JP2000246200A - Surface treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface treatment device in which stabilized surface treatment can constantly be performed without being influenced by variations in atmospheric humidity by controlling ozone concentration in a treating chamber or the illuminance of ultraviolet radiation of 300 nm or shorter. SOLUTION: A treatment chamber 12 in a treatment device body in which ultraviolet radiation light sources 16 are fitted is provided with an air introducing part 20 for introducing air into the treatment chamber and an oxygen feeding part 21 for introducing oxygen into the treatment chamber, and an ozone concentration meter 30 for measuring ozone concentration in the treatment chamber is arranged. Using the output of the ozone concentration meter, the oxygen feed quantity in the treatment chamber is controlled to always keep the ozone concentration in the treatment chamber constant. Instead of the ozone concentration meter, an ultraviolet radiation illuminance meter may be arranged to keep fixed the ozone concentration in the treatment chamber constant similarly.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an improvement in a surface treatment apparatus.

[0002]

2. Description of the Related Art Generally, organic dirt adhering to the surface of materials such as plastic, glass, metal, and ceramic is decomposed and removed by ultraviolet radiation and ozone. Ultraviolet radiation and ozone are also used in surface modification of organic materials such as plastics. As shown in FIG. 5, for example, a conventional surface treatment apparatus is configured by disposing a reflector 2 inside a box-shaped apparatus main body 1 and mounting an ultraviolet radiation light source 3 inside the reflector 2. is there. As the ultraviolet radiation light source 3, for example, a low-pressure mercury lamp is used. Further, the object 4 is conveyed by a conveyor 5 or the like at the lower surface of the ultraviolet radiation light source 3, and the surface treatment of the object 4 is performed by ozone and ultraviolet radiation generated by the ultraviolet radiation light source 3. In the figure, reference numeral 6 denotes an ozone exhaust fan for reducing the pressure in the apparatus main body so as to prevent ozone from leaking out of the apparatus. Exhaust at the flow rate.

[0003]

Incidentally, the ozone generation (ozone concentration) in the above-mentioned surface treatment apparatus greatly changes depending on the environmental conditions of the day as shown in FIG.
That is, as shown in the figure, when the atmospheric humidity of the processing apparatus increases, the ozone concentration decreases, the ultraviolet ray 254 nm increases, and there is a disadvantage that uniform surface treatment cannot be performed. That is, when the humidity increases, the reaction of oxygen to ozone is inhibited, and the ozone concentration decreases. When the ozone concentration is further reduced, the absorption at 254 nm by ozone is reduced, the illuminance at 254 nm is increased, and active oxygen is reduced, so that organic substances cannot be removed.

[0004] The present invention has been made in view of the above points, and by constantly controlling the ozone concentration in the processing chamber or the ultraviolet irradiance of 300 nm or less, it is always stable without being affected by changes in the atmospheric humidity. An object of the present invention is to provide a surface treatment apparatus capable of performing a surface treatment.

[0005]

Means for Solving the Problems The present invention has the following arrangement to solve the above-mentioned problems. That is, the invention according to claim 1 includes a processing apparatus main body in which an ultraviolet radiation light source is mounted, a processing chamber disposed in an irradiation unit of the ultraviolet radiation light source,
The present invention relates to a surface treatment apparatus having an ozone concentration meter for measuring an ozone concentration in a treatment chamber. Further, an air introduction section for introducing air into the processing chamber, an oxygen supply section for introducing oxygen into the processing chamber are provided, and an ozone concentration meter for measuring ozone concentration in the processing chamber is arranged. Further, the supply amount of oxygen in the processing chamber is controlled by the output of the ozone concentration meter, so that the ozone concentration in the processing chamber is constantly kept constant.

According to the first aspect of the invention, by controlling the amount of oxygen supplied into the processing chamber, the concentration of ozone in the processing chamber is constantly kept constant, and a stable surface treatment is always performed without being affected by changes in the atmospheric humidity. be able to.

According to a second aspect of the present invention, dry air is supplied to the processing chamber from the air inlet in the surface treatment apparatus according to the first aspect, and the supply amount of the dry air is controlled by a measurement value of an ozone concentration meter. In addition, the ozone concentration in the processing chamber is configured to be constantly constant.

According to the second aspect of the present invention, the supply amount of dry air can be controlled based on the measurement result of the ozone concentration, and the ozone concentration in the processing chamber is constantly kept constant, and is not affected by the fluctuation of the atmospheric humidity. Stable surface treatment can always be performed.

According to a third aspect of the present invention, there is provided a processing apparatus main body having an ultraviolet radiation light source mounted therein, a processing chamber disposed in an irradiation section of the ultraviolet radiation light source, and an ultraviolet irradiance in the processing chamber. The present invention relates to a surface treatment device having an illuminometer for measuring. Further, an air introduction unit for introducing air into the processing chamber, an oxygen supply unit for introducing oxygen into the processing chamber are provided, and an ultraviolet irradiometer for measuring ultraviolet irradiance in the processing chamber is further arranged. . Then, the supply amount of oxygen in the processing chamber is controlled by the measurement value of the ultraviolet irradiometer so that the ozone concentration in the processing chamber is constantly kept constant.

According to the third aspect of the present invention, by controlling the amount of oxygen supplied into the processing chamber, the concentration of ozone in the processing chamber is constantly kept constant, and a stable surface treatment can be performed without being affected by changes in the atmospheric humidity. It can be carried out.

According to a fourth aspect of the present invention, in the surface treatment apparatus according to the third aspect, dry air is supplied to the processing chamber from the air introduction portion, and the dry air supply amount is determined based on a measurement value of the ultraviolet irradiometer. Is controlled so that the ozone concentration in the processing chamber is constantly constant.

According to the fourth aspect of the present invention, the supply amount of dry air can be controlled based on the measurement result of the ultraviolet irradiometer, and the ozone concentration in the processing chamber is constantly kept constant.
A stable surface treatment can always be performed without being affected by changes in the atmospheric humidity.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The first embodiment of the present invention will be described with reference to FIGS. In FIG. 1, reference numeral 11 denotes a processing apparatus main body, which has a processing chamber 12 and is formed in a box shape. The main body of the processing apparatus has a conveyor passage section 13 at substantially the center in the horizontal direction. Reference numeral 15 denotes a reflector disposed inside the processing apparatus main body 11, and is configured using, for example, a mirror-finished aluminum plate. Reference numeral 16 denotes an ultraviolet radiation light source mounted inside the reflector 15,
For example, it is configured using a 40-watt low-pressure mercury lamp. In addition, the ultraviolet radiation light source 16 includes, for example, six lamps arranged at intervals of 5 cm along the transport direction of the workpiece. Further, the ultraviolet radiation light source is configured using an arc tube made of synthetic quartz glass or fused silica glass which efficiently irradiates a wavelength of 300 nm or less.

Reference numeral 20 denotes an air introduction section formed on, for example, the upper surface of the processing apparatus main body 11, and air is introduced according to the displacement of the exhaust fan 34. This is to prevent ozone from leaking out of the apparatus. 21 is the processing apparatus main body 1
For example, oxygen supply units configured at both upper ends of the upper part 1 supply oxygen whose flow rate is adjusted according to the ozone concentration so that the inside of the processing chamber 22 is not pressurized. Oxygen is at least higher than the oxygen concentration in the air. Further, oxygen is mixed with air introduced from outside in the processing chamber. 2
Reference numeral 2 denotes a conveyor arranged so as to pass through the processing chamber 12 of the processing apparatus main body 11, and conveys an object to be processed.

Reference numeral 30 denotes an ozone concentration meter disposed below the conveyor, for example. Reference numeral 31 denotes an ozone concentration sampling unit having one end connected to the ozone concentration meter 30. It is configured to collect ozone in the processing chamber 12. Ozone is UV 185nm
Is generated by being absorbed by oxygen. Ozone can also be supplied by an ozonizer. Further, since ozone has a light absorbing property, it absorbs ultraviolet rays of 254 nm and is decomposed into active oxygen, and this active oxygen acts on an organic substance to perform cleaning and reforming of an object to be processed. Reference numeral 32 denotes an input / output interface which receives a signal from the ozone concentration meter 30 and sends a signal to a regulator 33 to control an oxygen supply amount. Further, in order to prevent ozone in the processing chamber 12 from flowing out, the inside of the processing chamber 12 is configured to have a negative pressure. Reference numeral 35 denotes an object to be processed located below the ultraviolet radiation light source 16, such as plastic, glass, metal, or the like.
It is made of a material such as ceramic. The workpiece 35 is conveyed by, for example, the conveyor 22 as shown in FIG.

According to a second aspect of the present invention, dry air is supplied instead of oxygen in the surface treatment apparatus of the first aspect. According to the second aspect of the present invention, similarly to the first aspect, the input / output interface 32 receives a signal from the ozone concentration meter 30 and sends a signal to the regulator 33 to control the supply amount of dry air. .

The third embodiment will be described with reference to FIG. According to a third aspect of the present invention, an ultraviolet irradiance meter 40 for measuring ultraviolet irradiance in a processing chamber and an ultraviolet radiation introducing tube 41 are provided in place of the ozone concentration meter 30 according to the first aspect. . According to the invention, the ultraviolet irradiometer 40
, The ultraviolet irradiance in the processing chamber 12 is measured, a signal from the ultraviolet irradiometer 40 is received by the input / output interface 32, a signal is sent to the regulator 33, and oxygen from the oxygen supply unit 21 to the processing chamber 12 is measured. Control the supply.

According to a fourth aspect of the present invention, in the surface treatment apparatus of the third aspect, dry air is supplied instead of air. According to a fourth aspect of the present invention, similarly to the third aspect of the invention, the input / output interface 32 receives a signal from the ultraviolet irradiometer 40 and sends a signal to the regulator 33 to control the supply amount of dry air. I do. According to the first to fourth aspects of the present invention, the ozone concentration in the processing chamber 12 is constantly kept constant without being affected by the fluctuation of the atmospheric humidity.

Next, the humidity by the above-mentioned surface treatment device,
The relationship between the amount of ozone exhaust air and the ozone concentration will be described. According to the conventional surface treatment apparatus shown in FIG. 5, as shown in FIG. 6, as the humidity increases, the ozone concentration decreases and the ultraviolet irradiance increases. This is because ozone molecules collide with water molecules in the air and decompose. When the ozone concentration further decreases, ultraviolet radiation by ozone (200 nm to 300
nm) The UV irradiance increases conversely due to the reduced absorption.
On the other hand, according to the present invention, as shown in FIG. 2, even if the humidity increases, the concentration of oxygen, which is a raw material of ozone, increases, so that the ozone concentration is averaged and a stable surface treatment is performed. Can be. According to the conventional apparatus, FIG.
As shown in (2), the processing time increases when the humidity increases, but the processing time does not increase with the processing apparatus according to the present invention.

[0020]

According to the first aspect of the present invention, by controlling the amount of oxygen supplied into the processing chamber, the ozone concentration can always be controlled within a certain range, and the influence of the atmospheric humidity can be obtained. And has a special effect that a stable surface treatment can be performed.

According to the second aspect of the present invention, the ozone concentration in the processing chamber can be kept constant by controlling the supply amount of dry air and adjusting the internal humidity based on the measurement result of the ozone concentration. There is a special effect that a stable surface treatment can always be performed without being affected by the fluctuation of the atmospheric humidity.

According to the third aspect of the present invention, the ozone concentration in the processing chamber becomes constant by controlling the supply amount of dry air based on the measurement result of the ultraviolet irradiance, and the fluctuation of the atmospheric humidity is reduced. There is a special effect that a stable surface treatment can be always performed without being affected.

According to the present invention, the supply amount of the dry air is controlled based on the measurement result of the ultraviolet irradiance, the ozone concentration in the processing chamber becomes constant, and the influence of the fluctuation of the atmospheric humidity is reduced. There is a special effect that a stable surface treatment can always be performed without receiving.

[Brief description of the drawings]

FIG. 1 is a front view of a surface treatment apparatus according to the present invention.

FIG. 2 is an explanatory diagram showing a relationship among an atmospheric humidity, an ozone concentration, and an oxygen supply amount in the surface treatment apparatus shown in FIG.

FIG. 3 is a diagram showing the relationship between the atmospheric humidity and the processing time of the present invention and a conventional surface treatment apparatus.

FIG. 4 is a front view of another surface treatment apparatus according to the present invention.

FIG. 5 is a side view of a conventional surface treatment apparatus.

FIG. 6 is an explanatory diagram showing the relationship between the atmospheric humidity, the ozone concentration, and 254 nm in the surface treatment apparatus shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Processing apparatus main body 12 Processing room 13 Conveyor passage part 15 Reflector 16 Ultraviolet radiation light source 20 Air introduction part 21 Oxygen supply part 22 Conveyor 30 Ozone concentration meter 31 Ozone concentration sampling part 32 Input / output interface 33 Regulator 34 Exhaust fan 35 Exhaust fan 35 40 UV irradiance meter 41 UV radiation introduction tube

Claims (4)

[Claims] 1. A processing apparatus main body in which an ultraviolet radiation light source is mounted, a processing chamber disposed in an irradiation section of the ultraviolet radiation light source, and a surface having an ozone concentration meter for measuring an ozone concentration in the processing chamber. In the processing apparatus, an air introduction unit that introduces air into the processing chamber, an oxygen supply unit that introduces oxygen into the processing chamber, and an ozone concentration meter that measures an ozone concentration in the processing chamber are disposed. A surface treatment apparatus characterized in that the oxygen supply amount in the processing chamber is controlled by the output of the meter so that the ozone concentration in the processing chamber is constantly kept constant. 2. An apparatus for supplying dry air from an air inlet to a processing chamber and controlling a supply amount of dry air based on a measurement value from an ozone concentration meter so that the ozone concentration in the processing chamber is constantly constant. The surface treatment apparatus according to claim 1, wherein: 3. A processing apparatus main body having an ultraviolet radiation light source mounted therein, a processing chamber disposed in an irradiation section of the ultraviolet radiation light source, and a surface having an illuminometer for measuring ultraviolet irradiance in the processing chamber. In the processing apparatus, an air introduction unit that introduces air into the processing chamber, an oxygen supply unit that introduces oxygen into the processing chamber is provided, and an ultraviolet irradiance meter that measures ultraviolet irradiance in the processing chamber is arranged. A surface treatment apparatus characterized in that an oxygen supply amount in a processing chamber is controlled based on a measurement value of the ultraviolet irradiometer and an ozone concentration in the processing chamber is constantly kept constant. 4. An apparatus for supplying dry air from an air inlet to a processing chamber and controlling a supply amount of dry air based on a measured value of an ultraviolet irradiometer so that an ozone concentration in the processing chamber is constantly constant. The surface treatment apparatus according to claim 3, wherein: