JP2000285833A - Display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a display device for preventing spacer static charging, and avoiding element breakdown, and to provide an element having a structure for widely holding a distance between two substrates for composing an image display device. SOLUTION: This display device comprises a back panel 1 mounting a cathode substrate, a front panel 2 forming an anode electrode 3, and a barrier rib formed on the both panels. The barrier ribs on the both panels are formed and brought into contact with each other in a direction perpendicular mutually. Furthermore, an intermediate substrate having a spacer on at least one side is interposed between a first substrate provided with a plurality of function element formed on the substrate, for example the back substrate, and a second substrate provided with electrodes formed on the substrate, for example the front substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a vacuum hermetic container, and more particularly to a vacuum hermetic container enclosing a field emission cathode.

[0002]

2. Description of the Related Art Conventionally, there is a field emission device shown in FIG. This is obtained by superposing a metal spacer 107 formed by plating on a cathode plate (referred to as a rear panel in the present invention) 101 and an insulating spacer 109 formed on an anode plate 108. And the cathode plate 101
The upper gate line 103 is connected to the plating electrode 1 for forming a spacer.
06. However, in this conventional example, since the material of the spacer 107 on the cathode plate 101 is a metal, the anode plate 10 is prevented from a short circuit prevention of the element.
The material of the spacer 109 on the substrate 8 must be an insulator. Then, when the element is driven, the electrons emitted from the cathode plate 101 are expected to spread as approaching the anode plate 108, and a part of the electrons collide with the spacer 109 on the anode plate 108, causing the spacer 109 to be charged. Therefore, in the case where the anode side is the insulator spacer 109 and the cathode side is the metal spacer 107 as in this conventional example, there is a problem that the charged anode side spacer 109 causes destruction of the element.

Various methods have been proposed for the spacer structures of PDPs and FEDs and their manufacture. Examples of the structure include a stripe structure and a mesh structure. Examples of the manufacturing method include a printing method, a sand blast method, a method using a plate-shaped or frame-shaped spacer, and the like.

However, in the above-mentioned method, it is difficult to make the distance between the back substrate and the front substrate exceed 500 μm. That is, in the printing method, there is a limit to the number of times of printing and a limit to the formation height due to a manufacturing method in which printing is repeated many times. In the sandblasting method, there is a problem that the shape of the partition wall is destroyed as the film thickness increases. In the stripe structure, there is a problem in a method of installing the stripe-shaped spacer. The frame-shaped spacer has problems such as difficulty in etching a plate of several mm with high accuracy and forming a plate of several mm having an opening by plating.

[0005]

The conventional field emission device has a problem in that electrons emitted from the cathode plate spread and collide with the anode-side spacer to be charged, thereby causing the destruction of the element constituting the pixel. Was. Therefore, an object of the present invention is to provide a display device in which the charging of a spacer is prevented and the destruction of pixels is avoided.

Further, it has been difficult to obtain a structure and a manufacturing method in which the distance between the rear substrate and the front substrate is kept in the order of millimeters by the conventional method. Therefore, an object of the present invention is to provide a spacer having a structure for keeping a distance between a rear substrate and a front substrate on the order of millimeters.

[0007]

According to a first aspect of the present invention, a display device includes:
In a display device comprising: a first substrate on which a field emission type cathode substrate having an emitter array is formed; and a second substrate which is arranged to face the first substrate and has an anode electrode formed thereon, A first partition having a stripe shape is formed on a substrate, and a second partition having a stripe shape is formed on the second substrate in a direction intersecting with the direction of the partition, and the first and second stripes are formed. The partition walls are in contact with each other. Here, the intersecting direction is desirably an orthogonal direction, but intersecting in the range of orthogonal (90 degrees) to 30 degrees makes the pressure inside the display pixel uniform and sufficient with respect to aging. This is preferable because an airtight structure can be formed with good mass productivity, and the uniformity of the contrast of the entire screen and the reliability of reduction of color unevenness are improved.

A display device according to a second aspect is the display device according to the first aspect, wherein the first and second partition walls are made of an insulator. According to a third aspect of the present invention, in the display device according to the first aspect, the first partition is formed of an insulator, and the second partition is formed of a conductor.

According to a fourth aspect of the present invention, in the display device of the first aspect, a groove is formed on the second substrate in a direction perpendicular to the partition wall. The display device of claim 5 is
A first substrate having an electron-emitting device formed on a surface thereof, a second substrate having electrodes formed thereon, the first substrate and the second substrate;
And a spacer-integrated intermediate substrate interposed between the substrates. The display device of claim 6 is
In claim 5, the intermediate substrate also serves as an auxiliary electrode.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the vacuum-tight container according to the first aspect of the present invention, a first substrate on which a field emission type cathode substrate having an emitter array is directly formed or mounted,
A second substrate on which an anode electrode is formed, which is disposed so as to be separated from and opposed to the first substrate, a stripe-shaped partition is formed on the first substrate, and the second substrate is formed in the first substrate shape. A stripe-shaped partition wall in a direction perpendicular to the direction of the stripe-shaped partition wall is formed on the second substrate, and the stripe-shaped partition walls on the first and second substrates are in contact with each other.

The first stripe-shaped partition is formed in a region of the cathode substrate where the emitter array is not formed, and the second stripe-shaped partition is formed in a region on the anode substrate other than a position immediately above the emitter array. Are formed in a direction orthogonal to the stripe direction of the first partition. The first and second stripe-shaped barrier ribs are provided to keep the gap between the first and second substrates constant, and are brought into contact with each other at intersections interspersed in a lattice point so that the atmospheric pressure is maintained. This load prevents deflection between the two substrates. 1st, 2nd
By forming the partitions on both of the substrates, an aspect ratio twice as high as that obtained by forming the partitions on only one substrate on one side can be obtained. Furthermore, since the first partition and the second partition are arranged orthogonally, it is not necessary to align the first and second partitions, and the partition does not form a space between the partitions.
When the partition walls are formed only on one side, the space between the partition walls becomes a partitioned space, and the problem that the exhaust efficiency at the time of vacuum sealing is poor does not occur, and good exhaust efficiency can be maintained.

In the first aspect of the present invention, since a high voltage is applied between the cathode substrate on the first substrate and the anode substrate on the second substrate, the partition walls on the first and second substrates are insulated. By being formed of a body, it is possible to prevent an electrical short circuit between the cathode and the anode substrate and destruction of the element due to the electrical short. Insulator types are glass, ceramic,
Any material can be applied as long as it can secure insulation, such as a conductor subjected to insulation treatment, but glass and ceramic are more preferable.

[0013] The electrons emitted from the emitter array travel almost parallel to the electric field immediately after being emitted, that is, in the vicinity of the cathode substrate, but expand as they approach the anode substrate side. Therefore, since electrons may collide with the partition near the anode substrate, the second partition is formed of a conductor and short-circuited on the anode substrate.
It is possible to prevent the charging of the second partition and the deflection of emitted electrons and the destruction of the element due to the charging. However, in this case,
The first partition is formed of an insulator and needs to have a sufficient height in order to prevent a short circuit between the cathode and anode substrates and the destruction of the element due to the short circuit. Metal is more desirable as the type of conductor.

In order to further improve the evacuation efficiency, the vacuum-tight container according to the present invention is characterized in that a groove is formed on the second substrate in a direction perpendicular to the second partition. When the exhaust holes are formed in the partition walls, there is a disadvantage that the strength of the partition walls is reduced. However, by forming the groove on the substrate, the exhaust efficiency can be improved without lowering the strength of the partition walls. The width of the groove is desirably about the same as or less than the width of the first and second partition walls, and the depth of the groove is not more than 1/2 of the thickness of the second substrate, more desirably 1 /.
3 or less is good.

Further, in the vacuum-tight container according to the present invention, a first substrate on which a field emission type cathode substrate having an emitter array is directly formed or mounted, and a first substrate, which is spaced apart from and opposed to the first substrate, are disposed. A second substrate having electrodes formed thereon, wherein a stripe-shaped partition is formed on the first substrate, and a stripe is formed in a direction orthogonal to a direction of the stripe-shaped partition formed on the first substrate. A partition is formed on a second substrate, and the partition between the stripes on the first and second substrates has a lattice-like structure and the partition between lattice points has one or more gaps. The structure is characterized by being laminated. The lattice points of the lattice structure are formed so as to overlap the first and second partition walls. The material of the lattice structure may be an insulator or a conductor, but typical examples include glass and metal. As a method of forming a lattice-like structure having a gap in a partition between lattice points, for example, laminating wires,
Alternatively, a technique such as knitting may be used. In this case, the outer diameter of the wire is desirably equal to or less than the width of the first and second partition walls. By laminating the lattice-like structure,
A spacer having a higher aspect ratio can be supplied. In addition, since the lattice structure has one or more gaps, a spacer having a high aspect ratio can be provided while maintaining high exhaust efficiency.

In the present invention, for the purpose of mainly applying the display device, the second substrate is a light-transmitting substrate, and the anode electrode made of a transparent electrode and the phosphor are laminated. For the purpose, by using the substrate on which the anode electrode layer is formed, a power conversion element having sufficient strength can be realized by the structure of the present invention.

According to the present invention, a first substrate having a plurality of functional elements formed on a substrate, for example, a rear substrate, and a second substrate having electrodes formed on the substrate, for example, a front substrate, are provided. An image display device having a structure in which a distance between a first substrate and a second substrate is maintained in a milli-order by providing a structure in which at least one of them has a spacer-integrated intermediate substrate having a spacer interposed therebetween.

Further, by making the above-mentioned intermediate substrate also serve as an auxiliary electrode, the discharge can be stabilized. Further, by applying or changing the same voltage as the gate voltage to the auxiliary electrode, higher-quality discharge can be obtained.

As the above-mentioned intermediate substrate having a spacer, for example, the following structure can be used. As the intermediate substrate, a substrate having a thickness of 50 μm to 300 μm etched so as to have an opening corresponding to the pixel of the image display device, a substrate having a thickness of 50 to 250 μm by an additive method, a fine wire having a diameter of several tens μm Use a knitted version. When a fine wire is used as the intermediate substrate, it is necessary to apply tension to the fine wire to maintain the shape. In the case of using etching, a method in which a spacer is formed first and then etching is performed may be used. It is difficult to obtain a shape having the above-mentioned opening by using a substrate having a thickness of 500 μm by etching or plating. A spacer having a thickness of 300 μm is formed on one surface of the intermediate substrate by, for example, screen printing. Here, the spacer is formed on one surface of the intermediate substrate. However, a structure in which the spacer is provided on both sides of the intermediate substrate may be employed. In this case, using the above-described method, in this case, the thickness of the spacer is 600 μm on both sides plus the thickness of the intermediate substrate.

By overlapping the intermediate substrate on which the above-described spacers are formed and the partition walls formed on the substrate, a desired distance between the rear substrate and the front substrate can be achieved. For example, if the spacing is to be 1 mm, a 300 μm high partition is formed on the front substrate by printing, and a 100 μm thick intermediate substrate having a 300 μm spacer on one side and a 600 μm thick spacer on both sides is formed as described above. What is necessary is just to set it as the structure which interposed.

[0021]

The present invention can be better understood with reference to the following illustrative but non-limiting examples. (Embodiment 1) FIG. 1A is an exploded perspective view schematically showing a part of a vacuum-tight container which is Embodiment 1 of the present invention.
(B) is a sectional view.

A light-transmitting anode electrode 3 is arranged in a predetermined pattern on the inner surface of the front panel 2 having light-transmitting and insulating properties, and a phosphor layer 4 is attached to the anode electrode 3. . On the inner surface of the insulating back panel 1 facing the front panel 2, a field emission type emitter array 5 as an electron source,
It has an emitter line 6 and a gate line 7 provided via an insulating layer. The emitter array 5 has a plurality of pixels, for example, 24 pixels, and forms one pixel. The size of one pixel composed of three pixels of red, green, and blue is, for example, 400 μm.
m × 400 μm, and the pixel pitch is, for example, 450 μm × 4
It is 50 μm. The width between the picture elements of the emitter array is 40μm, the pitch is 450μm, and the height is 1mm.
The first partition 8 is formed. On the side of the front panel 2 facing the rear panel 1, a width 40 in the direction perpendicular to the direction of the first partition 8 is provided at a position corresponding to the space between the picture elements of the front panel 2.
A second partition 9 in the form of a stripe having a thickness of 1 μm, a pitch of 450 μm, and a height of 1 mm is formed. When the front panel 2 and the rear panel 1 are joined, the first partition 8 and the second partition 9 contact each other and maintain the panel against the atmospheric pressure applied to the panel surface after the panel is vacuum sealed. Can do things. Next, the manufacturing process of this embodiment will be described with reference to FIG. After forming the anode electrode 3 on the glass plate 10 having a thickness of 3 mm, a glass paste is printed by a screen printing method in a stripe shape having a width of 40 μm and a pitch of 450 μm in a region between picture elements, and dried at 120 ° C. After repeating this process about 10 times, it is baked at 450 ° C. and the width is 40 μm and the pitch is 450 μm.
m, a stripe-shaped partition wall 9 having a height of 1 mm is formed (FIG. 2).
(A)). Here, the repetitive printing method is used. However, when a flexible mask is used, a method of collectively removing (transferring) a thickness of 450 μm can be used. Next, the phosphor 4 is applied between the partition walls 9, baked, and then patterned to form pixels, thereby obtaining the front panel 2 (FIG. 2).
(B)).

After the emitter lines 5, the emitter array 6, and the gate lines 7 are formed on the glass plate 11 having a thickness of 3 mm, the direction perpendicular to the direction of the partition 9 formed on the front panel 2 is formed in the region between the picture elements. 40μm width, 450μm pitch
The glass paste is printed in a stripe shape by a screen printing method, and dried at 120 ° C. This printing and drying process is repeated about 10 times and then baked at 450 ° C.
A stripe-shaped partition wall 8 having a thickness of 0 μm, a pitch of 450 μm and a height of 1 mm is formed to obtain a back panel 1 (FIG. 2C).

Next, a low-melting glass 13 containing lead oxide as a main component is applied to a frame-like structure 12 having a thickness of 0.5 mm and a height of 2 mm. 1
After preliminarily firing 3, low melting glass 13 is applied to the other side of frame-shaped structure 12 and preliminarily fired. The front panel 2 and the frame-like structure 12 temporarily fixed, and the rear panel 1
Put the door to the vacuum chamber 14, the inside of the tank 10 ^- evacuating the ⁷ Torr stand. With the temperature of the rear panel 1 raised to 430 ° C. via the heater 15 on which the rear panel 1 is installed, the front panel 2 is aligned and fixed on the rear panel 1, and the low-melting glass 13 is baked and vacuumed. An airtight container is obtained (FIG. 2D).
As in this embodiment, even a partition having a fine width corresponding to a black matrix which is a non-display area can support the panels with sufficient strength. Therefore, the distance between the panels can be kept constant, a sufficient display area can be ensured, and a large-area display device with no luminance variation and excellent withstand voltage performance can be realized.

In the vacuum-tight container according to the present invention, a field emission type cathode substrate having an emitter array is directly formed,
Alternatively, by forming stripe-shaped partitions on both the mounted first substrate and the second substrate on which the anode electrode is formed, an aspect ratio twice as large as that in a case where the partitions are formed only on one substrate is provided. can get. Further, since the first partition and the second partition are arranged orthogonally, it is not necessary to align the first and second partitions, and the partition does not become a space partitioned between the partitions. When the partition walls are formed, there is no problem that the spaces between the partition walls are partitioned and the exhaust efficiency at the time of vacuum sealing is poor, and good exhaust efficiency can be maintained. Next, by forming the partition walls on the first and second substrates with an insulator, it is possible to prevent an electrical short between the cathode and anode substrates and destruction of the element due to the electrical short. Further, the second partition is formed of a conductor and short-circuited on the cathode substrate, whereby the first partition is formed.
It is possible to prevent charging of the second partition wall, which is more likely to collide with electrons than the partition wall, and deflection of emitted electrons and destruction of the element due to the charging.

Next, by forming a groove in the direction perpendicular to the second partition on the second substrate, the exhaust efficiency can be improved while maintaining the strength of the partition. Also,
By laminating a lattice-like structure having one or more gaps between the lattice-like partition walls between the stripe-like partition walls on the first and second substrates, a high aspect ratio can be maintained while maintaining high pumping efficiency. Can be supplied.

(Example 2) A vacuum-tight container similar to that of Example 1 is produced except that the front panel is produced by the following method shown in FIG.

After forming a conductor layer for an anode electrode on a glass plate 10 having a thickness of 3 mm, an anode electrode 3 is formed by a PEP process and etching. At this time, a region having a width of 40 μm and a pitch of 450 μm
Are formed at the same time. Next, a stripe-shaped resist mask 17 having a width of 110 μm and a pitch of 450 μm is applied to a region other than the partition wall forming electrode 16 formed in this manner by PEP using a thick-film resist.
The thickness is formed to 1 mm or more by repeating the process. A plating process is performed by immersing the electrode 16 for forming a partition wall in an electrolytic plating solution while applying a negative potential to the electrode 16 for forming a partition wall. A metal partition 9 is formed. After that, the phosphor 4 is applied between the partition walls 9, baked, and then patterned to form pixels, thereby obtaining the front panel 2.

Here, electrolytic plating is performed, but other plating methods such as electroless plating can also be used. Since the partition 9 on the front panel 2 side is formed of a conductor as in this embodiment, the electron flux emitted from the emitter on the rear panel spreads toward the front panel 2 side and spreads on the partition 9 on the front panel side. Even in the case of a collision, electrons flow in the partition walls 9, so that the charging of the partition walls 9, which causes the bending of the electron flow and the destruction of the element, can be prevented. Further, since the partition on the rear panel side is formed with a sufficient height using an insulator, a short circuit between the anode and the cathode can be avoided.

Example 3 A front panel was manufactured by the following method shown in FIG. A vacuum tube method was used for vacuum sealing. A glass plate 10 having a thickness of 3 mm has a depth of 1 mm and a width of 50 μm.
4 (a) and 4 (b). At this time, the grooves 18 are formed in parallel with the partition walls formed on the rear panel.
When the anode electrode 3 is formed on the glass plate 10, the grooves 1
8 and the method of forming the anode electrode 3,
The anode electrode 3 in the groove 18 is as shown in FIG. 4 (c) or FIG. 4 (d). In a region between picture elements, a glass paste is printed by a screen printing method in a stripe shape having a width of 40 μm and a pitch of 450 μm in a direction orthogonal to the groove 18 and dried at 120 ° C. After repeating this process about 10 times, it is baked at 450 ° C. and the width is 40 μm and the pitch is 450 μm.
m, a stripe-shaped partition wall 9 having a height of 1 mm is formed. After that, the phosphor 4 is applied between the partition walls 9, baked, and then patterned to form pixels, thereby obtaining the front panel 2 (FIG. 4E).

As shown in FIG.
It can be formed in parallel with the anode electrode 3. In this case, since the partition 9 on the front panel 2 is orthogonal to the anode electrode 3, the partition on the rear panel may be formed in a direction orthogonal to the gate line, that is, parallel to the emitter line.

Next, sealing was performed by a vacuum tube system different from the chamber system of FIG. 2 (d). In other words, the rear panel and the front panel are fixed with a frame-like structure and low-melting glass, and an exhaust pipe is attached to a part of the frame or a part of the rear panel or the front panel.
The area surrounded by the frame-like structure was evacuated. At this time, the panel was placed in an oven at 350 ° C. and evacuated.

As in the present embodiment, the groove 1 is formed on the front panel 2.
With the formation of 8, the exhaust efficiency can be further improved without impairing the strength of the partition 9, and the time required for exhaust can be significantly reduced.

(Embodiment 4) FIG. 6 is an exploded perspective view schematically showing a part of a vacuum-tight container which is Embodiment 4 of the present invention. The front panel 2 and the back panel 1 are the same as in the first embodiment. A lattice-shaped structure 19 formed by laminating glass cloth is laminated between the back panel 1 and the front panel 2. The grid points of the grid-like structure 19 are formed so as to overlap the contact points of the partition walls 8 on the back panel 1 and the partition walls 9 on the front panel 2. The method for producing this vacuum tight container is as follows.

A front panel and a rear panel are manufactured in the same manner as in the first embodiment. 450μ glass fiber with a wire diameter of 40μm
Five 80 μm-thick glass cloths 20 knitted in a grid pattern with m pitches are aligned so that the grid points overlap (FIG. 7), and fixed to a frame-shaped jig. This is called hydrofluoric acid
When immersed in SiO ₂ supersaturated solution and boric acid is added to the solution,
Since silicon oxide SiO ₂ is precipitated in the solution, a SiO ₂ film is uniformly deposited on the glass cloth surface 19. To SiO ₂ is deposited in between the grid points of the glass was aligned cross by jig, the five glass cloth are connected to each other becomes a glass cloth having a thickness of 400-500. SiO on the surface
₂ was deposited at 5 μm and then removed from the solution and the jig was removed to obtain a 50 μm width, 450 μm pitch, and a height of 45 μm.
A 0 μm lattice-like structure is obtained.

A low-melting glass 13 composed mainly of lead oxide is applied to a frame-like structure 12 having a thickness of 0.5 mm and a height of 2.5 mm.
Is calcined, a low-melting glass 13 is applied to the other side of the frame-shaped structure 12 and calcined. Front panel 2
And a frame-shaped structure 12 to those temporarily fixed, placed in a vacuum chamber 14 mounted in alignment with the mesh 20 and the rear panel 1, the inside of the tank 10 ^- evacuating the ⁷ Torr stand. With the temperature of the rear panel 1 raised to 430 ° C. via the heater 15 on which the rear panel 1 is installed, the front panel 2 is aligned and fixed on the rear panel 1, and the low-melting glass 13 is baked and vacuumed. Obtain an airtight container.

As in this embodiment, a spacer having a higher aspect ratio is supplied by further laminating a lattice-like structure between the partition 8 on the back panel 1 and the partition 9 on the front panel 2. be able to. Further, by forming the lattice-like structure by laminating glass cloths, since there is a gap between the glass cloths other than the lattice points, the exhaust efficiency is further improved.

Example 5 A vacuum-tight container is produced in the same manner as in Example 4, except that the front panel and the lattice-like structure are produced as follows. After forming a conductive layer for an anode electrode on a glass plate having a thickness of 3 mm, an anode electrode is formed by a PEP process and etching. At this time, stripe-shaped partition wall forming electrodes having a width of 40 μm and a pitch of 450 μm are simultaneously formed in a region where a partition between picture elements is formed. Next, a region of 110 μm
Then, a stripe-shaped resist mask having a pitch of 450 μm is formed to a thickness of 1 mm or more by repeating the PEP process using a resist for a thick film. A plating process is performed by immersing the electrode for forming a partition wall in an electrolytic plating solution while giving a negative potential, and a stripe-shaped metal of nickel or the like having a width of 40 μm, a pitch of 450 μm, and a height of 1 mm is formed on the partition formation electrode. A partition is formed. After that, apply phosphor between the stripes, bake, and pattern to form pixels,
Get the front panel. Wire diameter 40μm, opening 410
Five stainless screen meshes of 5 μm are aligned and fixed to a frame-shaped jig so that grid points overlap. This is immersed in an electrolytic plating solution while giving a negative potential to uniformly coat the surface of the stainless steel mesh with a metal plating film such as nickel. Since the metal is also deposited between the lattice points of the stainless steel mesh that has been aligned by the jig, the five stainless steel meshes are connected to each other to form a single metal mesh having a thickness of 400 to 500 μm. After depositing a metal such as nickel on the surface to a thickness of 5 μm, the jig was taken out of the solution and removed.
A grid-like structure having a pitch of 0 μm and a height of 450 μm is obtained. Here, electrolytic plating is performed for plating at the time of forming the partition and lattice structure on the front panel side, but other plating methods such as electroless plating can also be used. By forming the partition and lattice-like structure on the front panel side with conductors, the electron flux emitted from the emitter on the rear panel spreads as it approaches the front panel and spreads on the partition and lattice-like structure on the front panel side. In the event of a collision,
In addition, since electrons flow inside the lattice-shaped structure, it is possible to prevent the partition walls or the lattice-shaped structure from being charged, which may cause a curving of the electron flow or destruction of the element. Further, since the partition on the rear panel side is formed with a sufficient height using an insulator, a short circuit between the anode and the cathode can be avoided.

(Embodiment 6) FIG. 8 is an assembly view including main members constituting an image display device of the present invention. In this embodiment, an FED is used as the image display device. 8, reference numeral 81 denotes a rear substrate, 82 denotes an intermediate substrate, 83 and 84 denote spacers formed on the intermediate substrate, 85 denotes a front substrate, 86
Is a spacer formed on the front substrate. In FIG. 8, the one using the conventional technique is not shown,
On the rear substrate 81, an emitter, a gate, a cathode wiring, a gate wiring, and an interlayer insulating film thereof which constitute the FED are formed. Similarly, on the front substrate 85, an anode electrode, a phosphor film, a metal back and the like are formed. For the formation of the emitter and the gate, a Spindt method, a Gray method, a transfer molding method, and the like have been proposed, and any of them may be used. Here, the emitter and the gate are formed by the transfer molding method.

A spacer 86 having a thickness of 300 μm was formed by a screen printing method on a front substrate 85 on which an anode electrode, a phosphor film, a metal back and the like were formed. In this embodiment, the thickness of the glass spacer formed by one printing is about 1
Since it was 5 μm, 20 recoatings were performed.

Next, as shown in FIG. 9, a nickel intermediate substrate having a thickness of 100 μm manufactured by the additive method was prepared. An opening 87 is formed in the intermediate substrate. The shape of the openings 87 is 400 μm × 100 μm, which are arranged at a pitch of 453 μm in the vertical direction and at a pitch of 151 μm in the horizontal direction.

The height of the intermediate substrate is 300 μm by printing.
Was formed, and then a spacer 83 (not shown) was similarly formed on the back surface of the intermediate substrate. Here, since printing of glass paste was used, baking was performed after printing,
A metal may be used as the spacer. Alternatively, one may be a metal spacer and one may be an insulating spacer. Here, the printing method is used as a method of forming the spacer, but other methods such as sandblasting can be used to form the spacer.

The intermediate substrate with spacer formed as described above, the front substrate, and the rear substrate were overlapped as shown in FIG. 8 to produce an FED as shown in FIG. In FIG.
Is a vacuum sealed structure including the frame material, and 89 is a transfer for applying a potential from the wiring formed on the rear substrate to the intermediate substrate.

The effect of applying a potential to the intermediate substrate is dependent on the use of the intermediate substrate as a focusing electrode for preventing the spread of electrons, the voltage applied to the intermediate substrate, and the driving method.
It can also be used for gradation control. Here, it was used as a focusing electrode. The voltage as the focusing electrode is equal to or higher than the gate voltage and equal to or lower than the anode voltage, but is generally in the range of 30 to 80V. Further, although the same voltage as the gate voltage is used, it is desirable in terms of power consumption and circuit scale. There are a method of applying a constant voltage to the focusing electrode and a method of driving the focusing electrode in synchronization with the gate. Here, a constant potential of 45 V was applied.

As shown in FIGS. 8 and 10, the structure in which the spacers are alternately overlapped improves the exhaust efficiency of the container. Generally, the cross-sectional shape of the spacer is rectangular, but may be circular. In addition, the wedge-shaped fitting of the spacers and the portion where the spacers are mounted on the substrate may be formed into a fitting shape such as a male-female shape to prevent displacement of the spacers and increase the strength.

The spacers are arranged in units of RGB picture elements (R / G / B / spacer // R / G / B /
(Spacer), but may be arranged in units of R, G, and B pixels (R / spacer // G / spacer // B / spacer).

In this embodiment, the conductor is used as the intermediate substrate. However, depending on the characteristics of the FED, the auxiliary electrode is not necessarily required. In this case, the intermediate substrate may be formed of an insulator such as glass. . In the case of glass, by using photosensitive glass, an opening with little variation can be obtained.

As described above, the image display device according to the present invention has a first function having a plurality of functional elements formed on a substrate.
And a second substrate having electrodes formed on the substrate, at least one of which has a spacer, has a structure in which the spacer is integrated via a spacer-integrated intermediate substrate.
A structure in which the distance between the first substrate and the second substrate is kept wide can be provided.

[0049]

According to the above arrangement, it is possible to provide a display device in which the charging of the spacer is prevented and the destruction of the pixel due to the destruction of the element is avoided. In addition, it is possible to provide a display device having a spacer structure suitable for keeping a distance between the back substrate and the front substrate on the order of millimeters.

[Brief description of the drawings]

FIG. 1 is a diagram schematically illustrating a part of a vacuum-tight container that is Embodiment 1 of the present invention.

FIG. 2 is a process diagram schematically showing a manufacturing method of Example 1 of the present invention.

FIG. 3 is a process diagram schematically showing a manufacturing method according to a second embodiment of the present invention.

FIG. 4 is a process chart schematically showing a manufacturing method according to a third embodiment of the present invention.

FIG. 5 is a perspective view showing another embodiment of the third embodiment of the present invention.

FIG. 6 is an exploded perspective view schematically illustrating a part of a vacuum-tight container that is Embodiment 4 of the present invention.

FIG. 7 is a process chart showing a part of the manufacturing method according to the fourth embodiment of the present invention.

FIG. 8 is a perspective view illustrating a schematic configuration of an image display device according to a sixth embodiment of the present invention.

FIG. 9 is a plan view showing an intermediate substrate with spacers according to a sixth embodiment of the present invention.

FIG. 10 is a sectional view of an image display device according to a sixth embodiment of the present invention.

FIG. 11 is an exploded perspective view showing a conventional example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Back panel 2 ... Front panel 3 ... Anode electrode 4, 1
02: Phosphor 5: Emitter array, 6, 10, 202: Emitter line, 7, 106, 203: Gate line, 8: First partition, 9: Second partition, 10: Front substrate, 11: Back substrate , 12 ... frame-like structure, 13, 110 ... sealing material, 14
... vacuum tank, 15 ... heater, 16 ... electrode for forming partition walls, 17
... resist mask, 18 ... exhaust groove, 19 ... glass cloth, 20 ... lattice structure, 100 ... anode substrate, 103
... a cathode substrate, 105 ... an insulating layer, 107 ... an emitter,
108: low melting point glass pattern, 109: support column, 11
DESCRIPTION OF SYMBOLS 1 ... Glass fiber bundle, 112 ... Ni, 113 ... Magnet-containing paste, 114 ... Glass substrate, 115 ... Adhesive, 11
6 ... adhesive coated substrate, 201 ... cathode plate, 204 ...
Electron emitting portion, 205: pixel, 206: spacer forming electrode, 207: metal spacer, 208: anode plate 209
… Insulating spacer

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01J 29/87 H01J 29/87 (72) Inventor Atsuko Iida 33 Shinisogo-cho, Isogo-ku, Yokohama-shi, Yokohama, Japan (72) Inventor Masayuki Saito 33, Shinisogo-cho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture F-term (reference) 5C032 AA01 CC05 CC10 CD04 5C036 EE01 EE03 EE09 EE14 EE15 EE17 EF01 EF06 EF09 EG01 EG12 EG19 EG22 EG28 EG31 EH06 EH08 EH26 5C094 BA04 BA21 DA12 EA04 EA05 EB02 EC04

Claims (6)

[Claims] 1. A display device comprising: a first substrate on which a field emission type cathode substrate having an emitter array is formed; and a second substrate disposed opposite to the first substrate and having an anode electrode formed thereon. A first stripe-shaped partition is formed on the first substrate, and a second stripe-shaped second partition is formed on the second substrate in a direction intersecting the direction of the partition.
Wherein the first and second partitions are in contact with each other. 2. The display device according to claim 1, wherein said first and second partition walls are made of an insulator. 3. The display device according to claim 1, wherein the first partition is formed of an insulator, and the second partition is formed of a conductor. 4. The display device according to claim 1, wherein a groove is formed on the second substrate in a direction perpendicular to the partition wall. 5. A first substrate having an electron emission element formed on a surface thereof, a second substrate having electrodes formed thereon, and a spacer-integrated type interposed between the first substrate and the second substrate. A display device comprising an intermediate substrate. 6. The display device according to claim 5, wherein said intermediate substrate also serves as an auxiliary electrode.