GB505135A - Improvements in and relating to the coating of articles by cathode disintegration - Google Patents

Improvements in and relating to the coating of articles by cathode disintegration

Info

Publication number
GB505135A
GB505135A GB7912/38A GB791238A GB505135A GB 505135 A GB505135 A GB 505135A GB 7912/38 A GB7912/38 A GB 7912/38A GB 791238 A GB791238 A GB 791238A GB 505135 A GB505135 A GB 505135A
Authority
GB
United Kingdom
Prior art keywords
crucible
tube
crucibles
coating
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7912/38A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB505135A publication Critical patent/GB505135A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3428—Cathode assembly for sputtering apparatus, e.g. Target using liquid targets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrolytic Production Of Metals (AREA)

Abstract

505,135. Depositing materials by electric discharge. BERGHAUS, B. March 14, 1938, No. 7912. Convention date, March 25, 1937. [Class 39 (i)] In coating articles by cathode disintegration the cathode material is maintained in a molten state. The temperature of the molten material. and the applied voltage are such that vaporization plays a negligible part in the coating process. In the apparatus shown the material is contained in a metallic crucible 22 supported by a tube 6 flanged at the bottom and connected to the negative terminal. Deposition on the outside of the crucible is prevented by a metal cap 19 spaced therefrom and supported by a tube 18 mounted in the base 1 of the discharge chamber. The parts are secured in position by an insulating ring 27 and bolts 28, the tube 18 being insulated from the tube 6 by an insulating ring 24 mounted between sealing rings 25, 26, e.g. of lead. Compressed air for cooling is introduced through a tube 29. The stream of disintegrated particles is directed by the magnetic field of a coil 31. In a modification, the crucible is of insulating material such as sintered oxides of aluminium, beryllium, magnesium or' zirconium. The base of the crucible is mounted on a metal saucer spaced from the member 6 and supported on it at the centre by a pin which passes through the crucible , to make contact with the cathode material. Cadmium, silver and copper may be disintegrated in crucibles of molybdenum or tungsten. Nickel, cobalt, chromium, vanadium, platinum, titanium and rhodium should be disintegrated in non-metallic crucibles. A number of crucibles may be mounted in the base of single disintegration chamber for coating large surfaces. Specifications 481,842, [Group XXXVI], and 505,137 are referred to.
GB7912/38A 1937-03-25 1938-03-14 Improvements in and relating to the coating of articles by cathode disintegration Expired GB505135A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE835661X 1937-03-25

Publications (1)

Publication Number Publication Date
GB505135A true GB505135A (en) 1939-05-05

Family

ID=6760969

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7912/38A Expired GB505135A (en) 1937-03-25 1938-03-14 Improvements in and relating to the coating of articles by cathode disintegration

Country Status (3)

Country Link
US (1) US2206020A (en)
FR (1) FR835661A (en)
GB (1) GB505135A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2431887A (en) * 1940-01-16 1947-12-02 Penning Frans Michel Electric device and method for heating materials
GB770753A (en) * 1952-12-31 1957-03-27 Edwards & Co London Ltd W Improvements in or relating to apparatus for the vaporisation of metals and metalloids
BE569245A (en) * 1953-12-09
GB879256A (en) * 1956-10-12 1961-10-11 Edwards High Vacuum Ltd Improvements in or relating to vaporisation of metals
US3210263A (en) * 1962-01-11 1965-10-05 Nuclear Materials & Equipment Electric discharge apparatus for etching
US3305473A (en) * 1964-08-20 1967-02-21 Cons Vacuum Corp Triode sputtering apparatus for depositing uniform coatings
CA941781A (en) * 1970-05-13 1974-02-12 United Aircraft Corporation Metal deposition by liquid phase sputtering
JPH07268622A (en) * 1994-03-01 1995-10-17 Applied Sci & Technol Inc Microwave plasma sticking source

Also Published As

Publication number Publication date
US2206020A (en) 1940-07-02
FR835661A (en) 1938-12-28

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