GB2428399A - Aom modulation techniques for improving laser system performance - Google Patents

Aom modulation techniques for improving laser system performance Download PDF

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Publication number
GB2428399A
GB2428399A GB0623494A GB0623494A GB2428399A GB 2428399 A GB2428399 A GB 2428399A GB 0623494 A GB0623494 A GB 0623494A GB 0623494 A GB0623494 A GB 0623494A GB 2428399 A GB2428399 A GB 2428399A
Authority
GB
United Kingdom
Prior art keywords
facilitate
modulation techniques
aom
pulse
system performance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0623494A
Other versions
GB2428399B (en
GB0623494D0 (en
Inventor
Jay Johnson
David Watt
Brian Baird
Richard Harris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/138,659 external-priority patent/US7133188B2/en
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of GB0623494D0 publication Critical patent/GB0623494D0/en
Publication of GB2428399A publication Critical patent/GB2428399A/en
Application granted granted Critical
Publication of GB2428399B publication Critical patent/GB2428399B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.

Description

GB 2428399 A continuation (72) Inventor(s): Jay Johnson David Watt Brian
Baird Richard Harris (74) Agent and/or Address for Service: Forrester Ketley & Co Forrester House, 52 Bounds Green Road, LONDON, Nil 2EV, United Kingdom
GB0623494A 2004-06-07 2005-06-06 AOM modulation techniques for improving laser system performance Expired - Fee Related GB2428399B (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US57779604P 2004-06-07 2004-06-07
US11/138,659 US7133188B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing an upstream Bragg adjustment device
US11/138,662 US7019891B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing plurality of tilt-angled transducers to improve laser system performance
US11/138,075 US7133186B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing transducers to modulate different axes
US11/138,076 US7133187B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques employing plurality of transducers to improve laser system performance
US11/138,657 US7133182B2 (en) 2004-06-07 2005-05-25 AOM frequency and amplitude modulation techniques for facilitating full beam extinction in laser systems
US11/138,078 US7027199B2 (en) 2004-06-07 2005-05-25 AOM modulation techniques for facilitating pulse-to-pulse energy stability in laser systems
PCT/US2005/019775 WO2005121889A2 (en) 2004-06-07 2005-06-06 Aom modulation techniques for improving laser system performance

Publications (3)

Publication Number Publication Date
GB0623494D0 GB0623494D0 (en) 2007-01-03
GB2428399A true GB2428399A (en) 2007-01-31
GB2428399B GB2428399B (en) 2010-05-05

Family

ID=35503778

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0623494A Expired - Fee Related GB2428399B (en) 2004-06-07 2005-06-06 AOM modulation techniques for improving laser system performance

Country Status (5)

Country Link
JP (2) JP4791457B2 (en)
KR (1) KR101290665B1 (en)
DE (1) DE112005001324T5 (en)
GB (1) GB2428399B (en)
WO (1) WO2005121889A2 (en)

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GB0617945D0 (en) * 2006-09-12 2006-10-18 Ucl Business Plc Imaging apparatus and methods
TWI523720B (en) 2009-05-28 2016-03-01 伊雷克托科學工業股份有限公司 Acousto-optic deflector applications in laser processing of features in a workpiece, and related laser processing method
KR101908002B1 (en) 2010-10-22 2018-12-19 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 Laser processing systems and methods for beam dithering and skiving
CN104159697B (en) * 2011-07-05 2017-02-15 伊雷克托科学工业股份有限公司 The system and method for temperature stability is in use provided for acousto-optic beam deflector and acousto-optic modulator
US8848277B2 (en) * 2012-05-31 2014-09-30 Asml Netherlands B.V. System and method for protecting a seed laser in an EUV light source with a Bragg AOM
KR102166134B1 (en) * 2013-03-15 2020-10-16 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 Laser emission-based control of beam positioner
DE102014013567B3 (en) * 2014-09-18 2015-10-08 Iai Industrial Systems B.V. Q-switched CO2 laser material processing system with acousto-optic modulators
JP6487184B2 (en) * 2014-11-10 2019-03-20 株式会社ディスコ Laser oscillation mechanism
DE102015213468A1 (en) * 2015-07-17 2017-01-19 Trumpf Laser Gmbh Beam modulator with frequency conversion and associated method and laser processing machine
US10423047B2 (en) * 2016-07-27 2019-09-24 Coherent, Inc. Laser machining method and apparatus
DE102016125630B4 (en) * 2016-12-23 2022-07-28 Leica Microsystems Cms Gmbh Optical arrangement and method for influencing the beam direction of at least one light beam
KR101868295B1 (en) * 2017-11-16 2018-07-17 윤태중 Apparatus and Method for amplifying maximum output of laser
US11033981B2 (en) * 2018-07-23 2021-06-15 University Of Maryland, College Park Acousto-optic modulator configurations for quantum processing
US11374375B2 (en) 2019-08-14 2022-06-28 Kla Corporation Laser closed power loop with an acousto-optic modulator for power modulation
WO2021069873A1 (en) * 2019-10-09 2021-04-15 Mbda Uk Limited Acousto-optic device and method
DE102022119609A1 (en) 2022-08-04 2024-02-15 Trumpf Laser Gmbh Laser system and method for providing a pulsed laser beam intended to interact with a target material
US11813697B1 (en) * 2023-04-07 2023-11-14 Intraaction Corp Laser methods of fabrication of clothing

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Publication number Priority date Publication date Assignee Title
US4352402A (en) * 1979-06-25 1982-10-05 Vdo Adolf Schindling Ag Safety circuit for an apparatus for regulating the traveling speed of a vehicle
US5197074A (en) * 1991-12-26 1993-03-23 Electro Scientific Industries, Inc. Multi-function intra-resonator loss modulator and method of operating same
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
US5847960A (en) * 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
US5837962A (en) * 1996-07-15 1998-11-17 Overbeck; James W. Faster laser marker employing acousto-optic deflection
US6339604B1 (en) * 1998-06-12 2002-01-15 General Scanning, Inc. Pulse control in laser systems
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Also Published As

Publication number Publication date
KR20070030210A (en) 2007-03-15
JP2011085952A (en) 2011-04-28
GB2428399B (en) 2010-05-05
JP4791457B2 (en) 2011-10-12
WO2005121889A3 (en) 2006-10-19
GB0623494D0 (en) 2007-01-03
KR101290665B1 (en) 2013-07-30
WO2005121889A2 (en) 2005-12-22
DE112005001324T5 (en) 2007-08-23
JP5492763B2 (en) 2014-05-14
JP2008502010A (en) 2008-01-24

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20120606