GB1358438A - Process for the manufacture of a semiconductor component or an integrated semiconductor circuit - Google Patents
Process for the manufacture of a semiconductor component or an integrated semiconductor circuitInfo
- Publication number
- GB1358438A GB1358438A GB5585371A GB5585371A GB1358438A GB 1358438 A GB1358438 A GB 1358438A GB 5585371 A GB5585371 A GB 5585371A GB 5585371 A GB5585371 A GB 5585371A GB 1358438 A GB1358438 A GB 1358438A
- Authority
- GB
- United Kingdom
- Prior art keywords
- semi
- conductor
- layer
- mask
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 10
- 238000000034 method Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 abstract 6
- 239000000758 substrate Substances 0.000 abstract 4
- 238000000151 deposition Methods 0.000 abstract 3
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 2
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 abstract 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 abstract 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 1
- 239000000395 magnesium oxide Substances 0.000 abstract 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 229910052594 sapphire Inorganic materials 0.000 abstract 1
- 239000010980 sapphire Substances 0.000 abstract 1
- 229910052596 spinel Inorganic materials 0.000 abstract 1
- 239000011029 spinel Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
- 238000009834 vaporization Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
- H01L21/86—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body the insulating body being sapphire, e.g. silicon on sapphire structure, i.e. SOS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
1358438 Semi-conductor devices SIEMENS AG 1 Dec 1971 [1 Dec 1970] 55853/71 Heading H1K A semi-conductor layer 12 is deposited directly on an insulating substrate 2 only where it is required for a finished component or integrated circuit. The rest of the substrate surface is masked so that whereas the layer 12 deposits as monocrystalline material the semi-conductor material 13 depositing on the mask is polycrystalline and porous, allowing the mask to be subsequently removed, together with the polycrystalline material 13, by etching. The mask may be of SiO 2 , Si 3 N 4 or metal, the latter being useful in facilitating heating of the substrate by absorption of radiation when the semi-conductor material 12, 13 is to be deposited by high vacuum vaporization. In the form shown the mask comprises a layer 8 of SiO 2 overlying a layer 7 of Si 3 N 4 , the latter being retained flush with the semi-conductor material 12 in the finished structure. Other methods of depositing the semiconductor material 12, 13 are cathode sputtering and deposition from a gaseous semi-conductor compound. The semi-conductor 12, 13 may be Si, Ge or GaAs, the substrate 2 being magnesium oxide, beryllium oxide, spinel or sapphire.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19702059116 DE2059116C3 (en) | 1970-12-01 | 1970-12-01 | Method for manufacturing a semiconductor component |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1358438A true GB1358438A (en) | 1974-07-03 |
Family
ID=5789659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5585371A Expired GB1358438A (en) | 1970-12-01 | 1971-12-01 | Process for the manufacture of a semiconductor component or an integrated semiconductor circuit |
Country Status (7)
Country | Link |
---|---|
BE (1) | BE775973A (en) |
DE (1) | DE2059116C3 (en) |
FR (1) | FR2116424A1 (en) |
GB (1) | GB1358438A (en) |
IT (1) | IT941388B (en) |
LU (1) | LU64363A1 (en) |
NL (1) | NL7115760A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2522695A1 (en) * | 1982-01-12 | 1983-09-09 | Rca Corp | PROCESS FOR DRAWING MONOCRYSTALLINE SILICON ON A MASK-FORMING LAYER |
US4482422A (en) * | 1982-02-26 | 1984-11-13 | Rca Corporation | Method for growing a low defect monocrystalline layer on a mask |
GB2142185A (en) * | 1983-06-22 | 1985-01-09 | Rca Corp | Mosfet fabrication method |
US4549926A (en) * | 1982-01-12 | 1985-10-29 | Rca Corporation | Method for growing monocrystalline silicon on a mask layer |
US4578142A (en) * | 1984-05-10 | 1986-03-25 | Rca Corporation | Method for growing monocrystalline silicon through mask layer |
US4704186A (en) * | 1986-02-19 | 1987-11-03 | Rca Corporation | Recessed oxide method for making a silicon-on-insulator substrate |
GB2228617A (en) * | 1989-02-27 | 1990-08-29 | Philips Electronic Associated | A method of manufacturing a semiconductor device having a mesa structure |
US5273616A (en) * | 1980-04-10 | 1993-12-28 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material and devices made therefrom |
US5441012A (en) * | 1990-09-21 | 1995-08-15 | Anelva Corporation | Thin film deposition method for wafer |
US5690736A (en) * | 1987-08-24 | 1997-11-25 | Canon Kabushiki Kaisha | Method of forming crystal |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2284981A1 (en) * | 1974-09-10 | 1976-04-09 | Radiotechnique Compelec | PROCESS FOR OBTAINING AN INTEGRATED SEMICONDUCTOR CIRCUIT |
-
1970
- 1970-12-01 DE DE19702059116 patent/DE2059116C3/en not_active Expired
-
1971
- 1971-11-16 NL NL7115760A patent/NL7115760A/xx unknown
- 1971-11-26 IT IT3167871A patent/IT941388B/en active
- 1971-11-29 BE BE775973A patent/BE775973A/en unknown
- 1971-11-29 LU LU64363D patent/LU64363A1/xx unknown
- 1971-11-30 FR FR7142813A patent/FR2116424A1/fr not_active Withdrawn
- 1971-12-01 GB GB5585371A patent/GB1358438A/en not_active Expired
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5273616A (en) * | 1980-04-10 | 1993-12-28 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material and devices made therefrom |
FR2522695A1 (en) * | 1982-01-12 | 1983-09-09 | Rca Corp | PROCESS FOR DRAWING MONOCRYSTALLINE SILICON ON A MASK-FORMING LAYER |
US4549926A (en) * | 1982-01-12 | 1985-10-29 | Rca Corporation | Method for growing monocrystalline silicon on a mask layer |
US4482422A (en) * | 1982-02-26 | 1984-11-13 | Rca Corporation | Method for growing a low defect monocrystalline layer on a mask |
GB2142185A (en) * | 1983-06-22 | 1985-01-09 | Rca Corp | Mosfet fabrication method |
US4578142A (en) * | 1984-05-10 | 1986-03-25 | Rca Corporation | Method for growing monocrystalline silicon through mask layer |
US4704186A (en) * | 1986-02-19 | 1987-11-03 | Rca Corporation | Recessed oxide method for making a silicon-on-insulator substrate |
US5690736A (en) * | 1987-08-24 | 1997-11-25 | Canon Kabushiki Kaisha | Method of forming crystal |
GB2228617A (en) * | 1989-02-27 | 1990-08-29 | Philips Electronic Associated | A method of manufacturing a semiconductor device having a mesa structure |
US5441012A (en) * | 1990-09-21 | 1995-08-15 | Anelva Corporation | Thin film deposition method for wafer |
Also Published As
Publication number | Publication date |
---|---|
FR2116424A1 (en) | 1972-07-13 |
BE775973A (en) | 1972-03-16 |
IT941388B (en) | 1973-03-01 |
DE2059116B2 (en) | 1974-04-25 |
DE2059116A1 (en) | 1972-07-06 |
DE2059116C3 (en) | 1974-11-21 |
NL7115760A (en) | 1972-06-05 |
LU64363A1 (en) | 1972-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |