JP2000319030A - Formation of glass substrate - Google Patents

Formation of glass substrate

Info

Publication number
JP2000319030A
JP2000319030A JP11129115A JP12911599A JP2000319030A JP 2000319030 A JP2000319030 A JP 2000319030A JP 11129115 A JP11129115 A JP 11129115A JP 12911599 A JP12911599 A JP 12911599A JP 2000319030 A JP2000319030 A JP 2000319030A
Authority
JP
Japan
Prior art keywords
glass plate
stage
glass substrate
inner peripheral
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11129115A
Other languages
Japanese (ja)
Other versions
JP4123631B2 (en
Inventor
Yuichi Watanabe
裕一 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP12911599A priority Critical patent/JP4123631B2/en
Publication of JP2000319030A publication Critical patent/JP2000319030A/en
Application granted granted Critical
Publication of JP4123631B2 publication Critical patent/JP4123631B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/04Cutting or splitting in curves, especially for making spectacle lenses
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a substrate for a magnetic hard disk which is short in processing tact and is excellent in the concentricity between the outer periphery and in the inner periphery of the doughnut-shaped glass substrate by processing a glass sheet in order of a stage for punching an inner peripheral hole portion, an alignment stage for aligning the center of this portion to the center of rotation a stage for putting an outer peripheral cutting line, and a stage for cracking the outer side of an outer peripheral cutting line. SOLUTION: The glass sheet 1 is processed in order of the stage for punching the portion which is formed as the inner peripheral hole 2 of the doughnut-shaped glass substrate by grinding with a core drill from the glass sheet 1, the alignment stage for aligning the center of the inner peripheral hole 2 to the center of rotation of a scribing shaft, the stage for putting the outer peripheral cutting line 3 by rotating the scribing shaft while pressing the cutter arranged in a position apart a prescribed distance from the center of rotation of the scribing shaft to the glass sheet and the stage for cracking the glass sheet on an outer side by applying bending moment around the outer peripheral cutting line 3, by which the glass substrate 5 for the magnetic hard disk is produced. The processing accuracy of the glass substrate may be improved and the shortening of the production process is made possible.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、主にコンピュータ
の情報記録媒体として使用される磁気ハードディスク用
の基板として用いられるガラス基板の作成方法に関し、
特に、ガラス基板の加工精度を向上させることにより、
製造工程の短縮を可能としたガラス基板の作成方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a glass substrate used as a substrate for a magnetic hard disk mainly used as an information recording medium of a computer.
In particular, by improving the processing accuracy of the glass substrate,
The present invention relates to a method for manufacturing a glass substrate which enables a reduction in a manufacturing process.

【0002】[0002]

【従来の技術】近年のコンピュータの普及に伴い、作成
されるデータの高容量化、高速化が進展している。この
ような大量の情報を高速に記録/読出すことのできる情
報記録媒体としての磁気ハードディスクの開発において
は、従来のアルミニウム金属を用いた基板の代りに、硬
度や平滑性に優れるガラス基板を用いる動きが活発にな
っている。特に、フロート法により成形されたガラス板
は、平坦性や平滑性に優れ、また、大規模生産に適して
おりコスト面でも優位となる。
2. Description of the Related Art With the spread of computers in recent years, the capacity and speed of created data has been increasing. In the development of a magnetic hard disk as an information recording medium capable of recording / reading such a large amount of information at high speed, a glass substrate having excellent hardness and smoothness is used instead of a conventional substrate using aluminum metal. The movement is brisk. In particular, a glass sheet formed by the float method has excellent flatness and smoothness, is suitable for large-scale production, and is advantageous in terms of cost.

【0003】従来より、ガラス板を加工して、ドーナツ
状ガラス基板を作成する方法は各種の態様が採用されて
いるが、大別すると、コアドリルを用いる研削加工と、
ホイールチップ等のカッタを使用する割断法が代表的で
ある。コアドリルを用いる研削加工は、加工精度が良い
反面、装置コストが高いという問題がある。一方、ホイ
ールチップ等のカッタを使用する割断法は、装置コスト
が比較的安価である利点があるが、内周孔を抜くのに工
夫を要するという問題がある。
[0003] Conventionally, various methods have been adopted for producing a donut-shaped glass substrate by processing a glass plate.
A cutting method using a cutter such as a wheel tip is typical. Grinding using a core drill has a problem that the processing accuracy is high, but the equipment cost is high. On the other hand, the cleaving method using a cutter such as a wheel tip has an advantage that the apparatus cost is relatively low, but has a problem that a device is required to remove the inner peripheral hole.

【0004】また、上記の2種類の方法を組合わせた加
工法も一部実用化されている。すなわち、ドーナツ状ガ
ラス基板の外周部の加工は、ホイールチップ等のカッタ
を使用する割断法を使用し、内周孔の加工は、コアドリ
ルを用いる研削加工を使用する組合わせである。この方
法では、内周孔の加工は、コアドリルを用いるので、該
内周孔を抜くのに工夫を要せず、外周部の加工は、ホイ
ールチップ等のカッタを使用する安価な割断法を使用で
きる。
[0004] A processing method combining the above two types of methods has also been partially put into practical use. That is, the outer peripheral portion of the donut-shaped glass substrate is processed by a cutting method using a cutter such as a wheel chip, and the inner peripheral hole is processed by a grinding process using a core drill. In this method, a core drill is used for the processing of the inner peripheral hole, so there is no need to devise to remove the inner peripheral hole, and for the outer peripheral part, an inexpensive cutting method using a cutter such as a wheel tip is used. it can.

【0005】[0005]

【発明が解決しようとする課題】現在一部実用化されて
いる上記方法は、まずドーナツ状ガラス基板の外周部の
加工をホイールチップ等のカッタを使用する割断法で行
い、その後に割断された外周形状よりガラス基板の中心
を計算し、該中心を基準にコアドリルで内周孔の加工を
行う方法である。
According to the above-mentioned method which has been partially put into practical use, the outer peripheral portion of a donut-shaped glass substrate is first processed by a cutting method using a cutter such as a wheel chip, and then the cutting is performed. In this method, the center of the glass substrate is calculated from the outer peripheral shape, and the inner peripheral hole is machined with a core drill based on the center.

【0006】しかし、この方法では割断された外周部の
断面がガラス基板の面に対して垂直な形状にならないこ
とが多く、このような外周形状よりガラス基板の中心を
計算した場合、誤差を生じる。このように計算された中
心基準でコアドリルの内周孔加工を行った結果、ドーナ
ツ状ガラス基板の外周と内周孔の同心度に劣り、後加工
であるチャンファーリング(エッジ部面取り加工)での
取り代(加工量)を大きくしなければならない。
However, in this method, the cross section of the cut outer peripheral portion often does not have a shape perpendicular to the surface of the glass substrate, and an error occurs when the center of the glass substrate is calculated from such an outer peripheral shape. . As a result of processing the inner peripheral hole of the core drill on the basis of the center calculated in this way, the concentricity of the outer periphery and the inner peripheral hole of the donut-shaped glass substrate is inferior, and the chamfering (edge chamfering) which is post-processing is performed. The machining allowance (processing amount) must be increased.

【0007】本発明は、上記従来の工程の不具合を解決
すべくなされたものであり、加工タクトが短く、かつド
ーナツ状ガラス基板の外周と内周孔の同心度に優れた磁
気ハードディスク用ガラス基板の作成方法の提供を目的
とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned disadvantages of the conventional process, and has a short processing tact time and is excellent in concentricity between the outer and inner peripheral holes of a donut-shaped glass substrate. The purpose is to provide a method for creating

【0008】[0008]

【課題を解決するための手段】本発明は、ガラス板を加
工して、ドーナツ状ガラス基板を作成する方法におい
て、ガラス板から、前記ドーナツ状ガラス基板の内周孔
となる部分をコアドリルによる研削加工で抜く工程と、
前記内周孔が抜かれたガラス板の、該内周孔の孔中心
を、ガラススクライバのスクライブ軸の回転中心に一致
させるアラインメント工程と、前記スクライブ軸に設置
され、スクライブ軸の回転中心から所定距離離れた位置
に配されたカッタをガラス板に押圧しながらスクライブ
軸を回転させ、ガラス板に外周切り線を入れる工程と、
前記外周切り線の回りに曲げモーメントを加え、外周切
り線の外側のガラス板を割断する工程、の順でガラス板
を加工することを特徴とするガラス基板の作成方法を提
供する。上記方法を採ることで、ガラス基板の加工精度
が向上でき、また製造工程の短縮が可能となる。
According to the present invention, there is provided a method of forming a donut-shaped glass substrate by processing a glass plate, wherein a portion to be an inner peripheral hole of the donut-shaped glass substrate is ground from the glass plate by a core drill. The process of extracting by processing,
An alignment step of aligning the center of the inner peripheral hole of the glass plate with the inner peripheral hole with the rotation center of the scribe axis of the glass scriber, and a predetermined distance from the rotation center of the scribe axis provided on the scribe axis. A step of rotating a scribe shaft while pressing a cutter arranged at a distant position against a glass plate, and making a perimeter cut line on the glass plate,
A method for producing a glass substrate, characterized by processing a glass plate in the order of a step of applying a bending moment around the outer perimeter cut line and cutting the glass plate outside the outer perimeter cut line. By employing the above method, the processing accuracy of the glass substrate can be improved, and the manufacturing process can be shortened.

【0009】[0009]

【発明の実施の形態】以下、本発明の実施の形態を図面
を使用して説明する。図1(a)〜(d)は、ガラス板
から磁気ハードディスク用ガラス基板を加工する工程を
示す。(a)は、所定寸法に切断された素板であるガラ
ス板1である。(b)は、ガラス板1の内周孔2を、図
2、3のようにコアドリル8を使用して研削加工で抜
き、内周孔2が形成された状態である。(c)は、図
4、5のようにガラススクライバ14によりガラス板1
に外周切り線3が入れられた状態である。(d)は、外
周切り線3の外側のガラス板が割断され、磁気ハードデ
ィスク用ガラス基板5が形成された状態である。それぞ
れの工程を以下に詳説する。
Embodiments of the present invention will be described below with reference to the drawings. FIGS. 1A to 1D show steps of processing a glass substrate for a magnetic hard disk from a glass plate. (A) is a glass plate 1 which is a raw plate cut to a predetermined size. 2B shows a state in which the inner peripheral hole 2 of the glass plate 1 is cut out by grinding using a core drill 8 as shown in FIGS. 4C, the glass plate 1 is moved by the glass scriber 14 as shown in FIGS.
Is a state in which the outer perimeter cut line 3 is inserted. (D) is a state in which the glass plate outside the outer perimeter line 3 is cut, and the magnetic hard disk glass substrate 5 is formed. Each step is described in detail below.

【0010】図2は、図1のガラス板の内周孔2をコア
ドリル8を使用して研削加工で抜く工程を示す。ワーク
ステージ11上にガラス板1が固定され、コアドリル8
を回転させるとともに、コアドリル8の軸中心より研削
液12を吐出させながらガラス板1に切り込み、内周孔
2が抜かれる。
FIG. 2 shows a process of punching the inner peripheral hole 2 of the glass plate of FIG. 1 by grinding using a core drill 8. The glass plate 1 is fixed on the work stage 11 and the core drill 8
Is rotated, and while the grinding fluid 12 is discharged from the axis of the core drill 8, the cutting is performed on the glass plate 1, and the inner peripheral hole 2 is removed.

【0011】コアドリル8の先端部には、メタルボンド
ダイヤモンド層9が形成されている。また、メタルボン
ドダイヤモンド層9には数箇所のスリット状の切込み1
0が形成されており、研削液の逃げがスムーズになるよ
うに図っている。
At the tip of the core drill 8, a metal bond diamond layer 9 is formed. In addition, several slit-shaped cuts 1 are formed in the metal bond diamond layer 9.
0 is formed so that the escape of the grinding fluid is smooth.

【0012】ワークステージ11の上面は、フッ素樹脂
のコーティング、または軟質な合成樹脂のフィルム、た
とえばポリ塩化ビニル製保護フィルム等の緩衝層が設け
られていることが好ましい。これにより、ガラスの微粉
(カレット)によるガラス板への押しキズが防げる。
The upper surface of the work stage 11 is preferably provided with a buffer layer such as a fluororesin coating or a soft synthetic resin film such as a polyvinyl chloride protective film. This can prevent the fine powder (cullet) of the glass from being pressed against the glass plate.

【0013】ガラス板1をワークステージ11に固定す
る方法は、真空吸着、治具による固定等各種考えられる
が、確実に固定がなされればよく、特に限定されない。
また、ワークステージ11の上面には、コアドリル8が
ガラス板1を貫通したときに、コアドリル8がワークス
テージ11を削らないよう、逃げの溝または貫通孔を形
成しておくのが好ましい。
There are various methods for fixing the glass plate 1 to the work stage 11, such as vacuum suction and fixing with a jig. However, the method is not particularly limited as long as it is securely fixed.
Further, it is preferable to form an escape groove or a through hole on the upper surface of the work stage 11 so that the core drill 8 does not cut the work stage 11 when the core drill 8 penetrates the glass plate 1.

【0014】図3は、ガラス板1の内周孔2をコアドリ
ル8を使用して研削加工で抜く工程の他の例を示す。
(a)に示されるように、コアドリル8がガラス板1の
板厚分の大半の加工を行った時点で一旦加工を停止し、
ワークステージ11を180度反転させた後、(b)に
示されるように、コアドリル8がガラス板1の板厚分の
残りの部分の加工を行い、ガラス板1の反対側より貫通
させる。このような工程を採ることで、貫通時にガラス
板1に生じるチッピング(カケ)の発生を軽減または防
止できる。なお、ガラス板1は吸引溝13により真空吸
着されワークステージ11に固定される。
FIG. 3 shows another example of a process of removing the inner peripheral hole 2 of the glass plate 1 by grinding using a core drill 8.
As shown in (a), when the core drill 8 has machined most of the thickness of the glass sheet 1, the machining is temporarily stopped,
After inverting the work stage 11 by 180 degrees, the core drill 8 processes the remaining portion corresponding to the thickness of the glass plate 1 as shown in FIG. By adopting such a process, it is possible to reduce or prevent the occurrence of chipping (chip) generated in the glass plate 1 at the time of penetration. In addition, the glass plate 1 is vacuum-sucked by the suction groove 13 and fixed to the work stage 11.

【0015】図4は、内周孔2が抜かれたガラス板1
の、内周孔2の孔中心を、ガラススクライバ14のスク
ライブ軸28の回転中心に一致させるアラインメント工
程を示す。ガラススクライバ14は、図示しない架台、
ワーク吸着ステージ16、躯体26、スクライブ軸2
8、位置決めシャフト24等より構成される。
FIG. 4 shows a glass plate 1 from which an inner peripheral hole 2 has been removed.
4 shows an alignment step of making the center of the inner peripheral hole 2 coincide with the rotation center of the scribe shaft 28 of the glass scriber 14. The glass scriber 14 includes a mount (not shown),
Work suction stage 16, frame 26, scribe shaft 2
8, the positioning shaft 24 and the like.

【0016】ガラス板1をワーク吸着ステージ16にセ
ットし、概略位置決めをした後、真空ポンプ22からの
真空吸引によりガラス板1を固定する。このときの真空
圧は低く設定し、後述するアラインメント時にガラス板
1がワーク吸着ステージ16上を動けるようにしてお
く。真空圧の調整は減圧バルブ20で行う。なお、ワー
ク吸着ステージ16には多数の吸引孔18、18…が設
けられている。
After the glass plate 1 is set on the work suction stage 16 and roughly positioned, the glass plate 1 is fixed by vacuum suction from the vacuum pump 22. The vacuum pressure at this time is set low so that the glass plate 1 can move on the work suction stage 16 at the time of alignment described later. The adjustment of the vacuum pressure is performed by the pressure reducing valve 20. The work suction stage 16 is provided with a large number of suction holes 18.

【0017】次に、ワーク吸着ステージ16の内周孔に
下より円錐台形状の位置決めシャフト24を上昇させ、
ガラス板1の内周孔2の中心がシャフト24の軸中心
(スクライブ軸28の軸中心とも一致させてある)と一
致するべく位置合せする。ついで、ワーク吸着ステージ
16の真空吸引圧を減圧バルブ20で切り替え、吸引を
強くすることでガラス板1の固定を確実にする。なお、
本実施例では、位置決め手段として円錐台形状の位置決
めシャフト24を使用したが、これに限定されず、たと
えば、旋盤やボール盤のチャックに使用されている三つ
爪チャックのような治具を使用して芯出しする方法でも
よい。
Next, a frusto-conical positioning shaft 24 is raised from below into the inner peripheral hole of the work suction stage 16,
Alignment is performed so that the center of the inner peripheral hole 2 of the glass plate 1 matches the axis center of the shaft 24 (also coincident with the axis center of the scribe shaft 28). Next, the vacuum suction pressure of the work suction stage 16 is switched by the pressure reducing valve 20, and the suction is strengthened to secure the glass plate 1 securely. In addition,
In this embodiment, the positioning shaft 24 having the shape of a truncated cone is used as the positioning means. However, the present invention is not limited to this. A centering method may be used.

【0018】ガラス板1に切り線を入れる方法は、通常
用いられている円形ガラス用スクライバと同様であり、
スクライブ軸28に設置され、スクライブ軸28の回転
中心から所定距離離れた位置に配されたカッタ30をガ
ラス板1に押圧させながらスクライブ軸28を略360
度回転させ、ガラス板1に外周切り線3(図1(c)参
照)を入れる方法であり、図5に示される。なお、図5
では、吸引孔18、18…の図示が省略してある。
The method of making a cut line in the glass plate 1 is the same as that of a commonly used circular glass scriber.
The scribe shaft 28 is moved to approximately 360 while the cutter 30 installed on the scribe shaft 28 and arranged at a predetermined distance from the rotation center of the scribe shaft 28 is pressed against the glass plate 1.
This is a method of making an outer perimeter cut line 3 (see FIG. 1 (c)) in the glass plate 1 by rotating the glass plate 1 by an angle, as shown in FIG. FIG.
In the drawing, the illustration of the suction holes 18 is omitted.

【0019】カッタ30には、ガラス板の割断時に通常
用いられている、ホイールカッタ、単石のダイヤモンド
からなるダイヤモンドカッタ等が使用できる。ホイール
カッタには、略算盤玉形状の超鋼製のホイールチップ3
2が使用される。ホイールチップ32の先端角度は各種
のものがあるが、ガラス板の組成、板厚等に応じて最適
のものが選択される。
As the cutter 30, a wheel cutter, a diamond cutter made of a single stone diamond, or the like, which is usually used when cutting a glass sheet, can be used. A wheel tip 3 made of super-steel, which has a roughly abacus ball shape, is used for the wheel cutter.
2 are used. There are various types of tip angles of the wheel chips 32, and the most suitable one is selected according to the composition and thickness of the glass plate.

【0020】外周切り線3が形成された後に外周切り線
3の回りに曲げモーメントを加え、外周切り線3の外側
のガラス板を割断する方法は、ガラス板1をワーク吸着
ステージ16から取り外し、手折りする方法であって
も、ガラス板1をワーク吸着ステージ16に固定したま
まで、外周切り線3の外側の数箇所に押し下げバー等を
当て、曲げモーメントを加えて折る方法であってもよ
く、特に限定されない。
A method of applying a bending moment around the outer perimeter line 3 after the outer perimeter line 3 is formed and cutting the glass plate outside the outer perimeter line 3 is as follows. Even if it is a method of manual folding, a method of applying a bending moment and applying a bending moment to several places outside the outer perimeter cut line 3 with the glass plate 1 fixed to the work suction stage 16 and folding the glass plate 1 may be used. Is not particularly limited.

【0021】[0021]

【発明の効果】本発明により、同心度の優れたガラス基
板が得られ、ガラス基板の加工精度が向上できる。ま
た、これにより後加工であるチャンファーリング(エッ
ジ部面取り加工)での取り代(加工量)を少なくでき、
その結果、製造工程を短縮できる。
According to the present invention, a glass substrate having excellent concentricity can be obtained, and the processing accuracy of the glass substrate can be improved. In addition, this makes it possible to reduce the machining allowance (machining amount) in the chamfering (edge chamfering) which is the post-processing,
As a result, the manufacturing process can be shortened.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)〜(d)は、本発明のガラス板から磁気
ハードディスク用ガラス基板を加工する工程を示す図で
ある。
1 (a) to 1 (d) are views showing steps of processing a glass substrate for a magnetic hard disk from the glass plate of the present invention.

【図2】本発明の、ガラス板の内周孔をコアドリルを使
用して研削加工で抜く工程を示す説明図である。
FIG. 2 is an explanatory view showing a step of removing an inner peripheral hole of a glass plate by grinding using a core drill according to the present invention.

【図3】本発明の、ガラス板の内周孔をコアドリルを使
用して研削加工で抜く工程の他の例を示す説明図であ
り、(a)は、ガラス板の片面からコアドリルを切り込
む状態の断面図を示し、(b)は、ガラス板の反対面か
らコアドリルを切り込む状態の断面図を示す。
FIG. 3 is an explanatory view showing another example of the process of the present invention in which an inner peripheral hole of a glass plate is removed by grinding using a core drill, and FIG. 3 (a) shows a state in which the core drill is cut from one surface of the glass plate. (B) is a cross-sectional view of a state where a core drill is cut from the opposite surface of the glass plate.

【図4】本発明の、内周部が抜かれたガラス板の、内周
孔の孔中心を、ガラススクライバのスクライブ軸の回転
中心に一致させるアラインメント工程を示す説明図(断
面図)である。
FIG. 4 is an explanatory view (cross-sectional view) showing an alignment step of the present invention in which the center of the inner peripheral hole of the glass plate from which the inner peripheral portion is removed is coincident with the rotation center of the scribe shaft of the glass scriber.

【図5】本発明の、カッタをガラス板に押圧させながら
スクライブ軸を回転させ、ガラス板に切り線を入れる工
程を示す説明図(断面図)である。
FIG. 5 is an explanatory view (cross-sectional view) showing a step of rotating a scribe shaft while pressing a cutter against a glass plate and making a cut line in the glass plate according to the present invention.

【符号の説明】[Explanation of symbols]

1:ガラス板 2:内周孔 3:外周切り線 5:磁気ハードディスク用ガラス基板 7:内周孔加工機 8:コアドリル 9:メタルボンドダイヤモンド層 10:切込み 11:ワークステージ 12:研削液の流れ 13:吸引溝 14:ガラススクライバ 16:ワーク吸着ステージ 18:吸引孔 20:減圧バルブ 22:真空ポンプ 26:躯体 28:スクライブ軸 30:カッタ 32:ホイールチップ 1: glass plate 2: inner peripheral hole 3: outer peripheral cut line 5: glass substrate for magnetic hard disk 7: inner peripheral hole processing machine 8: core drill 9: metal bond diamond layer 10: cut 11: work stage 12: flow of grinding fluid 13: suction groove 14: glass scriber 16: work suction stage 18: suction hole 20: pressure reducing valve 22: vacuum pump 26: body 28: scribe shaft 30: cutter 32: wheel tip

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】ガラス板を加工して、ドーナツ状ガラス基
板を作成するガラス基板の作成方法において、 ガラス板から、前記ドーナツ状ガラス基板の内周孔とな
る部分をコアドリルによる研削加工で抜く工程と、 前記内周孔が抜かれたガラス板の、該内周孔の孔中心
を、ガラススクライバのスクライブ軸の回転中心に一致
させるアラインメント工程と、 前記スクライブ軸に設置され、スクライブ軸の回転中心
から所定距離離れた位置に配されたカッタをガラス板に
押圧しながらスクライブ軸を回転させ、ガラス板に外周
切り線を入れる工程と、 前記外周切り線の回りに曲げモーメントを加え、外周切
り線の外側のガラス板を割断する工程、 の順でガラス板を加工することを特徴とするガラス基板
の作成方法。
1. A method for producing a doughnut-shaped glass substrate by processing a glass plate, wherein a portion to be an inner peripheral hole of the donut-shaped glass substrate is removed from the glass plate by grinding with a core drill. An alignment step of aligning the hole center of the inner peripheral hole of the glass plate from which the inner peripheral hole has been removed with the rotation center of the scribe axis of the glass scriber. A step of rotating a scribe shaft while pressing a cutter disposed at a predetermined distance away from the glass plate, a step of cutting a perimeter cut line on the glass plate, and applying a bending moment around the perimeter cut line, A method for producing a glass substrate, characterized by processing the glass plate in the order of: cutting the outer glass plate.
JP12911599A 1999-05-10 1999-05-10 How to make a glass substrate Expired - Fee Related JP4123631B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12911599A JP4123631B2 (en) 1999-05-10 1999-05-10 How to make a glass substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12911599A JP4123631B2 (en) 1999-05-10 1999-05-10 How to make a glass substrate

Publications (2)

Publication Number Publication Date
JP2000319030A true JP2000319030A (en) 2000-11-21
JP4123631B2 JP4123631B2 (en) 2008-07-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP4123631B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003114501A (en) * 2001-10-04 2003-04-18 Konica Corp Silver halide photographic plate and method for producing the same
US7488145B2 (en) 2005-01-25 2009-02-10 Asahi Glass Company, Limited Method for manufacturing a doughnut-shaped glass substrate
JP2009280490A (en) * 2008-04-29 2009-12-03 Seagate Technology Llc Sheet-stack coring
CN101356124B (en) * 2006-03-24 2012-11-28 Hoya株式会社 Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk
JP2014001103A (en) * 2012-06-19 2014-01-09 Honda Motor Co Ltd Method for perforating glass substrate and perforation assistant tool
CN109968542A (en) * 2019-03-24 2019-07-05 荆门市亿美工业设计有限公司 The copper bar graphite bush making apparatus and oxygen-free copper bar of copper foil copper bar assembly line
CN112620692A (en) * 2020-12-07 2021-04-09 钟申爱 Auto-parts perforating device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003114501A (en) * 2001-10-04 2003-04-18 Konica Corp Silver halide photographic plate and method for producing the same
US7488145B2 (en) 2005-01-25 2009-02-10 Asahi Glass Company, Limited Method for manufacturing a doughnut-shaped glass substrate
CN101356124B (en) * 2006-03-24 2012-11-28 Hoya株式会社 Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk
JP2009280490A (en) * 2008-04-29 2009-12-03 Seagate Technology Llc Sheet-stack coring
JP2012236765A (en) * 2008-04-29 2012-12-06 Seagate Technology Llc Method and device for producing glass object
JP2014001103A (en) * 2012-06-19 2014-01-09 Honda Motor Co Ltd Method for perforating glass substrate and perforation assistant tool
CN109968542A (en) * 2019-03-24 2019-07-05 荆门市亿美工业设计有限公司 The copper bar graphite bush making apparatus and oxygen-free copper bar of copper foil copper bar assembly line
CN112620692A (en) * 2020-12-07 2021-04-09 钟申爱 Auto-parts perforating device
CN112620692B (en) * 2020-12-07 2023-12-19 长春恒兴集团有限公司 Auto-parts perforating device

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