GB0504553D0 - Apparatus for inhibiting the propagation of a flame front - Google Patents

Apparatus for inhibiting the propagation of a flame front

Info

Publication number
GB0504553D0
GB0504553D0 GBGB0504553.9A GB0504553A GB0504553D0 GB 0504553 D0 GB0504553 D0 GB 0504553D0 GB 0504553 A GB0504553 A GB 0504553A GB 0504553 D0 GB0504553 D0 GB 0504553D0
Authority
GB
United Kingdom
Prior art keywords
flame
waste stream
pressure
pumping mechanism
combustion chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0504553.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GBGB0504553.9A priority Critical patent/GB0504553D0/en
Publication of GB0504553D0 publication Critical patent/GB0504553D0/en
Priority to JP2008500251A priority patent/JP5502318B2/en
Priority to EP06709828A priority patent/EP1856416B1/en
Priority to US11/885,720 priority patent/US20080273995A1/en
Priority to PCT/GB2006/000592 priority patent/WO2006095132A1/en
Priority to KR1020077020425A priority patent/KR101244492B1/en
Priority to AT06709828T priority patent/ATE542053T1/en
Priority to TW095107680A priority patent/TW200637629A/en
Ceased legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62C—FIRE-FIGHTING
    • A62C4/00—Flame traps allowing passage of gas but not of flame or explosion wave
    • A62C4/02—Flame traps allowing passage of gas but not of flame or explosion wave in gas-pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Incineration Of Waste (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Glass Compositions (AREA)
  • Looms (AREA)
  • Regulation And Control Of Combustion (AREA)

Abstract

Apparatus is described for inhibiting the propagation of a flame front ignited by a pumping mechanism drawing a waste stream from a process chamber. A combustion chamber comprises an inlet for receiving the waste stream exhaust from the pumping mechanism and means for generating a flame for burning a flammable component of the waste stream. A pressure detector detects a pressure at a location through which the waste stream is drawn by the pumping mechanism, and a flame detector detects the presence of a flame in th combustion chamber. A controller regulates the delivery of at least one process fluid to the process chamber if the detected pressure is greater than a pressure above which the flame front can be sustained by the waste stream, or if there is no flame present in the combustion chamber.
GBGB0504553.9A 2005-03-07 2005-03-07 Apparatus for inhibiting the propagation of a flame front Ceased GB0504553D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GBGB0504553.9A GB0504553D0 (en) 2005-03-07 2005-03-07 Apparatus for inhibiting the propagation of a flame front
JP2008500251A JP5502318B2 (en) 2005-03-07 2006-02-21 Device for preventing the propagation of the flame front
EP06709828A EP1856416B1 (en) 2005-03-07 2006-02-21 Apparatus and method for inhibiting the propagation of a flame front
US11/885,720 US20080273995A1 (en) 2005-03-07 2006-02-21 Apparatus for Inhibiting the Propagation of a Flame Front
PCT/GB2006/000592 WO2006095132A1 (en) 2005-03-07 2006-02-21 Apparatus for inhibiting the propagation of a flame front
KR1020077020425A KR101244492B1 (en) 2005-03-07 2006-02-21 Apparatus for inhibiting the propagation of a flame front
AT06709828T ATE542053T1 (en) 2005-03-07 2006-02-21 APPARATUS AND METHOD FOR PREVENTING THE SPREAD OF A FLAME FRONT
TW095107680A TW200637629A (en) 2005-03-07 2006-03-07 Apparatus for inhibiting the propagation of a flame front

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0504553.9A GB0504553D0 (en) 2005-03-07 2005-03-07 Apparatus for inhibiting the propagation of a flame front

Publications (1)

Publication Number Publication Date
GB0504553D0 true GB0504553D0 (en) 2005-04-13

Family

ID=34451843

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0504553.9A Ceased GB0504553D0 (en) 2005-03-07 2005-03-07 Apparatus for inhibiting the propagation of a flame front

Country Status (8)

Country Link
US (1) US20080273995A1 (en)
EP (1) EP1856416B1 (en)
JP (1) JP5502318B2 (en)
KR (1) KR101244492B1 (en)
AT (1) ATE542053T1 (en)
GB (1) GB0504553D0 (en)
TW (1) TW200637629A (en)
WO (1) WO2006095132A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101551170B1 (en) * 2007-05-25 2015-09-09 어플라이드 머티어리얼스, 인코포레이티드 Methods and apparatus for efficient operation of an abatement system
JP5748523B2 (en) * 2011-03-30 2015-07-15 エドワーズ株式会社 Abatement equipment
GB2500610A (en) * 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
US9411341B2 (en) * 2012-05-24 2016-08-09 Globalfoundries Singapore Pte. Ltd. Vacuum pump controller
EP3112687B1 (en) * 2015-06-29 2020-04-22 Pfeiffer Vacuum Gmbh Detection of the circulation of a flow of auxiliary gas that is supplied to a vacuum pump
JP6685204B2 (en) * 2016-08-26 2020-04-22 東京エレクトロン株式会社 Safety device, safety system and method for making combustion abatement device safe
US10690057B2 (en) 2017-04-25 2020-06-23 General Electric Company Turbomachine combustor end cover assembly with flame detector sight tube collinear with a tube of a bundled tube fuel nozzle
GB2561899B (en) * 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
US11517831B2 (en) * 2019-06-25 2022-12-06 George Andrew Rabroker Abatement system for pyrophoric chemicals and method of use
GB2595938A (en) * 2020-06-12 2021-12-15 Edwards Ltd Flammable gas dilution

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616884B1 (en) 1987-06-19 1991-05-10 Air Liquide PROCESS FOR THE TREATMENT OF GASEOUS EFFLUENTS FROM THE MANUFACTURE OF ELECTRONIC COMPONENTS AND AN INCINERATION APPARATUS FOR IMPLEMENTING SAME
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US6022195A (en) 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
GB9906439D0 (en) * 1999-03-19 1999-05-12 Boc Group Plc Improvements in flame arresters

Also Published As

Publication number Publication date
US20080273995A1 (en) 2008-11-06
EP1856416A1 (en) 2007-11-21
ATE542053T1 (en) 2012-02-15
WO2006095132A1 (en) 2006-09-14
JP2008531979A (en) 2008-08-14
JP5502318B2 (en) 2014-05-28
EP1856416B1 (en) 2012-01-18
TW200637629A (en) 2006-11-01
KR101244492B1 (en) 2013-03-18
KR20070110071A (en) 2007-11-15

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)