JP2000349480A - Cooler of heat generating element - Google Patents

Cooler of heat generating element

Info

Publication number
JP2000349480A
JP2000349480A JP11154679A JP15467999A JP2000349480A JP 2000349480 A JP2000349480 A JP 2000349480A JP 11154679 A JP11154679 A JP 11154679A JP 15467999 A JP15467999 A JP 15467999A JP 2000349480 A JP2000349480 A JP 2000349480A
Authority
JP
Japan
Prior art keywords
heating element
heat generating
cooling
generating elements
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11154679A
Other languages
Japanese (ja)
Inventor
Akihiro Fujimoto
明博 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP11154679A priority Critical patent/JP2000349480A/en
Publication of JP2000349480A publication Critical patent/JP2000349480A/en
Pending legal-status Critical Current

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  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

PROBLEM TO BE SOLVED: To cool respective heat generating elements at a uniform temperature, by covering with a sealing case the plurality of heat generating elements mounted on a printed circuit board, and by forming in the sealing case independent shunts of each other for the respective heat generating elements. SOLUTION: On one surface of a printed circuit board 1, a plurality of heat generating elements 2 are mounted to form independent cooling shunts 8 of each other for these respective heat generating elements by partition plates 7 formed on the rear side of a sealing case 3. Further, the temperatures of the cooling liquids flowing in these respective cooling shunts 8 are so set to the same temperature of 25 deg.C in the states of them contacting with the respective heat generating elements 2 that the junction temperatures of all the heat generating elements 2 are maintained resultly at the same temperature of 70 deg.C. Thereby, there is completely no possibility of the heat generating elements 2 malfunctioning partially due to the temperature differences among them to constitute a highly reliable cooler.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は規模が大きい電子
機器に適用される発熱素子冷却装置に関し、特に複数の
発熱素子を共通の絶縁性冷却液で冷却する発熱素子冷却
装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating element cooling device applied to a large-scale electronic device, and more particularly to a heating element cooling device for cooling a plurality of heating elements with a common insulating cooling liquid.

【0002】[0002]

【従来の技術】図5及び図6に従来の発熱素子冷却装置
の構造を示す。図中1はプリント基板を示す。この例で
は図6に示すようにプリント基板1の表側1A及び裏側
1Bの双方の面に発熱素子2を実装した例を示す。発熱
素子2としては例えばLSI等と呼ばれている大規模半
導体デバイス、或いは電力系に用いられる半導体スイッ
チ素子、或いは温度を一定に保つ必要がある遅延回路を
構成する半導体デバイス等が考えられる。
2. Description of the Related Art FIGS. 5 and 6 show the structure of a conventional heating element cooling device. In the drawing, reference numeral 1 denotes a printed circuit board. In this example, as shown in FIG. 6, an example is shown in which the heating element 2 is mounted on both the front side 1A and the back side 1B of the printed circuit board 1. As the heating element 2, for example, a large-scale semiconductor device called an LSI or the like, a semiconductor switch element used in a power system, or a semiconductor device forming a delay circuit that needs to maintain a constant temperature can be considered.

【0003】発熱素子2の実装部分には密封ケース3が
被せられる。密封ケース3は例えばアルミニューム製の
ダイキャストによって形成することができ、プリント基
板1の表側と裏側に対接するケース半体3Aと3Bで構
成され、これらケース半体3Aと3Bでプリント基板1
を挟み付けて密封ケース3が構成される。ケース半体3
A,3Bとプリント基板1との接触面にはオーリングM
(図6参照)が装着される。プリント基板1の面にはオ
ーリングMの接触位置に例えば金メッキ層(特に図示し
ない)のような滑らかな面が形成され、このメッキ層に
オーリングMが圧接されて液密構造とされる。
[0003] A sealed case 3 is placed over a mounting portion of the heating element 2. The sealed case 3 can be formed by die-casting made of aluminum, for example, and is composed of case halves 3A and 3B that are in contact with the front side and the back side of the printed circuit board 1. The case halves 3A and 3B are used to form the printed circuit board 1.
Are sandwiched to form the sealed case 3. Case half 3
O-ring M on the contact surface between A, 3B and printed circuit board 1
(See FIG. 6). A smooth surface such as, for example, a gold plating layer (not particularly shown) is formed on the surface of the printed circuit board 1 at the contact position of the O-ring M, and the O-ring M is pressed against this plating layer to form a liquid-tight structure.

【0004】密封ケース3には例えばパーフロロカーボ
ンのように絶縁性の高い冷却液を注入口4と、吐出口5
との間で流す構造とされる。つまり、これら注入口4と
吐出口5に冷却液循環路10を接続する。冷却液循環路
10は冷却液を冷却して循環させる。冷却液循環路10
は熱交換器11と、ポンプ12とによって構成され、主
に熱交換器11によって冷却液を冷却し、所定の温度に
戻して循環させる構造とされる。プリント基板1の両端
には発熱素子2を外部に電気的に接続するコネクタJ
1,J2が装着される。
In the sealed case 3, a cooling liquid having a high insulating property such as perfluorocarbon is injected into an inlet 4 and an outlet 5.
It is a structure to flow between. That is, the coolant circulation path 10 is connected to the inlet 4 and the outlet 5. The coolant circulation path 10 cools and circulates the coolant. Coolant circulation circuit 10
Is composed of a heat exchanger 11 and a pump 12, and has a structure in which the coolant is cooled mainly by the heat exchanger 11, returned to a predetermined temperature, and circulated. Connectors J for electrically connecting the heating elements 2 to the outside at both ends of the printed circuit board 1
1, J2 are attached.

【0005】[0005]

【発明が解決しようとする課題】従来の密封ケース3は
複数の発熱素子2に対して共通の流路6を構成し、この
流路6に冷却液を流す構造とされる。このため、密封ケ
ース3の内部でも冷却液の温度は注入口4側で例えば2
5℃,吐出口5側では例えば35℃程度に温度差が発生
し、これがために、発熱素子2はその位置に応じて接触
する冷却液に温度差が発生し、これがために発熱素子2
の相互間において温度差が与えられる欠点が生じる。つ
まり、発熱素子2がLSIであるものとすると、LSI
はその位置に応じて各デバイスごとに温度差が与えら
れ、動作条件に違いが発生する欠点が生じる。
The conventional sealed case 3 has a common flow path 6 for a plurality of heating elements 2 and has a structure in which a cooling liquid flows through the flow path 6. Therefore, the temperature of the coolant inside the sealed case 3 is, for example, 2 at the inlet 4 side.
For example, a temperature difference of about 5 ° C. and about 35 ° C. is generated at the discharge port 5 side, so that the heating element 2 generates a temperature difference in the contacting coolant depending on its position.
Has the disadvantage that a temperature difference is given between them. That is, assuming that the heating element 2 is an LSI, the LSI
Is disadvantageous in that a temperature difference is given to each device according to its position, and a difference occurs in operating conditions.

【0006】この発明の目的は密封ケースを用い、冷却
液を循環させて温度の上昇を抑える構造の発熱素子冷却
装置において、複数の発熱素子を均一な温度に冷却する
ことができる発熱素子冷却装置の構成を提供しようとす
るものである。
SUMMARY OF THE INVENTION An object of the present invention is to provide a heating element cooling device having a structure using a sealed case and circulating a cooling liquid to suppress a rise in temperature, in which a plurality of heating elements can be cooled to a uniform temperature. Is intended to be provided.

【0007】[0007]

【課題を解決するための手段】この発明ではプリント基
板に実装された複数の発熱素子に対して密封ケースを被
せ、この密封ケース内において冷却液を流す構造の発熱
素子冷却装置において密封ケースに各発熱素子に対して
独立した分流路を形成した構成を特徴とするものであ
る。
According to the present invention, a plurality of heating elements mounted on a printed circuit board are covered with a sealing case, and a cooling element is provided in the heating element cooling device having a structure in which a cooling liquid flows in the sealing case. The present invention is characterized in that an independent branch channel is formed for a heating element.

【0008】この発明の構成によれば、各発熱素子に接
して流れる冷却液の温度は同一温度となる。この結果、
複数の発熱素子は位置の違いに関係なく、同一温度に維
持され動作条件を揃えることができる利点が得られる。
According to the structure of the present invention, the temperature of the coolant flowing in contact with each heating element is the same. As a result,
The advantage is obtained that the plurality of heating elements can be maintained at the same temperature and the operating conditions can be uniform regardless of the difference in position.

【0009】[0009]

【発明の実施の形態】図1にこの発明の一実施例を示
す。この実施例では図2に示すように、プリント基板1
の一方の面に複数の発熱素子2を実装した実施例を示
す。この発明では密封ケース3Aの裏側に仕切板7を形
成し、この仕切板7によって各発熱素子2に対して独立
した分流路8を形成した構造とした点を特徴とするもの
である。仕切板7はケース半体3A,3Bと一体に形成
するか、或いはプリント基板1に金属板を実装して構成
することもできる。
FIG. 1 shows an embodiment of the present invention. In this embodiment, as shown in FIG.
An embodiment in which a plurality of heat generating elements 2 are mounted on one surface of the device will be described. The present invention is characterized in that a partition plate 7 is formed on the back side of the sealed case 3A, and an independent branch channel 8 is formed for each heating element 2 by the partition plate 7. The partition plate 7 may be formed integrally with the case halves 3A and 3B, or may be configured by mounting a metal plate on the printed circuit board 1.

【0010】仕切板7を設けた構造とすることにより、
各分流路8を流れる冷却液の温度は各発熱素子2に接す
る状態において、例えば25℃の同一温度となる。この
結果、全ての発熱素子2のジャンクション温度を例えば
70℃の同一温度に維持させることができるため、動作
条件を揃えることができる利点が得られる。図3はプリ
ント基板1の両面に発熱素子2を実装した場合を示す。
この場合もプリント基板1の両面に対接するケース半体
3Aと3Bの双方に仕切板7を形成し、この仕切板7に
よって分流路8を形成する。
By adopting a structure provided with the partition plate 7,
The temperature of the cooling liquid flowing through each branch channel 8 becomes the same temperature of, for example, 25 ° C. in a state of being in contact with each heating element 2. As a result, the junction temperature of all the heating elements 2 can be maintained at the same temperature of, for example, 70 ° C., so that an advantage that operating conditions can be uniformed is obtained. FIG. 3 shows a case where the heating elements 2 are mounted on both surfaces of the printed circuit board 1.
Also in this case, the partition plates 7 are formed on both of the case halves 3A and 3B which are in contact with both surfaces of the printed circuit board 1, and the dividing channels 7 are formed by the partition plates 7.

【0011】このように、プリント基板1の両面に発熱
素子2を実装する場合には、図4に示すようにプリント
基板1に孔1Aと1Bを形成し、この孔1Aと1Bを通
じて絶縁性冷却液を流すことにより、冷却液をプリント
基板1の両面にわたって流すことができる。
As described above, when the heating elements 2 are mounted on both sides of the printed board 1, holes 1A and 1B are formed in the printed board 1 as shown in FIG. 4, and insulating cooling is performed through the holes 1A and 1B. By flowing the liquid, the cooling liquid can flow over both surfaces of the printed circuit board 1.

【0012】[0012]

【発明の効果】以上説明したように、この発明によれば
各仕切板7によって独立した分流路8を形成し、この分
流路8のそれぞれに冷却液を流すことにより、全ての発
熱体2を同一温度の条件下で動作させることができる。
よって、温度差によって部分的に誤動作するようなおそ
れは全くなく、信頼性の高い装置を構成することができ
る利点が得られる。
As described above, according to the present invention, an independent branch channel 8 is formed by each partition plate 7 and a cooling liquid is flowed into each of the branch channels 8 so that all the heating elements 2 are separated. It can be operated under the condition of the same temperature.
Therefore, there is no possibility that a malfunction occurs partially due to a temperature difference, and an advantage that a highly reliable device can be configured can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施例を説明するための平面図。FIG. 1 is a plan view for explaining an embodiment of the present invention.

【図2】図1のA−A線上の断面図。FIG. 2 is a cross-sectional view taken along line AA of FIG.

【図3】この発明の変形実施例を示す断面図。FIG. 3 is a sectional view showing a modified embodiment of the present invention.

【図4】図3に示したB−B線上の断面図。FIG. 4 is a sectional view taken along the line BB shown in FIG. 3;

【図5】従来の技術を説明するための平面図。FIG. 5 is a plan view for explaining a conventional technique.

【図6】図5に示したC−C線上の断面図。FIG. 6 is a sectional view taken along the line CC shown in FIG. 5;

【符号の説明】[Explanation of symbols]

1 プリント基板 2 発熱素子 3 密封ケース 3A,3B 密封ケース半体 4 注入口 5 吐出口 7 仕切板 8 分流路 DESCRIPTION OF SYMBOLS 1 Printed circuit board 2 Heating element 3 Sealed case 3A, 3B Sealed case half 4 Inlet 5 Discharge port 7 Partition plate 8 Branch flow path

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 プリント基板に実装された複数の発熱素
子に対して密封ケースを被せ、密封ケース内に絶縁性冷
却液を流して上記複数の発熱素子を冷却する構造の発熱
素子冷却装置において、 上記密封ケース内において、複数の仕切板を設け、この
複数の仕切板によって上記密封ケース内に独立した複数
の分流路を形成し、この複数の分流路のそれぞれに上記
発熱素子を配置する構造としたことを特徴とする発熱素
子冷却装置。
1. A heating element cooling apparatus having a structure in which a plurality of heating elements mounted on a printed circuit board are covered with a sealing case, and an insulating cooling liquid is flowed in the sealing case to cool the plurality of heating elements. In the sealed case, a plurality of partition plates are provided, a plurality of independent flow paths are formed in the sealed case by the plurality of partition plates, and the heating element is arranged in each of the plurality of flow channels. A cooling device for a heating element, comprising:
【請求項2】 請求項1記載の発熱素子冷却装置におい
て、上記プリント基板の一方の面に複数の発熱素子が実
装され、これら発熱素子に上記分流路が形成された密封
ケースを被せた構造としたことを特徴とする発熱素子冷
却装置。
2. A heating element cooling device according to claim 1, wherein a plurality of heating elements are mounted on one surface of said printed circuit board, and said heating elements are covered with a sealed case having said shunt channel formed therein. A cooling device for a heating element, comprising:
【請求項3】 請求項1記載の発熱素子冷却装置におい
て、上記プリント基板の表面及び裏面の双方に発熱素子
を装着し、これら発熱素子の装着面の双方に上記分流路
が形成された密封ケースを被せた構造としたことを特徴
とする発熱素子冷却装置。
3. The heat-generating element cooling device according to claim 1, wherein a heat-generating element is mounted on both the front surface and the rear surface of said printed circuit board, and said branch channel is formed on both of said heat-generating element mounting surfaces. A heating element cooling device characterized by having a structure covered with a heating element.
【請求項4】 請求項1または2記載の発熱素子冷却装
置のいずれかにおいて、上記密封ケースには絶縁性冷却
液の注入口と吐出口とを有し、注入口から注入した上記
絶縁性冷却液は上記各分流路を通じて吐出口に向かって
流れ、吐出口から吐出された上記絶縁性冷却液は熱交換
器で冷却されて上記注入口に注入される循環路を循環す
る構造とした発熱素子冷却装置。
4. The cooling device according to claim 1, wherein the sealing case has an inlet and an outlet for an insulating cooling liquid, and the insulating cooling injected from the inlet. The heating element has a structure in which the liquid flows toward the discharge port through each of the branch channels, and the insulating coolant discharged from the discharge port is cooled by a heat exchanger and circulates in a circulation path injected into the injection port. Cooling system.
JP11154679A 1999-06-02 1999-06-02 Cooler of heat generating element Pending JP2000349480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11154679A JP2000349480A (en) 1999-06-02 1999-06-02 Cooler of heat generating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11154679A JP2000349480A (en) 1999-06-02 1999-06-02 Cooler of heat generating element

Publications (1)

Publication Number Publication Date
JP2000349480A true JP2000349480A (en) 2000-12-15

Family

ID=15589555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11154679A Pending JP2000349480A (en) 1999-06-02 1999-06-02 Cooler of heat generating element

Country Status (1)

Country Link
JP (1) JP2000349480A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6217885B1 (en) * 2016-09-16 2017-10-25 富士通株式会社 Immersion tank and apparatus having an immersion tank
JP6217835B1 (en) * 2016-09-16 2017-10-25 富士通株式会社 Immersion cooling device
JP6237942B1 (en) * 2017-01-30 2017-11-29 富士通株式会社 Immersion cooling device
JP2019145749A (en) * 2018-02-23 2019-08-29 日本電気株式会社 Electronic equipment and electronic device
WO2021157469A1 (en) * 2020-02-07 2021-08-12 株式会社日立製作所 Electronic circuit device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6217885B1 (en) * 2016-09-16 2017-10-25 富士通株式会社 Immersion tank and apparatus having an immersion tank
JP6217835B1 (en) * 2016-09-16 2017-10-25 富士通株式会社 Immersion cooling device
JP2018049582A (en) * 2016-09-16 2018-03-29 富士通株式会社 Liquid immersion cooling device
US10212849B2 (en) 2016-09-16 2019-02-19 Fujitsu Limited Liquid immersion tank, and apparatus including liquid immersion tank
JP6237942B1 (en) * 2017-01-30 2017-11-29 富士通株式会社 Immersion cooling device
JP2018125363A (en) * 2017-01-30 2018-08-09 富士通株式会社 Liquid immersion cooler
JP2019145749A (en) * 2018-02-23 2019-08-29 日本電気株式会社 Electronic equipment and electronic device
US10772187B2 (en) 2018-02-23 2020-09-08 Nec Corporation Electronic equipment and electronic device
WO2021157469A1 (en) * 2020-02-07 2021-08-12 株式会社日立製作所 Electronic circuit device
JP2021125653A (en) * 2020-02-07 2021-08-30 株式会社日立製作所 Electronic circuit device
JP7354004B2 (en) 2020-02-07 2023-10-02 株式会社日立製作所 electronic circuit equipment

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