ITMI20070061A1 - Processo di fabbricazione di un dispositivo ottico integrato e dispositivo realizzato mediante il processo - Google Patents

Processo di fabbricazione di un dispositivo ottico integrato e dispositivo realizzato mediante il processo

Info

Publication number
ITMI20070061A1
ITMI20070061A1 IT000061A ITMI20070061A ITMI20070061A1 IT MI20070061 A1 ITMI20070061 A1 IT MI20070061A1 IT 000061 A IT000061 A IT 000061A IT MI20070061 A ITMI20070061 A IT MI20070061A IT MI20070061 A1 ITMI20070061 A1 IT MI20070061A1
Authority
IT
Italy
Prior art keywords
integrated optical
manufacturing process
optical device
device made
manufacturing
Prior art date
Application number
IT000061A
Other languages
English (en)
Inventor
Antonio Fincato
Ubaldo Mastromatteo
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT000061A priority Critical patent/ITMI20070061A1/it
Priority to US12/015,199 priority patent/US7590326B2/en
Publication of ITMI20070061A1 publication Critical patent/ITMI20070061A1/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
IT000061A 2007-01-18 2007-01-18 Processo di fabbricazione di un dispositivo ottico integrato e dispositivo realizzato mediante il processo ITMI20070061A1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT000061A ITMI20070061A1 (it) 2007-01-18 2007-01-18 Processo di fabbricazione di un dispositivo ottico integrato e dispositivo realizzato mediante il processo
US12/015,199 US7590326B2 (en) 2007-01-18 2008-01-16 Optical integrated device manufacturing process and device manufactured by the process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000061A ITMI20070061A1 (it) 2007-01-18 2007-01-18 Processo di fabbricazione di un dispositivo ottico integrato e dispositivo realizzato mediante il processo

Publications (1)

Publication Number Publication Date
ITMI20070061A1 true ITMI20070061A1 (it) 2008-07-19

Family

ID=39641303

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000061A ITMI20070061A1 (it) 2007-01-18 2007-01-18 Processo di fabbricazione di un dispositivo ottico integrato e dispositivo realizzato mediante il processo

Country Status (2)

Country Link
US (1) US7590326B2 (it)
IT (1) ITMI20070061A1 (it)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2357502A1 (en) * 2008-12-04 2011-08-17 Sumitomo Bakelite Company Limited Optical waveguide and member for forming optical waveguide
US8818146B2 (en) * 2011-06-13 2014-08-26 California Institute Of Technology Silica-on-silicon waveguides and related fabrication methods
US8917444B2 (en) 2011-06-17 2014-12-23 California Institute Of Technology Chip-based frequency comb generator with microwave repetition rate
US9293887B2 (en) 2011-06-17 2016-03-22 California Institute Of Technology Chip-based laser resonator device for highly coherent laser generation
JP5892875B2 (ja) 2012-06-22 2016-03-23 Ｎｔｔエレクトロニクス株式会社 光電子集積モジュール
JP5753136B2 (ja) * 2012-08-08 2015-07-22 日本電信電話株式会社 光結合回路素子及びその作製方法
DE102012025565B4 (de) * 2012-12-20 2015-03-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optisches Kopplungssystem mit einem optischen Koppler und einem lichtdurchlässigen äußeren Medium sowie Herstellung und Verwendung eines solchen Systems
CN106062970B (zh) * 2013-03-11 2018-05-08 英特尔公司 用于硅基光子集成电路的具有凹角镜的低电压雪崩光电二极管
WO2014146204A1 (en) * 2013-03-22 2014-09-25 Canadian Microelectronics Corporation Wafer-level fiber to coupler connector
JP6394018B2 (ja) * 2013-03-29 2018-09-26 住友ベークライト株式会社 光導波路および電子機器
CN107124910B (zh) 2014-01-24 2019-08-23 加州理工学院 稳定的微波频率源
US9059252B1 (en) 2014-02-10 2015-06-16 International Business Machines Corporation Silicon waveguide on bulk silicon substrate and methods of forming
US9595918B2 (en) 2014-03-06 2017-03-14 California Institute Of Technology Stable microwave-frequency source based on cascaded brillouin lasers
US9385022B2 (en) 2014-05-21 2016-07-05 Globalfoundries Inc. Silicon waveguide on bulk silicon substrate and methods of forming
WO2016138291A1 (en) 2015-02-26 2016-09-01 California Institute Of Technology Optical frequency divider based on an electro-optical-modulator frequency comb
CN115032741A (zh) * 2022-05-22 2022-09-09 上海图灵智算量子科技有限公司 波导及包含其的光芯片
CN115047563B (zh) * 2022-05-22 2023-03-17 上海图灵智算量子科技有限公司 集成波导的光学组件

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4698129A (en) * 1986-05-01 1987-10-06 Oregon Graduate Center Focused ion beam micromachining of optical surfaces in materials
US4938841A (en) * 1989-10-31 1990-07-03 Bell Communications Research, Inc. Two-level lithographic mask for producing tapered depth
US5135605A (en) * 1991-04-29 1992-08-04 At&T Bell Laboratories Methods for making mirrors
US5894538A (en) 1997-09-17 1999-04-13 Lucent Technologies Inc. Method of forming integrated optical circuit planar waveguide turning mirrors

Also Published As

Publication number Publication date
US7590326B2 (en) 2009-09-15
US20080175531A1 (en) 2008-07-24

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