IT994204B - Procedimento per la fabbricazione di dispositivi a semiconduttore con dissipatore termico integrato e relativi dispositivi a semicon duttore - Google Patents

Procedimento per la fabbricazione di dispositivi a semiconduttore con dissipatore termico integrato e relativi dispositivi a semicon duttore

Info

Publication number
IT994204B
IT994204B IT52366/73A IT5236673A IT994204B IT 994204 B IT994204 B IT 994204B IT 52366/73 A IT52366/73 A IT 52366/73A IT 5236673 A IT5236673 A IT 5236673A IT 994204 B IT994204 B IT 994204B
Authority
IT
Italy
Prior art keywords
semiconductor devices
procedure
manufacture
heat sink
thermal heat
Prior art date
Application number
IT52366/73A
Other languages
English (en)
Original Assignee
Selenia Ind Elettroniche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Selenia Ind Elettroniche filed Critical Selenia Ind Elettroniche
Priority to IT52366/73A priority Critical patent/IT994204B/it
Priority to US05/502,307 priority patent/US3973320A/en
Priority to GB38647/74A priority patent/GB1483099A/en
Priority to JP49103397A priority patent/JPS5094888A/ja
Application granted granted Critical
Publication of IT994204B publication Critical patent/IT994204B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4871—Bases, plates or heatsinks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
IT52366/73A 1973-09-06 1973-09-06 Procedimento per la fabbricazione di dispositivi a semiconduttore con dissipatore termico integrato e relativi dispositivi a semicon duttore IT994204B (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT52366/73A IT994204B (it) 1973-09-06 1973-09-06 Procedimento per la fabbricazione di dispositivi a semiconduttore con dissipatore termico integrato e relativi dispositivi a semicon duttore
US05/502,307 US3973320A (en) 1973-09-06 1974-09-03 Method for the production of semiconductor devices with an integral heatsink and of related semiconductor equipment
GB38647/74A GB1483099A (en) 1973-09-06 1974-09-04 Production of semiconductor devices with an integral heatsink
JP49103397A JPS5094888A (it) 1973-09-06 1974-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT52366/73A IT994204B (it) 1973-09-06 1973-09-06 Procedimento per la fabbricazione di dispositivi a semiconduttore con dissipatore termico integrato e relativi dispositivi a semicon duttore

Publications (1)

Publication Number Publication Date
IT994204B true IT994204B (it) 1975-10-20

Family

ID=11276849

Family Applications (1)

Application Number Title Priority Date Filing Date
IT52366/73A IT994204B (it) 1973-09-06 1973-09-06 Procedimento per la fabbricazione di dispositivi a semiconduttore con dissipatore termico integrato e relativi dispositivi a semicon duttore

Country Status (4)

Country Link
US (1) US3973320A (it)
JP (1) JPS5094888A (it)
GB (1) GB1483099A (it)
IT (1) IT994204B (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3435306A1 (de) * 1984-09-26 1986-04-03 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung von laserdioden mit jutierter integrierter waermesenke
FR2609212B1 (fr) * 1986-12-29 1989-10-20 Thomson Semiconducteurs Procede de decoupe collective, par voie chimique, de dispositifs semiconducteurs, et dispositif decoupe par ce procede
US5252294A (en) * 1988-06-01 1993-10-12 Messerschmitt-Bolkow-Blohm Gmbh Micromechanical structure
US5220487A (en) * 1992-01-27 1993-06-15 International Business Machines Corporation Electronic package with enhanced heat sinking
US5313094A (en) * 1992-01-28 1994-05-17 International Business Machines Corportion Thermal dissipation of integrated circuits using diamond paths
JP2810322B2 (ja) * 1993-07-16 1998-10-15 株式会社ジャパンエナジー 半導体装置の製造方法
SG59997A1 (en) * 1995-06-07 1999-02-22 Ibm Apparatus and process for improved die adhesion to organic chip carries
US6083248A (en) * 1995-06-23 2000-07-04 Medtronic, Inc. World wide patient location and data telemetry system for implantable medical devices
US6048777A (en) 1997-12-18 2000-04-11 Hughes Electronics Corporation Fabrication of high power semiconductor devices with respective heat sinks for integration with planar microstrip circuitry
DE60030963D1 (de) * 2000-06-06 2006-11-09 St Microelectronics Srl Elektronischer Halbleiterbaustein mit Wärmeverteiler
AUPS112202A0 (en) * 2002-03-14 2002-04-18 Commonwealth Scientific And Industrial Research Organisation Semiconductor manufacture
US6960490B2 (en) * 2002-03-14 2005-11-01 Epitactix Pty Ltd. Method and resulting structure for manufacturing semiconductor substrates

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3850707A (en) * 1964-09-09 1974-11-26 Honeywell Inc Semiconductors
US3453722A (en) * 1965-12-28 1969-07-08 Texas Instruments Inc Method for the fabrication of integrated circuits
US3689993A (en) * 1971-07-26 1972-09-12 Texas Instruments Inc Fabrication of semiconductor devices having low thermal inpedance bonds to heat sinks
US3794883A (en) * 1973-02-01 1974-02-26 E Bylander Process for fabricating ge:hg infrared detector arrays and resulting article of manufacture

Also Published As

Publication number Publication date
GB1483099A (en) 1977-08-17
US3973320A (en) 1976-08-10
JPS5094888A (it) 1975-07-28

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