JP2000188316A5

JP2000188316A5 - Transport method and equipment

Info

Publication number: JP2000188316A5
Application number: JP1998366243A
Authority: JP
Filing date: 1998-12-24
Publication date: 2007-05-10

Description

【特許請求の範囲】
【請求項１】保管部に保管された搬送容器を移し替え部に移動して前記移し替え部に設けられたローダに自動で前記搬送容器を配置する工程と、
前記搬送容器間で移し替え手段によって被処理物を移し替える工程と、
前記被処理物の移し替え後、前記ローダから前記保管部に自動で前記搬送容器を移動する工程とを有することを特徴とする搬送方法。
【請求項２】請求項１記載の搬送方法であって、前記被処理物として半導体ウェハを用い、前記移し替え手段である移載ロボットによって前記半導体ウェハを前記搬送容器間で移し替えることを特徴とする搬送方法。
【請求項３】被処理物を収容可能な搬送容器間における前記被処理物の移し替えが行われる移し替え部と、
複数の前記搬送容器を保管可能な保管部と、
前記移し替え部と前記保管部との間で前記搬送容器を移動させる搬送容器移動手段とを有し、
前記被処理物の移し替え時の前記搬送容器の配置および移し替え後の前記搬送容器の移動を自動で行うことを特徴とする搬送装置。
【請求項４】請求項３記載の搬送装置であって、前記被処理物が半導体ウェハであり、前記移し替え部に、前記半導体ウェハを前記搬送容器間で移し替える移載ロボットが設けられていることを特徴とする搬送装置。
【請求項５】請求項４記載の搬送装置であって、前記半導体ウェハまたは前記搬送容器もしくはその両者の識別情報を認識する識別情報認識手段が設けられていることを特徴とする搬送装置。 [Claims]
1. A step of moving a transport container stored in a storage unit to a transfer unit and automatically arranging the transport container on a loader provided in the transfer unit.
The process of transferring the object to be processed by the transfer means between the transport containers, and
A transport method comprising a step of automatically moving the transport container from the loader to the storage unit after the transfer of the object to be processed.
2. The transfer method according to claim 1, wherein a semiconductor wafer is used as the object to be processed, and the semiconductor wafer is transferred between the transfer containers by a transfer robot which is the transfer means. Transport method.
3. A transfer unit in which the object to be processed is transferred between transport containers capable of accommodating the object to be processed.
A storage unit that can store a plurality of the transport containers,
It has a transport container moving means for moving the transport container between the transfer unit and the storage unit.
A transport device characterized in that the transport container is arranged at the time of transfer of the object to be processed and the transport container is automatically moved after the transfer.
4. The transfer device according to claim 3, wherein the object to be processed is a semiconductor wafer, and a transfer robot for transferring the semiconductor wafer between the transfer containers is provided in the transfer unit. A transport device characterized by being
5. The transport device according to claim 4, further comprising an identification information recognizing means for recognizing identification information of the semiconductor wafer, the transport container, or both of them.

本発明の目的は、搬送容器の入れ替えおよび搬送を自動化して工場全体の自動化を図る搬送方法および装置を提供することにある。 An object of the present invention is to provide a conveyance method and equipment improve the automation of entire plants to automate the replacement and transportation of the transport container.