GB1424762A - Electron optical apparatus - Google Patents

Electron optical apparatus

Info

Publication number
GB1424762A
GB1424762A GB1360573A GB1360573A GB1424762A GB 1424762 A GB1424762 A GB 1424762A GB 1360573 A GB1360573 A GB 1360573A GB 1360573 A GB1360573 A GB 1360573A GB 1424762 A GB1424762 A GB 1424762A
Authority
GB
United Kingdom
Prior art keywords
pulses
switch
optical apparatus
counter
march
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1360573A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1424762A publication Critical patent/GB1424762A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/07—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors
    • G05B19/075—Programme control other than numerical control, i.e. in sequence controllers or logic controllers where the programme is defined in the fixed connection of electrical elements, e.g. potentiometers, counters, transistors for delivering a step function, a slope or a continuous function
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Abstract

1424762 Automatic control of electron-optical apparatus PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 21 March 1973 [24 March 1972] 13605/73 Heading G3N The lens current of electron optical apparatus is controlled by an adjusting mechanism comprising an externally operable control member for generating digital control pulses and a digital to analogue converter for converting the pulses to a control signal. Adjusting switch 2 generates add or substact step pulses in combination with clock 5 and circuit 6. The magnitude of each step is set up on switch 4 and circuit 7 either distributes the step pulses from 6 to the correct counter 8 according to the setting of switches 4 or acts as a variable multiplier in which case there is only one counter 8. The counter reading is converted to an analogue control signal by D/A converter 9 which may comprise reed relays as switching elements and is also displayed on NIXIE tubes 10. Preset magnifiction may be generated by switch 11 which enters the desired count value into store 12. This value is compared by comparator 13 with this actual count and the actual count is adjusted by pulses from clock 5. The operation may be controlled using predetermined values in a computer programme.
GB1360573A 1972-03-24 1973-03-21 Electron optical apparatus Expired GB1424762A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7203932A NL7203932A (en) 1972-03-24 1972-03-24

Publications (1)

Publication Number Publication Date
GB1424762A true GB1424762A (en) 1976-02-11

Family

ID=19815686

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1360573A Expired GB1424762A (en) 1972-03-24 1973-03-21 Electron optical apparatus

Country Status (6)

Country Link
JP (1) JPS499177A (en)
CA (1) CA976669A (en)
DE (1) DE2311424A1 (en)
FR (1) FR2177861B1 (en)
GB (1) GB1424762A (en)
NL (1) NL7203932A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5354465A (en) * 1976-10-28 1978-05-17 Jeol Ltd Lens control circuit for electromicroscope or the like
JPS5464458A (en) * 1977-10-31 1979-05-24 Jeol Ltd Magnification selection circuit of electromicro scope
JPS5816745B2 (en) * 1977-11-11 1983-04-01 日本電子株式会社 Lens control circuit for electron microscopes, etc.
JPS5477060A (en) * 1977-12-01 1979-06-20 Hitachi Ltd Electron microscope
JPS57145262U (en) * 1981-03-09 1982-09-11
JP3866509B2 (en) 2000-12-08 2007-01-10 富士工業株式会社 Reel seat for fishing rod and fishing rod

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1265362A (en) * 1969-02-04 1972-03-01
US3629845A (en) * 1970-06-03 1971-12-21 Hewlett Packard Co Digital adjustment apparatus for electronic instrumentation
JPS495662A (en) * 1972-04-11 1974-01-18

Also Published As

Publication number Publication date
CA976669A (en) 1975-10-21
FR2177861B1 (en) 1976-05-21
NL7203932A (en) 1973-09-26
JPS499177A (en) 1974-01-26
DE2311424A1 (en) 1973-10-04
FR2177861A1 (en) 1973-11-09

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee