JP2000164755A - High-frequency circuit package - Google Patents

High-frequency circuit package

Info

Publication number
JP2000164755A
JP2000164755A JP10334655A JP33465598A JP2000164755A JP 2000164755 A JP2000164755 A JP 2000164755A JP 10334655 A JP10334655 A JP 10334655A JP 33465598 A JP33465598 A JP 33465598A JP 2000164755 A JP2000164755 A JP 2000164755A
Authority
JP
Japan
Prior art keywords
conductor
line conductor
frequency circuit
dielectric substrate
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10334655A
Other languages
Japanese (ja)
Inventor
Katsuyuki Yoshida
克亨 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP10334655A priority Critical patent/JP2000164755A/en
Publication of JP2000164755A publication Critical patent/JP2000164755A/en
Pending legal-status Critical Current

Links

Landscapes

  • Waveguides (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a surface-mount high-frequency circuit package, which is equipped with a sidewall line conductor as a signal input/output on the side of a dielectric board and low in reflection and high in transmission properties for high-frequency signals. SOLUTION: A high-frequency circuit package comprises a dielectric board 1, equipped with a ground conductor layer 2 formed inside and a mounting region 1a which is located on its upside and where a high-frequency circuit part 9 is mounted, a dielectric frame 3 jointed to the top surface of the dielectric board 1 surrounding the mount region 1a, a line conductor 4 formed on the underside of the dielectric board 1 corresponding to the dielectric frame 3 and extending to the periphery, a sidewall line conductor 5 formed on the side of the dielectric board 1 extending continuously from the line conductor 4, and a through-conductor 6 which is formed extending from the other end of the line conductor 4 inside the dielectric frame 3 to the top surface of the board 1, where the sidewall line conductor 5 is formed 1/4 or below as long as the wavelength of high-frequency signals. A high-frequency circuit package of this constitution can be prevented from increasing in impedance or protected against impedance mismatching, reduced in reflection properties, and satisfactory in transmission properties.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、マイクロ波帯また
はミリ波帯の高周波回路部品を搭載して収納するための
高周波回路用パッケージに関し、特に外部電気回路基板
への表面実装に好適な高周波回路用パッケージに関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency circuit package for mounting and housing high frequency circuit components in a microwave band or a millimeter wave band, and more particularly to a high frequency circuit suitable for surface mounting on an external electric circuit board. It is related to a package for use.

【0002】[0002]

【従来の技術】MHz帯やGHz帯の高周波信号を用い
る無線通信機器等の高周波回路あるいは高周波用半導体
素子を収容する高周波回路用パッケージにおいては、パ
ッケージ内部に高周波回路や高周波用半導体素子が収納
されて気密封止され、それら内部の回路や素子と外部の
回路とを電気的に接続して高周波信号の良好な伝送特性
を得るために、線路導体を用いた配線を使用した信号入
出力部が形成される。
2. Description of the Related Art In a high-frequency circuit package for accommodating a high-frequency circuit or a high-frequency semiconductor element such as a wireless communication device using a high-frequency signal in a MHz band or a GHz band, the high-frequency circuit or the high-frequency semiconductor element is accommodated inside the package. In order to obtain good transmission characteristics for high-frequency signals by electrically connecting internal circuits and elements to external circuits, signal input / output units using wiring using line conductors It is formed.

【0003】そのような高周波回路用パッケージにおい
ては、従来は、下面または内部に接地導体層が形成さ
れ、上面に高周波用半導体素子等の高周波回路部品を搭
載する搭載部とこの搭載部近傍から外周に至る高周波信
号伝送用の線路導体とが形成さた誘電体基板と、この誘
電体基板の上面に搭載部を囲むとともに線路導体の一部
を挟んでいわゆるハーメチックシール部を構成するよう
に接合された誘電体枠体とから成り、誘電体基板の側面
に誘電体基板と誘電体枠体との間を通って外周まで形成
された線路導体と連続的に形成されて接続された表面実
装用の側壁線路導体を形成して信号入出力部が構成され
ていた。そして、この高周波回路用パッケージを外部電
気回路に実装し、側壁線路導体を外部電気回路の接続用
導体と電気的に接続することにより、パッケージ内部の
高周波回路部品と外部電気回路とが電気的に接続されて
いた。
Conventionally, in such a package for a high-frequency circuit, a grounding conductor layer is formed on the lower surface or inside, and a mounting portion for mounting a high-frequency circuit component such as a high-frequency semiconductor element on the upper surface and an outer peripheral portion near the mounting portion. A dielectric substrate on which a line conductor for high-frequency signal transmission leading to is formed, is joined to the upper surface of the dielectric substrate so as to surround a mounting portion and form a so-called hermetic seal portion with a part of the line conductor interposed therebetween. For the surface mounting, which is continuously formed and connected to the line conductor formed up to the outer periphery through the dielectric substrate and the dielectric frame on the side surface of the dielectric substrate. A signal input / output unit is formed by forming a side wall line conductor. Then, the high-frequency circuit package is mounted on an external electric circuit, and the side wall line conductor is electrically connected to the connection conductor of the external electric circuit, so that the high-frequency circuit components inside the package and the external electric circuit are electrically connected. Was connected.

【0004】また、側壁線路導体を誘電体基板の側面の
下まで形成し、さらに誘電体基板の下面にこの側壁線路
導体と連続的に同様の線路導体により実装用端子導体を
形成し、実装信頼性を高めることも行なわれていた。
Further, a side wall line conductor is formed up to the side of the dielectric substrate, and a mounting terminal conductor is formed on the lower surface of the dielectric substrate by a line conductor similar to the side wall line conductor. It was also used to enhance sex.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記の
ような従来の高周波回路用パッケージにおいては、線路
導体が誘電体枠体と誘電体基板とに挟まれるハーメチッ
クシール部においてマイクロストリップモードからスト
リップモードへ切り替わるため、この部分においてイン
ピーダンスのミスマッチングが生じて反射損失が増大
し、伝送線路の高周波特性が劣化してしまうという問題
点があった。
However, in the above-mentioned conventional high-frequency circuit package, the line conductor changes from the microstrip mode to the strip mode at the hermetic seal portion sandwiched between the dielectric frame and the dielectric substrate. Since the switching is performed, there is a problem that impedance mismatch occurs in this portion, the reflection loss increases, and the high-frequency characteristics of the transmission line deteriorate.

【0006】また、線路導体と側壁線路導体とによる伝
送線路において、側壁線路導体の存在によってキャパシ
タンス成分の減少やインダクタンス成分の増大が生じ、
そのために伝送線路が高インピーダンスとなって高周波
信号の反射が増大することとなり、高周波信号の伝送特
性が低下してしまうという問題点もあった。特に、側壁
線路導体の長さが長くなった場合にはインピーダンスの
増加が顕著となり、高周波信号の伝送特性が大きく低下
してしまうという問題点があった。
In a transmission line composed of a line conductor and a side wall line conductor, the presence of the side wall line conductor causes a decrease in capacitance component and an increase in inductance component.
For this reason, the transmission line has a high impedance, so that the reflection of the high-frequency signal increases, and the transmission characteristics of the high-frequency signal deteriorate. In particular, when the length of the side wall line conductor is increased, the impedance is remarkably increased, and there is a problem that the transmission characteristics of the high-frequency signal are greatly reduced.

【0007】本発明は上記従来技術の問題点に鑑みて案
出されたものであり、その目的は、誘電体基板の側面に
表面実装用の信号入出力部として側壁線路導体を有する
表面実装型の高周波回路用パッケージにおいて、高周波
信号に対して低反射特性を有する伝送特性が良好な高周
波回路用パッケージを提供することにある。
SUMMARY OF THE INVENTION The present invention has been devised in view of the above-mentioned problems of the prior art, and has as its object to provide a surface mount type having side wall conductors as signal input / output portions for surface mount on the side surfaces of a dielectric substrate. Another object of the present invention is to provide a high-frequency circuit package having low reflection characteristics for high-frequency signals and good transmission characteristics.

【0008】[0008]

【課題を解決するための手段】本発明の高周波回路用パ
ッケージは、内部に接地導体層が形成され、上面に高周
波回路部品を搭載する搭載部が形成された誘電体基板
と、この誘電体基板の上面に前記搭載部を囲んで接合さ
れた誘電体枠体と、前記誘電体基板の下面に形成され、
前記誘電体枠体の内側に対応する位置から外周に至る線
路導体と、前記誘電体基板の側面に前記線路導体と連続
的に形成された側壁線路導体と、前記線路導体の他方の
端部から前記誘電体枠体の内側の前記誘電体基板の上面
にかけて形成された貫通導体とから成り、前記側壁線路
導体は、その長さが前記線路導体により伝送される高周
波信号の波長の4分の1以下であることを特徴とするも
のである。
According to the present invention, there is provided a high-frequency circuit package comprising a dielectric substrate having a ground conductor layer formed therein and a mounting portion for mounting a high-frequency circuit component formed on an upper surface thereof; A dielectric frame joined to the upper surface of the mounting portion so as to surround the mounting portion, and formed on the lower surface of the dielectric substrate;
A line conductor extending from a position corresponding to the inside of the dielectric frame to the outer periphery, a side wall line conductor formed continuously with the line conductor on a side surface of the dielectric substrate, and the other end of the line conductor. A penetrating conductor formed on the upper surface of the dielectric substrate inside the dielectric frame, wherein the length of the side wall line conductor is one quarter of the wavelength of a high frequency signal transmitted by the line conductor. It is characterized by the following.

【0009】また、本発明の高周波回路用パッケージ
は、上記構成において、前記線路導体の両側の前記貫通
導体から前記高周波信号の波長の2分の1以下の距離の
位置に、前記接地導体層に電気的に接続された前記誘電
体基板の上面から下面にわたる接地貫通導体を形成した
ことを特徴とするものである。
In the above structure, the high-frequency circuit package according to the present invention may be arranged such that the ground conductor layer is located at a distance of not more than half the wavelength of the high-frequency signal from the through conductor on both sides of the line conductor. A ground through conductor extending from an upper surface to a lower surface of the dielectric substrate electrically connected to the dielectric substrate is formed.

【0010】本発明の高周波回路用パッケージによれ
ば、上端が誘電体枠体の内側で搭載部の近傍に位置する
貫通導体に高周波回路部品が電気的に接続され、この貫
通導体から誘電体基板の下面に形成された線路導体を介
して接続された側壁線路導体に外部電気回路が接続され
ることから、従来のハーメチックシール部を経由する線
路導体のようにマイクロストリップモードからストリッ
プモードへの切り替わりがないため、インピーダンスの
ミスマッチングが生じることがなく、反射損失が増大し
て伝送線路の高周波特性が劣化してしまうこともない。
According to the high-frequency circuit package of the present invention, the high-frequency circuit component is electrically connected to the through conductor whose upper end is located near the mounting portion inside the dielectric frame, and the through-conductor is connected to the dielectric substrate. Since the external electric circuit is connected to the side wall line conductor connected via the line conductor formed on the lower surface of the device, the mode is switched from the microstrip mode to the strip mode like a conventional line conductor passing through a hermetic seal portion. Therefore, there is no occurrence of impedance mismatching, no increase in reflection loss, and no deterioration in high-frequency characteristics of the transmission line.

【0011】また、側壁線路導体は、その長さが高周波
回路部品が使用され線路導体により伝送される高周波信
号の波長の4分の1以下であることから、伝送線路の長
さによる損失を最小限に抑えることが可能であるため、
この側壁線路導体により高周波特性上で問題となるキャ
パシタンス成分の減少やインダクタンス成分の増大が生
じることがなく、そのために伝送線路が高インピーダン
スとなって高周波信号の反射が増大して高周波信号の伝
送特性が低下してしまうこともなくなる。
Further, since the length of the side wall line conductor is one-fourth or less of the wavelength of the high-frequency signal transmitted by the line conductor using a high-frequency circuit component, the loss due to the length of the transmission line is minimized. It is possible to limit to
This side wall line conductor does not cause a decrease in capacitance component or an increase in inductance component, which is a problem in high frequency characteristics. Therefore, the transmission line has a high impedance and the reflection of high frequency signals increases, so that the transmission characteristics of high frequency signals Does not decrease.

【0012】また、線路導体の両側の貫通導体から高周
波信号の波長の2分の1以下の距離の位置に、誘電体基
板の下面から少なくとも接地導体層にかけて接地導体層
に電気的に接続された誘電体基板の上面から下面にわた
る接地貫通導体を形成した場合には、線路導体と接地貫
通導体との間に適切な容量成分を持たせることが可能で
あるため、貫通導体におけるインピーダンスの不整合を
防ぐことができる。
In addition, at a distance of less than half the wavelength of the high-frequency signal from the through conductor on both sides of the line conductor, the lower surface of the dielectric substrate and at least the ground conductor layer are electrically connected to the ground conductor layer. When a grounded through conductor extending from the upper surface to the lower surface of the dielectric substrate is formed, an appropriate capacitance component can be provided between the line conductor and the grounded through conductor. Can be prevented.

【0013】[0013]

【発明の実施の形態】以下、本発明の高周波回路用パッ
ケージを図面に基づいて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A high-frequency circuit package according to the present invention will be described below with reference to the drawings.

【0014】図1(a)および(b)は、それぞれ本発
明の高周波回路用パッケージの実施の形態の一例を示す
要部断面図および要部平面図である。図1において、1
は誘電体基板、1aはその上面に形成された搭載部、2
は誘電体基板1の内部に形成された接地導体層である。
FIGS. 1A and 1B are a sectional view and a plan view, respectively, showing an example of an embodiment of a high-frequency circuit package according to the present invention. In FIG. 1, 1
Is a dielectric substrate, 1a is a mounting portion formed on the upper surface thereof, 2a
Is a ground conductor layer formed inside the dielectric substrate 1.

【0015】3は誘電体基板1の上面に搭載部1aを囲
んで接合された誘電体枠体であり、この誘電体枠体3と
誘電体基板1とによりパッケージ本体の容器が構成され
る。
Reference numeral 3 denotes a dielectric frame joined to the upper surface of the dielectric substrate 1 so as to surround the mounting portion 1a. The dielectric frame 3 and the dielectric substrate 1 constitute a package body container.

【0016】そして、この上面に蓋体(図示せず)を接
合することにより内部が気密に封止される。また、高周
波回路用パッケージの仕様によっては、蓋体を使用せ
ず、封止樹脂によって高周波回路部品8を封止してもよ
い。
Then, a lid (not shown) is joined to the upper surface to hermetically seal the inside. Further, depending on the specification of the high-frequency circuit package, the high-frequency circuit component 8 may be sealed with a sealing resin without using the lid.

【0017】4は誘電体基板1の下面に誘電体枠体3の
内側の搭載部1a近傍に対応する位置から外周に至るよ
うに形成された高周波信号伝送用の線路導体であり、必
要に応じて複数本あるいは誘電体基板1の種々の方向に
向けて形成される。このような線路導体4と誘電体基板
1・接地導体層2とにより、マイクロストリップ線路構
造の伝送線路が構成される。なお、この線路導体4は、
その両側に同一面接地導体を設けて、コプレーナ線路構
造の伝送線路としてもよい。
Reference numeral 4 denotes a line conductor for high-frequency signal transmission formed on the lower surface of the dielectric substrate 1 so as to extend from a position corresponding to the vicinity of the mounting portion 1a inside the dielectric frame 3 to the outer periphery. Formed in various directions of the dielectric substrate 1. Such a line conductor 4, the dielectric substrate 1 and the ground conductor layer 2 constitute a transmission line having a microstrip line structure. Note that this line conductor 4 is
A coplanar line transmission line may be provided by providing the same plane ground conductor on both sides.

【0018】5は誘電体基板1の側面に線路導体4と連
続的に形成された側壁線路導体であり、外部電気回路
(図示せず)の接続用用導体と電気的に接続することに
より、パッケージ内部の高周波回路部品8と外部電気回
路とが電気的に接続される。なお、接地導体層2と側壁
線路導体5との間は、電気的な絶縁が確保でき、高周波
特性に悪影響を与えない距離が設けられていればよい。
Reference numeral 5 denotes a side wall line conductor formed continuously on the side surface of the dielectric substrate 1 with the line conductor 4, and is electrically connected to a connection conductor of an external electric circuit (not shown). The high-frequency circuit component 8 inside the package and the external electric circuit are electrically connected. It is sufficient that electrical insulation is ensured between the ground conductor layer 2 and the side wall line conductor 5 and a distance that does not adversely affect high frequency characteristics is provided.

【0019】6は線路導体4の他方の端部すなわち誘電
体枠体3の内側の搭載部1a近傍に対応する位置の側の
端部から誘電体枠体3の内側の搭載部1a近傍に対応す
る誘電体基板1の上面にかけて形成された貫通導体であ
り、この貫通導体6には電極パッド7を介して、あるい
は直接その上端に高周波回路部品8が電気的に接続され
る。なお、線路導体4および貫通導体6は、それぞれ誘
電体基板1の比誘電率εr の値に応じて、特性インピー
ダンスZ0 を所望の値とするようにその幅・直径や長さ
が設定される。
Reference numeral 6 denotes the other end of the line conductor 4, that is, from the end on the side corresponding to the vicinity of the mounting portion 1a inside the dielectric frame 3, to the vicinity of the mounting portion 1a inside the dielectric frame 3. A high-frequency circuit component 8 is electrically connected to the through conductor 6 via the electrode pad 7 or directly at the upper end thereof. Incidentally, the line conductor 4 and the through conductor 6, respectively in accordance with the value of the relative dielectric constant epsilon r of the dielectric substrate 1, the characteristic impedance Z 0 of the desired width, diameter and length so that the value is set You.

【0020】8は搭載部1aに搭載される高周波用半導
体素子や高周波回路等の高周波回路部品であり、電極パ
ッド7あるいは貫通導体6とは、図示しないワイヤボン
ディングやリボンボンディングあるいはいわゆるバンプ
接続により電気的に接続される。
Reference numeral 8 denotes a high-frequency circuit component such as a high-frequency semiconductor device or a high-frequency circuit mounted on the mounting portion 1a. The electrode pad 7 or the through conductor 6 is electrically connected to the electrode pad 7 or the through conductor 6 by wire bonding or ribbon bonding (not shown) or so-called bump connection. Connected.

【0021】そして、本発明の高周波回路用パッケージ
においては、側壁線路導体5の長さを、高周波回路部品
8が使用され線路導体4により伝送される高周波信号の
波長の4分の1以下としている。これにより、伝送線路
の長さによる損失を最小限に抑えることが可能であるた
め、この側壁線路導体により高周波特性上で問題となる
キャパシタンス成分の減少やインダクタンス成分の増大
が生じることがなく、そのために伝送線路が高インピー
ダンスとなって高周波信号の反射が増大して高周波信号
の伝送特性が低下してしまうことがなくなる。このよう
な作用効果は、特に高周波信号の周波数が10GHz以上
の場合に特に効果的なものである。中でも、周波数が30
GHz以上の高周波信号に対しては、側壁線路導体5の
長さをその高周波信号の波長の8分の1以下とすること
により、そのようなより高周波の領域においてもインピ
ーダンスの増加を有効に抑制することができ、低反射特
性を有する良好な高周波特性の高周波回路用パッケージ
となる。
In the high-frequency circuit package of the present invention, the length of the side wall line conductor 5 is set to not more than 4 of the wavelength of the high-frequency signal transmitted by the line conductor 4 using the high-frequency circuit component 8. . As a result, it is possible to minimize the loss due to the length of the transmission line, so that the sidewall component does not cause a decrease in the capacitance component or an increase in the inductance component, which is a problem in the high-frequency characteristics. In addition, it is possible to prevent the transmission line from becoming high impedance, increasing the reflection of the high-frequency signal and deteriorating the transmission characteristics of the high-frequency signal. Such an effect is particularly effective when the frequency of the high-frequency signal is 10 GHz or more. Among them, the frequency is 30
For a high-frequency signal of GHz or higher, the length of the side wall line conductor 5 is set to 1/8 or less of the wavelength of the high-frequency signal, thereby effectively suppressing an increase in impedance even in such a higher frequency region. Thus, a high-frequency circuit package having low reflection characteristics and good high-frequency characteristics can be obtained.

【0022】このような側壁線路導体5は、通常は誘電
体基板1の側面の長さ(側壁の高さ)とほぼ同じ長さに
設定されることとなるが、誘電体基板1の側面の長さよ
り短いものとして誘電体基板1の側面に形成してもよ
い。これにより、誘電体基板1に必要な強度と高周波信
号伝送用の伝送線路に必要な高周波特性とをともに確保
して、信頼性に優れた高周波回路用パッケージとするこ
とができる。
Such a side wall line conductor 5 is usually set to a length substantially equal to the length of the side surface of the dielectric substrate 1 (height of the side wall). It may be formed on the side surface of the dielectric substrate 1 as shorter than the length. Thereby, both the strength required for the dielectric substrate 1 and the high-frequency characteristics required for the transmission line for transmitting a high-frequency signal are ensured, and a highly reliable high-frequency circuit package can be obtained.

【0023】次に、本発明の高周波回路用パッケージの
実施の形態の他の例を図2(a)および(b)に図1と
同様の要部断面図および要部平面図で示す。
Next, another embodiment of the high-frequency circuit package according to the present invention will be described with reference to FIGS. 2A and 2B which are a cross-sectional view and a plan view of a main part similar to FIG.

【0024】図2において図1と同様の箇所には同じ符
号を付してあり、9は、線路導体4の両側の貫通導体6
から高周波信号の波長の2分の1以下の距離の位置に、
接地導体層2に電気的に接続された誘電体基板1の上面
から下面にわたる接地貫通導体である。この接地貫通導
体9と線路導体4との距離は、貫通導体6から図2
(b)中に一点鎖線で示す高周波信号の波長の2分の1
以下の距離の範囲内に設定すればよい。
In FIG. 2, the same parts as those in FIG. 1 are denoted by the same reference numerals, and 9 is a through conductor 6 on both sides of the line conductor 4.
At a distance less than half the wavelength of the high-frequency signal from
The ground through conductor extends from the upper surface to the lower surface of the dielectric substrate 1 electrically connected to the ground conductor layer 2. The distance between the ground through conductor 9 and the line conductor 4 is different from the through conductor 6 in FIG.
(B) A half of the wavelength of the high-frequency signal indicated by a dashed line in FIG.
What is necessary is just to set it within the range of the following distances.

【0025】さらに、接地貫通導体9は線路導体4の両
側にそれぞれ複数本形成してもよく、誘電体基板1の下
面において線路導体4の両側にいわゆるコプレーナ線路
構造を構成するように同一面接地導体を設けておき、こ
れらと接地貫通導体9とを接続するようにしてもよい。
Further, a plurality of ground through conductors 9 may be formed on both sides of the line conductor 4 on the both sides of the line conductor 4. On the lower surface of the dielectric substrate 1, both sides of the line conductor 4 are grounded on the same plane so as to form a so-called coplanar line structure. Conductors may be provided, and these may be connected to the ground through conductor 9.

【0026】このような接地貫通導体9を形成すること
により、高インピーダンスの貫通導体6に対して容量成
分を補うことが可能であるため、貫通導体6におけるイ
ンピーダンスの不整合を防ぐことができる。その結果、
高周波回路部品8と外部電気回路との間の電気的接続に
おけるインピーダンスのミスマッチングを効果的に抑え
て高周波信号の伝送特性の劣化を抑えることができ、さ
らに低反射損失の高周波回路用パッケージとすることが
できる。この接地貫通導体9はスルーホール導体やビア
導体等により形成すればよい。
By forming such a grounded through conductor 9, it is possible to supplement a capacitive component with respect to the high impedance through conductor 6, so that impedance mismatch in the through conductor 6 can be prevented. as a result,
Impedance mismatch in the electrical connection between the high-frequency circuit component 8 and the external electric circuit can be effectively suppressed to suppress the deterioration of the transmission characteristics of the high-frequency signal. be able to. This ground through conductor 9 may be formed of a through-hole conductor, a via conductor, or the like.

【0027】本発明の高周波回路用パッケージにおける
誘電体基板1には、例えばアルミナセラミックスや窒化
アルミニウムセラミックス等のセラミックス材料あるい
はガラスセラミックス等の無機系材料、またはPTFE
(ポリテトラフルオロエチレン)・ガラスエポキシ・ポ
リイミド等の樹脂系材料等を用いればよい。例えばガラ
スセラミックスから成る場合であれば、ガラスセラミッ
クスのグリーンシートに必要に応じて凹部や貫通導体と
なる貫通孔を形成し、所定の箇所に接地導体層2・線路
導体4・側壁線路導体5や貫通導体6・接地貫通導体9
となる金属ペーストを印刷塗布・充填して、これらのグ
リーンシートを上下に積層して約1000℃で一体焼成する
ことにより製作すればよい。
The dielectric substrate 1 in the high-frequency circuit package of the present invention is made of a ceramic material such as alumina ceramics or aluminum nitride ceramics, an inorganic material such as glass ceramics, or PTFE.
A resin material such as (polytetrafluoroethylene), glass epoxy, or polyimide may be used. For example, in the case of glass ceramics, a concave portion or a through hole serving as a through conductor is formed in a green sheet of glass ceramics as necessary, and a ground conductor layer 2, a line conductor 4, a side wall line conductor 5, Through conductor 6 / Ground through conductor 9
The green paste is printed and applied, and these green sheets are stacked one on top of the other and fired integrally at about 1000 ° C.

【0028】あるいは、焼成された誘電体基板1の上面
・側面・下面に種々の薄膜法や印刷・焼成法により所定
パターンの接地導体層2・線路導体4・側壁線路導体5
・貫通導体6を形成し、接地貫通導体9を形成してもよ
い。
Alternatively, the ground conductor layer 2, the line conductor 4, and the side wall line conductor 5 having a predetermined pattern are formed on the upper surface, side surfaces, and lower surface of the fired dielectric substrate 1 by various thin film methods or printing and firing methods.
The through conductor 6 may be formed and the ground through conductor 9 may be formed.

【0029】接地導体層2・線路導体4・側壁線路導体
5・貫通導体6および接地貫通導体9を形成するための
導体としては、タングステンや銅・ニッケル・金・クロ
ム・ニクロム・窒化タンタル・チタン・パラジウムおよ
びこれらの合金等を用いればよく、その形成は、種々の
薄膜法や薄膜法とフォトリソグラフィ法との組合せ、あ
るいは印刷・焼成法等によればよい。
The conductor for forming the ground conductor layer 2, the line conductor 4, the side wall line conductor 5, the through conductor 6, and the ground through conductor 9 may be tungsten, copper, nickel, gold, chrome, nichrome, tantalum nitride, or titanium. -Palladium and alloys thereof may be used, and the formation may be performed by various thin film methods, a combination of a thin film method and a photolithography method, or a printing and firing method.

【0030】[0030]

【実施例】〔例1〕図1に示した本発明の高周波回路用
パッケージとして、内部に接地導体層2を形成した比誘
電率εr が9の誘電体基板1の下面に、誘電体枠体3の
内側の搭載部1a近傍に対応する位置から誘電体基板1
の外周に至る線路幅が150 μm・同一面接地導体との間
隔が100 μmであるコプレーナ線路構造の線路導体4を
形成した。また、誘電体基板1の側面に線路幅が150 μ
mの側壁線路導体5を誘電体基板1の外周において線路
導体4と連続的に、その長さを変えたものをいくつか作
製した。また、線路導体4の他方の端部から誘電体枠体
3の内側の搭載部1a近傍に対応する位置の誘電体基板
1の上面にかけて、直径が0.2 mmの貫通導体6を形成
した。
As EXAMPLES EXAMPLE 1 a high-frequency circuit package of the present invention shown in FIG. 1, the lower surface of the dielectric substrate 1 of dielectric constant to form a ground conductor layer 2 inside epsilon r is 9, the dielectric frame From the position corresponding to the vicinity of the mounting portion 1a inside the body 3, the dielectric substrate 1
A line conductor 4 having a coplanar line structure having a line width reaching the outer periphery of 150 μm and an interval of 100 μm from a ground conductor on the same plane was formed. The line width is 150 μm on the side surface of the dielectric substrate 1.
A number of m side wall line conductors 5 having different lengths were manufactured continuously with the line conductors 4 on the outer periphery of the dielectric substrate 1. Further, a through conductor 6 having a diameter of 0.2 mm was formed from the other end of the line conductor 4 to the upper surface of the dielectric substrate 1 at a position corresponding to the vicinity of the mounting portion 1a inside the dielectric frame 3.

【0031】そして、側壁線路導体5の長さを変えたと
きの30GHzの高周波信号に対する反射特性を解析した
ところ、図3に示すような結果を得た。図3は側壁線路
導体5の長さに対する高周波信号の反射損失の変化を示
す線図であり、横軸は側壁線路導体5の長さを、縦軸は
反射損失の大きさ(単位:dB)を表わし、図中の白丸
は解析値を、実線は特性曲線を示している。
Then, when the reflection characteristics for a high frequency signal of 30 GHz when the length of the side wall line conductor 5 was changed were analyzed, the results shown in FIG. 3 were obtained. FIG. 3 is a diagram showing a change in the reflection loss of the high-frequency signal with respect to the length of the side wall line conductor 5. The horizontal axis represents the length of the side wall line conductor 5, and the vertical axis represents the magnitude of the reflection loss (unit: dB). In the figure, open circles indicate analysis values, and solid lines indicate characteristic curves.

【0032】図3から分かるように、側壁線路導体5の
長さをλ/4以下とすることにより、反射損失は高周波
回路用パッケージとして実用的な−10dB以下の小さな
値に抑えられる。特に、側壁線路導体5の長さをλ/8
以下とすることにより、反射損失は−15dBを下回る非
常に小さな値に抑えられ、良好な反射特性を有すること
が分かる。
As can be seen from FIG. 3, by setting the length of the side wall line conductor 5 to λ / 4 or less, the reflection loss can be suppressed to a small value of -10 dB or less which is practical for a high frequency circuit package. In particular, the length of the side wall line conductor 5 is set to λ / 8.
By setting the values as follows, it is understood that the reflection loss is suppressed to a very small value of less than -15 dB, and that good reflection characteristics are obtained.

【0033】〔例2〕〔例1〕と同様の高周波回路用パ
ッケージにおいて、図2に示した本発明の高周波回路用
パッケージとして、誘電体基板1にεr が9.9 ・8.6 お
よび5.7 のものを用い、線路導体4の両側の貫通導体6
から高周波信号の波長の2分の1以下の距離の位置に、
直径が0.2 mmの接地貫通導体9の位置を変えて形成し
たものをいくつか作製した。
Example 2 In the same high-frequency circuit package as in [Example 1], the dielectric substrate 1 having ε r of 9.9 · 8.6 and 5.7 as the high-frequency circuit package of the present invention shown in FIG. The through conductors 6 on both sides of the line conductor 4
At a distance less than half the wavelength of the high-frequency signal from
Several pieces were formed by changing the position of the ground through conductor 9 having a diameter of 0.2 mm.

【0034】そして、それらについて接地貫通導体9の
位置による貫通導体6の特性インピーダンスの変化を解
析したところ、図4に示すような結果を得た。図4は貫
通導体6からの接地貫通導体9の距離に対する貫通導体
6の特性インピーダンスの変化を示す線図であり、横軸
は貫通導体6からの接地貫通導体9の距離(単位:m
m)を、縦軸は特性インピーダンス(単位:Ω)を表わ
し、図中の特性曲線は、一点鎖線・破線および実線がそ
れぞれεr が9.9 ・8.6 および5.7 の誘電体基板1にお
ける結果を示している。なお、これらの貫通導体6と接
地端子導体9との距離は0.4 mmから1.0 mmの間で変
えており、この距離は、60GHz程度の信号の伝送波長
の2分の1以下に相当する。
Then, when a change in the characteristic impedance of the through conductor 6 depending on the position of the ground through conductor 9 was analyzed, a result as shown in FIG. 4 was obtained. FIG. 4 is a diagram showing a change in the characteristic impedance of the through conductor 6 with respect to the distance of the ground through conductor 9 from the through conductor 6. The horizontal axis represents the distance (unit: m) of the ground through conductor 9 from the through conductor 6.
m), the vertical axis represents characteristic impedance (unit: Ω), and the characteristic curve in the figure shows the results for the dielectric substrate 1 with ε r of 9.9, 8.6, and 5.7, respectively, indicated by a dashed line, a broken line, and a solid line. I have. The distance between the penetrating conductor 6 and the ground terminal conductor 9 is changed between 0.4 mm and 1.0 mm, and this distance corresponds to a half or less of a signal transmission wavelength of about 60 GHz.

【0035】図4から分かるように、側壁線路導体5か
ら高周波信号の波長の2分の1以下の距離に接地貫通導
体9を設けることで、インピーダンスの不整合を防ぎ、
また、不連続部に発生する高次モードを抑えることがで
きた。
As can be seen from FIG. 4, by providing the ground through conductor 9 at a distance of one half or less of the wavelength of the high frequency signal from the side wall line conductor 5, impedance mismatch can be prevented.
In addition, a higher-order mode generated in a discontinuous portion could be suppressed.

【0036】〔例3〕〔例1〕と同様の高周波信号用パ
ッケージにおいて、誘電体基板1の厚みを400 μmとす
ることで、側壁線路導体5の長さを30GHzにおける高
周波信号の波長の8分の1以下にし、また、貫通導体6
の端から1mmの距離で2本の接地貫通導体9を配置す
ることにより、本発明の高周波回路用パッケージの試料
Aを得た。
[Example 3] In the same high-frequency signal package as in [Example 1], by setting the thickness of the dielectric substrate 1 to 400 μm, the length of the side wall line conductor 5 is set to 8 of the wavelength of the high-frequency signal at 30 GHz. Less than 1 /
By arranging the two ground through conductors 9 at a distance of 1 mm from the end of, a sample A of the high-frequency circuit package of the present invention was obtained.

【0037】また、試料Aにおける2本の接地貫通導体
9を除くことにより、比較例としての従来の高周波回路
用パッケージの試料Bを得た。
A sample B of a conventional high-frequency circuit package as a comparative example was obtained by removing the two ground through conductors 9 in the sample A.

【0038】これら試料A・Bについて、3次元構造解
析シミュレータ(HFSS)により、Sパラメータの周
波数特性を得た。
The frequency characteristics of S-parameters of these samples A and B were obtained by a three-dimensional structural analysis simulator (HFSS).

【0039】その結果を図5に示す。図5はSパラメー
タの周波数特性を示す線図であり、横軸は周波数(単
位:GHz)を、縦軸は反射係数(単位:dB)を表わ
し、図中の実線は試料AのS11についての特性曲線を、
破線は試料BのS11についての特性曲線を示している。
FIG. 5 shows the result. Figure 5 is a graph showing frequency characteristics of S parameters, the horizontal axis represents the frequency (unit: GHz) and the vertical axis the reflection coefficient (unit: dB) represents the solid line in the figure for S 11 of the sample A The characteristic curve of
The broken line shows a characteristic curve for S 11 of sample B.

【0040】図5より分かるように、試料Aにおいては
貫通導体6から高周波信号の波長の2分の1以下の距離
に接地貫通導体9を設けたため、貫通導体6のインピー
ダンスの不整合を防ぐことができ、試料Bと比べて良好
な伝送特性になった。
As can be seen from FIG. 5, in the sample A, since the ground through conductor 9 is provided at a distance of one half or less of the wavelength of the high frequency signal from the through conductor 6, it is possible to prevent the impedance of the through conductor 6 from being mismatched. The transmission characteristics were better than those of the sample B.

【0041】以上の結果より、本発明の高周波回路用パ
ッケージによれば、誘電体基板の側面に表面実装用の信
号入出力部として側壁線路導体を有する表面実装型の高
周波回路用パッケージにおいて、高周波帯においても低
反射な良好な伝送特性を有するものであることが確認で
きた。
According to the above results, according to the high-frequency circuit package of the present invention, the high-frequency circuit package of the surface-mount type having the side wall conductor as the signal input / output section for the surface mount on the side surface of the dielectric substrate has a high frequency. It was confirmed that the band also had good transmission characteristics with low reflection in the band.

【0042】なお、本発明は以上の例に限定されるもの
ではなく、本発明の要旨を逸脱しない範囲で種々の変更
・改良を加えることは何ら差し支えない。
It should be noted that the present invention is not limited to the above examples, and various changes and improvements can be made without departing from the scope of the present invention.

【0043】[0043]

【発明の効果】本発明の高周波回路用パッケージによれ
ば、誘電体基板の側面に表面実装用の信号入出力部とし
て側壁線路導体を有する表面実装型の高周波回路用パッ
ケージにおいて、上端が誘電体枠体の内側で搭載部の近
傍に位置する貫通導体に高周波回路部品が電気的に接続
され、この貫通導体から誘電体基板の下面に形成された
線路導体を介して接続された側壁線路導体に外部電気回
路が接続されることから、従来のハーメチックシール部
を経由する線路導体のようにインピーダンスのミスマッ
チングが生じることがなく、反射損失が増大して伝送線
路の高周波特性が劣化してしまうことがない。
According to the high frequency circuit package of the present invention, in a surface mount type high frequency circuit package having a side wall line conductor as a signal input / output unit for surface mounting on the side surface of a dielectric substrate, the upper end is made of a dielectric material. A high-frequency circuit component is electrically connected to a through conductor located in the vicinity of the mounting portion inside the frame, and from the through conductor to a side wall line conductor connected via a line conductor formed on the lower surface of the dielectric substrate. Since the external electric circuit is connected, impedance mismatch does not occur unlike the conventional line conductor that passes through the hermetic seal, and the return loss increases and the high-frequency characteristics of the transmission line deteriorate. There is no.

【0044】また、側壁線路導体は、その長さが高周波
回路部品が使用され線路導体により伝送される高周波信
号の波長の4分の1以下であることから、この側壁線路
導体により高周波特性上で問題となるキャパシタンス成
分の減少やインダクタンス成分の増大が生じることがな
く、そのために伝送線路が高インピーダンスとなって高
周波信号の反射が増大して高周波信号の伝送特性が低下
してしまうこともなくなる。
Further, since the length of the side wall line conductor is less than 4 of the wavelength of the high frequency signal transmitted by the line conductor using a high frequency circuit component, the side wall line conductor has a high frequency characteristic. The problem of a decrease in the capacitance component and an increase in the inductance component, which are problematic, does not occur. Therefore, the transmission line does not have a high impedance, so that the reflection of the high-frequency signal increases and the transmission characteristic of the high-frequency signal does not deteriorate.

【0045】また、線路導体の両側の貫通導体から高周
波信号の波長の2分の1以下の距離の位置に、誘電体基
板の下面から少なくとも接地導体層にかけて接地導体層
に電気的に接続された誘電体基板の上面から下面にわた
る接地貫通導体を形成した場合には、貫通導体における
インピーダンスの不整合を防ぐことができる。
Further, at a position which is less than half the wavelength of the high frequency signal from the through conductors on both sides of the line conductor, the lower surface of the dielectric substrate and at least the ground conductor layer are electrically connected to the ground conductor layer. When the ground through conductor is formed from the upper surface to the lower surface of the dielectric substrate, impedance mismatch in the through conductor can be prevented.

【0046】以上により、本発明によれば、誘電体基板
の側面に表面実装用の信号入出力部として側壁線路導体
を有する表面実装型の高周波回路用パッケージにおい
て、高周波信号に対して低反射特性を有する伝送特性が
良好な高周波回路用パッケージを提供することができ
た。
As described above, according to the present invention, in a surface mount type high frequency circuit package having side wall conductors as signal input / output portions for surface mount on the side surfaces of a dielectric substrate, low reflection characteristics for high frequency signals are obtained. A high-frequency circuit package having good transmission characteristics having the above characteristics can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)および(b)は、それぞれ本発明の高周
波回路用パッケージの実施の形態の一例を示す要部断面
図および要部平面図である。
FIGS. 1 (a) and 1 (b) are a cross-sectional view and a plan view, respectively, showing an example of an embodiment of a high-frequency circuit package according to the present invention.

【図2】(a)および(b)は、それぞれ本発明の高周
波回路用パッケージの実施の形態の他の例を示す要部断
面図および要部平面図である。
FIGS. 2 (a) and 2 (b) are a cross-sectional view and a plan view, respectively, showing another example of a high-frequency circuit package according to another embodiment of the present invention.

【図3】本発明の高周波回路用パッケージにおける側壁
線路導体の長さに対する高周波信号の反射損失の変化を
示す線図である。
FIG. 3 is a diagram showing a change in reflection loss of a high-frequency signal with respect to the length of a side wall line conductor in the high-frequency circuit package of the present invention.

【図4】本発明の高周波信号用パッケージにおける接地
貫通導体の位置に対する貫通導体の特性インピーダンス
の変化を示す線図である。
FIG. 4 is a diagram showing a change in characteristic impedance of a through conductor with respect to a position of a ground through conductor in the high-frequency signal package of the present invention.

【図5】高周波回路用パッケージにおけるSパラメータ
の周波数特性を示す線図である。
FIG. 5 is a diagram showing frequency characteristics of S parameters in a high-frequency circuit package.

【符号の説明】[Explanation of symbols]

1・・・・・誘電体基板 1a・・・・搭載部 2・・・・・接地導体層 3・・・・・誘電体枠体 4・・・・・線路導体 5・・・・・側壁線路導体 6・・・・・貫通導体 8・・・・・高周波回路部品 9・・・・・接地貫通導体 1 Dielectric substrate 1a Mounting part 2 Ground conductor layer 3 Dielectric frame 4 Line conductor 5 Side wall Line conductor 6 ... Through conductor 8 ... High frequency circuit component 9 ... Ground through conductor

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 内部に接地導体層が形成され、上面に高
周波回路部品を搭載する搭載部が形成された誘電体基板
と、該誘電体基板の上面に前記搭載部を囲んで接合され
た誘電体枠体と、前記誘電体基板の下面に形成され、前
記誘電体枠体の内側に対応する位置から外周に至る線路
導体と、前記誘電体基板の側面に前記線路導体と連続的
に形成された側壁線路導体と、前記線路導体の他方の端
部から前記誘電体枠体の内側の前記誘電体基板の上面に
かけて形成された貫通導体とから成り、前記側壁線路導
体は、その長さが前記線路導体により伝送される高周波
信号の波長の4分の1以下であることを特徴とする高周
波回路用パッケージ。
A dielectric substrate having a ground conductor layer formed therein and a mounting portion for mounting a high-frequency circuit component formed on an upper surface thereof, and a dielectric bonded to the upper surface of the dielectric substrate so as to surround the mounting portion. A body frame, a line conductor formed on the lower surface of the dielectric substrate and extending from a position corresponding to the inside of the dielectric frame to the outer periphery, and formed continuously with the line conductor on a side surface of the dielectric substrate. And a through conductor formed from the other end of the line conductor to the upper surface of the dielectric substrate inside the dielectric frame, and the length of the sidewall line conductor is A high-frequency circuit package, wherein the wavelength of the high-frequency signal transmitted by the line conductor is one-fourth or less.
【請求項2】 前記線路導体の両側の前記貫通導体から
前記高周波信号の波長の2分の1以下の距離の位置に、
前記接地導体層に電気的に接続された前記誘電体基板の
上面から下面にわたる接地貫通導体を形成したことを特
徴とする請求項1記載の高周波回路用パッケージ。
2. A position at a distance equal to or less than half the wavelength of the high-frequency signal from the through conductor on both sides of the line conductor,
2. The high frequency circuit package according to claim 1, wherein a ground through conductor extending from an upper surface to a lower surface of said dielectric substrate electrically connected to said ground conductor layer is formed.
JP10334655A 1998-11-25 1998-11-25 High-frequency circuit package Pending JP2000164755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10334655A JP2000164755A (en) 1998-11-25 1998-11-25 High-frequency circuit package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10334655A JP2000164755A (en) 1998-11-25 1998-11-25 High-frequency circuit package

Publications (1)

Publication Number Publication Date
JP2000164755A true JP2000164755A (en) 2000-06-16

Family

ID=18279793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10334655A Pending JP2000164755A (en) 1998-11-25 1998-11-25 High-frequency circuit package

Country Status (1)

Country Link
JP (1) JP2000164755A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003100941A (en) * 2001-09-27 2003-04-04 Kyocera Corp Wiring board and mounting structure thereof
JP2003347809A (en) * 2002-05-23 2003-12-05 Kyocera Corp High-frequency line to waveguide converter
JP2006332317A (en) * 2005-05-26 2006-12-07 Kyocera Corp Circuit substrate for transmitting high-frequency and high frequency circuit substrate
WO2015129731A1 (en) * 2014-02-26 2015-09-03 京セラ株式会社 Electronic-component-containing package and electronic device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01173946U (en) * 1988-05-25 1989-12-11
JPH03276745A (en) * 1990-03-27 1991-12-06 Mitsubishi Electric Corp Semiconductor device
JPH07221512A (en) * 1994-02-04 1995-08-18 Sony Corp High frequency connection line
JPH1074863A (en) * 1996-08-30 1998-03-17 Kyocera Corp Mounting structure for high-frequency semiconductor device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01173946U (en) * 1988-05-25 1989-12-11
JPH03276745A (en) * 1990-03-27 1991-12-06 Mitsubishi Electric Corp Semiconductor device
JPH07221512A (en) * 1994-02-04 1995-08-18 Sony Corp High frequency connection line
JPH1074863A (en) * 1996-08-30 1998-03-17 Kyocera Corp Mounting structure for high-frequency semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003100941A (en) * 2001-09-27 2003-04-04 Kyocera Corp Wiring board and mounting structure thereof
JP4587625B2 (en) * 2001-09-27 2010-11-24 京セラ株式会社 Wiring board and its mounting structure
JP2003347809A (en) * 2002-05-23 2003-12-05 Kyocera Corp High-frequency line to waveguide converter
JP2006332317A (en) * 2005-05-26 2006-12-07 Kyocera Corp Circuit substrate for transmitting high-frequency and high frequency circuit substrate
JP4646699B2 (en) * 2005-05-26 2011-03-09 京セラ株式会社 High frequency transmission circuit board and high frequency circuit board
WO2015129731A1 (en) * 2014-02-26 2015-09-03 京セラ株式会社 Electronic-component-containing package and electronic device

Similar Documents

Publication Publication Date Title
JPH10242716A (en) High frequency input and output terminal and package for containing high frequency semiconductor device using it
US10777493B2 (en) Semiconductor device mounting board and semiconductor package
JP2000164755A (en) High-frequency circuit package
JP3618046B2 (en) High frequency circuit package
JP3725983B2 (en) High frequency circuit package
JP3935082B2 (en) High frequency package
JP3810566B2 (en) High frequency package
JP4454144B2 (en) High frequency circuit package
JP3297607B2 (en) High frequency circuit package
JP2000164743A (en) High-frequency circuit package
JP3692204B2 (en) Transmission line structure
JP2001127182A (en) High-frequency circuit package
JPH05199019A (en) High frequency circuit package
JP3176337B2 (en) Mounting structure of high frequency semiconductor package
JP3395290B2 (en) High frequency circuit board
JP3600729B2 (en) High frequency circuit package
JP3281813B2 (en) Transmission line structure
JP3261094B2 (en) Mounting structure of high frequency wiring board
JP2001230342A (en) Mounting structure of high frequency circuit component mounting board
JPH11339898A (en) High frequency input and output terminal, and package for high frequency circuit
JP3145670B2 (en) Mounting structure of high frequency semiconductor package
JP3987659B2 (en) High frequency semiconductor device
JP4005858B2 (en) High frequency circuit component mounting board, high frequency semiconductor package, and mounting structure thereof
JP3305020B2 (en) Mounting structure of cavity-down type semiconductor device
JP3297604B2 (en) High frequency circuit package

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050308

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050517

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20050920