GB9210897D0 - Apparatus for and method of producing ions - Google Patents

Apparatus for and method of producing ions

Info

Publication number
GB9210897D0
GB9210897D0 GB929210897A GB9210897A GB9210897D0 GB 9210897 D0 GB9210897 D0 GB 9210897D0 GB 929210897 A GB929210897 A GB 929210897A GB 9210897 A GB9210897 A GB 9210897A GB 9210897 D0 GB9210897 D0 GB 9210897D0
Authority
GB
United Kingdom
Prior art keywords
producing ions
ions
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB929210897A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Superion Ltd
Original Assignee
Superion Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Superion Ltd filed Critical Superion Ltd
Priority to GB929210897A priority Critical patent/GB9210897D0/en
Publication of GB9210897D0 publication Critical patent/GB9210897D0/en
Priority to PCT/GB1993/001036 priority patent/WO1993023869A1/en
Pending legal-status Critical Current

Links

GB929210897A 1992-05-21 1992-05-21 Apparatus for and method of producing ions Pending GB9210897D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB929210897A GB9210897D0 (en) 1992-05-21 1992-05-21 Apparatus for and method of producing ions
PCT/GB1993/001036 WO1993023869A1 (en) 1992-05-21 1993-05-20 Apparatus for and method of producing ions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929210897A GB9210897D0 (en) 1992-05-21 1992-05-21 Apparatus for and method of producing ions

Publications (1)

Publication Number Publication Date
GB9210897D0 true GB9210897D0 (en) 1992-07-08

Family

ID=10715876

Family Applications (1)

Application Number Title Priority Date Filing Date
GB929210897A Pending GB9210897D0 (en) 1992-05-21 1992-05-21 Apparatus for and method of producing ions

Country Status (2)

Country Link
GB (1) GB9210897D0 (en)
WO (1) WO1993023869A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9524117D0 (en) * 1995-11-24 1996-01-24 Applied Materials Inc Improvements in boron ion sources for ion implantation apparatus
US5977552A (en) * 1995-11-24 1999-11-02 Applied Materials, Inc. Boron ion sources for ion implantation apparatus
US7655932B2 (en) 2007-01-11 2010-02-02 Varian Semiconductor Equipment Associates, Inc. Techniques for providing ion source feed materials
CN104299871B (en) * 2013-07-16 2016-12-28 上海凯世通半导体股份有限公司 Ion source system and ion beam current system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719355A (en) * 1986-04-10 1988-01-12 Texas Instruments Incorporated Ion source for an ion implanter
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
JP2530434B2 (en) * 1986-08-13 1996-09-04 日本テキサス・インスツルメンツ株式会社 Ion generator
DE3813559A1 (en) * 1988-02-26 1989-09-07 Asea Brown Boveri Ion source

Also Published As

Publication number Publication date
WO1993023869A1 (en) 1993-11-25

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