GB0709619D0 - Device and method for exposing wafers to a liquid - Google Patents

Device and method for exposing wafers to a liquid

Info

Publication number
GB0709619D0
GB0709619D0 GB0709619A GB0709619A GB0709619D0 GB 0709619 D0 GB0709619 D0 GB 0709619D0 GB 0709619 A GB0709619 A GB 0709619A GB 0709619 A GB0709619 A GB 0709619A GB 0709619 D0 GB0709619 D0 GB 0709619D0
Authority
GB
United Kingdom
Prior art keywords
liquid
exposing wafers
wafers
exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0709619A
Other versions
GB2449309A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renewable Energy Corp ASA
Original Assignee
Renewable Energy Corp ASA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renewable Energy Corp ASA filed Critical Renewable Energy Corp ASA
Priority to GB0709619A priority Critical patent/GB2449309A/en
Publication of GB0709619D0 publication Critical patent/GB0709619D0/en
Priority to CN2008800164818A priority patent/CN101689524B/en
Priority to PCT/NO2008/000170 priority patent/WO2008143518A1/en
Priority to KR1020097026527A priority patent/KR20100022477A/en
Priority to DE112008001312T priority patent/DE112008001312T5/en
Publication of GB2449309A publication Critical patent/GB2449309A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • B65G49/04—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction
    • B65G49/0409—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length
    • B65G49/0413—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length arrangements for conveyance through the bath
    • B65G49/0418—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length arrangements for conveyance through the bath chain or belt conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B65G15/32—Belts or like endless load-carriers made of rubber or plastics
    • B65G15/42—Belts or like endless load-carriers made of rubber or plastics having ribs, ridges, or other surface projections
    • B65G15/44—Belts or like endless load-carriers made of rubber or plastics having ribs, ridges, or other surface projections for impelling the loads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
    • B65G17/06—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface having a load-carrying surface formed by a series of interconnected, e.g. longitudinal, links, plates, or platforms
    • B65G17/063—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface having a load-carrying surface formed by a series of interconnected, e.g. longitudinal, links, plates, or platforms the load carrying surface being formed by profiles, rods, bars, rollers or the like attached to more than one traction element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
GB0709619A 2007-05-18 2007-05-18 A method for exposing a solar cell wafer to a liquid Withdrawn GB2449309A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB0709619A GB2449309A (en) 2007-05-18 2007-05-18 A method for exposing a solar cell wafer to a liquid
CN2008800164818A CN101689524B (en) 2007-05-18 2008-05-15 Device and method for exposing wafers to a liquid
PCT/NO2008/000170 WO2008143518A1 (en) 2007-05-18 2008-05-15 Device and method for exposing wafers to a liquid
KR1020097026527A KR20100022477A (en) 2007-05-18 2008-05-15 Device and method for exposing wafers to a liquid
DE112008001312T DE112008001312T5 (en) 2007-05-18 2008-05-15 Apparatus and method for exposing wafers to a liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0709619A GB2449309A (en) 2007-05-18 2007-05-18 A method for exposing a solar cell wafer to a liquid

Publications (2)

Publication Number Publication Date
GB0709619D0 true GB0709619D0 (en) 2007-06-27
GB2449309A GB2449309A (en) 2008-11-19

Family

ID=38234724

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0709619A Withdrawn GB2449309A (en) 2007-05-18 2007-05-18 A method for exposing a solar cell wafer to a liquid

Country Status (5)

Country Link
KR (1) KR20100022477A (en)
CN (1) CN101689524B (en)
DE (1) DE112008001312T5 (en)
GB (1) GB2449309A (en)
WO (1) WO2008143518A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201001524A (en) * 2008-04-01 2010-01-01 Stichting Energie Arrangement and method for etching silicon wafer
GB2459124A (en) * 2008-04-10 2009-10-14 Rec Solar As Wafer holder for electroplating apparatus
DE102008034505B4 (en) * 2008-07-24 2013-04-18 Stangl Semiconductor Equipment Ag Devices and methods for processing and handling process material
DE102011050324A1 (en) * 2011-05-12 2012-11-29 Roth & Rau Ag Substrate transport module, loading and unloading system and transport method for substrates in a substrate processing plant
DE102012210618A1 (en) * 2012-01-26 2013-08-01 Singulus Stangl Solar Gmbh Apparatus and method for treating plate-shaped process material
DE102012209902A1 (en) 2012-06-13 2013-12-19 Singulus Stangl Solar Gmbh Method for treating silicon rods with e.g. water during manufacturing polycrystalline silicon ingots in process reactor, involves transporting semiconductor rods by endless chains, and treating semiconductor rods with liquid or gas
CN102807064A (en) * 2012-09-04 2012-12-05 昆山市圣吉川工业自动化设备有限公司 Conveying belt with steel bar
FR3049940B1 (en) * 2016-04-06 2018-04-13 Saint- Gobain Glass France SUPPORT DEVICE FOR GLASS SHEET IN PARTICULAR IN A WASHING PLANT
FR3049943B1 (en) * 2016-04-06 2020-08-28 Saint Gobain DEVICE FOR CONVEYING AND HOLDING SHEETS OF GLASS, IN PARTICULAR IN A WASHING INSTALLATION, AND PROCESS FOR IMPLEMENTATION
CA2968115A1 (en) * 2017-05-24 2018-11-24 Steven Kelley Spiral conveyor system for immersing items in a liquid
WO2021090565A1 (en) * 2019-11-05 2021-05-14 株式会社トクヤマ Etching device for silicon core wire and etching method for silicon core wire

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4635788A (en) * 1984-07-12 1987-01-13 Cincinnati Milacron Inc. Conveyor
JPS6342131A (en) * 1986-08-08 1988-02-23 Nec Corp Treating device for semiconductor wafer
JP3200876B2 (en) * 1991-07-12 2001-08-20 セイコーエプソン株式会社 Circuit board cleaning method and cleaning apparatus
JPH08115862A (en) * 1994-10-13 1996-05-07 Hitachi Ltd Developing device
AU772539B2 (en) * 1999-07-29 2004-04-29 Kaneka Corporation Method for cleaning photovoltaic module and cleaning apparatus
JP2001170583A (en) * 1999-12-15 2001-06-26 Kanegafuchi Chem Ind Co Ltd Ultrasonic washing apparatus and ultrasonic washing method
JP4046492B2 (en) * 2000-10-23 2008-02-13 シャープ株式会社 Solar cell manufacturing equipment
JP2002203800A (en) * 2000-10-30 2002-07-19 Canon Inc Wafer cassette, device using the same and liquid phase growth method
JP2004210440A (en) * 2002-12-27 2004-07-29 Ishikawajima Harima Heavy Ind Co Ltd Carrying device for platy member
DE20321702U1 (en) * 2003-05-07 2008-12-24 Universität Konstanz Device for texturing surfaces of silicon wafers

Also Published As

Publication number Publication date
WO2008143518A1 (en) 2008-11-27
KR20100022477A (en) 2010-03-02
DE112008001312T5 (en) 2010-04-22
CN101689524B (en) 2011-09-28
GB2449309A (en) 2008-11-19
CN101689524A (en) 2010-03-31

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)