GB201006567D0 - High density plasma source - Google Patents

High density plasma source

Info

Publication number
GB201006567D0
GB201006567D0 GBGB1006567.0A GB201006567A GB201006567D0 GB 201006567 D0 GB201006567 D0 GB 201006567D0 GB 201006567 A GB201006567 A GB 201006567A GB 201006567 D0 GB201006567 D0 GB 201006567D0
Authority
GB
United Kingdom
Prior art keywords
high density
plasma source
density plasma
source
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1006567.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Quest Ltd
Original Assignee
Plasma Quest Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Quest Ltd filed Critical Plasma Quest Ltd
Priority to GBGB1006567.0A priority Critical patent/GB201006567D0/en
Publication of GB201006567D0 publication Critical patent/GB201006567D0/en
Priority to PCT/GB2011/000519 priority patent/WO2011131921A1/en
Priority to TW100113530A priority patent/TW201145349A/en
Ceased legal-status Critical Current

Links

GBGB1006567.0A 2010-04-20 2010-04-20 High density plasma source Ceased GB201006567D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB1006567.0A GB201006567D0 (en) 2010-04-20 2010-04-20 High density plasma source
PCT/GB2011/000519 WO2011131921A1 (en) 2010-04-20 2011-04-05 High density plasma source
TW100113530A TW201145349A (en) 2010-04-20 2011-04-19 High density plasma source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1006567.0A GB201006567D0 (en) 2010-04-20 2010-04-20 High density plasma source

Publications (1)

Publication Number Publication Date
GB201006567D0 true GB201006567D0 (en) 2010-06-02

Family

ID=42245475

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1006567.0A Ceased GB201006567D0 (en) 2010-04-20 2010-04-20 High density plasma source

Country Status (3)

Country Link
GB (1) GB201006567D0 (en)
TW (1) TW201145349A (en)
WO (1) WO2011131921A1 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6010406B2 (en) * 2012-01-27 2016-10-19 東京エレクトロン株式会社 Microwave radiation mechanism, microwave plasma source, and surface wave plasma processing apparatus
GB2576541A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd An apparatus
GB2576542A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd An apparatus
GB2576545A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd An apparatus
GB2576540A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd An apparatus
GB2576547A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd A method
GB2576539A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd A method
GB2576543A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd An apparatus
GB2576546A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd An apparatus
GB2576544A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd An apparatus
US11255016B2 (en) * 2019-10-04 2022-02-22 Mks Instruments, Inc. Microwave magnetron with constant anodic impedance and systems using the same
GB2588949B (en) * 2019-11-15 2022-09-07 Dyson Technology Ltd Method and apparatus for sputter deposition
GB2588935B (en) * 2019-11-15 2022-09-07 Dyson Technology Ltd Method and apparatus for sputter deposition of target material to a substrate
GB2588941B (en) * 2019-11-15 2022-08-17 Dyson Technology Ltd Method of depositing a material
GB2588937B (en) * 2019-11-15 2023-01-04 Dyson Technology Ltd Sputter deposition
GB2588946B (en) * 2019-11-15 2022-08-17 Dyson Technology Ltd Method of manufacturing crystalline material from different materials
GB2588948A (en) 2019-11-15 2021-05-19 Dyson Technology Ltd A method of manufacturing solid state battery cathodes for use in batteries
GB2588945B (en) * 2019-11-15 2024-04-17 Dyson Technology Ltd Method of depositing material on a substrate
GB2588947B (en) 2019-11-15 2024-02-21 Dyson Technology Ltd A method of manufacturing solid state battery cathodes for use in batteries
GB2590614B (en) * 2019-12-16 2022-09-28 Dyson Technology Ltd Method and apparatus for use in generating plasma
GB2590613B (en) * 2019-12-16 2023-06-07 Dyson Technology Ltd Method and apparatus for use in generating plasma
GB2590612A (en) * 2019-12-16 2021-07-07 Dyson Technology Ltd Method and apparatus for use in generating plasma
GB2599393A (en) 2020-09-30 2022-04-06 Dyson Technology Ltd Method and apparatus for sputter deposition
GB2599392B (en) * 2020-09-30 2024-01-03 Dyson Technology Ltd Sputter deposition apparatus and method
CN116815152A (en) * 2023-07-11 2023-09-29 安徽立光电子材料股份有限公司 Continuous vacuum deposition coating equipment

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990229A (en) * 1989-06-13 1991-02-05 Plasma & Materials Technologies, Inc. High density plasma deposition and etching apparatus
US5122251A (en) * 1989-06-13 1992-06-16 Plasma & Materials Technologies, Inc. High density plasma deposition and etching apparatus
US6083363A (en) * 1997-07-02 2000-07-04 Tokyo Electron Limited Apparatus and method for uniform, low-damage anisotropic plasma processing
GB2343992B (en) 1998-11-20 2001-06-20 Michael John Thwaites High density plasmas
WO2001063981A1 (en) 2000-02-24 2001-08-30 Ccr Gmbh Beschichtungstechno Logie High frequency plasma source
US6463873B1 (en) 2000-04-04 2002-10-15 Plasma Quest Limited High density plasmas

Also Published As

Publication number Publication date
WO2011131921A1 (en) 2011-10-27
TW201145349A (en) 2011-12-16

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)