GB2459866B - Mems transducer - Google Patents

Mems transducer

Info

Publication number
GB2459866B
GB2459866B GB0808298A GB0808298A GB2459866B GB 2459866 B GB2459866 B GB 2459866B GB 0808298 A GB0808298 A GB 0808298A GB 0808298 A GB0808298 A GB 0808298A GB 2459866 B GB2459866 B GB 2459866B
Authority
GB
United Kingdom
Prior art keywords
mems transducer
mems
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB0808298A
Other versions
GB0808298D0 (en
GB2459866A (en
Inventor
Richard Ian Laming
Robert Errol Mcmullen
Anthony Bernard Traynor
Tsjerk Hans Hoekstra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International UK Ltd
Original Assignee
Wolfson Microelectronics PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC
Priority to GB0808298A priority Critical patent/GB2459866B/en
Publication of GB0808298D0 publication Critical patent/GB0808298D0/en
Priority to US12/991,378 priority patent/US20110062535A1/en
Priority to CN200980121004.2A priority patent/CN102056680B/en
Priority to PCT/GB2009/050473 priority patent/WO2009136196A2/en
Publication of GB2459866A publication Critical patent/GB2459866A/en
Application granted granted Critical
Publication of GB2459866B publication Critical patent/GB2459866B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/10—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the capsule type
    • G01L7/106—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the capsule type with optical transmitting or indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)
GB0808298A 2008-05-07 2008-05-07 Mems transducer Active GB2459866B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB0808298A GB2459866B (en) 2008-05-07 2008-05-07 Mems transducer
US12/991,378 US20110062535A1 (en) 2008-05-07 2009-05-07 Mems transducers
CN200980121004.2A CN102056680B (en) 2008-05-07 2009-05-07 Mems transducers
PCT/GB2009/050473 WO2009136196A2 (en) 2008-05-07 2009-05-07 Mems transducers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0808298A GB2459866B (en) 2008-05-07 2008-05-07 Mems transducer

Publications (3)

Publication Number Publication Date
GB0808298D0 GB0808298D0 (en) 2008-06-11
GB2459866A GB2459866A (en) 2009-11-11
GB2459866B true GB2459866B (en) 2011-08-31

Family

ID=39537419

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0808298A Active GB2459866B (en) 2008-05-07 2008-05-07 Mems transducer

Country Status (1)

Country Link
GB (1) GB2459866B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6057571B2 (en) * 2012-07-06 2017-01-11 キヤノン株式会社 Capacitive transducer
JP7216550B2 (en) 2016-06-13 2023-02-01 コーニンクレッカ フィリップス エヌ ヴェ Broadband ultrasonic transducer
CN108871389B (en) 2018-05-10 2020-03-31 京东方科技集团股份有限公司 Ultrasonic sensing unit, manufacturing method thereof, ultrasonic sensor and display device

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1098719A1 (en) * 1998-07-23 2001-05-16 The Secretary Of State For Defence Method of manufacturing a capacitive ultrasound transducer
EP1207970A2 (en) * 1999-05-20 2002-05-29 Sensant Corporation Electrostatic ultrasonic transducer and method of making the same
EP1414739A2 (en) * 2001-07-31 2004-05-06 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
US20040174773A1 (en) * 2003-03-06 2004-09-09 Kai Thomenius Mosaic arrays using micromachined ultrasound transducers
EP1552721A2 (en) * 2002-08-08 2005-07-13 The Board of Trustees of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
US6968744B1 (en) * 2004-10-18 2005-11-29 Silverbrook Research Pty Ltd Capacitative pressure sensor with close electrodes
EP1725343A2 (en) * 2004-03-11 2006-11-29 Georgia Technology Research Corporation Asymmetric membrane cmut devices and fabrication methods
GB2427321A (en) * 2005-06-17 2006-12-20 Ind Tech Res Inst Fabricating a polymer-based capacitive ultrasonic transducer (CMUT)
US20070215964A1 (en) * 2006-02-28 2007-09-20 Butrus Khuri-Yakub Capacitive micromachined ultrasonic transducer (CMUT) with varying thickness membrane
US20070266794A1 (en) * 2004-10-18 2007-11-22 Silverbrook Research Pty Ltd Pressure Sensor With Dual Chambers
GB2459863A (en) * 2008-05-07 2009-11-11 Wolfson Microelectronics Plc MEMS ultrasonic transducer array

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1098719A1 (en) * 1998-07-23 2001-05-16 The Secretary Of State For Defence Method of manufacturing a capacitive ultrasound transducer
EP1207970A2 (en) * 1999-05-20 2002-05-29 Sensant Corporation Electrostatic ultrasonic transducer and method of making the same
EP1414739A2 (en) * 2001-07-31 2004-05-06 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
EP1552721A2 (en) * 2002-08-08 2005-07-13 The Board of Trustees of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
US20040174773A1 (en) * 2003-03-06 2004-09-09 Kai Thomenius Mosaic arrays using micromachined ultrasound transducers
EP1725343A2 (en) * 2004-03-11 2006-11-29 Georgia Technology Research Corporation Asymmetric membrane cmut devices and fabrication methods
US6968744B1 (en) * 2004-10-18 2005-11-29 Silverbrook Research Pty Ltd Capacitative pressure sensor with close electrodes
US20070266794A1 (en) * 2004-10-18 2007-11-22 Silverbrook Research Pty Ltd Pressure Sensor With Dual Chambers
GB2427321A (en) * 2005-06-17 2006-12-20 Ind Tech Res Inst Fabricating a polymer-based capacitive ultrasonic transducer (CMUT)
US20070215964A1 (en) * 2006-02-28 2007-09-20 Butrus Khuri-Yakub Capacitive micromachined ultrasonic transducer (CMUT) with varying thickness membrane
GB2459863A (en) * 2008-05-07 2009-11-11 Wolfson Microelectronics Plc MEMS ultrasonic transducer array

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Capacitive micromachined ultrasonic transducers: fabrication technology. IEEE transactions on ultrasonics, ferroelectrics and frequency control, vol 52 (12), pages 2242-2258, Dec 2005 *

Also Published As

Publication number Publication date
GB0808298D0 (en) 2008-06-11
GB2459866A (en) 2009-11-11

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150820 AND 20150826