GB0821015D0 - Apparatus and method - Google Patents

Apparatus and method

Info

Publication number
GB0821015D0
GB0821015D0 GBGB0821015.5A GB0821015A GB0821015D0 GB 0821015 D0 GB0821015 D0 GB 0821015D0 GB 0821015 A GB0821015 A GB 0821015A GB 0821015 D0 GB0821015 D0 GB 0821015D0
Authority
GB
United Kingdom
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0821015.5A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cranfield University
Original Assignee
Cranfield University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cranfield University filed Critical Cranfield University
Priority to GBGB0821015.5A priority Critical patent/GB0821015D0/en
Publication of GB0821015D0 publication Critical patent/GB0821015D0/en
Priority to PCT/GB2009/002699 priority patent/WO2010058165A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
GBGB0821015.5A 2008-11-18 2008-11-18 Apparatus and method Ceased GB0821015D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB0821015.5A GB0821015D0 (en) 2008-11-18 2008-11-18 Apparatus and method
PCT/GB2009/002699 WO2010058165A1 (en) 2008-11-18 2009-11-18 Interferometric system for profiling surfaces with application in the field of manufacturing radioastronomic antennas and corresponding method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0821015.5A GB0821015D0 (en) 2008-11-18 2008-11-18 Apparatus and method

Publications (1)

Publication Number Publication Date
GB0821015D0 true GB0821015D0 (en) 2008-12-24

Family

ID=40194768

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0821015.5A Ceased GB0821015D0 (en) 2008-11-18 2008-11-18 Apparatus and method

Country Status (2)

Country Link
GB (1) GB0821015D0 (en)
WO (1) WO2010058165A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7430457B2 (en) 2020-07-22 2024-02-13 株式会社ミツトヨ Lever type optical displacement sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4436424A (en) * 1981-07-27 1984-03-13 Gca Corporation Interferometer using transverse deviation of test beam
DE3279056D1 (en) * 1982-01-15 1988-10-27 Zeiss Carl Fa Threedimensional interferometric length-measuring device
JP3000819B2 (en) * 1993-03-15 2000-01-17 松下電器産業株式会社 Three-dimensional measurement probe and shape measurement method
GB2332056B (en) * 1997-12-04 2000-08-09 Taylor Hobson Ltd Surface measuring apparatus
KR100578140B1 (en) * 2004-10-07 2006-05-10 삼성전자주식회사 Interferometer System For Measuring Displacement And Exposure System Using The Same
US7440113B2 (en) * 2005-12-23 2008-10-21 Agilent Technologies, Inc. Littrow interferometer

Also Published As

Publication number Publication date
WO2010058165A1 (en) 2010-05-27

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)