GB8407592D0 - Automatic alignment system - Google Patents

Automatic alignment system

Info

Publication number
GB8407592D0
GB8407592D0 GB848407592A GB8407592A GB8407592D0 GB 8407592 D0 GB8407592 D0 GB 8407592D0 GB 848407592 A GB848407592 A GB 848407592A GB 8407592 A GB8407592 A GB 8407592A GB 8407592 D0 GB8407592 D0 GB 8407592D0
Authority
GB
United Kingdom
Prior art keywords
alignment system
automatic alignment
automatic
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB848407592A
Other versions
GB2139348A (en
GB2139348B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Abrasive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP58051019A external-priority patent/JPS59176610A/en
Priority claimed from JP58162031A external-priority patent/JPS6054454A/en
Priority claimed from JP59032576A external-priority patent/JPS60177647A/en
Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd
Publication of GB8407592D0 publication Critical patent/GB8407592D0/en
Publication of GB2139348A publication Critical patent/GB2139348A/en
Application granted granted Critical
Publication of GB2139348B publication Critical patent/GB2139348B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
GB08407592A 1983-03-26 1984-03-23 Automatic aligment system Expired GB2139348B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP58051019A JPS59176610A (en) 1983-03-26 1983-03-26 Method and device for detecting straight line of body to be detected
JP58162031A JPS6054454A (en) 1983-09-05 1983-09-05 Automatic precise positioning system
JP59032576A JPS60177647A (en) 1984-02-24 1984-02-24 Automatic precision positioning system

Publications (3)

Publication Number Publication Date
GB8407592D0 true GB8407592D0 (en) 1984-05-02
GB2139348A GB2139348A (en) 1984-11-07
GB2139348B GB2139348B (en) 1986-10-01

Family

ID=27287759

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08407592A Expired GB2139348B (en) 1983-03-26 1984-03-23 Automatic aligment system

Country Status (2)

Country Link
KR (1) KR900002508B1 (en)
GB (1) GB2139348B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146427B (en) * 1983-08-01 1987-10-21 Canon Kk Semiconductor manufacture
US4794736A (en) * 1985-12-27 1989-01-03 Citizen Watch Co., Ltd. Arrangement for mechanically and accurately processing a workpiece with a position detecting pattern or patterns
JPH027992A (en) * 1988-06-27 1990-01-11 Brother Ind Ltd Pattern registering machine
JPH03232215A (en) * 1990-02-08 1991-10-16 Toshiba Corp Method for alignment
EP0443062B1 (en) * 1990-02-22 1995-06-07 Komori Corporation Device for inspecting quality of printed matter and method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140278A (en) * 1976-05-19 1977-11-22 Hitachi Ltd Position detector
US4200861A (en) * 1978-09-01 1980-04-29 View Engineering, Inc. Pattern recognition apparatus and method
JPS5915381B2 (en) * 1978-10-16 1984-04-09 日本電信電話株式会社 Pattern inspection method
EP0020832A1 (en) * 1979-06-26 1981-01-07 Excellon Industries Pattern recognition system and method for using this system
JPS56132505A (en) * 1980-03-24 1981-10-16 Hitachi Ltd Position detecting method
US4325077A (en) * 1980-05-19 1982-04-13 Gca Corporation Automatic wafer alignment system
US4450579A (en) * 1980-06-10 1984-05-22 Fujitsu Limited Recognition method and apparatus
JPS57157378A (en) * 1981-03-25 1982-09-28 Hitachi Ltd Setting method of binary-coded threshold level

Also Published As

Publication number Publication date
KR900002508B1 (en) 1990-04-16
GB2139348A (en) 1984-11-07
GB2139348B (en) 1986-10-01
KR840008221A (en) 1984-12-13

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20040322