GB2221302A - Coriolis-effect fluid mass flow and density sensor made by a micromachining method - Google Patents

Coriolis-effect fluid mass flow and density sensor made by a micromachining method Download PDF

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Publication number
GB2221302A
GB2221302A GB8908527A GB8908527A GB2221302A GB 2221302 A GB2221302 A GB 2221302A GB 8908527 A GB8908527 A GB 8908527A GB 8908527 A GB8908527 A GB 8908527A GB 2221302 A GB2221302 A GB 2221302A
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United Kingdom
Prior art keywords
channel
flow
mass flow
density
flow channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB8908527A
Other versions
GB8908527D0 (en
Inventor
Paul Andrew Robertson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PA Consulting Services Ltd
Original Assignee
PA Consulting Services Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PA Consulting Services Ltd filed Critical PA Consulting Services Ltd
Publication of GB8908527D0 publication Critical patent/GB8908527D0/en
Publication of GB2221302A publication Critical patent/GB2221302A/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8404—Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8422—Coriolis or gyroscopic mass flowmeters constructional details exciters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/8472—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/32—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity by using flow properties of fluids, e.g. flow through tubes or apertures

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Volume Flow (AREA)

Abstract

An apparatus for measuring fluid mass flow and/or density has a generally U-shaped flow channel (107) formed in a cantilevered member (103) by a micromachining technique, such as by a lithography and etching process. A top cover (102) is bonded over the member (103) to enclose the channel (107), the bonding being made by an electrostatic or anodic bonding means. By vibrating the cantilevered member during fluid flow, and sensing the resultant motion, the mass flow and fluid density can be measured. Excitation and detection may be thermal, optical, electrostatic, piezoelectric or electromagnetic. <IMAGE>

Description

Title: Fluid Mass Flow and Density Sensor Field of the invention The present invention relates to apparatus for measuring fluid mass flow and/or density, and to a method of constructing such an apparatus.
Background of the invention Conventional Coriolis mass flow meters are relatively large dcvices, some tens of centimetres ii length, often constructed from many components and sub-assemblies and typically measure true mass flow rates in the range n.5 g/s to 150 Kq/s.The measurement of lower mass riow rates is achieved using other types of flow meter such dS those based on differential pressure drops, turbines, metering pumps, thermal measurements and Doppler etfects, however, these methods do not measure mass flow directly but are sensitive to fluid velocity or volumetric flow rate from which the mass flow may be derived, provided the composition of the fluid is known and its relevant properties well characterised.
Statement of invention According to the present invention, there is provided an apparatus for measuring fluid mass flow and/or density comprising an enclosed flow channel generally of U-shape which is cantilevered at its ends, excitation means for causing the free portion of the channel to vibrate, and detection means for monitoring the motion of the free portion, the flow channel being formed by a micromashing technique.
The micromachining technique may be of the type developed for the integrated circuit fabrication industry, and may for example comprise a lithography and etching process.
With these construction methods a mass flow and density sensor may be fabricated in a wide range of sizes with dimensions of the order of a few micrometer to d few centimeters. Therefore, the true mass flow measurement range of the Coriolis sensor may be extended to mass flow rates many ormers of magnitude lower than those measureable by conventional devices.
In addition to this advantaqe, the present invention describes a conFiguration of sensor which only requires a relatively small number of simply formed loicrolnachined components to comprise the complete Coriolis mass flow and density sensor unit. The process of micromachining is well established, involving lithography and etching processes, and does not form part of the invention described herein. The components formed by micromachining may be joined together by electrostatic (anodic) bondinq, solder or cement to form the complete device.
The invention also extends to a method of so forming such a measuring apparatus.
Brief description of the drawings The invention will now be described, by way of example only, with reference to the accompanying drawings in which: Figure 1 is a perspective view of the basic arrangement of a fluid mass flow and density meter; Figures 2A and B are end views of the meter showing, in exaggerated form, its twisting in use; Figure 3 shows side views (a) to (e) of alternative excitation echnit3ues for the meter; Figure 4 shows end views la) to (d) of alternalÄve detection techniques for monitoring the twist in tiie meter; and Figures 5 to 7 are respectively views in plan, side elevation and end elevation of a preferred embodiment of the riveter.
Detailed description Conventional Coriolis mass flow meters are usually excited into resonant vibration by electromagnetic means1 and the motions due to the Coriolis effect of the moving fluid mass are similarly sensed by electromagnetic means. The present invention described below employs thermal, optical, electrostdtic, piezo-electric or electro-magnetic excitation and detection techniques.
Considering a U-tube geometry for the micromachined Coriolis mass flow and density meter shown in Figure 1, a U-tube cantilever 10 is excited into vertical oscillation or vibration by one of the technitlues mentioned above.
When a mass flow of fluid passes through the U-tube 10 while it is vibrating as shown in Figure 1, the Coriolis forces due to the fluid motion cause the U-tube to twist in quadrature with the U-tube cantilever vibration, such that the instantaneous orientation of the U-tube end as it passes through the central point of oscillation is shown in Figure 2 - depending on the direction of fluid flow and velocity of vibration.
The magnitude of twist is proportional to the mass flow rate through the tube and may be sensed by measuring the relative phase shift in oscillation of each arm of the Utube or by measuring the anqle of the surfaces of the end of the tube or arms of the tube. The geometry of the Coriolis mass flow meter is not confined to a U-tube shape, a 'tennis racket' shape and straight tubes may also be employed.
Figure 3 illustrates a range of excitation techniques which may be employed to maintain oscillation of the-Utube or other shaped beam configuration in each case from a cantilever fixture point 12. These methods show respectively: (a) a piezo-electric bimorph strip 13; (b) photo-thermal excitation using anoptical fibre 14; (c) a bimetallic strip or element 16 which is photothermally or electrically heated; (d) electro-magnetic excitation using a magnetic force plate 18 attached to the end of the beam 10, and an electromagnet 20 actuated by a current drive 22; and (e) electrostatic excitation using capacitor plates 24 actuated by a voltage drive 26.
With the beam 10 in resonance, the torsional Coriolis forces applied to the structure as a result of the fluid flow through the U-tube may be ascertained by measuring either the torsional deformation of the structure apparent from the distortion of the U-tube end or from the phase difference between the oscillation of the U-tube arms.
Figure 4 illustrates a range of detection techniques urhicfi monitor the twisting distortion of the U-tube cantilever end. The methods shown utilise rPspectively: (a) a yiezo-electric technique with piezo-bimorpi; strips 28; (b) an optical technique such as interferometery :'nd riable reflective coupling back into optical 'irDres 30; (c) a capacitive technique using capacitor plates 32; and (d) an inductive proximity detection technique using inductors 34 and loading plates 36 mounted on the U-tube end.
The capacitive and inductive proximity sensing techniques may be used in an a.c. bridge circuit for sensitive detection of the cantilever twisting movement and good rejection of the fundamental cantilever oscillation movement.
From the excitation and detection schemes described it is possible to construct a device using different excitation and detection methods which can result in negligible breakthrough of the drive onto the output signal, enabling a low noise output signal to be obtained. The differential output from the two detectors provides the twist signal from which the mass flow rate may be determined, whereas the summed output may be used to determine the cantilever position and is used-in a feedback circuit to maintain the cantilever resonance at its natural frequency and at a suitable amplitude. The natural frequency of oscillation is dependent on the fluid density within the cantilever U-tube and is used to determine that density. For a given device the mass flow is nroportional to the ratio of the difference signal to the sum signal.
Referring now to the preferred embodiment of device shown in Figures 5 to 7, a U-tube cantilever is formed from two components: a channel section member leo3, and A top cover 102. The channel section 103 comprises a plate of an etchable material which contains an open channel 107. The formation of this component is straightforward, using micromachining techniques known to one versed in the art thereof. The U-tube cover 102 is formed from a plate of a compatible material which may be similarly fabricated by micromachining and which is bonded to the top of the section 103 by any suitable process: for example electrostatic or anodic bonding is a well established technique for bonding silicon and metals to glasses. The top cover 102 contains two windows through which the fluid may flow into the channels 107 within the section 103.
Two tubes 106 are anodically bonded or cemented to the top cover 102, to form the fluid inlet and outlet of the flow and density sensor.
The cantilever U-tube and feed tubes assembly, comprising the parts 102, 103, and 106 is similarly bonded to a base plate 104 made of glass. This compatible material base supports a pair of optical fibres 105 which are used to analyse the position of each side of the cantilever end.
The fibres 105 are set into V-shaped grooves 111 for alignment, and fixed with epoxy cement or other bonding technique. The fibre ends may be cleaved and polished after the bondinq process. The curved sections 1 ns, "t the material interface, inhibit stress concentration at these points. Examples of suitable materials for these components are nickel alloy for the tubes 106, single crystal silicon for the cllanllel section 103, and glass for the top cover 102 and for the base plate 104.
The cantilever assembly is maintained in its fundamental resonance by piezo-bimorpl-, drivers 101 bonded to its surface on either tile top or bottom or both. The feedback required for continuous mechanical oscillation is derived from the optical signals transmitted by the optical fibres 105 or from the electrical impedance of the binorph drivers. Each of the fibres 105 in the present configuration form one arm of a two arm interferometer, such that the interferometer is sensitive to the difference in the gap lengths 112 and 113. This difference in the gap lengths, is determined by the twist of the U-tube cantilever introduced by the Coriolis forces imparted by the flowing fluid mass.
The density of the fluid in the U-tube cantilever assembly is determined from the natural frequency of oscillation of.
the bean which is reduced by the presence of the fluid inside it.

Claims (10)

Claims
1. Apparatus for measuring fluid mass flow and/or density comprising an enclosed flow channel generally of U-shape which is cantilevered at its ends, excitation means tor causing the free portion of the channel to vibrate, and detection means for monitoring the motion of the free portion, thc flow channel being formed by a micromachining technique.
2. Apparatus according to claim 1 in which tulle flow channel is formed by a lithography and etching process.
3. Apparatus according to claim 1 or claim 2 iri which the flow channel comprises a flat member into one àcz-of which the channel is micromachined, and a cover secured onto said face to enclose the channel.
4. Apparatus according to claim 3 in which the member is made of a single crystal silicon and the cover is made ot: glass.
5. Apparatus according to claim 4 in which the member and the glass are bonded by electrostatic or anodic bonding.
6. Apparatus according to any preceding claim in which the excitation means comprises a piezo-electric biinorph strip.
7. Apparatus according to any preceding claim in which the detection means comprises an interferometer And a pair of spaced optical fibres directed towards the free portion of the channel to detect twisting thereof.
8. A method of contructing an apparatus for measuring fluid flow and/or density having a cantilevered flow channel of generally U-shape, in which the flow channel is formed by a micromachining technique.
9. Apparatus for measuring flow mass flow and/or density substantially as herein described with reference to, and as shown in, the accompanying drawings.
10. A method of constructing an apparatus for measuring fluid flow and/or density substantially as herein described with reference to, and d5 shown in, the accompanying drawings.
GB8908527A 1988-04-25 1989-04-14 Coriolis-effect fluid mass flow and density sensor made by a micromachining method Withdrawn GB2221302A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB888809715A GB8809715D0 (en) 1988-04-25 1988-04-25 Fluid mass flow & density sensor

Publications (2)

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GB8908527D0 GB8908527D0 (en) 1989-06-01
GB2221302A true GB2221302A (en) 1990-01-31

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GB8908527A Withdrawn GB2221302A (en) 1988-04-25 1989-04-14 Coriolis-effect fluid mass flow and density sensor made by a micromachining method

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Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4327052A1 (en) * 1993-08-12 1995-02-16 Krohne Mestechnik Massametron Device for measuring the mass of liquids and gases
EP0706032A1 (en) * 1994-10-07 1996-04-10 Krohne Messtechnik Gmbh & Co. Kg Measuring apparatus for flowing fluids
WO1997005824A1 (en) * 1995-08-09 1997-02-20 Resmed Limited Apparatus and methods for oro-nasal respiration monitoring
DE19605923A1 (en) * 1996-02-17 1997-08-21 Danfoss As Flowmeter with tube driven by excitation unit at right angles to linear direction
US6029665A (en) 1993-11-05 2000-02-29 Resmed Limited Determination of patency of airway
US6029660A (en) 1996-12-12 2000-02-29 Resmed Limited Substance delivery apparatus
WO2000034748A2 (en) * 1998-12-08 2000-06-15 Emerson Electric Co. Coriolis mass flow controller
US6091973A (en) 1995-04-11 2000-07-18 Resmed Limited Monitoring the occurrence of apneic and hypopneic arousals
US6152129A (en) 1996-08-14 2000-11-28 Resmed Limited Determination of leak and respiratory airflow
US6155986A (en) 1995-06-08 2000-12-05 Resmed Limited Monitoring of oro-nasal respiration
US6182657B1 (en) 1995-09-18 2001-02-06 Resmed Limited Pressure control in CPAP treatment or assisted respiration
US6213119B1 (en) 1995-10-23 2001-04-10 Resmed Limited Inspiratory duration in CPAP or assisted respiration treatment
WO2001036918A2 (en) * 1999-11-01 2001-05-25 Micro Motion, Inc. Coriolis mass flow controller
US6253764B1 (en) 1996-05-08 2001-07-03 Resmed, Ltd. Control of delivery pressure in CPAP treatment or assisted respiration
US6367474B1 (en) 1997-11-07 2002-04-09 Resmed Limited Administration of CPAP treatment pressure in presence of APNEA
US6397841B1 (en) 1997-06-18 2002-06-04 Resmed Limited Apparatus for supplying breathable gas
US6513392B1 (en) 1998-12-08 2003-02-04 Emerson Electric Co. Coriolis mass flow controller
US6532957B2 (en) 1996-09-23 2003-03-18 Resmed Limited Assisted ventilation to match patient respiratory need
US6635021B1 (en) 1987-06-26 2003-10-21 Resmed Limited Method and apparatus useful in the diagnosis of obstructive sleep apnea of a patient
US6748813B1 (en) 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
WO2004072591A1 (en) * 2003-02-04 2004-08-26 Micro Motion, Inc. Low mass coriolis mass flowmeter having a low mass drive system
WO2006083386A1 (en) * 2005-02-03 2006-08-10 Integrated Sensing Systems, Inc. Fluid sensing device with integrated bypass and process therefor
US7168329B2 (en) 2003-02-04 2007-01-30 Micro Motion, Inc. Low mass Coriolis mass flowmeter having a low mass drive system
WO2010020525A1 (en) * 2008-08-21 2010-02-25 Endress+Hauser Flowtec Ag Sensor in micromechanical design
EP2177883A1 (en) 2008-10-15 2010-04-21 Honeywell International Inc. Low-power flow meter and related method
US7730886B2 (en) 1993-11-05 2010-06-08 Resmed Limited Determination of patency of the airway
US8585910B2 (en) 2008-03-03 2013-11-19 Integrated Sensing Systems Inc. Process of making a microtube and microfluidic devices formed therewith

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0239703A1 (en) * 1986-01-07 1987-10-07 THORN EMI plc Force-sensitive flow sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0239703A1 (en) * 1986-01-07 1987-10-07 THORN EMI plc Force-sensitive flow sensor

Cited By (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6635021B1 (en) 1987-06-26 2003-10-21 Resmed Limited Method and apparatus useful in the diagnosis of obstructive sleep apnea of a patient
DE4327052A1 (en) * 1993-08-12 1995-02-16 Krohne Mestechnik Massametron Device for measuring the mass of liquids and gases
DE4327052C3 (en) * 1993-08-12 1998-10-22 Krohne Ag Mass flow meter
US6029665A (en) 1993-11-05 2000-02-29 Resmed Limited Determination of patency of airway
US6138675A (en) 1993-11-05 2000-10-31 Resmed Ltd. Determination of the occurrence of an apnea
US8360060B2 (en) 1993-11-05 2013-01-29 Resmed Limited Distinguishing between closed and open airway apneas and treating patients accordingly
US8381722B2 (en) 1993-11-05 2013-02-26 Resmed Limited Distinguishing between closed and open airway apneas and treating patients accordingly
US7730886B2 (en) 1993-11-05 2010-06-08 Resmed Limited Determination of patency of the airway
US8752547B2 (en) 1993-11-05 2014-06-17 Resmed Limited Distinguishing between closed and open airway apneas and treating patients accordingly
DE4435809A1 (en) * 1994-10-07 1996-04-11 Krohne Messtechnik Kg Measuring device for flowing media
US5747704A (en) * 1994-10-07 1998-05-05 Krohne Messtechnik Gmbh & Co., Kg Meter for flowing media
EP0706032A1 (en) * 1994-10-07 1996-04-10 Krohne Messtechnik Gmbh & Co. Kg Measuring apparatus for flowing fluids
US6091973A (en) 1995-04-11 2000-07-18 Resmed Limited Monitoring the occurrence of apneic and hypopneic arousals
US6155986A (en) 1995-06-08 2000-12-05 Resmed Limited Monitoring of oro-nasal respiration
WO1997005824A1 (en) * 1995-08-09 1997-02-20 Resmed Limited Apparatus and methods for oro-nasal respiration monitoring
US6182657B1 (en) 1995-09-18 2001-02-06 Resmed Limited Pressure control in CPAP treatment or assisted respiration
US6526974B1 (en) 1995-09-18 2003-03-04 John William Ernest Brydon Pressure control in CPAP treatment or assisted respiration
US6213119B1 (en) 1995-10-23 2001-04-10 Resmed Limited Inspiratory duration in CPAP or assisted respiration treatment
DE19605923C2 (en) * 1996-02-17 2001-09-13 Danfoss As Flow meter
DE19605923A1 (en) * 1996-02-17 1997-08-21 Danfoss As Flowmeter with tube driven by excitation unit at right angles to linear direction
US6253764B1 (en) 1996-05-08 2001-07-03 Resmed, Ltd. Control of delivery pressure in CPAP treatment or assisted respiration
US6152129A (en) 1996-08-14 2000-11-28 Resmed Limited Determination of leak and respiratory airflow
US9974911B2 (en) 1996-09-23 2018-05-22 Resmed Limited Method and apparatus for providing ventilatory assistance
US8733351B2 (en) 1996-09-23 2014-05-27 Resmed Limited Method and apparatus for providing ventilatory assistance
US6810876B2 (en) 1996-09-23 2004-11-02 Resmed Ltd. Assisted ventilation to match patient respiratory need
US8051853B2 (en) 1996-09-23 2011-11-08 Resmed Limited Method and apparatus for providing ventilatory assistance
US7644713B2 (en) 1996-09-23 2010-01-12 Resmed Limited Method and apparatus for determining instantaneous leak during ventilatory assistance
US6532957B2 (en) 1996-09-23 2003-03-18 Resmed Limited Assisted ventilation to match patient respiratory need
US6688307B2 (en) 1996-09-23 2004-02-10 Resmed Limited Methods and apparatus for determining instantaneous elastic recoil and assistance pressure during ventilatory support
US6029660A (en) 1996-12-12 2000-02-29 Resmed Limited Substance delivery apparatus
US6397841B1 (en) 1997-06-18 2002-06-04 Resmed Limited Apparatus for supplying breathable gas
US9526855B2 (en) 1997-11-07 2016-12-27 Resmed Limited Administration of CPAP treatment pressure in presence of apnea
US8684000B2 (en) 1997-11-07 2014-04-01 Resmed Limited Administration of CPAP treatment pressure in presence of apnea
US6367474B1 (en) 1997-11-07 2002-04-09 Resmed Limited Administration of CPAP treatment pressure in presence of APNEA
US6748813B1 (en) 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
AU771345B2 (en) * 1998-12-08 2004-03-18 Emerson Electric Co. Coriolis mass flow controller
WO2000034748A2 (en) * 1998-12-08 2000-06-15 Emerson Electric Co. Coriolis mass flow controller
WO2000034748A3 (en) * 1998-12-08 2000-11-16 Emerson Electric Co Coriolis mass flow controller
KR100846692B1 (en) 1998-12-08 2008-07-16 에머슨 일렉트릭 컴파니 Coriolis mass flow controller
CN100443861C (en) * 1998-12-08 2008-12-17 埃莫森电器公司 Coriolis mass flow controller
KR100880285B1 (en) 1998-12-08 2009-01-28 에머슨 일렉트릭 컴파니 Coriolis mass flow controller
KR100880286B1 (en) 1998-12-08 2009-01-28 에머슨 일렉트릭 컴파니 Coriolis mass flow controller
KR100883622B1 (en) 1998-12-08 2009-02-13 에머슨 일렉트릭 컴파니 Coriolis mass flow controller
US6513392B1 (en) 1998-12-08 2003-02-04 Emerson Electric Co. Coriolis mass flow controller
EP2071297A2 (en) * 1998-12-08 2009-06-17 Emerson Electric Co. Coriolis Mass Flow Controller
EP2071297A3 (en) * 1998-12-08 2009-12-09 Emerson Electric Co. Coriolis Mass Flow Controller
CN101533278B (en) * 1998-12-08 2013-03-27 埃莫森电器公司 Coriolis mass flow controller
US6526839B1 (en) 1998-12-08 2003-03-04 Emerson Electric Co. Coriolis mass flow controller and capacitive pick off sensor
US7032462B2 (en) 1998-12-08 2006-04-25 Emerson Electric Co. Mass flow measurement device
WO2001036918A2 (en) * 1999-11-01 2001-05-25 Micro Motion, Inc. Coriolis mass flow controller
WO2001036918A3 (en) * 1999-11-01 2002-03-21 Micro Motion Inc Coriolis mass flow controller
AU2003216167B2 (en) * 2003-02-04 2009-05-28 Micro Motion, Inc. Low mass Coriolis mass flowmeter having a low mass drive system
CN100385209C (en) * 2003-02-04 2008-04-30 微动公司 Low mass coriolis mass flowmeter having a low mass drive system
WO2004072591A1 (en) * 2003-02-04 2004-08-26 Micro Motion, Inc. Low mass coriolis mass flowmeter having a low mass drive system
US7168329B2 (en) 2003-02-04 2007-01-30 Micro Motion, Inc. Low mass Coriolis mass flowmeter having a low mass drive system
WO2006083386A1 (en) * 2005-02-03 2006-08-10 Integrated Sensing Systems, Inc. Fluid sensing device with integrated bypass and process therefor
US7228735B2 (en) 2005-02-03 2007-06-12 Integrated Sensing Systems, Inc. Fluid sensing device with integrated bypass and process therefor
US8585910B2 (en) 2008-03-03 2013-11-19 Integrated Sensing Systems Inc. Process of making a microtube and microfluidic devices formed therewith
WO2010020525A1 (en) * 2008-08-21 2010-02-25 Endress+Hauser Flowtec Ag Sensor in micromechanical design
US8336395B2 (en) 2008-08-21 2012-12-25 Endress + Hauser Flowtec Ag Sensor with micromechanical construction
EP2177883A1 (en) 2008-10-15 2010-04-21 Honeywell International Inc. Low-power flow meter and related method
US7930115B2 (en) 2008-10-15 2011-04-19 Honeywell International Inc. Low-power flow meter and related method

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