GB9610471D0 - Optical measurement - Google Patents

Optical measurement

Info

Publication number
GB9610471D0
GB9610471D0 GBGB9610471.6A GB9610471A GB9610471D0 GB 9610471 D0 GB9610471 D0 GB 9610471D0 GB 9610471 A GB9610471 A GB 9610471A GB 9610471 D0 GB9610471 D0 GB 9610471D0
Authority
GB
United Kingdom
Prior art keywords
optical measurement
measurement
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9610471.6A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Nottingham
Original Assignee
University of Nottingham
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Nottingham filed Critical University of Nottingham
Priority to GBGB9610471.6A priority Critical patent/GB9610471D0/en
Publication of GB9610471D0 publication Critical patent/GB9610471D0/en
Priority to CN 97196506 priority patent/CN1225720A/en
Priority to JP09541783A priority patent/JP2000510951A/en
Priority to EP97923185A priority patent/EP0900356A1/en
Priority to PCT/GB1997/001353 priority patent/WO1997044633A1/en
Pending legal-status Critical Current

Links

GBGB9610471.6A 1996-05-18 1996-05-18 Optical measurement Pending GB9610471D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GBGB9610471.6A GB9610471D0 (en) 1996-05-18 1996-05-18 Optical measurement
CN 97196506 CN1225720A (en) 1996-05-18 1997-05-16 Optical measurement
JP09541783A JP2000510951A (en) 1996-05-18 1997-05-16 Optical measurement
EP97923185A EP0900356A1 (en) 1996-05-18 1997-05-16 Optical measurement
PCT/GB1997/001353 WO1997044633A1 (en) 1996-05-18 1997-05-16 Optical measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9610471.6A GB9610471D0 (en) 1996-05-18 1996-05-18 Optical measurement

Publications (1)

Publication Number Publication Date
GB9610471D0 true GB9610471D0 (en) 1996-07-24

Family

ID=10793969

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9610471.6A Pending GB9610471D0 (en) 1996-05-18 1996-05-18 Optical measurement

Country Status (5)

Country Link
EP (1) EP0900356A1 (en)
JP (1) JP2000510951A (en)
CN (1) CN1225720A (en)
GB (1) GB9610471D0 (en)
WO (1) WO1997044633A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114295075A (en) * 2022-03-09 2022-04-08 中国工程物理研究院激光聚变研究中心 Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece

Families Citing this family (20)

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Publication number Priority date Publication date Assignee Title
DE19856400B4 (en) * 1998-12-07 2009-04-09 Steinbichler Optotechnik Gmbh Method and device for the direct phase measurement of radiation
US6804009B2 (en) 2000-05-03 2004-10-12 The Regents Of The University Of California Wollaston prism phase-stepping point diffraction interferometer and method
FR2818376B1 (en) 2000-12-18 2003-03-28 Centre Nat Rech Scient DEVICE FOR BIDIMENSIONAL ELLIPSOMETRIC VISUALIZATION OF A SAMPLE, VISUALIZATION PROCESS AND ELLIPSOMETRIC MEASUREMENT PROCESS WITH SPATIAL RESOLUTION
US7139081B2 (en) 2002-09-09 2006-11-21 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US7106454B2 (en) 2003-03-06 2006-09-12 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7324214B2 (en) 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
US7271918B2 (en) 2003-03-06 2007-09-18 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7289225B2 (en) 2003-09-15 2007-10-30 Zygo Corporation Surface profiling using an interference pattern matching template
TWI335417B (en) 2003-10-27 2011-01-01 Zygo Corp Method and apparatus for thin film measurement
KR101159380B1 (en) 2004-03-11 2012-06-27 이코스비젼 시스팀스 엔.브이. Methods and apparatus for wavefront manipulations and improved 3-d measurements
JP4768754B2 (en) * 2005-01-20 2011-09-07 ザイゴ コーポレーション Interferometer for determining object surface characteristics
TWI394930B (en) 2005-05-19 2013-05-01 Zygo Corp Method and apparatus for analyzing low-coherence interferometry signals for obtaining information about thin film structures
US7889355B2 (en) 2007-01-31 2011-02-15 Zygo Corporation Interferometry for lateral metrology
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
CN101520413B (en) * 2009-02-18 2011-09-21 深圳大学 A heterodyne interference elliptic-deviation measurement nonlinear error compensation method
WO2017041843A1 (en) * 2015-09-09 2017-03-16 Siemens Healthcare Gmbh A technique for illuminating a sample to be inspected by interferometric microscopy
JP6782470B2 (en) 2018-09-05 2020-11-11 パナソニックＩｐマネジメント株式会社 Measuring device and measuring method
US10705026B2 (en) * 2018-10-26 2020-07-07 Kla Corporation Scanning differential interference contrast in an imaging system design
CN109916279B (en) * 2019-03-04 2020-09-22 Oppo广东移动通信有限公司 Flatness detection method and device for terminal cover plate, test machine table and storage medium
CN113155040B (en) * 2021-03-04 2023-02-28 上海精测半导体技术有限公司 Device and method for detecting angle change of reflected light beam and film thickness measuring device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567006A (en) * 1979-06-22 1981-01-24 Ibm Method of extending measurement range of interference
JPH061178B2 (en) * 1985-01-16 1994-01-05 株式会社日立製作所 Defect inspection method and apparatus
US4905311A (en) * 1988-02-10 1990-02-27 Brother Kogyo Kabushiki Kaisha Optical surface roughness measuring apparatus with polarization detection
US5602643A (en) * 1996-02-07 1997-02-11 Wyko Corporation Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114295075A (en) * 2022-03-09 2022-04-08 中国工程物理研究院激光聚变研究中心 Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece

Also Published As

Publication number Publication date
CN1225720A (en) 1999-08-11
WO1997044633A1 (en) 1997-11-27
JP2000510951A (en) 2000-08-22
EP0900356A1 (en) 1999-03-10

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