GB1300118A - Improvements relating to semiconductor strain transducers - Google Patents

Improvements relating to semiconductor strain transducers

Info

Publication number
GB1300118A
GB1300118A GB01701/70A GB1170170A GB1300118A GB 1300118 A GB1300118 A GB 1300118A GB 01701/70 A GB01701/70 A GB 01701/70A GB 1170170 A GB1170170 A GB 1170170A GB 1300118 A GB1300118 A GB 1300118A
Authority
GB
United Kingdom
Prior art keywords
beams
epitaxial layer
strain
conductor
seismic mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB01701/70A
Inventor
Charles Trevor Jones
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferranti International PLC
Original Assignee
Ferranti PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferranti PLC filed Critical Ferranti PLC
Priority to GB01701/70A priority Critical patent/GB1300118A/en
Publication of GB1300118A publication Critical patent/GB1300118A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

1300118 Semi-conductor strain transducers FERRANTI Ltd 19 April 1971 [11 March 1970] 11701/70 Heading H1K A strain transducer for detecting accelerations, forces, or fluid flow rates in one direction consists of a plurality of PN junction isolated piezo-resistive elements formed in each of two flexible semi-conductor beams. Uniform stress is achieved in the beams, which extend normal to said direction from clamped ends to a common point at which they support a seismic mass by a reduction in section of each beam at a uniform rate from the clamped end. In the embodiment which is an accelerometer P type strain sensors 13 are formed by planar diffusion into an N type epitaxial layer on a P type silicon substrate and lie along 111 and 110 crystallographic directions respectively. After diffusion and oxide passivation unwanted parts of the substrate and epitaxial layer are removed to leave two inwardly tapering beams 16 supported by a thick peripheral ring 12 and joined by an integral seismic mass 17. Aluminium tracks are then provided, which interconnect the sensors, e.g. into a bridge circuit and extend to contact pads to which fold wires are thermocompression bonded. The assembly is sealed in an evacuated housing.
GB01701/70A 1970-03-11 1970-03-11 Improvements relating to semiconductor strain transducers Expired GB1300118A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB01701/70A GB1300118A (en) 1970-03-11 1970-03-11 Improvements relating to semiconductor strain transducers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB01701/70A GB1300118A (en) 1970-03-11 1970-03-11 Improvements relating to semiconductor strain transducers

Publications (1)

Publication Number Publication Date
GB1300118A true GB1300118A (en) 1972-12-20

Family

ID=9991116

Family Applications (1)

Application Number Title Priority Date Filing Date
GB01701/70A Expired GB1300118A (en) 1970-03-11 1970-03-11 Improvements relating to semiconductor strain transducers

Country Status (1)

Country Link
GB (1) GB1300118A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4089217A (en) * 1976-09-16 1978-05-16 Tedea Technological Development And Automation Ltd. Guided-beam transducers
USRE31459E (en) 1976-02-09 1983-12-06 Harry E. Aine Solid state force transducer and method of making same
EP0401635A2 (en) * 1989-05-29 1990-12-12 Wacoh Corporation Manufacturing method of a detector using resistance elements
EP0492986A2 (en) * 1990-12-21 1992-07-01 Texas Instruments Incorporated Accelerometer
EP0519626A1 (en) * 1991-06-21 1992-12-23 Texas Instruments Incorporated Piezoresistive accelerometer with central mass in support
EP0631142A1 (en) * 1993-05-26 1994-12-28 Matsushita Electric Works, Ltd. Acceleration detector
EP1491901A1 (en) * 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor and method of manufacturing the same
CN110849469A (en) * 2019-12-04 2020-02-28 西北工业大学 Ring beam structure high-performance piezoelectric accelerometer

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE31459E (en) 1976-02-09 1983-12-06 Harry E. Aine Solid state force transducer and method of making same
US4089217A (en) * 1976-09-16 1978-05-16 Tedea Technological Development And Automation Ltd. Guided-beam transducers
EP0401635A2 (en) * 1989-05-29 1990-12-12 Wacoh Corporation Manufacturing method of a detector using resistance elements
EP0401635A3 (en) * 1989-05-29 1992-11-04 Wacoh Corporation Manufacturing method of a detector using resistance elements
EP0492986A2 (en) * 1990-12-21 1992-07-01 Texas Instruments Incorporated Accelerometer
EP0492986A3 (en) * 1990-12-21 1992-12-09 Texas Instruments Incorporated Piezoresistive accelerometer
US5412986A (en) * 1990-12-21 1995-05-09 Texas Instruments Incorporated Accelerometer with improved strain gauge sensing means
EP0519626A1 (en) * 1991-06-21 1992-12-23 Texas Instruments Incorporated Piezoresistive accelerometer with central mass in support
EP0631142A1 (en) * 1993-05-26 1994-12-28 Matsushita Electric Works, Ltd. Acceleration detector
US5485749A (en) * 1993-05-26 1996-01-23 Matsushita Electric Works, Ltd. Acceleration detector
EP1491901A1 (en) * 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor and method of manufacturing the same
CN110849469A (en) * 2019-12-04 2020-02-28 西北工业大学 Ring beam structure high-performance piezoelectric accelerometer

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees