JP2000016840A - Glass substrate for flat panel display and production of display substrate - Google Patents
Glass substrate for flat panel display and production of display substrateInfo
- Publication number
- JP2000016840A JP2000016840A JP10199840A JP19984098A JP2000016840A JP 2000016840 A JP2000016840 A JP 2000016840A JP 10199840 A JP10199840 A JP 10199840A JP 19984098 A JP19984098 A JP 19984098A JP 2000016840 A JP2000016840 A JP 2000016840A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- substrate
- display
- glass
- residual stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
- C03B25/02—Annealing glass products in a discontinuous way
- C03B25/025—Glass sheets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Liquid Crystal (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、フラットパネルディス
プレイのアレイ基板材料や、その対向基板材料として用
いられるガラス基板及びそれを用いたディスプレイ基板
の製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate used as an array substrate material of a flat panel display, a counter substrate material thereof, and a method of manufacturing a display substrate using the same.
【０００２】[0002]
【従来の技術】従来よりフラットパネルディスプレイ用
ガラス基板として、０．３〜３．０ｍｍ程度の厚みを有
する矩形状の板ガラスが大量に用いられている。特に近
年になって、α−Ｓｉ ＴＦＴ（Ａｍｏｒｐｈｏｕｓ−
Ｓｉ Ｔｈｉｎ Ｆｉｌｍ Ｔｒａｓｉｓｔｏｒ）液晶
ディスプレイ等の薄膜電気回路を用いたフラットパネル
ディスプレイ市場が急速に拡大している。2. Description of the Related Art Heretofore, rectangular glass sheets having a thickness of about 0.3 to 3.0 mm have been used in large quantities as glass substrates for flat panel displays. Particularly in recent years, α-Si TFTs (Amorphous-
The market for flat panel displays using thin film electric circuits such as Si Thin Film Transistor liquid crystal displays is rapidly expanding.
【０００３】ところで最近のフラットパネルディスプレ
イ用ガラス基板には、大板化が求められている。すなわ
ち最終製品であるディスプレイの大きさは、対角１２イ
ンチ程度のものが主流であるが、ディスプレイ基板の製
造コストの低減と、スループットの向上を目的として大
きなガラス基板から複数のディスプレイ基板を作製する
マルチ方式が採用されている。つまりガラスメーカーで
成形された大型のガラス基板（ガラス素板）上に、複数
分の回路パターンを形成した後、回路パターン毎にガラ
ス基板を分割切断して複数のディスプレイ基板を作製す
る方式が採用されており、これらの基板は、ディスプレ
イの背面基板となるアレイ基板として使用されている。
また同様に、アレイ基板の対向基板（前面基板）につい
ても大型のガラス基板に複数のパターンを形成した後、
分割切断する生産方式が採られている。Recently, a glass substrate for a flat panel display has been required to be large. In other words, the size of the display, which is the final product, is generally about 12 inches diagonally, but a plurality of display substrates are manufactured from a large glass substrate for the purpose of reducing the production cost of the display substrate and improving the throughput. A multi-system is adopted. In other words, a method is used in which a plurality of circuit patterns are formed on a large glass substrate (glass plate) molded by a glass maker, and then the glass substrate is divided and cut for each circuit pattern to produce a plurality of display substrates. These substrates are used as an array substrate serving as a rear substrate of a display.
Similarly, for the counter substrate (front substrate) of the array substrate, after forming a plurality of patterns on a large glass substrate,
The production system is divided and cut.
【０００４】そのため従来のガラス基板の大きさ（縦横
寸法）は、３００×４００ｍｍサイズや３７０×４７０
ｍｍサイズであったが、最近では、５５０×６５０ｍｍ
サイズや、それ以上のサイズのガラス基板が必要とされ
るようになってきている。Therefore, the size (length and width) of a conventional glass substrate is 300 × 400 mm or 370 × 470.
mm size, but recently 550 x 650mm
A glass substrate of a size or larger is required.
【０００５】[0005]
【発明が解決しようとする課題】上記したように最近に
なって、フラットパネルディスプレイ用ガラス基板は、
大板化が進められているが、これに伴ってガラス基板を
分割切断した後に、ガラス基板が変形するという問題が
発生している。As described above, glass substrates for flat panel displays have recently been developed as follows.
Although the size of the glass substrate has been increased, a problem has arisen that the glass substrate is deformed after the glass substrate is divided and cut.
【０００６】例えば液晶ディスプレイのアレイ基板とし
て用いられるガラス基板上には、薄膜電気回路や、その
他の各種金属膜、絶縁膜等を組み合わせた回路パターン
が形成され、その対向基板であるカラーフィルター基板
には、ＲＧＢパターンが形成されるが、このような画素
パターンが形成されたガラス基板が分割切断された後に
変形すると、互いの画素パターンが所期の設計からずれ
てしまい、アレイ基板の回路パターンとカラーフィルタ
ー基板のパターンとが一致せず、最終製品である液晶デ
ィスプレイの表示不良という致命的な欠陥につながるこ
とがあるため大きな問題となっている。For example, on a glass substrate used as an array substrate of a liquid crystal display, a circuit pattern formed by combining a thin film electric circuit and other various metal films and insulating films is formed. The RGB pattern is formed, but if the glass substrate on which such a pixel pattern is formed is divided and cut and then deformed, the respective pixel patterns deviate from the intended design, and the circuit pattern of the array substrate and This is a serious problem because the pattern of the color filter substrate does not match, which may lead to a fatal defect such as display failure of a liquid crystal display as a final product.
【０００７】本発明の目的は、大板ガラスであっても、
分割切断後の変形が少なく、パターンが所期の設計から
ずれてディスプレイの表示不良が発生するということが
ないフラットパネルディスプレイ用ガラス基板と、それ
を用いたディスプレイ基板の製造方法を提供することで
ある。An object of the present invention is to provide a large sheet glass,
By providing a glass substrate for a flat panel display and a method of manufacturing a display substrate using the same, in which deformation after division cutting is small and a pattern is not deviated from an intended design and display failure of a display does not occur. is there.
【０００８】[0008]
【課題を解決するための手段】本発明者等は、上記目的
を達成すべく種々の実験を繰り返した結果、ガラス基板
が分割切断された後に変形する原因が、ガラス基板の平
面方向に大きな残留応力が発生するからであり、平面方
向の残留応力を一定値以下に抑えることによって、ガラ
ス基板の分割切断後の変形が抑えられることを見いだ
し、本発明を提案するに至った。As a result of repeating various experiments in order to achieve the above object, the present inventors have found that the cause of deformation after the glass substrate is divided and cut is a large residual in the plane direction of the glass substrate. This is because stress is generated, and it has been found that by suppressing the residual stress in the planar direction to a certain value or less, the deformation of the glass substrate after divided cutting can be suppressed, and the present invention has been proposed.
【０００９】すなわち本発明のフラットパネルディスプ
レイ用ガラス基板は、平面方向の残留応力が、５ｋｇ／
ｃｍ2 以下であることを特徴とする。That is, the glass substrate for a flat panel display of the present invention has a residual stress in the plane direction of 5 kg /
cm 2 or less.
【００１０】また本発明のディスプレイ基板の製造方法
は、平面方向の残留応力が、５ｋｇ／ｃｍ2 以下である
ガラス基板上に複数のパターンを形成した後、パターン
毎にガラス基板を分割切断することを特徴とする。Further, in the method of manufacturing a display substrate according to the present invention, after forming a plurality of patterns on a glass substrate having a residual stress in a planar direction of 5 kg / cm 2 or less, the glass substrate is divided and cut for each pattern. It is characterized by.
【００１１】さらに本発明のガラス基板は、縦寸法が４
００ｍｍ以上、横寸法が５００ｍｍ以上であることを特
徴とする。Further, the glass substrate of the present invention has a vertical dimension of 4
It is characterized by being at least 00 mm and having a lateral dimension of at least 500 mm.
【００１２】[0012]
【作用】フラットパネルディスプレイ用ガラス基板に残
留応力が発生するメカニズムは、次のとおりである。The mechanism by which residual stress is generated in the glass substrate for a flat panel display is as follows.
【００１３】この種のガラス基板を成形するための一般
の工業的な方法としては、フロート法、オーバーフロー
ダウンドロー法、スロットダウンドロー法等が知られて
いるが、いずれの成形法を採用しても、成形した板ガラ
スを冷却する時に、その肉厚方向に温度分布が発生する
と共に、平面方向にもいくらかの温度分布が発生し、そ
の結果、不均一な残留応力が発生することになる。As a general industrial method for forming this kind of glass substrate, a float method, an overflow down draw method, a slot down draw method and the like are known. In addition, when the formed sheet glass is cooled, a temperature distribution is generated in a thickness direction thereof, and some temperature distribution is also generated in a plane direction. As a result, uneven residual stress is generated.
【００１４】切断後の変形に影響を与えるのは、主にガ
ラス基板の平面方向に発生する残留応力であり、ガラス
基板の中央付近に比べて、周縁部の冷却速度が速い場合
や、逆にガラス基板の中央付近に比べて周縁部の冷却速
度が遅い場合に、周縁部付近に残留応力が発生する。こ
のような平面方向に残留応力を有するガラス基板が分割
切断されると、変形することによって応力を解放しよう
とする。The residual stress which affects the deformation after cutting is mainly generated in the plane direction of the glass substrate, and the cooling rate of the peripheral portion is higher than that near the center of the glass substrate, or conversely. When the cooling rate of the peripheral portion is lower than that of the vicinity of the center of the glass substrate, residual stress occurs near the peripheral portion. When the glass substrate having the residual stress in such a plane direction is divided and cut, the glass substrate is deformed to release the stress.
【００１５】本発明者等の知見によると、平面方向の残
留応力は、ガラス基板の大きさに比例して大きくなり、
例えば、縦寸法４００ｍｍ以上、横寸法５００ｍｍ以上
のガラス基板の場合、周縁部の残留応力は、２０ｋｇ／
ｃｍ2 以上となることがあった。しかしながらガラス基
板の平面方向の残留応力を５ｋｇ／ｃｍ2 以下にする
と、これを分割切断しても、問題となるような大きな変
形は生じない。According to the findings of the present inventors, the residual stress in the plane direction increases in proportion to the size of the glass substrate,
For example, in the case of a glass substrate having a vertical dimension of 400 mm or more and a horizontal dimension of 500 mm or more, the residual stress at the periphery is 20 kg /.
cm 2 or more. However, if the residual stress in the plane direction of the glass substrate is set to 5 kg / cm 2 or less, even if it is divided and cut, large problematic deformation does not occur.
【００１６】次に本発明のフラットパネルディスプレイ
用ガラス基板を作製する方法を説明する。Next, a method of manufacturing the glass substrate for a flat panel display of the present invention will be described.
【００１７】先ず一つの方法は、板ガラスを成形した後
の冷却工程で、その平面方向に発生する温度分布をでき
るだけ小さくするような温度制御を行う方法である。First, one method is to perform temperature control in a cooling step after forming a sheet glass so as to minimize a temperature distribution generated in a plane direction of the sheet glass.
【００１８】またもう一つの方法は、通常の方法で板ガ
ラスを成形、冷却、切断した後、平坦性に優れた低膨張
結晶化ガラス板やセラミック板からなるセッターの上に
載置してからアニールすることによって、板ガラスに発
生した平面方向の残留応力を小さくする方法である。Another method is to form, cool and cut a sheet glass by a usual method, and then place it on a setter made of a low expansion crystallized glass plate or a ceramic plate having excellent flatness, and then annealed. By doing so, the residual stress in the planar direction generated in the sheet glass is reduced.
【００１９】但し、通常の方法でガラス基板をアニール
しても、ガラス基板全面を均一に加熱、冷却することは
困難であり、特にアニール炉の炉壁に近いガラス基板の
周縁部の残留応力が大きくなりやすいため、次に示す方
法のいずれかでアニールすることが望ましい。However, even if the glass substrate is annealed by a usual method, it is difficult to uniformly heat and cool the entire surface of the glass substrate. In particular, the residual stress at the peripheral portion of the glass substrate near the furnace wall of the annealing furnace is low. Since it tends to be large, it is desirable to anneal by any of the following methods.
【００２０】予め所定寸法より大きい板ガラスを作製
し、これをアニールした後、ガラス基板の周縁部を切り
落として所定寸法のガラス基板とする方法。但し、この
方法では、ガラス基板の周縁部を廃棄することになるた
め、ガラスの生産効率が低下するという問題がある。A method in which a sheet glass larger than a predetermined size is prepared in advance, annealed, and the peripheral edge of the glass substrate is cut off to obtain a glass substrate having a predetermined size. However, in this method, since the peripheral portion of the glass substrate is discarded, there is a problem that the production efficiency of the glass is reduced.
【００２１】ガラス基板の縦寸法と横寸法よりも５０
ｍｍ以上長い縦寸法と横寸法を有する大型の耐熱性セッ
ターを使用することによって、ガラス基板を均一にアニ
ールする方法。The vertical and horizontal dimensions of the glass substrate are more than 50
A method of uniformly annealing a glass substrate by using a large heat-resistant setter having a vertical dimension and a horizontal dimension longer than mm.
【００２２】ガラス基板を載置した耐熱性セッターの
付近に耐熱性のダミーセッターを配置することによっ
て、ガラス基板を均一にアニールする方法。A method of uniformly annealing a glass substrate by disposing a heat-resistant dummy setter near a heat-resistant setter on which a glass substrate is mounted.
【００２３】尚、アニールする場合、連続式アニール炉
やバッチ式電気炉が使用できるが、生産性を考えると、
連続式アニール炉を用いることが望ましい。For annealing, a continuous annealing furnace or a batch type electric furnace can be used.
It is desirable to use a continuous annealing furnace.
【００２４】[0024]
【実施例】以下、本発明のフラットパネルディスプレイ
用ガラス基板を実施例及び比較例に基づいて詳細に説明
する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a glass substrate for a flat panel display according to the present invention will be described in detail based on examples and comparative examples.
【００２５】まず重量％で、ＳｉＯ2 ５５％、Ｂ2 Ｏ
3 １０％、Ａｌ2 Ｏ3 １０％、ＲＯ ２５％の組成
となるようにガラス原料を調合し、１５８０℃で所定時
間溶融した後、スロットダウンドロー法を用いて成形
し、切断加工することによって、５５０×６５０×０．
７ｍｍの寸法を有するα−Ｓｉ ＴＦＴ液晶ディスプレ
イ用無アルカリガラス基板を３６枚作製した。First, 55% by weight of SiO 2 and B 2 O
A glass raw material is prepared so as to have a composition of 3 10%, Al 2 O 3 10%, and RO 25%, melted at a predetermined temperature of 1580 ° C. for a predetermined time, then formed by a slot down draw method, and cut. 550 × 650 × 0.
Thirty-six alkali-free glass substrates for an α-Si TFT liquid crystal display having a dimension of 7 mm were produced.
【００２６】次に、これらのガラス基板を板状で平坦性
に優れた耐熱性セッター（日本電気硝子株式会社製ネオ
セラムＮ−０）上に１枚づつ載置し、アニール炉内に入
れ、温度条件等を変えることにより、平面方向の残留応
力が２０ｋｇ／ｃｍ2 のガラス基板を１２枚（Ａグルー
プ）、平面方向の残留応力が１０ｋｇ／ｃｍ2 のガラス
基板を１２枚（Ｂグループ）、平面方向の残留応力が４
ｋｇ／ｃｍ2 のガラス基板（Ｃグループ）を１２枚作製
した。Next, these glass substrates are placed one by one on a heat-resistant setter (NEOCERAM N-0 manufactured by NEC Corporation) having a plate shape and excellent flatness, and placed in an annealing furnace. By changing the conditions and the like, 12 glass substrates having a residual stress in the planar direction of 20 kg / cm 2 (A group), 12 glass substrates having a residual stress in the planar direction of 10 kg / cm 2 (B group), 4 residual stresses
Twelve glass substrates (group C) of kg / cm 2 were produced.
【００２７】その後、図１に示すように、各ガラス基板
１０上に４つの回路パターン１１を形成してから、回路
パターン１１毎にガラス基板１０を２本の切断線１２、
１２に沿って４枚のアレイ基板に分割切断し、これらの
アレイ基板上の回路パターン１１の正規位置からの最大
ずれ量を測定し、その結果を表１に示した。After that, as shown in FIG. 1, four circuit patterns 11 are formed on each glass substrate 10, and the glass substrate 10 is cut into two cutting lines 12 for each circuit pattern 11.
The substrate was cut into four array substrates along the line 12, and the maximum shift amount of the circuit pattern 11 on these array substrates from the normal position was measured. The results are shown in Table 1.
【００２８】[0028]
【表１】 [Table 1]
【００２９】表１から明らかなように、Ａグループのア
レイ基板は、回路パターンのずれ量が６〜８μｍと大き
かったが、Ｃグループのアレイ基板は、回路パターンの
ずれがほとんど発生せず、このことから、アレイ基板の
平面方向の残留応力の大きさと、切断後の寸法のずれ量
の間に相関関係が認められた。As is clear from Table 1, the array substrate of the group A has a large circuit pattern shift amount of 6 to 8 μm, but the array substrate of the group C has almost no circuit pattern shift. Accordingly, a correlation was recognized between the magnitude of residual stress in the planar direction of the array substrate and the amount of dimensional deviation after cutting.
【００３０】尚、上記の残留応力は、東芝歪検査器ＳＶ
Ｐ−１００を用い、セナルモン法に基づいて測定した。The above residual stress is measured by using a Toshiba strain tester SV.
It measured based on the Senarumon method using P-100.
【００３１】またアレイ基板のずれ量は、その対向基板
として、アレイ基板と同じサイズを有する未変形のカラ
ーフィルター基板を準備し、図２に示すように、アレイ
基板１３をカラーフィルター基板１４上に重ね合わせ、
アレイ基板１３上の回路パターン１５と、カラーフィル
ター基板１４上に形成されたパターン１６の最もずれの
大きい部分の長さ（Ｌ）を顕微鏡で測定したものであ
る。As for the amount of displacement of the array substrate, an undeformed color filter substrate having the same size as the array substrate is prepared as the counter substrate, and the array substrate 13 is placed on the color filter substrate 14 as shown in FIG. Superposition,
The length (L) of the portion where the circuit pattern 15 on the array substrate 13 and the pattern 16 formed on the color filter substrate 14 have the largest deviation is measured with a microscope.
【００３２】[0032]
【発明の効果】以上のように本発明のフラットパネルデ
ィスプレイ用ガラス基板は、平面方向の残留応力が５ｋ
ｇ／ｃｍ2 以下であるため、このガラス基板上にパター
ンを形成した後、パターン毎にガラス基板を分割切断し
ても変形が少ない。そのため、特に周縁部の残留応力が
大きくなりやすい縦寸法が４００ｍｍ以上、横寸法が５
００ｍｍ以上のディスプレイ用ガラス基板に有用であ
る。As described above, the glass substrate for a flat panel display of the present invention has a residual stress of 5 k in the planar direction.
g / cm 2 or less, there is little deformation even if a glass substrate is divided and cut for each pattern after forming a pattern on the glass substrate. Therefore, the vertical dimension, in which the residual stress particularly at the peripheral portion is likely to be large, is 400 mm or more and the horizontal dimension is
It is useful for a glass substrate for a display of 00 mm or more.
【図１】４つの回路パターンが形成されたガラス基板を
示す平面図である。FIG. 1 is a plan view showing a glass substrate on which four circuit patterns are formed.
【図２】アレイ基板をカラーフィルター上に重ね合わせ
た状態を示す概略説明図である。FIG. 2 is a schematic explanatory view showing a state where an array substrate is overlaid on a color filter.
１０ ガラス基板 １１、１５ 回路パターン １２ 切断線 １３ アレイ基板 １４ カラーフィルター基板 １６ カラーフィルター基板上に形成されたパターン Reference Signs List 10 glass substrate 11, 15 circuit pattern 12 cutting line 13 array substrate 14 color filter substrate 16 pattern formed on color filter substrate
Claims (4)
以下であることを特徴とするフラットパネルディスプレ
イ用ガラス基板。1. A residual stress in a plane direction of 5 kg / cm 2
A glass substrate for a flat panel display, characterized in that:
０ｍｍ以上であることを特徴とする請求項１記載のフラ
ットパネルディスプレイ用ガラス基板。2. A vertical dimension of 400 mm or more and a horizontal dimension of 50 mm.
The glass substrate for a flat panel display according to claim 1, wherein the glass substrate has a thickness of 0 mm or more.
以下であるガラス基板上に複数のパターンを形成した
後、パターン毎にガラス基板を分割切断することを特徴
とするディスプレイ基板の製造方法。3. The residual stress in the plane direction is 5 kg / cm 2.
A method of manufacturing a display substrate, comprising: forming a plurality of patterns on a glass substrate as described below; and dividing and cutting the glass substrate for each pattern.
横寸法が５００ｍｍ以上であることを特徴とする請求項
３記載のディスプレイ基板の製造方法。4. The glass substrate has a vertical dimension of 400 mm or more,
4. The method according to claim 3, wherein the lateral dimension is 500 mm or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19984098A JP4006747B2 (en) | 1998-06-29 | 1998-06-29 | Display substrate manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19984098A JP4006747B2 (en) | 1998-06-29 | 1998-06-29 | Display substrate manufacturing method |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006220212A Division JP4423611B2 (en) | 2006-08-11 | 2006-08-11 | Glass substrate for flat panel display |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000016840A true JP2000016840A (en) | 2000-01-18 |
| JP2000016840A5 JP2000016840A5 (en) | 2005-09-02 |
| JP4006747B2 JP4006747B2 (en) | 2007-11-14 |
Family
ID=16414530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19984098A Expired - Fee Related JP4006747B2 (en) | 1998-06-29 | 1998-06-29 | Display substrate manufacturing method |
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| Country | Link |
|---|---|
| JP (1) | JP4006747B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7201965B2 (en) | 2004-12-13 | 2007-04-10 | Corning Incorporated | Glass laminate substrate having enhanced impact and static loading resistance |
| JP2009179552A (en) * | 2009-03-06 | 2009-08-13 | Asahi Glass Co Ltd | Glass substrate for display |
| JP2009276088A (en) * | 2008-05-12 | 2009-11-26 | Avanstrate Inc | Method and equipment for inspecting strain of glass plate |
| JP2010009061A (en) * | 2009-10-06 | 2010-01-14 | Asahi Glass Co Ltd | Method of manufacturing glass substrate for display |
| JP2011256107A (en) * | 2011-07-11 | 2011-12-22 | Asahi Glass Co Ltd | Method for manufacturing glass substrate for display and method for manufacturing flat panel display |
| JP2012128435A (en) * | 2012-01-26 | 2012-07-05 | Asahi Glass Co Ltd | Glass substrate for display |
| JP2013083995A (en) * | 2007-01-29 | 2013-05-09 | Nippon Electric Glass Co Ltd | Glass substrate for display |
| JP2015024951A (en) * | 2011-01-18 | 2015-02-05 | 日本電気硝子株式会社 | Strengthened glass and strengthened glass plate |
-
1998
- 1998-06-29 JP JP19984098A patent/JP4006747B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7201965B2 (en) | 2004-12-13 | 2007-04-10 | Corning Incorporated | Glass laminate substrate having enhanced impact and static loading resistance |
| KR101180200B1 (en) | 2004-12-13 | 2012-09-10 | 코닝 인코포레이티드 | Glass laminate substrate having enhanced impact and static loading resistance |
| JP2013083995A (en) * | 2007-01-29 | 2013-05-09 | Nippon Electric Glass Co Ltd | Glass substrate for display |
| JP2009276088A (en) * | 2008-05-12 | 2009-11-26 | Avanstrate Inc | Method and equipment for inspecting strain of glass plate |
| JP2009179552A (en) * | 2009-03-06 | 2009-08-13 | Asahi Glass Co Ltd | Glass substrate for display |
| JP2010009061A (en) * | 2009-10-06 | 2010-01-14 | Asahi Glass Co Ltd | Method of manufacturing glass substrate for display |
| JP2015024951A (en) * | 2011-01-18 | 2015-02-05 | 日本電気硝子株式会社 | Strengthened glass and strengthened glass plate |
| JP2015038021A (en) * | 2011-01-18 | 2015-02-26 | 日本電気硝子株式会社 | Glass sheet for tempering |
| JP2011256107A (en) * | 2011-07-11 | 2011-12-22 | Asahi Glass Co Ltd | Method for manufacturing glass substrate for display and method for manufacturing flat panel display |
| JP2012128435A (en) * | 2012-01-26 | 2012-07-05 | Asahi Glass Co Ltd | Glass substrate for display |
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|---|---|
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