GB2271124B - Method and apparatus for plasma treatment of a material - Google Patents

Method and apparatus for plasma treatment of a material

Info

Publication number
GB2271124B
GB2271124B GB9316308A GB9316308A GB2271124B GB 2271124 B GB2271124 B GB 2271124B GB 9316308 A GB9316308 A GB 9316308A GB 9316308 A GB9316308 A GB 9316308A GB 2271124 B GB2271124 B GB 2271124B
Authority
GB
United Kingdom
Prior art keywords
plasma treatment
plasma
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9316308A
Other versions
GB2271124A (en
GB9316308D0 (en
Inventor
Vyacheslav Gennadie Shamshurin
Pavel Pavlovich Kulik
Oleg Vyacheslavovich Sinyagin
Iskander Malikovich Tokmulin
Vladimir Valentinovic Zakharov
Nikolai Vasilievich Ermokhin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPA
Original Assignee
OPA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OPA filed Critical OPA
Publication of GB9316308D0 publication Critical patent/GB9316308D0/en
Publication of GB2271124A publication Critical patent/GB2271124A/en
Application granted granted Critical
Publication of GB2271124B publication Critical patent/GB2271124B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/40—Details, e.g. electrodes, nozzles using applied magnetic fields, e.g. for focusing or rotating the arc
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma Technology (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
GB9316308A 1990-12-26 1990-12-26 Method and apparatus for plasma treatment of a material Expired - Fee Related GB2271124B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1990/000286 WO1992012273A1 (en) 1990-12-26 1990-12-26 Method and device for plasma processing of material

Publications (3)

Publication Number Publication Date
GB9316308D0 GB9316308D0 (en) 1993-09-22
GB2271124A GB2271124A (en) 1994-04-06
GB2271124B true GB2271124B (en) 1995-09-27

Family

ID=21617723

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9316308A Expired - Fee Related GB2271124B (en) 1990-12-26 1990-12-26 Method and apparatus for plasma treatment of a material

Country Status (3)

Country Link
FR (1) FR2678467A1 (en)
GB (1) GB2271124B (en)
WO (1) WO1992012273A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996023394A1 (en) * 1995-01-26 1996-08-01 ZAKRYTOE AKTSIONERNOE OBSCHESTVO PROIZVODSTVENNAYA FIRMA 'Az' Device for generating a plasma stream
US6050215A (en) * 1995-11-13 2000-04-18 Ist Instant Surface Technology S.A. Plasma stream generator with a closed configuration arc
EP0861575B1 (en) * 1995-11-13 2000-07-05 IST Instant Surface Technology S.A. Four-nozzle plasma generator for forming an activated jet
EP0902961B1 (en) 1996-05-31 2000-07-05 IPEC Precision, Inc. Method for treating articles with a plasma jet
KR20000016138A (en) * 1996-05-31 2000-03-25 피터 무몰라 Apparatus for generating and deflecting a plasma jet
KR100377033B1 (en) 1996-10-29 2003-03-26 트러시 테크날러지스 엘엘시 Integrated circuits and methods for their fabrication
GB2324196B (en) * 1997-04-09 2001-10-24 Aea Technology Plc Plasma processing
US5767627A (en) 1997-01-09 1998-06-16 Trusi Technologies, Llc Plasma generation and plasma processing of materials
US6139678A (en) * 1997-11-20 2000-10-31 Trusi Technologies, Llc Plasma processing methods and apparatus
US6168697B1 (en) 1998-03-10 2001-01-02 Trusi Technologies Llc Holders suitable to hold articles during processing and article processing methods
US6660643B1 (en) 1999-03-03 2003-12-09 Rwe Schott Solar, Inc. Etching of semiconductor wafer edges
US6287976B1 (en) 1999-05-19 2001-09-11 Tru-Si Technologies, Inc. Plasma processing methods and apparatus
US6423923B1 (en) 2000-08-04 2002-07-23 Tru-Si Technologies, Inc. Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream
US6749764B1 (en) 2000-11-14 2004-06-15 Tru-Si Technologies, Inc. Plasma processing comprising three rotational motions of an article being processed
US7671294B2 (en) * 2006-11-28 2010-03-02 Vladimir Belashchenko Plasma apparatus and system
CN105338724A (en) * 2014-08-14 2016-02-17 新疆兵团现代绿色氯碱化工工程研究中心(有限公司) V-shaped nozzle of plasma torch

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4013867A (en) * 1975-08-11 1977-03-22 Westinghouse Electric Corporation Polyphase arc heater system
GB1493394A (en) * 1974-06-07 1977-11-30 Nat Res Dev Plasma heater assembly
GB1525393A (en) * 1974-10-02 1978-09-20 Daido Steel Co Ltd Heat treating apparatus and method
DE1589562B2 (en) * 1966-01-07 1979-08-09 Centre National De La Recherche Scientifique, Paris Process for generating a high temperature plasma stream
EP0075953A1 (en) * 1981-09-30 1983-04-06 Kabushiki Kaisha Toshiba Plasma devices

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3283205A (en) * 1961-06-01 1966-11-01 Bolt Harold E De Shifting arc plasma system
FR1376869A (en) * 1963-11-15 1964-10-31 United Kingdom Government Plasma jet torch
US3453474A (en) * 1966-04-27 1969-07-01 Xerox Corp Plasma arc electrodes
US4009413A (en) * 1975-02-27 1977-02-22 Spectrametrics, Incorporated Plasma jet device and method of operating same
US4982067A (en) * 1988-11-04 1991-01-01 Marantz Daniel Richard Plasma generating apparatus and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1589562B2 (en) * 1966-01-07 1979-08-09 Centre National De La Recherche Scientifique, Paris Process for generating a high temperature plasma stream
GB1493394A (en) * 1974-06-07 1977-11-30 Nat Res Dev Plasma heater assembly
GB1525393A (en) * 1974-10-02 1978-09-20 Daido Steel Co Ltd Heat treating apparatus and method
US4013867A (en) * 1975-08-11 1977-03-22 Westinghouse Electric Corporation Polyphase arc heater system
EP0075953A1 (en) * 1981-09-30 1983-04-06 Kabushiki Kaisha Toshiba Plasma devices

Also Published As

Publication number Publication date
WO1992012273A1 (en) 1992-07-23
GB2271124A (en) 1994-04-06
GB9316308D0 (en) 1993-09-22
FR2678467A1 (en) 1992-12-31

Similar Documents

Publication Publication Date Title
EP0300447A3 (en) Method and apparatus for treating material by using plasma
GB2251977B (en) Method and apparatus for plasma processing
EP0459392A3 (en) Method and apparatus for processing a minute portion of a specimen
EP0451943A3 (en) Plasma processing method and apparatus
SG82555A1 (en) Method and apparatus for treating a belt-like article
GB2271124B (en) Method and apparatus for plasma treatment of a material
EP0461683A3 (en) Apparatus and method for plasma treatment of resin material
EP0488207A3 (en) Method and apparatus for processing photosensitive material
EP0482479A3 (en) Method and apparatus for processing photosensitive material
GB2279777B (en) Apparatus for and method of controlling a process
GB9319501D0 (en) Apparatus and method for processing fibre material
GB9312760D0 (en) A fleece material and a method of and an apparatus for producing such a material
EP0117541A3 (en) Apparatus and method for plasma treatment of resin material
EP0515999A3 (en) A containerless processing method for materials under a state of compensated-gravitation and an apparatus therefor
EP0594528A3 (en) Process and apparatus for treatment of half-carcasses
PL297342A1 (en) Method of and apparatus for sterilizing treated materials
GB2260720B (en) Method for surface treatment of plastic material and apparatus used therefor
EP0449660A3 (en) A method and apparatus of generating shadow process
GB9320314D0 (en) A method of and apparatus for insepcting parts
EP0512677A3 (en) Plasma treatment method and apparatus
HU9303285D0 (en) Apparatus for and method of induction-hardening machine components
GB9606282D0 (en) Method and apparatus for treating a run of fabric with vacuum
ZA841296B (en) Apparatus and method for plasma treatment of resin material
ZA841294B (en) Apparatus and method for plasma treatment of resin material
GB2266298B (en) A process and an apparatus for the treatment of effluent

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19971226