at least one of the revolver and the cube turret, and controlling the operation of the revolver currently on the optical path. Recognize at least one of the currently selected microscopy method by the mounting hole and the cube turret. A device control unit, wherein the automatic focusing control unit is on a current optical path recognized by the device control unit with a set value regarding whether or not the automatic focusing control operation set by the setting unit is performed. An automatic focusing device for performing or stopping automatic focusing control based on a mounting hole or the currently selected microscopic method.