GB2162314A - Transducer - Google Patents
Transducer Download PDFInfo
- Publication number
- GB2162314A GB2162314A GB8518730A GB8518730A GB2162314A GB 2162314 A GB2162314 A GB 2162314A GB 8518730 A GB8518730 A GB 8518730A GB 8518730 A GB8518730 A GB 8518730A GB 2162314 A GB2162314 A GB 2162314A
- Authority
- GB
- United Kingdom
- Prior art keywords
- filaments
- transducer
- support
- base
- tuning fork
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 5
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 5
- 239000010703 silicon Substances 0.000 claims abstract description 5
- 230000010355 oscillation Effects 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 2
- 229910002113 barium titanate Inorganic materials 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
- G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Gyroscopes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
A transducer for stress or strain measurement comprises a pair of parallel stretched silicon filaments 12 which vibrate in antiphase in their common plane. The resonant vibrational frequency is determined by the external forces applied to the filaments. The transducer may be employed as a sensor element in an inertial guidance system. The filaments form a double-ended tuning fork structure attached at its roots 13, 14 to a single crystal silicon support 11 having flexible regions 15 by which external forces are applied to the filaments. Piezoelectric layers or electrostrictive pn junctions at the roots 13, 14 establish filament vibration which may then be detected electrically or optically. <IMAGE>
Description
SPECIFICATION
Transducer
This invention relates to transducers for use e.g. as stress gauges for measuring stress or strain and in particular to such a transducer in which the responsive element is a mechanical resonator.
According to the invention there is provided a transducer responsive to a force applied thereto, the transducer including a single crystal silicon support structure, and a pair of parallel silicon filaments forming a double ended tuning fork structure and coupled to the support via the two base or root portions of the tuning fork, means disposed on the base or root portions for vibrating the filaments in antiphase and in their common plane, and means whereby a force applied to the support is transmitted to the filaments thereby determining their resonant frequency.
As the filaments vibrate in antiphase in a common plane the structure is dynamically balanced and is thus relatively insensitive to spurious resonances introduced via the mounting of the device. The structure may be used in a variety of applications but is of particular use as an accelerometer in an inertial guidance system.
An embodiment of the invention will now be described with reference to the accompanying drawing in which:
Figure 1 is a three quarters view of the transducer;
Figure 2 is a plan view of the transducer,
Figure 3 is a sectional view in the plane x-x of Fig. 2, and
Figure 4 is a schematic diagram of an inertial guidance system employing transducers of the type shown in Figs. 1, 2 and 3.
Referring to the drawings, the transducer comprises a support frame structure 11 of single crystal silicon across which a parallel pair of silicon filaments 12 are stretched. The filaments are formed as a double ended tuning fork structure supported via its base or root portions 13, 14 on the frame 11. In this way the filaments 1 2 are substantially isolated from the support.
The support structure 11 is provided with two relatively thin portions 1 5 whereby the structure may be flexed to apply a tension force to the filaments 1 2 thereby determining their resonant vibrational frequency.
In use the filaments vibrate in antiphase and in a mode confined to their common plane. This ensures that the structure is dynamically balanced.
Excitation of the resonator filaments may be achieved by shock excitation or by a positive feedback arrangement, the drive force being applied via the base or root portions 13, 14.
Typically the base portions 13, 14 of the structure are doped to provide electrostrictive regions 1 6. A pn junction is provided between each portion 13, 14 and the supporting frame 11. An electric field applied across this junction such that the junction is reverse biassed produces a stress that is proportional to the square of the electric field. Application of an oscillating field, with a suitable steady voltage bias, causes corresponding changes of tension in the filaments 1 2 driving them into resonance in antiphase. Alternatively excitation of the filaments may be provided via a piezoelectric layer (not shown) deposited on the base portion. Typically such a layer comprises zinc oxide or barium titanate.The drive force is applied to the filaments via the base or root portions such that the arrangement. is compressed or stretched so that the filaments are driven into an antiphase vibrational mode in their common plane. As the filaments are substantially decoupled from the frame 11 by the base portions 13, 14, and as the drive is applied directly to the filaments and not via the frame 11, the arrangement has a high Q factor.
Oscillation of the filaments may be detected electrically, or optically via an optical fibre directed at one filament. Light transmitted along the fibre is reflected from the filament and modulated with the resonant frequency.
In some applications the filaments 1 2 may be driven into and/or maintained in oscillation by an optical drive signal via photovoltaic devices (not shown) disposed on the base portions 13, 1 4. An optical feedback system may be used to maintain oscillation. Such a technique is described in out UK specification
No. 2,121,953 (J.C. Greenwood 42).
The structure may be formed by selective etching from a body of single crystal silicon, the device configuration being defined by boron doping or by the use of an electrolytic etch stop. Typically the filaments are defined by doping with boron to a level of about 4 X 10'9 atoms/cc. The silicon body is then masked and exposed to a selective etch comprising a mixture of catechol, ethylene diamine and water, or potassium hydroxide and isopropyl alcohol. Such techniques are more fully described in our published specification
No. 1,211,496 (J.C. Greenwood-6).
The transducer has particular application as an accelerometer. For this purpose the frame 11 is mounted via one end portion 1 1a (Fig.
1) on a support (not shown), the free portion of the frame providing an inertial mass. Movement of the free portion of the frame about the thin portions 1 5 in response to an acceleration causes corresponding tension or compression of the filaments 1 2. Fig. 4 shows a schematic diagram of an inertial guidance system, e.g. for use in a vehicle. Accelerations in the X, Y and Z directions are sensed by corresponding transducers 41, 42 and 43.
The outputs of these transducers are fed via respective X, Y and Z amplifiers (44 to 46) to a central control unit 47. In response to the input signals received from the amplifiers, and to preset course information, the control unit provides output signals to X, Y and Z guidance controls (48-50) whereby a desired course may be maintained.
Claims (8)
1. A transducer responsive to a force applied thereto, the transducer including a single crystal silicon support structure, and a pair of parallel silicon filaments forming a double ended tuning fork structure and coupled to the support via the two base or root portions of the tuning fork, means disposed on the base or root portions for vibrating the filaments in antiphase and in their common plane, and means whereby a force applied to the support is transmitted to the filaments thereby determining their resonant frequency.
2. A transducer as claimed in claim 1, wherein said support structure has a flexible portion whereby a force may be transmitted to the filaments by distortion of the support.
3. A transducer as claimed in claim 1 or 2, wherein electrostrictive means are provided whereby the filaments, in use, are maintained in oscillation.
4. A transducer as claimed in claim 1 or 2, wherein piezoelectric means are provided whereby the filaments, in use, are maintained in oscillation.
5. A transducer as claimed in claim 4, wherein said piezoelectric means comprise a layer of zinc oxide or barium titanate deposited on each said base portion.
6. A transducer substantially as described herein with reference to Figs. 1 to 3 of the accompanying drawings.
7. An inertial guidance system incorporating one or more transducers as claimed in any one of claims 1 to 6.
8. A vehicle provided with a guidance system as claimed in claim 7.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB848418914A GB8418914D0 (en) | 1984-07-25 | 1984-07-25 | Transducer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB8518730D0 GB8518730D0 (en) | 1985-08-29 |
| GB2162314A true GB2162314A (en) | 1986-01-29 |
| GB2162314B GB2162314B (en) | 1987-12-16 |
Family
ID=10564413
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB848418914A Pending GB8418914D0 (en) | 1984-07-25 | 1984-07-25 | Transducer |
| GB8518730A Expired GB2162314B (en) | 1984-07-25 | 1985-07-24 | Transducer |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB848418914A Pending GB8418914D0 (en) | 1984-07-25 | 1984-07-25 | Transducer |
Country Status (1)
| Country | Link |
|---|---|
| GB (2) | GB8418914D0 (en) |
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2185106A (en) * | 1985-12-13 | 1987-07-08 | Gen Electric Co Plc | An optically-driven vibrating sensor |
| EP0244086A2 (en) * | 1986-04-26 | 1987-11-04 | Stc Plc | Resonator device |
| GB2197069A (en) * | 1986-11-03 | 1988-05-11 | Stc Plc | Optically driven sensor device |
| GB2201776A (en) * | 1987-01-24 | 1988-09-07 | Schlumberger Electronics | Resonantly vibratable sensors |
| FR2627592A1 (en) * | 1988-02-22 | 1989-08-25 | Sagem | PENDULUM ACCELEROMETER NOT SERVED WITH RESONANT BEAM |
| US4912990A (en) * | 1989-02-27 | 1990-04-03 | Sundstrand Data Control, Inc. | Magnetically driven vibrating beam force transducer |
| US4945765A (en) * | 1988-08-31 | 1990-08-07 | Kearfott Guidance & Navigation Corp. | Silicon micromachined accelerometer |
| EP0419596A1 (en) * | 1989-02-27 | 1991-04-03 | Sundstrand Data Control | Accelerometer with coplanar push-pull force transducers. |
| US5060526A (en) * | 1989-05-30 | 1991-10-29 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with vibrating element |
| US5165279A (en) * | 1989-07-06 | 1992-11-24 | Sundstrand Corporation | Monolithic accelerometer with flexurally mounted force transducer |
| US5170665A (en) * | 1989-08-08 | 1992-12-15 | Denis Janiaud | Accelerometric sensor with flectional vibratory beams |
| GB2303450A (en) * | 1993-08-03 | 1997-02-19 | Univ Brunel | DETF load cell |
| EP0762132A2 (en) * | 1995-08-24 | 1997-03-12 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
| EP0855583A2 (en) * | 1996-10-31 | 1998-07-29 | Consorzio ABB per lo Sviluppo Tecnologico | Device for measuring a pressure |
| WO1998053328A1 (en) * | 1997-05-23 | 1998-11-26 | Sextant Avionique | Micro-accelerometer with capacitive resonator |
| US5962786A (en) * | 1995-09-26 | 1999-10-05 | Onera (Office National D'eudes Et De Recheres Aerospatiales) | Monolithic accelerometric transducer |
| JP2008209388A (en) * | 2006-10-13 | 2008-09-11 | Seiko Epson Corp | Acceleration sensor |
| JP2008309731A (en) * | 2007-06-18 | 2008-12-25 | Epson Toyocom Corp | Acceleration detection unit and acceleration sensor |
| US7565840B2 (en) * | 2005-12-13 | 2009-07-28 | Epson Toyocom Corporation | Acceleration sensor element and acceleration sensor |
| EP2607906A1 (en) * | 2011-12-20 | 2013-06-26 | Honeywell International Inc. | Double-ended tuning fork with outrigger excitation |
| JP2015025796A (en) * | 2013-06-21 | 2015-02-05 | 国立大学法人名古屋大学 | Load sensor with quartz crystal resonator |
| RU2569409C1 (en) * | 2014-09-10 | 2015-11-27 | Открытое акционерное общество "Научно-исследовательский институт физических измерений" | Tuning-fork measuring transformer of mechanical stresses and deformations |
| GB2556040A (en) * | 2016-11-10 | 2018-05-23 | Geometric Design Ltd | Vibrating-element force transducer |
| US9998089B2 (en) | 2012-12-14 | 2018-06-12 | General Electric Company | Resonator device |
| RU2726723C1 (en) * | 2019-12-24 | 2020-07-15 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Астраханский государственный технический университет" ФГБОУ ВО "АГТУ" | Device for measuring drilling mud pressure in well |
| RU2737901C1 (en) * | 2020-01-27 | 2020-12-04 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Астраханский государственный технический университет" ФГБОУ ВО "АГТУ" | Method of drilling fluid pressure measurement in well |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4215570A (en) * | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
| US4299122A (en) * | 1978-10-11 | 1981-11-10 | Yokogawa Electric Works, Ltd. | Force transducer |
| EP0050307A2 (en) * | 1980-10-20 | 1982-04-28 | Quartex, Inc. | Resonator force transducer |
| EP0052318A1 (en) * | 1980-11-17 | 1982-05-26 | Quartex, Inc. | Force transducer |
| EP0060185A1 (en) * | 1981-03-04 | 1982-09-15 | The Bendix Corporation | Vibrating beam rotation sensor |
| GB2115551A (en) * | 1982-02-09 | 1983-09-07 | Itt Ind Ltd | Load sensor |
| GB2121953A (en) * | 1982-06-10 | 1984-01-04 | Itt Ind Ltd | Improvements in transducers |
-
1984
- 1984-07-25 GB GB848418914A patent/GB8418914D0/en active Pending
-
1985
- 1985-07-24 GB GB8518730A patent/GB2162314B/en not_active Expired
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4299122A (en) * | 1978-10-11 | 1981-11-10 | Yokogawa Electric Works, Ltd. | Force transducer |
| US4215570A (en) * | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
| EP0050307A2 (en) * | 1980-10-20 | 1982-04-28 | Quartex, Inc. | Resonator force transducer |
| EP0052318A1 (en) * | 1980-11-17 | 1982-05-26 | Quartex, Inc. | Force transducer |
| EP0060185A1 (en) * | 1981-03-04 | 1982-09-15 | The Bendix Corporation | Vibrating beam rotation sensor |
| GB2115551A (en) * | 1982-02-09 | 1983-09-07 | Itt Ind Ltd | Load sensor |
| GB2121953A (en) * | 1982-06-10 | 1984-01-04 | Itt Ind Ltd | Improvements in transducers |
Cited By (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2185106A (en) * | 1985-12-13 | 1987-07-08 | Gen Electric Co Plc | An optically-driven vibrating sensor |
| GB2185106B (en) * | 1985-12-13 | 1990-04-25 | Gen Electric Plc | A sensor |
| EP0244086A3 (en) * | 1986-04-26 | 1989-07-19 | Stc Plc | Resonator device resonator device |
| EP0244086A2 (en) * | 1986-04-26 | 1987-11-04 | Stc Plc | Resonator device |
| US4813271A (en) * | 1986-04-26 | 1989-03-21 | Stc Plc | Resonator device |
| GB2197069B (en) * | 1986-11-03 | 1990-10-24 | Stc Plc | Sensor device |
| GB2197069A (en) * | 1986-11-03 | 1988-05-11 | Stc Plc | Optically driven sensor device |
| GB2201776A (en) * | 1987-01-24 | 1988-09-07 | Schlumberger Electronics | Resonantly vibratable sensors |
| FR2627592A1 (en) * | 1988-02-22 | 1989-08-25 | Sagem | PENDULUM ACCELEROMETER NOT SERVED WITH RESONANT BEAM |
| EP0331557A1 (en) * | 1988-02-22 | 1989-09-06 | Societe D'applications Generales D'electricite Et De Mecanique Sagem | Non-assisted pendulum accelerometer with a resonating beam |
| US4939935A (en) * | 1988-02-22 | 1990-07-10 | Societe D'applications Generales D'electricite Et De Mecanique | Pendular non-servoed tuning beam accelerometer |
| US4945765A (en) * | 1988-08-31 | 1990-08-07 | Kearfott Guidance & Navigation Corp. | Silicon micromachined accelerometer |
| US4912990A (en) * | 1989-02-27 | 1990-04-03 | Sundstrand Data Control, Inc. | Magnetically driven vibrating beam force transducer |
| EP0419596A1 (en) * | 1989-02-27 | 1991-04-03 | Sundstrand Data Control | Accelerometer with coplanar push-pull force transducers. |
| EP0419596A4 (en) * | 1989-02-27 | 1991-07-24 | Sundstrand Data Control, Inc. | Accelerometer with coplanar push-pull force transducers |
| US5060526A (en) * | 1989-05-30 | 1991-10-29 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with vibrating element |
| US5165279A (en) * | 1989-07-06 | 1992-11-24 | Sundstrand Corporation | Monolithic accelerometer with flexurally mounted force transducer |
| US5170665A (en) * | 1989-08-08 | 1992-12-15 | Denis Janiaud | Accelerometric sensor with flectional vibratory beams |
| GB2303450B (en) * | 1993-08-03 | 1997-07-09 | Univ Brunel | Detf load cell |
| GB2303450A (en) * | 1993-08-03 | 1997-02-19 | Univ Brunel | DETF load cell |
| EP0762132A3 (en) * | 1995-08-24 | 1998-04-15 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
| EP0762132A2 (en) * | 1995-08-24 | 1997-03-12 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
| US5962786A (en) * | 1995-09-26 | 1999-10-05 | Onera (Office National D'eudes Et De Recheres Aerospatiales) | Monolithic accelerometric transducer |
| EP0855583A2 (en) * | 1996-10-31 | 1998-07-29 | Consorzio ABB per lo Sviluppo Tecnologico | Device for measuring a pressure |
| EP0855583A3 (en) * | 1996-10-31 | 1999-03-24 | Consorzio ABB per lo Sviluppo Tecnologico | Device for measuring a pressure |
| US5969257A (en) * | 1996-10-31 | 1999-10-19 | Consorzio Abb Per Lo Sviluppo Tecnologico | Pressure measuring membrane with resonant element vibrating orthogonal to membrane movement |
| WO1998053328A1 (en) * | 1997-05-23 | 1998-11-26 | Sextant Avionique | Micro-accelerometer with capacitive resonator |
| FR2763694A1 (en) * | 1997-05-23 | 1998-11-27 | Sextant Avionique | CAPACITIVE RESONATOR MICRO-ACCELEROMETER |
| US6311556B1 (en) | 1997-05-23 | 2001-11-06 | Sextant Avionique | Micro-accelerometer with capacitive resonator |
| US7565840B2 (en) * | 2005-12-13 | 2009-07-28 | Epson Toyocom Corporation | Acceleration sensor element and acceleration sensor |
| JP2008209388A (en) * | 2006-10-13 | 2008-09-11 | Seiko Epson Corp | Acceleration sensor |
| JP2008309731A (en) * | 2007-06-18 | 2008-12-25 | Epson Toyocom Corp | Acceleration detection unit and acceleration sensor |
| EP2607906A1 (en) * | 2011-12-20 | 2013-06-26 | Honeywell International Inc. | Double-ended tuning fork with outrigger excitation |
| JP2013130567A (en) * | 2011-12-20 | 2013-07-04 | Honeywell Internatl Inc | Double-ended tuning fork with outrigger excitation |
| US8887567B2 (en) | 2011-12-20 | 2014-11-18 | Honeywell International Inc. | Double-ended tuning fork with outrigger excitation |
| US9998089B2 (en) | 2012-12-14 | 2018-06-12 | General Electric Company | Resonator device |
| JP2015025796A (en) * | 2013-06-21 | 2015-02-05 | 国立大学法人名古屋大学 | Load sensor with quartz crystal resonator |
| RU2569409C1 (en) * | 2014-09-10 | 2015-11-27 | Открытое акционерное общество "Научно-исследовательский институт физических измерений" | Tuning-fork measuring transformer of mechanical stresses and deformations |
| GB2556040A (en) * | 2016-11-10 | 2018-05-23 | Geometric Design Ltd | Vibrating-element force transducer |
| RU2726723C1 (en) * | 2019-12-24 | 2020-07-15 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Астраханский государственный технический университет" ФГБОУ ВО "АГТУ" | Device for measuring drilling mud pressure in well |
| RU2737901C1 (en) * | 2020-01-27 | 2020-12-04 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Астраханский государственный технический университет" ФГБОУ ВО "АГТУ" | Method of drilling fluid pressure measurement in well |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2162314B (en) | 1987-12-16 |
| GB8518730D0 (en) | 1985-08-29 |
| GB8418914D0 (en) | 1984-08-30 |
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| PCNP | Patent ceased through non-payment of renewal fee |