JP2000333405A - Air-bearing motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a motor provided with an air bearing, that can be reduced in size by equalizing the thickness of coil through enhancement of positional accuracy of coil without reduction in mechanical rigidity. SOLUTION: In an air bearing motor comprising a stator 10, a movable element 210 that can move with respect to the stator 10 and an air baring for supporting the movable element 10 with respect to the stator 10 on the noncontact basis, a core 3 is formed in the axial direction of a core 11, by toroidal winding of wire material to a slotless stator core 11. Each winding part is wound by laminating wire material in multiple layers with the noncrossing part formed to the stator core at the surface opposing the movable element, so that the crossing part and noncrossing part are separated at the adjacent layers and these are lined adjacently.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a motor, and more particularly to an air bearing motor having an air bearing structure.

[0002]

2. Description of the Related Art In various precision instruments such as optical instruments and electronic instruments, with high precision, high density and high integration, processing accuracy on the order of nanometers has been required for these components. Machine tools, steppers, and electron beam lithography systems that process these high-precision parts require very high-resolution accuracy. Generally, in these processing apparatuses and manufacturing apparatuses, positioning is performed by a positioning apparatus. The position control of the positioning device is often performed by a rotary servomotor or a linear motor controlled by the CNC. Therefore, in order to increase the processing accuracy of the component parts, it is necessary to control the rotary servomotor and the linear motor with high accuracy.

However, since a rotary servomotor or a linear motor usually has a torque ripple, it is necessary to reduce the torque ripple in order to control the motor with high accuracy.

[0004] The torque ripple can be roughly classified into a mechanically structured torque ripple and an electromagnetic torque ripple. For example, in the case of a rotary servomotor, frictional resistance generated in a bearing or the like of a rotor shaft causes torque ripple due to mechanical structure, and magnetic strain generated between a rotor and a stator causes electromagnetic torque ripple. .

Hitherto, in order to reduce mechanical structural torque ripples, there has been proposed an apparatus in which a frictional resistance is reduced by performing non-contact shaft support with an air bearing, a magnetic bearing, or the like.

[0006]

FIG. 17 is a schematic sectional view for explaining a conventional motor structure. As shown in FIG. 17, in the stator 110 of the motor, there is a winding portion projecting from the stator core 111 in the axial direction of the motor, which is called a winding ear, as indicated by reference numeral 104. This portion does not electromagnetically contribute to the rotor. Therefore, when the number of windings is increased, the size of the motor is increased, and there is a problem that the miniaturization is hindered. In the housing 131 on the support member side supporting the stator and the like,
A portion corresponding to the ear 104 of the winding, which is a protruding winding portion, is shaved to form a counterbore groove 132.
A configuration is known in which the size is reduced by placing the winding ears 104 in the inside 32.

However, there is a problem that the counterbore groove 132 lowers the mechanical rigidity of the motor. In particular,
In the air bearing structure, the gap 140b between the rotor 120 and the stator 110, the rotor 140 and the housing 13
Since the gas is supplied to the gap 140a between the stator 110 and the rotor 110, the rotor 110 is supported in a non-contact manner, so that the stator 110 and the housing 131 receive outward forces Fb and Fa by the supplied gas. This force Fb,
Due to Fa, stress concentration occurs near the counterbore groove 132 of the housing 131 (around A in FIG. 17), and strain occurs. This strain changes the gap spacing,
If the support of the rotor 120 becomes unstable or the strain increases, the housing 131 may be damaged.

Therefore, the conventional air bearing motor employs a configuration in which the thickness of the housing is increased in order to increase the mechanical rigidity, which is a factor that makes it difficult to reduce the size of the air bearing motor.

Therefore, the present invention solves the conventional problems,
It is an object of the present invention to provide an air bearing motor that can be reduced in size without increasing mechanical rigidity by increasing the positional accuracy of the windings to make the windings uniform in thickness.

[0010]

SUMMARY OF THE INVENTION The present invention comprises a stator,
In an air bearing motor including a movable element movable with respect to the stator and an air bearing that supports the movable element in a non-contact manner with respect to the stator, a wire rod is wound in a toroidal shape around a slotless stator core, and the wire is wound in an axial direction of the core. The windings are formed in such a manner that each winding portion divides a crossing portion and a non-crossing portion between adjacent layers, and is wound by stacking wires in multiple layers so as to be aligned adjacent to each other. The stator core is formed on a surface facing the movable element.

[0011] Here, the toroidal winding is such that, when the wire is wound while being spirally rotated, the wire intersects the wound wire in one direction in which the winding is formed by the winding operation. In this way, the winding accuracy in the tangential direction with respect to the surface of the stator core can be increased.

[0012] The winding of the aligned winding means forming the winding in layers and stacking and winding the formed layers, whereby the winding in the normal direction to the surface of the stator core is formed. Position accuracy can be improved. By increasing the positional accuracy of the winding in the normal direction, the thickness of the entire winding can be made uniform.

Accordingly, by winding the wire in a toroidal and aligned winding around the slotless stator core, it is possible to improve the positional accuracy of the winding in both the tangential direction and the normal direction with respect to the surface of the stator core. In addition to the above, it is possible to eliminate the protruding portion that hits the ear of the conventional winding, assuming that the entire winding has a uniform thickness.

According to the air bearing motor of the present invention, the stator does not have a projecting portion as in the prior art due to the winding structure, so that the housing does not need to form a counterbore groove, and the thickness is increased in response to stress concentration. No need to thicken. Therefore, the thickness of the housing of the air bearing motor can be reduced, and the size of the housing can be reduced.

Further, by forming the winding with high positional accuracy in the tangential direction and the normal direction, the electric resistance and inductance of the winding can be made uniform, and a uniform magnetic field can be formed. It is also possible to achieve the effect.

In the toroidal winding, the same effect as that of a winding wound in a toroidal and aligned winding can be obtained by overlapping and winding the wires at a constant winding pitch. .

Further, the stator may have a configuration in which a resin mold is provided on a radial surface facing the rotor, and the rotor may have a configuration in which a resin mold is provided on the radial surface facing the stator. The uneven surface can be shaped and the air pressure can be made uniform to enable stable support.

A radial surface between the stator and the rotor;
By providing a mechanism for supplying gas to the gap between the thrust surface between the rotor and the housing, the bearing area can be increased, the rigidity of the bearing can be increased, and the rotor can be stably supported.

[0019]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a schematic sectional view for explaining an air bearing motor of the present invention, and shows a rotary motor as an example. In FIG. 1, in an air bearing motor 1, a rotor 20 having a shaft 30 attached thereto rotates with respect to a stator 10. Stator 1
Reference numeral 0 denotes a configuration including a winding 3 in which the stator core 11 and the wire are wound in a toroidal and aligned winding. The air bearing supplies a gas such as air to a gap between the rotor 20 and the stator 10 and a gap 40 between the rotor 20 and the housing 31, and the air pressure causes the rotor 20 to move relative to the stator 10 and the housing 31. Support without contact.

The air bearing motor according to the present invention has a protruding portion called a lug of a winding provided in a conventional stator by using a winding in which a wire is wound in a toroidal shape and aligned winding in the configuration of the stator. In this case, the length of the motor in the axial direction can be reduced, the thickness of the housing 31 can be reduced, and the size of the entire motor can be reduced.

Compressed air is supplied into the gap 40 by a mechanism (not shown). The compressed air is introduced through a passage (not shown) formed in the housing 31 for the thrust surface of the rotor, and the passage formed in the stator 10 and the winding (not shown) for the radial surface of the rotor. (Not shown).

Hereinafter, the structure of the stator used in the air bearing motor of the present invention will be described with reference to FIGS. 2 to 9 show an example in which the winding method of the present invention is applied to a stator of a three-phase AC servomotor. 2 to 5 are views of the winding 1 as viewed from the rotor side, FIG. 2 is a perspective view, FIG. 3 is a plan view as viewed from the rotor side, and FIGS.
It is sectional drawing of A. 6 to 9 are views of the winding 1 as viewed from the stator side, FIG. 6 is a perspective view, FIG. 7 is a plan view as viewed from the stator side, and FIGS. It is.

Printed circuit boards 12 and 13 are arranged in close contact with both end faces in the axial direction of the stator core 11, and the wire 2 is wound around the printed circuit boards 12 and 13 and the stator core 11 so as to wrap these together. I do.

In winding the wire 2, aligned winding is performed in a toroidal shape. In order to wind the wire 2 around the stator core 11 and the printed boards 12 and 13 in a toroidal shape, the wire 2 is wound around the stator core 11 and the printed boards 12 and 13.
13 while being spirally rotated in the axial direction. As shown in FIG. 3, the wire 2 is wound without intersecting each other by making the one layer in which the winding is formed by the winding operation into a toroidal shape.

After the winding of the wire 2 by one layer in the axial direction of the stator core 11 and the printed circuit boards 12 and 13 is completed, the wire 2 is folded back at the end, and is wound on the layer formed by the previous winding. I do. In the next layer, winding is performed in a toroidal shape as in the previous case. In this way, the winding is formed in layers, and the formed layers are stacked and wound to form an aligned winding. FIGS. 4 and 5 are diagrams for explaining this aligned winding. FIG. 4 shows a case where the wire 2a has a circular cross section. The wire 2a wound in a toroidal shape is disposed between the wires 2a between the layers, and the layers are sequentially stacked in the normal direction. FIG. 5 shows a case where the wire 2b is a rectangular wire having a rectangular cross section. The wire 2b wound in a toroidal shape forms each layer, and the layers are sequentially stacked in the normal direction. In this winding, if the adjacent wire 2b is wound such that the adjacent sides of the adjacent rectangular wire are parallel, a uniform magnetic field can be formed even at the end of the turn of the winding.

At this time, by appropriately determining the aspect ratio of each side of the cross section of the rectangular wire, it is possible to suppress an increase in the size of the entire winding. For example, by laminating rectangular wires so that the shorter sides are in the normal direction, the thickness in the entire normal direction can be reduced.

In the case of winding in a toroidal shape, in each layer in one direction in which the winding is formed by the winding operation, a portion where the wound wire material intersects is not formed, but the winding operation is folded back. When the next layer is wound, a portion where windings intersect between adjacent layers occurs. As shown in FIG. 6, the portion where the windings intersect is disposed on the side of the stator where the magnetic field formed by the stator is less affected by the rotation of the rotor. In FIG. 5, the intersection is located on the opposite side of the rotor. Moreover, it can also be arrange | positioned at the axial end surface side of a stator.

FIG. 7 is a view of the intersection of the windings viewed from the stator side. The angle of the windings with respect to the axial direction of the stator core differs between adjacent layers. 8 and 9 are diagrams for explaining the state of the aligned winding. FIG. 8 shows a case where the cross-sectional shape of the wire 2a is circular.
The wire 2a wound in a toroidal shape is disposed on the wire 2a between the layers, and the layers are sequentially stacked in the normal direction. FIG. 9 shows a case where the cross-sectional shape is a rectangular flat wire 2b, and the wire 2b wound in a toroidal shape forms each layer, and the layers are sequentially stacked in the normal direction.

According to the winding of the stator used in the air bearing motor of the present invention, the lugs formed in the conventional winding are not formed, so that the axial length of the motor can be suppressed and the size can be reduced. It can be carried out. Further, as shown in FIG. 1, the winding segment 3 can be housed in the motor without forming a counterbore groove in the housing 31.
Therefore, without increasing the thickness of the housing 31,
It can withstand the air pressure of the air bearing.

Next, an embodiment of the air bearing motor of the present invention will be described with reference to FIGS. Generally, the shape of the rotor of a rotary motor is classified into an outer type, an inner type, and a side type according to the purpose of use of the motor. The air bearing motor shown in FIG. 10 is a configuration example of an inner rotor type motor, the air bearing motor shown in FIG. 11 is a configuration example of an outer rotor type motor, and the air bearing motor shown in FIG. 12 is a configuration example of a side rotor type motor. It is an example. 13 to 15 show a configuration in which the stator faces the rotor on multiple sides.
14 is a configuration example using two surfaces, and FIG. 15 is a configuration example using three surfaces. FIG. 16 shows a configuration example applied to a linear motor.

The first embodiment shown in FIG. 10 is applied to an inner rotor type motor, and includes a rotor 20 and a shaft 3.
0 is provided inside the stator and is rotated about the rotation axis C. In the stator, printed boards 12 and 13 are arranged at both ends in the axial direction of a stator core 11, and a wire is wound around the stator core 11 and the printed boards 12 and 13 so as to be integrally wrapped to form a winding 3.
At least the surface of the winding 3 facing the rotor 20 is provided with a resin mold 14 and a gap 40 for an air bearing is provided.
Is shaped to a predetermined smoothness. The resin mold 14 can be provided around the entire winding 3.

The rotor 20 is formed by attaching a magnet 22 to a rotor core 21 and at least the stator 10
A resin mold 24 is applied to the surface facing the surface of the housing, and the inner wall surface of the gap 40 for the air bearing is shaped to a predetermined smoothness. The outer surfaces of the resin molds 14 and 24 can be shaped by polishing to obtain the required surface accuracy as an air bearing surface.

The compressed air for forming the air bearing is
The air is introduced from the air inlet 41 to the motor side. The compressed air is introduced into the air passage 42a formed in the housing 31.
Through the air passages 42b formed in the stator core 11 and the windings 3. In FIG.
The air passages 42a are formed on both sides of the housing 31 in the axial direction with the rotor 20 interposed therebetween.
The introduction of compressed air into the two thrust surfaces between them takes place.
Further, the air passage 42b is formed by the stator core 11 and the winding 3
, And penetrates to the rotor 20 side to introduce compressed air to a radial surface between the rotor 20 and the stator 10.
Thus, compressed air is introduced into the gap 40 between the rotor 20 and the housing 31 and the stator 10. By introducing the compressed air, the rotor 20 is supported in a non-contact manner with respect to the housing 31 and the stator 10.

The second embodiment shown in FIG. 11 is an outer rotor type motor in which a rotor 20 and a shaft 30 are provided outside a stator and rotated about a rotation axis C. The stator and the rotor of the second mode are the same as those of the first embodiment.
Can be the same as the embodiment. Therefore, the description here is omitted because it is duplicated.

The compressed air for forming the air bearing is
The air is introduced from the air inlet 41 to the motor side. The compressed air is introduced into the air passage 42a formed in the housing 31.
Through the air passages 42b formed in the stator core 11 and the windings 3. In FIG.
The air passages 42a are formed on both sides of the housing 31 in the axial direction with the rotor 20 interposed therebetween.
The introduction of compressed air into the two thrust surfaces between them takes place.
Further, the air passage 42b is formed by the stator core 11 and the winding 3
, And penetrates to the rotor 20 side to introduce compressed air to a radial surface between the rotor 20 and the stator 10.
Thus, compressed air is introduced into the gap 40 between the rotor 20 and the housing 31 and the stator 10.

Since the rotor 20 and the shaft 30 are arranged outside the housing 31, FIG.
, A communication portion 43 communicating with the gap 40 is formed between the housing 31 and the shaft 30.
Rotates relative to the housing 31 with the communicating portion 43 interposed therebetween. By introducing the compressed air, the rotor 20 is supported in a non-contact manner with respect to the housing 31 and the stator 10.

A third embodiment shown in FIG. 12 is a side rotor type motor in which a rotor 20 and a shaft 30 and a stator are arranged along an axis of a rotation axis C, and the rotor 20 and the stator 10 are , And rotates about a rotation axis C. Third
The stator and the rotor according to the embodiment may be the same as those according to the first embodiment. Therefore, the description here is omitted because it is duplicated.

The compressed air for forming the air bearing is
The air is introduced from the air inlet 41 to the motor side. The compressed air is introduced into the air passage 42a formed in the housing 31.
Through the air passages 42b formed in the stator core 11 and the windings 3. In FIG.
One of the air passages 42a communicates with the air passage 42b, and the other is formed in the side direction of the rotor 20 and in the opposite direction across the rotor 20. The air passage 42 a provided on the side surface of the rotor 20 introduces compressed air into the gap 40 between the rotor 20 and the housing 31 on the radial surface side. Further, an air passage 42a provided in the opposite direction with respect to the rotor 20 is provided.
Is connected to the rotor 20 and the housing 31 via the shaft 30.
Compressed air is introduced into the gap 40 on one thrust surface side.

The air passage 42b is connected to the stator core 11
And through the winding 3 to the rotor 20 side to introduce compressed air to the other thrust surface between the rotor 20 and the stator 10. Thus, compressed air is introduced into the gap 40 between the rotor 20 and the housing 31 and the stator 10. By introducing the compressed air, the rotor 20 is supported in a non-contact manner with respect to the housing 31 and the stator 10.

In the fourth, fifth, and sixth embodiments, the stator is opposed to the rotor on multiple sides. When the stator core is, for example, a quadrangle, an electromagnetic circuit can be formed on three of the four surfaces except for one surface for fixing the stator to be the facing surface of the rotor. Thereby, a large torque can be formed.

The fourth embodiment shown in FIG. 13 is a configuration using two surfaces of the stator core. The two opposing surfaces of the stator core are arranged along the axial direction of the rotation axis C, and each surface of the stator core is The rotor is arranged so as to sandwich the magnetic pole surface of the rotor, and is rotated about a rotation axis C.

Accordingly, the rotor 20 sandwiches the stator core between two opposing magnetic poles, and generates torque between each magnetic pole. The rotor is connected to the stator core by 2
Between the two magnetic poles and the shaft 30, and is supported by compressed air introduced into a total of three gaps 40. The stator and the rotor of the fourth embodiment can be the same as those of the first embodiment. Therefore, the description here is omitted because it is duplicated.

The compressed air for forming the air bearing is
The air is introduced from the air inlet 41 to the motor side. The compressed air is introduced into the air passage 42a formed in the housing 31.
Through the air passages 42b formed in the stator core 11 and the windings 3. In FIG.
The air passage 42a passes through the housing 31 and passes through the air passage 4
2b. The air passage 42b is divided into three opposing magnetic pole faces of the rotor and the three directions of the shaft 30 and compressed into a total of three gaps 40 between the stator core and the two magnetic poles and between the stator core and the shaft 30. Introduce air. By introducing the compressed air, the rotor 20 is supported in a non-contact manner with respect to the housing 31 and the stator 10.

In a fifth embodiment shown in FIG.
In this configuration, one surface of each of the two stator cores is used. In this configuration, the electromagnetic circuits of the two stator cores are arranged to face each other along the axial direction of the rotation axis C, and the magnetic pole faces of the rotor are interposed between the opposed electromagnetic circuits of the two stator cores. The rotation is performed about the rotation axis C.

Therefore, the two stators sandwich one stator core and generate torque between the two opposing surfaces.
The rotor is supported by compressed air introduced into a total of three gaps 40 between the two stator cores and the housing 31. Note that the stator and the rotor of the fifth embodiment can be the same as those of the first embodiment. Therefore, the description here is omitted because it is duplicated.

The compressed air for forming the air bearing is
The air is introduced from the air inlet 41 to the motor side. The compressed air is introduced into the air passage 42a formed in the housing 31.
Through the air passages 42b formed in the stator core 11 and the windings 3. In FIG.
The air passage 42a passes through the housing 31 and passes through the air passage 4
2b, and is connected to the gap on the thrust surface side of the rotor 20. The air passage 42b formed in each stator core introduces compressed air into the gap 40 between the stator core and the magnetic pole. The introduction of the compressed air causes the rotor 20 to move the housing 31 and the stator 10
Is supported without contact.

The sixth embodiment shown in FIG. 15 is a configuration using three surfaces of the stator core. The two opposing surfaces of the stator core are arranged along the axial direction of the rotation axis C. Thus, the magnetic pole surface of the rotor is arranged so as to surround it from three directions, and the rotor is rotated about a rotation axis C.

Therefore, the rotor 20 surrounds the stator core by three magnetic poles having a U-shaped cross section and generates torque with each magnetic pole. Further, the rotor 20 is supported by compressed air introduced into a total of three gaps 40 between two magnetic poles facing each other and a magnetic pole on the shaft 30 side with respect to the stator core. In addition,
The stator and the rotor of the sixth embodiment can be the same as those of the first embodiment. Therefore, the description here is omitted because it is duplicated.

The compressed air for forming the air bearing is
The air is introduced from the air inlet 41 to the motor side. The compressed air is introduced into the air passage 42a formed in the housing 31.
Through the air passages 42b formed in the stator core 11 and the windings 3. In FIG.
The air passage 42a passes through the housing 31 and passes through the air passage 4
2b. The air passage 42b is divided into three opposing magnetic pole faces of the rotor and the three directions of the shaft 30 and compressed into a total of three gaps 40 between the stator core and the two magnetic poles and between the stator core and the shaft 30. Introduce air.

The introduction of the compressed air causes the rotor 20
Are supported in a non-contact manner with respect to the housing 31 and the stator 10. A seventh embodiment shown in FIG. 16 is an example of a configuration applied to a linear motor, in which a stator 10 and a housing 31 are arranged in a moving direction, and a movable part 50 for Is to be moved.

Therefore, the movable portion 50 is movably disposed in a U-shape arrangement of the stator 31 and the housing 31 opposed to each other, and the torque between the magnetic pole provided on the movable portion 50 and the stator side. Occurs. Further, the movable portion 50 is supported by compressed air introduced into a total of three gaps 40 between the stator core 11 and the housing 31 that is arranged to face the movable portion 50.

Incidentally, the stator and the movable portion of the seventh embodiment can be the same as those of the first embodiment. Therefore, the description here is omitted because it is duplicated. In addition, the movable core 50 corresponds to the rotor core 21, and the magnet 52 is the magnet 22.
, And the resin mold 54 corresponds to the resin mold 24.

The compressed air for forming the air bearing is
The air is introduced from the air inlet 41 to the motor side. The compressed air is introduced into the air passage 42a formed in the housing 31.
Through the air passages 42b formed in the stator core 11 and the windings 3. In FIG.
The air passage 42a passes through the housing 31 and passes through the air passage 4
2b, and is formed in the direction of the two side surfaces of the moving part 50, and introduces compressed air into the gap 40 between the moving part 50 and the housing 31. The air passage 42b introduces compressed air into the gap 40 between the stator core side and the magnetic pole on the moving section 50 side through the stator core 11 and the winding 3. Due to the introduction of the compressed air, the moving unit 50 is supported without contact with the housing 31 and the stator 10.

In the above embodiment, the case where the number of the stator cores is four has been described. However, the number of core shapes can be arbitrarily determined. Also, by adjusting the number of stators and shifting the phase of the current supplied to each stator to adjust the magnetic field distribution formed by the electromagnetic circuit,
Rotation and movement can be controlled smoothly.

[0055]

As described above, according to the present invention,
It is possible to provide an air bearing motor including an air bearing that can be reduced in size without increasing the positional accuracy of the winding to make the thickness of the winding uniform and reduce mechanical rigidity.

[Brief description of the drawings]

FIG. 1 is a motor cross-sectional view for explaining an outline of an air bearing motor of the present invention.

FIG. 2 is a perspective view of a winding applied to the air bearing motor of the present invention as viewed from a rotor.

FIG. 3 is a plan view of a winding applied to the air bearing motor of the present invention as viewed from a rotor side.

FIG. 4 is a sectional view taken along line AA of a winding applied to the air bearing motor of the present invention.

FIG. 5 is a sectional view taken along line AA of a winding applied to the air bearing motor of the present invention.

FIG. 6 is a perspective view of a winding applied to the air bearing motor of the present invention as viewed from a stator side.

FIG. 7 is a plan view of a winding applied to the air bearing motor of the present invention as viewed from a stator side.

FIG. 8 is a sectional view taken along line BB of the winding applied to the air bearing motor of the present invention.

FIG. 9 is a sectional view taken along line BB of the winding applied to the air bearing motor of the present invention.

FIG. 10 is a cross-sectional view for explaining a configuration example of an inner rotor type motor of the air bearing motor of the present invention.

FIG. 11 is a cross-sectional view for explaining a configuration example of an outer rotor type motor of the air bearing motor of the present invention.

FIG. 12 is a cross-sectional view illustrating a configuration example of a side rotor type motor of the air bearing motor of the present invention.

FIG. 13 is a cross-sectional view for explaining a configuration example using two surfaces of a stator in the air bearing motor of the present invention.

FIG. 14 is a cross-sectional view for explaining a configuration example using two stators in the air bearing motor of the present invention.

FIG. 15 is a cross-sectional view for explaining a configuration example using three surfaces of a stator in the air bearing motor of the present invention.

FIG. 16 is a cross-sectional view illustrating a configuration example in which the air bearing motor of the present invention is applied to a linear motor.

FIG. 17 is a schematic sectional view for explaining a conventional motor structure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Motor 2, 2a, 2b Wire 3,103 Winding 4 Winding start contact 5 Winding end contact 6 Wiring 10,110 Stator 11,111 Stator core 12,13 Printed circuit board 14,24,54 Resin mold 20 Rotor 21 Rotor core 22 , 52 Magnet 30, 130 Shaft 31, 131 Housing 40, 140a, 140b Gap 41 Air inlet 42a, 42b Air passage 50 Movable part 51 Movable part core 104 Winding ear 132 Counterbore groove

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H02K 3/44 H02K 3/44 B 5/16 5/16 Z 16/02 16/02 16/04 16 / 04

Claims (4)

[Claims] 1. An air bearing motor comprising a stator, a movable element movable with respect to the stator, and an air bearing which supports the movable element with respect to the stator in a non-contact manner. A winding formed in the axial direction of the core by winding, wherein each winding portion divides a crossing portion and a non-crossing portion between adjacent layers and overlaps the wires in multiple layers so as to be aligned adjacent to each other. Wherein the non-intersecting portion is formed on a surface of the stator core facing the movable element. 2. The air bearing motor according to claim 1, wherein the stator has a resin mold on a radial surface facing the rotor. 3. The air bearing motor according to claim 1, wherein the rotor includes a resin mold on a radial surface facing the stator. 4. The air bearing has a mechanism for supplying gas to a gap between a radial surface between the stator and the rotor and a thrust surface between the rotor and the housing.
An air bearing motor as described.