JP2001006169A - Manufacture for magnetic disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid decrease in recording/reproduction performance and a life decrease by overlapping a magnetic transfer master on the surface of a disk subjected to a varnish treatment, magnetizing a magnetic part of the magnetic transfer master, and transferring to record an array pattern of information signals as a magnetization pattern of information signals to the disk. SOLUTION: A ferromagnetic layer is formed to a disk substrate of aluminum or the like thereby forming a magnetic disk body. After a lubricant layer is formed to the magnetic disk body, magnetic transfer is carried out and a varnish treatment is executed. The ferromagnetic layer is provided with a magnetic layer by vapor deposition or a dry plating means such as a sputtering means or the like on the aluminum substrate. In a process for forming a lubricant layer, the magnetic disk is dipped in a lubricant solution, and thereafter pulled up at a predetermined speed, whereby a lubricant is applied to the entire surface of the magnetic disk. Carbon, hydrogen, oxygen, fluorine or the like is preferred as a constituent substance of the lubricant layer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing a magnetic disk used in a hard disk drive or a floppy disk drive.

[0002]

2. Description of the Related Art At present, a hard disk drive, which is a typical magnetic disk device, has a surface recording density of 1 Gb.
A device exceeding it / sqin has been commercialized, and a few years later, rapid technological progress has been recognized such that practical application of 10 Gbit / sqin will be discussed.

[0003] The technical background that has made such a high recording density possible is that a magnetoresistive element type head capable of reproducing a signal having a track width of only several μm with good SN while improving the linear recording density. Is big. Also, with the increase in the recording density, a reduction in the flying height of the floating magnetic slider with respect to the magnetic recording medium has been required, and the possibility that disk / slider contact will occur due to some factor during the flying is increasing. Under such circumstances, the recording medium is required to have higher smoothness.

[0004] Tracking servo technology of the head plays an important role for the head to accurately scan a narrow track. In a current hard disk drive using such tracking servo technology, a servo signal for tracking, an address information signal, a reproduction clock signal, and the like are recorded at a constant angular interval during one round of the disk. The drive device detects and corrects the position of the head based on these signals reproduced from the head at regular time intervals, thereby controlling the head to accurately scan the track.

The above-mentioned servo signal and address information signal,
The reproduction clock signal and the like serve as a reference signal for the head to accurately scan the track, and therefore writing (hereinafter, referred to as formatting) requires high positioning accuracy. In a current hard disk drive, formatting is performed by positioning a recording head using a dedicated servo device (hereinafter, referred to as a servo writer) incorporating a high-accuracy position detection device utilizing optical interference.

However, the following problems exist in the formatting by the servo writer. That is,
It takes a lot of time to write signals over many tracks while positioning the head with high accuracy,
To increase productivity, many servo writers must be operated at the same time. In addition, introduction and maintenance of many servo writers require a large amount of cost, and these problems become more serious as the track density increases and the number of tracks increases.

Therefore, the formatting is performed not by a servo writer, but by overlapping a disk called a master on which all servo information is written in advance with a magnetic disk to be formatted, and applying transfer energy from the outside to obtain information of the master. Have been proposed for batch transfer to a magnetic disk.

As one example, Japanese Patent Application Laid-Open No.
In this example, magnetic transfer is performed by bringing a magnetic recording medium and a convex portion of a master information carrier into close contact with each other and applying an external magnetic field.

[0009]

However, in the above-mentioned conventional magnetic transfer apparatus, when an abnormal projection exists between the magnetic recording medium and the convex portion of the master information carrier, the two come into contact with each other, so that the magnetic recording medium is contacted. Depressions occur on the surface of the surface. Also, in this depression, a small protrusion of about 20 nm is present around the depression of about 50 nm. FIG. 16 shows the results of measuring such protrusions by an optical measurement method, and it is understood that there are many fine protrusions of about 20 nm on the surface of the magnetic disk due to the contact.

In a hard disk drive, the flying height of the slider from the surface of the magnetic disk is about 20 to 30 nm.
If a protrusion of about nm exists, the magnetic head and the magnetic disk come into contact during data recording / reproduction, and in such a case, the clearance between the magnetic head and the magnetic disk becomes large at the moment of contact, The signal recording / reproducing performance is reduced, and the magnetic head physically contacts the magnetic disk, which causes a reduction in the life of the magnetic head. As described above, according to the conventional magnetic transfer method, a large number of protrusions exist on the magnetic disk, and there is a problem that the recording / reproducing performance and the life of the magnetic head are reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides a highly reliable method of manufacturing a magnetic disk without lowering signal recording / reproducing performance or shortening the life of a magnetic head. The purpose is to do so.

[0012]

In order to achieve this object, a method of manufacturing a magnetic disk according to the present invention comprises applying a burnishing process to a magnetic disk having a ferromagnetic layer, and then setting a magnetic portion corresponding to a predetermined information signal. A magnetic transfer master formed so as to have an array pattern shape to be superimposed on the surface of the magnetic disk and magnetizing a magnetic portion of the magnetic transfer master, thereby arraying information signals of the magnetic transfer master. The pattern is transferred and recorded on a magnetic disk as a magnetization pattern of an information signal.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First, according to the first aspect of the present invention, after a burnishing process is performed on a magnetic disk having a ferromagnetic layer, the magnetic portion is arranged in an array pattern shape corresponding to a predetermined information signal. The magnetic transfer master formed so as to be superimposed on the surface of the magnetic disk and magnetizing the magnetic portion of the magnetic transfer master, thereby changing the arrangement pattern of the information signal of the magnetic transfer master to the information signal. Transfer recording as a magnetization pattern on a magnetic disk.

Further, the invention according to claim 3 of the present invention provides:
A magnetic transfer master formed by forming a magnetic portion to have an array pattern shape corresponding to a predetermined information signal is superimposed on the surface of a magnetic disk, and the magnetic portion of the magnetic transfer master is magnetized to thereby provide a magnetic field. A method for manufacturing a magnetic disk, comprising: transferring and recording an array pattern of information signals of a transfer master on a magnetic disk as a magnetization pattern of the information signal; and performing a burnishing process on the magnetic disk.

Further, in the invention according to claim 4 of the present invention, after a lubricant layer is formed on a magnetic disk having a ferromagnetic layer, the magnetic portions are arranged so as to have an array pattern shape corresponding to a predetermined information signal. The formed magnetic transfer master is superimposed on the surface of the magnetic disk, and the magnetic portion of the magnetic transfer master is magnetized, so that the information signal array pattern of the magnetic transfer master is used as the information signal magnetization pattern. This is a method for manufacturing a magnetic disk, which is transcribed and recorded on a magnetic disk.

In the present invention, even if particles exist on the magnetic disk and the magnetic transfer master, damage to the magnetic disk hardly occurs due to the effect of the lubricant. Further, in the present invention, by performing a burnishing process on the surface of the magnetic disk after performing the magnetic transfer, even if the smoothness of the magnetic disk surface is impaired by the magnetic transfer, the convex portion of the surface will be cut off, Physical contact between the magnetic head and the minute protrusion on the magnetic disk can be prevented. Furthermore, in the present invention, by first forming a ferromagnetic layer on the surface and performing magnetic transfer after performing a burnishing process, foreign substances adhering to the slave can be reliably removed before magnetic transfer. It is possible to prevent abnormal projections from occurring during transfer.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1) A method of manufacturing a magnetic recording medium according to the present embodiment will be described with reference to FIGS.

FIG. 1 is a process diagram of the present embodiment. As shown in FIG. 1, a ferromagnetic layer is formed on a disk substrate of aluminum or the like to form a magnetic disk main body, and a lubricant is provided on the magnetic disk main body. After forming the layer, magnetic transfer is performed, and then burnishing is performed.

Here, for the step of forming the ferromagnetic layer and the step of forming the lubricant layer on the disk substrate, the techniques conventionally known in the magnetic disk manufacturing process can be used as they are. For example, as for formation of a ferromagnetic layer, there is a method of providing a magnetic layer on a substrate made of aluminum by dry plating such as evaporation or sputtering. Further, usually, a method of protecting the magnetic layer by performing a step of providing a protective layer on the magnetic layer by dry plating such as vapor deposition or sputtering, or by dipping or spin coating is employed.

In the step of forming a lubricant layer, the magnetic disk is immersed in a lubricant solution and then pulled up at a predetermined speed to apply the lubricant to the entire surface of the magnetic disk. The thickness of the lubricant layer is 15 to 20 angstroms (1.5 to 2.0 nm), and carbon (C), hydrogen (H), oxygen (O), and fluorine (F) are desirable as constituent materials.

Next, the contents of the magnetic transfer step shown in FIG. 1 will be described in detail with reference to FIGS.

FIG. 2 is a perspective view showing a cross section of a part of an apparatus for performing a magnetic transfer step in the present embodiment. In FIG. 2, reference numeral 1 denotes a donut disk-shaped magnetic disk, and reference numeral 2 denotes a disk-shaped magnetic transfer master for transferring and recording information signals on the magnetic disk 1 as a magnetization pattern. The master 2 is arranged so as to sandwich the magnetic disk 1 from above and below. Reference numeral 3 denotes a transfer surface of the master 2, 4 denotes a positioning ring fixed to a surface of the master 2 opposite to the transfer surface 3, 5 denotes an upper flange for holding one of the two masters 2, and 6 denotes 2 A lower flange 7 for holding the other of the masters 2 is a flexible film connecting the master 2 to the upper flange 5 or the lower flange 6.

Numeral 8 denotes a spindle made of an elastic material inserted through the center hole of the magnetic disk 2 and the center holes of the two masters 2. Reference numeral 9 denotes a cap for crushing and deforming the spindle 8. The spindle 8 is a cylinder. The mandrel 9a of the cap 9 is inserted in the center at the center. A predetermined gap is provided between the spindle 8 and the mandrel 9a. 10 is a master pedestal for supporting one of the spindle 8 and the master 2, 11 is an air passage for discharging air between the master 2 and the magnetic disk 1, and 12 is an air outlet for discharging air from the air passage. , 13 is a suction pump connected to the air discharge port, 14 is a flange pedestal supporting the lower flange, and 15 is a magnet for transferring the magnetic pattern of the master 2 to the magnetic disk 1.

Next, an example of a master used in the method of the present invention will be described.

FIG. 3 schematically shows a plane of an example of the master 2, and as shown in FIG. 3, one main surface of the master 2, that is, the surface in contact with the ferromagnetic layer surface of the magnetic disk 1. Has a substantially radial signal region 2a.

FIG. 4 schematically shows an enlarged view of a portion A surrounded by a dotted line in FIG. As shown in FIG. 4, a signal area 2a includes a magnetic portion made of a ferromagnetic thin film in a pattern shape corresponding to the information signal at a position corresponding to a digital information signal to be recorded on a magnetic recording medium, for example, preformat recording. An information pattern is formed. In FIG. 4, a hatched portion is a magnetic portion composed of a ferromagnetic thin film. The information pattern shown in FIG.
Each area of a clock signal, a tracking servo signal, an address information signal, and the like is sequentially arranged in the track length direction. Note that the information pattern shown in FIG. 4 is an example, and the configuration, arrangement, and the like of the information pattern are appropriately determined according to the digital information signal recorded on the magnetic recording medium.

For example, when a reference signal is first recorded on a magnetic film of a hard disk such as a hard disk drive and preformat recording of a servo signal for tracking or the like is performed based on the reference signal, the master according to the present invention is used. Only the reference signal used for preformat recording is transferred and recorded on the magnetic film of the hard disk in advance, and the hard disk is built into the drive housing, and the preformat recording of the servo signal for tracking etc. uses the magnetic head of the hard disk drive It may be performed afterwards.

FIG. 5 shows an enlarged view of a main part of the master. In FIG. 5, reference numeral 16 denotes a magnetic part made of a ferromagnetic thin film for transferring and recording a magnetization pattern on the magnetic disk 1;
Reference numeral 7 denotes a groove radially provided on the transfer surface 3 on which the magnetic portion 16 of the master 2 is provided.

FIG. 6 shows a cross section of the signal area shown in FIGS. 3 and 4, and as shown in FIG.
A plurality of fine array patterns corresponding to information signals are formed on one main surface of a disk-shaped substrate 2b made of a nonmagnetic material such as a Si substrate, a glass substrate, or a plastic substrate, that is, on the surface on the side in contact with the surface of the magnetic disk 1. A concave portion 2c is formed in a shape, and a ferromagnetic thin film serving as the magnetic portion 16 is embedded in the concave portion 2c of the base 2b.

Here, as the ferromagnetic thin film, many kinds of magnetic materials can be used irrespective of hard magnetic materials, semi-hard magnetic materials and soft magnetic materials, and digital information signals can be transferred and recorded on a magnetic disk. Anything should do. For example, Fe, Co, an Fe—Co alloy, or the like can be used. In order to generate a sufficient recording magnetic field irrespective of the type of the magnetic disk on which the information signal is recorded, the larger the saturation magnetic flux density of the magnetic material, the better. In particular, 200
For a magnetic disk having a high coercive force exceeding 0 Oe or a flexible disk having a thick magnetic layer, sufficient recording may not be performed if the saturation magnetic flux density is 0.8 Tesla or less. Is 0.8
A magnetic material having a saturation magnetic flux density of at least Tesla, preferably at least 1.0 Tesla is used. The thickness of the ferromagnetic thin film depends on the bit length, the saturation magnetization of the magnetic disk, and the thickness of the magnetic layer. For example, the bit length is about 1 μm, the saturation magnetization of the magnetic disk is about 500 emu / cc, When the thickness is about 20 nm, 50 nm to 500 nm
It may be about nm.

FIGS. 7 and 8 are views for explaining the operation of the apparatus for performing the magnetic transfer step in the present embodiment. The operation in this step will be described below. First, as shown in FIG. 2, the magnetic disk 1 is sandwiched between two masters 2, and the positioning ring 4 and the center through hole of the magnetic disk 1 are both inserted into the spindle 8. When the positioning ring 4 and the center through hole of the magnetic disk 1 are inserted through the spindle 8, the upper flange 5 and the lower flange 6 are joined. At this time,
The joint between the positioning ring 4 and the magnetic disk 1 is shown in FIG.
This is the state shown in FIG. That is, the inner diameter of the master 2 is larger than the outer diameter of the spindle 8, and a slight clearance exists between the master 2 and the magnetic disk 1 in the thickness direction.

Next, the core rod 9a is pulled in the direction of the arrow P shown in FIG.
Is compressed and deformed by the cap 9 and is compressed in the thickness direction, and at the same time, its outer diameter increases. As shown in FIG. Position the lining. When the positioning of the magnetic disk 1 and the master 2 is completed by the spindle 8, the suction pump 13 discharges air from the air discharge port 12 while the spindle 8 remains deformed. At this time, the positioning ring 4 is made of an elastic material, and the positioning ring 4 is deformed by the exhaust of the suction pump 13, so that the clearance between the magnetic disk 1 and the master 2 becomes zero as shown in FIG. , Resulting in a completely adhered state.

That is, as shown in FIG. 2, the magnetic disk 1 is surrounded by an upper flange 5, a lower flange 6, two flexible rings 7, two masters 2, two positioning rings 4, and a spindle 8. When air is discharged from the air discharge port 12, the pressure in the closed space becomes lower than the atmospheric pressure. As a result, the two masters 2 receive a force in the direction sandwiching the magnetic disk 1 by the atmospheric pressure, and the transfer surface 3 of the master 2 and the surface of the magnetic disk 1 are strongly adhered. At this time, if a foreign substance such as a projection exists between the magnetic disk 1 and the master 2, a projection exists around the depression.

When the contact between the magnetic disk 1 and the master 2 is completed, the magnet 15 is brought close to the master 2 to apply a magnetic field required for transfer as shown in FIG. That is, by rotating the magnetic disk 1 in the direction of arrow B in FIG.

Here, the procedure for transferring and recording the information signal corresponding to the pattern shape formed on the master on the magnetic disk will be described in more detail with reference to FIGS.

First, in a state where the magnet 15 is brought close to the magnetic disk 1, the magnetic disk 1 is rotated in parallel with the magnetic disk 1 about the center axis of the magnetic disk 1 as a rotation axis, thereby obtaining the configuration shown in FIG.
As shown by the arrow, the magnetic disk 1 is magnetized in one direction in advance (initial magnetization). Next, as described above, in a state where the master 2 is positioned and overlapped on the magnetic disk 1, the master 2 and the magnetic disk 1 are uniformly brought into close contact with each other, and thereafter, as shown in FIG. By applying a magnetic field in the direction, the magnetic portion 16 of the master 2 is magnetized, and a predetermined area 1
In b, an information signal corresponding to the pattern shape of the magnetic part 16 is recorded as shown in FIG. The arrow shown in FIG. 10 indicates the direction of the magnetic field of the magnetization pattern transferred and recorded on the magnetic disk 1 at this time.

FIG. 11 shows the state of the magnetization process. As shown in FIG. 11, a magnetic field is applied to the master 2 by applying a magnetic field to the master 2 from the outside while the master 2 is in close contact with the magnetic disk 1. Is magnetized, an information signal can be recorded on the ferromagnetic layer 1c of the magnetic disk 1. That is, by using the master 2 formed by forming the magnetic portion 11 made of a ferromagnetic thin film in an array pattern shape corresponding to a predetermined information signal on the non-magnetic substrate 2b, a magnetic pattern is formed as a magnetization pattern corresponding to the information signal. It can be magnetically transferred and recorded on the disk 1.

As a method of transferring and recording the pattern of the master 2 on the magnetic disk 1, other than a method of applying an external magnetic field while the master 2 is in contact with the magnetic disk 1 as described above, An information signal can also be recorded by a method in which the magnetic section 16 is magnetized in advance and the master 2 is brought into close contact with the magnetic disk 1 in that state.

Next, in the present invention, the burnishing process is performed as shown in FIG. 1. The details of the burnishing process will be described in detail with reference to FIG.

FIG. 12 is a perspective view for explaining an apparatus for performing a burnishing process in this embodiment.
As shown in FIG. 12, the apparatus for performing the burnishing process includes a spindle 21 for holding and rotating the magnetic disk 1 after performing the magnetic transfer step, a clamp mechanism 22 for fixing the magnetic disk 1 to the spindle 21, Head support mechanism 2 including burnishing head 20 for burnishing
3, a guide arm 24 that cantileverly supports the head support mechanism 23 at its base, and a varnish that moves and positions the burnishing head 20 on the recording surface of the magnetic disk 1 via the head support mechanism 23 and the guide arm 24. A head positioning unit 25, a positioning control unit 26 for controlling the operation of the burnish head positioning unit 25, a spindle control unit 27 for controlling the operation of the spindle 21, and a controller 28 for controlling the positioning control unit 26 and the spindle control unit 27 It is composed of

First, the magnetic disk 1 is rotated at a constant speed by the controller 28 by the spindle controller 27 by the controller 28. Next, the burnish head positioning unit 25 is
Is controlled by the positioning control unit 26 so as to move the magnetic disk 1 and the burnishing head 20 at a predetermined distance, for example, at a position where the distance becomes 15 nm. The setting method of this position is shown below.

The distance between the magnetic disk 1 and the burnishing head 20 when the burnishing head positioning section 25 is located at an arbitrary position is measured in advance. Then, the distance to be moved to make the distance between the magnetic disk 1 and the burnishing head 20 a predetermined distance, for example, 15 nm, is calculated and stored in the controller 28. The controller 28 moves the burnish head positioning unit 2 via the positioning control unit 26, and sets the distance between the magnetic disk 1 and the burnish head 20 to 15 nm.
Set to. Here, the distance between the magnetic disk 1 and the burnishing head 20, that is, 15 nm, is set to a value smaller than the flying height of the head when performing recording and reproduction with an actual hard disk drive.

Thereafter, the positioning control unit 27 controls the burnishing head 20 to move in the direction B of FIG. 12, ie, in the radial direction of the magnetic disk 1 while the magnetic disk 1 is rotated, and performs magnetic transfer. The burnishing process is performed on the surface in contact with the master 2. As a result, abnormal protrusions existing on the surface of the magnetic disk 1,
In particular, protrusions larger than the clearance between the magnetic disk and the magnetic head during recording and reproduction can be removed by collision energy.

FIG. 13 shows the result of an optical measurement of the surface condition of the magnetic disk 1 after the burnishing process. Compared with FIG. 12 described in the related art, it can be seen that the fine projections existing on the surface of the magnetic disk 1 are drastically reduced by performing the burnishing process after performing the magnetic transfer process.

As described above, according to the present embodiment, by performing the burnishing process after the magnetic transfer step, the surface smoothness of the magnetic disk on which the magnetic transfer has been performed is improved, and the signal recording / reproducing performance and the signal recording / reproducing performance are improved. A highly reliable device that does not reduce the life of the magnetic head can be realized.

(Embodiment 2) A method according to Embodiment 2 of the present invention will be described with reference to FIGS.

FIG. 14 shows a process chart in this embodiment, and each step has the same configuration as that of the first embodiment. That is, in the present embodiment, a method in which a ferromagnetic layer is formed on a disk substrate, a burnishing process is performed, a lubricant is formed on the magnetic disk, and then a magnetic transfer process is performed.

First, in the present embodiment, a magnetic transfer step is performed after the burnishing step, whereby foreign substances existing on the magnetic disk 1 can be removed in advance. It is possible to prevent the presence of foreign matter between the master 2 and the magnetic disk 1 beforehand, and to reduce the signal recording / reproducing performance and the life of the magnetic head as in the first embodiment. A highly reliable device can be realized.

Further, in this embodiment, since the magnetic transfer step is performed after the lubricant application step, damage occurring during the magnetic transfer can be prevented. That is, the magnetic disk 1 and the master 2
When the contact is made, a lubricant composed of carbon, hydrogen, oxygen, fluorine, or the like is added in an amount of 1.5 to 2.0 n before contact.
By applying with a thickness of m, damage that may occur at the time of contact between the two can be prevented beforehand.

FIG. 15 shows an observation result of a magnetic disk surface generated when magnetic transfer is performed without applying a lubricant. FIG. 15A shows the state of the entire surface of the magnetic disk after the magnetic transfer. As shown in FIG. 15A, fine scratches having a longitudinal direction in the same direction are generated on the entire surface of the magnetic disk, especially near the center. You can see that. FIG. 15 (b)
Is an enlarged view of such a fine flaw, and it can be seen that the microflaw has a concave shape such as a scratch of about 3 to 5 μm.

That is, from these observation results, when the magnetic disk 1 and the master 2 are brought into contact with each other in a state where the lubricant is not applied, fine scratches having the same direction as the magnetic disk 1 are generated, especially near the center of the disk. Was found to occur frequently. This is, as shown in FIG.
When the magnetic disk 1 and the master 2 come into close contact with each other, it is considered that the deformation of the spindle 8 causes the magnetic disk 1 and the master 2 to be displaced, and if the lubricant is not applied, a scratch is generated at this time. Conversely, it has been clarified from the experimental results that by applying a lubricant to the magnetic disk 1 prior to the magnetic transfer between the magnetic disk 1 and the master 2, damage is less likely to occur. This is because the lubricant serves as a protective film for preventing damage at the time of contact.

As described above, according to the present embodiment, by performing the magnetic transfer process after the burnishing process, foreign substances existing on the magnetic disk can be removed in advance. It is possible to prevent foreign substances from being present between the disc and the disc.

Further, since the step of magnetic transfer is performed after the step of applying the lubricant, it is possible to prevent damage that may occur when the two are in contact with each other.

In this embodiment, the magnetic transfer step is performed after the burnishing step. However, the magnetic transfer step is performed after the burnishing step in combination with the first embodiment. If you go through the process,
Magnetic transfer can be performed with foreign substances present on the magnetic disk removed in advance, and the surface smoothness of the magnetic disk after the magnetic transfer can be further improved, further improving the signal recording / reproducing performance and the durability of the magnetic head, A highly reliable device can be realized.

In the above example, the burnishing process was performed using a burnishing head, but the burnishing process is not limited to this. For example, a burnishing tape or a buffing process may be used. The same effect can be obtained by a configuration in which the minute projections are removed by the collision energy between the minute projections.

The method of magnetic transfer is not limited to this, and a method of bringing the magnetic disk 1 into contact with the master 2 using another method may be employed.

[0058]

As described above, according to the present invention, by performing burnishing after the magnetic transfer step, the surface smoothness of the magnetic disk on which the magnetic transfer has been performed is not impaired. Therefore, it is possible to realize a highly reliable device without lowering the recording / reproducing performance of the magnetic head and without reducing the life of the magnetic head.

Further, by performing the magnetic transfer step after the burnishing step, foreign substances existing on the magnetic disk can be removed in advance, so that foreign substances should be present between the master and the magnetic disk. Can be prevented beforehand, and a highly reliable device can be realized.

Further, since a magnetic transfer step is performed after the step of applying the lubricant, it is possible to prevent damage which may occur at the time of contact between the two, thereby realizing a highly reliable apparatus. Can be.

[Brief description of the drawings]

FIG. 1 is a process chart showing a method for manufacturing a magnetic disk according to a first embodiment of the present invention.

FIG. 2 is a perspective view, partially in section, showing an apparatus for performing a magnetic transfer step in the first embodiment of the present invention;

FIG. 3 is a plan view illustrating a configuration of a master for performing the magnetic transfer process.

FIG. 4 is an explanatory diagram illustrating a configuration of an information signal formed in the master.

FIG. 5 is an enlarged perspective view showing a main part of the master.

FIG. 6 is a similar sectional view.

FIGS. 7A to 7C are cross-sectional views illustrating the positioning of the disk when performing the magnetic transfer process.

FIG. 8 is a perspective view for explaining the operation of the apparatus when performing the magnetic transfer step.

FIG. 9 is a perspective view for explaining a state of the magnetic disk that has been subjected to initial magnetization in the magnetic transfer process.

FIG. 10 is a perspective view for explaining the state of the magnetic disk on which the transfer recording has been performed in the magnetic transfer step.

FIG. 11 is a sectional view for explaining a transfer recording principle in the magnetic transfer process.

FIG. 12 is a perspective view illustrating an apparatus for performing the burnishing process.

FIG. 13 is an explanatory diagram showing a state of the surface of the magnetic disk after the burnishing process is performed.

FIG. 14 is a process chart showing a method for manufacturing a magnetic disk according to the second embodiment of the present invention.

FIG. 15 is an explanatory diagram for explaining a magnetic disk surface when magnetic transfer is performed without applying a lubricant;

FIG. 16 is an explanatory diagram showing a state of a magnetic disk surface after a magnetic disk and a master are brought into contact with each other in a conventional technique.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Magnetic disk 2 Master 2a Signal area 2b Base 15 Magnet 16 Magnetic part 20 Burnish head

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Kaoru Matsuoka 1006 Kazuma Kadoma, Osaka Pref. Matsushita Electric Industrial Co., Ltd. (72) Inventor Toshio Makabe 1006 Kadoma Kadoma Kadoma, Osaka Pref. Terms (reference) 5D112 AA07 AA24 GA09 GA11 GA13

Claims (9)

[Claims] 1. A magnetic transfer master comprising: a magnetic disk having a ferromagnetic layer; a burnishing process; and a magnetic transfer master having a magnetic portion formed in an array pattern shape corresponding to a predetermined information signal. A magnetic pattern of the information signal of the magnetic transfer master is transferred and recorded on a magnetic disk as a magnetization pattern of the information signal by superimposing the magnetic portion of the magnetic transfer master on the surface of the magnetic transfer master. Disc manufacturing method. 2. The method according to claim 1, wherein after performing a burnishing process on the magnetic disk, a lubricant layer is formed on the magnetic disk, and then an information signal is transferred and recorded on the magnetic disk using a magnetic transfer master. Item 2. The method for manufacturing a magnetic disk according to Item 1. 3. A magnetic transfer master having a magnetic portion formed in an array pattern shape corresponding to a predetermined information signal is superimposed on the surface of a magnetic disk, and the magnetic portion of the magnetic transfer master is magnetized. A method for manufacturing a magnetic disk, wherein an array pattern of information signals of a magnetic transfer master is transferred and recorded on a magnetic disk as a magnetization pattern of the information signal, and then burnishing is performed on the magnetic disk. 4. A magnetic transfer master comprising a magnetic disk having a ferromagnetic layer, a lubricant layer formed thereon, and a magnetic portion formed so as to have an array pattern shape corresponding to a predetermined information signal. A magnetic pattern of the information signal of the magnetic transfer master is transferred and recorded on a magnetic disk as a magnetization pattern of the information signal by superimposing the magnetic portion of the magnetic transfer master on the surface of the magnetic transfer master. Disc manufacturing method. 5. The method according to claim 4, wherein after the information signal is transferred and recorded on the magnetic disk by using a magnetic transfer master, the magnetic disk is subjected to burnishing. 6. The method according to claim 1, wherein the burnishing process uses a burnishing tape. 7. The method according to claim 1, wherein the burnishing process uses a burnishing head. 8. A magnetic recording / reproducing apparatus using a magnetic disk that has been preformat-recorded using the method for manufacturing a magnetic disk according to claim 1. 9. In a hard disk drive having a magnetic disk, a magnetic pattern used for preformat recording is preliminarily transferred and recorded on a ferromagnetic layer by using the method for manufacturing a magnetic disk according to any one of claims 1 to 5. A hard disk drive characterized in that it has a configuration in which a magnetic disk is formed.