FR835664A - Electrical feedthrough for cathode sputtering devices - Google Patents

Electrical feedthrough for cathode sputtering devices

Info

Publication number
FR835664A
FR835664A FR835664DA FR835664A FR 835664 A FR835664 A FR 835664A FR 835664D A FR835664D A FR 835664DA FR 835664 A FR835664 A FR 835664A
Authority
FR
France
Prior art keywords
cathode sputtering
electrical feedthrough
sputtering devices
devices
feedthrough
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Inventor
Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR835664A publication Critical patent/FR835664A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR835664D 1937-03-25 1938-03-23 Electrical feedthrough for cathode sputtering devices Expired FR835664A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE835664X 1937-03-25

Publications (1)

Publication Number Publication Date
FR835664A true FR835664A (en) 1938-12-28

Family

ID=1554033

Family Applications (1)

Application Number Title Priority Date Filing Date
FR835664D Expired FR835664A (en) 1937-03-25 1938-03-23 Electrical feedthrough for cathode sputtering devices

Country Status (2)

Country Link
US (1) US2219611A (en)
FR (1) FR835664A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH291362A (en) * 1950-08-03 1953-06-15 Berghaus Elektrophysik Anst Method and device for carrying out technical processes by means of gas discharges, which are connected with a cathodeic material atomization.
US2701846A (en) * 1951-01-18 1955-02-08 Berghaus Lead-in device for high-power currents
US2762945A (en) * 1951-01-18 1956-09-11 Berghaus Passing an electric conductor through the bounding walls of discharge vessels
US2787730A (en) * 1951-01-18 1957-04-02 Berghaus Glow discharge apparatus
US3117246A (en) * 1953-02-17 1964-01-07 Berghaus Elektrophysik Anst Two electrode arrangement for electric glow discharge chambers
BE569245A (en) * 1953-12-09
US2960557A (en) * 1958-10-02 1960-11-15 Nat Res Corp Arc furnace for the production of metals
US3097154A (en) * 1959-01-13 1963-07-09 Nuclear Materials & Equipment Apparatus for method for etching objects
US3190772A (en) * 1960-02-10 1965-06-22 Berghaus Bernhard Method of hardening work in an electric glow discharge
US3210263A (en) * 1962-01-11 1965-10-05 Nuclear Materials & Equipment Electric discharge apparatus for etching
GB1045274A (en) * 1962-07-26 1966-10-12 Standard Telephones Cables Ltd Character display tubes
US3278407A (en) * 1963-06-26 1966-10-11 Ibm Deposition of thin film by sputtering
US3282815A (en) * 1963-07-01 1966-11-01 Ibm Magnetic control of film deposition
US3325394A (en) * 1963-07-01 1967-06-13 Ibm Magnetic control of film deposition
US3282816A (en) * 1963-09-16 1966-11-01 Ibm Process of cathode sputtering from a cylindrical cathode
US3348088A (en) * 1964-09-08 1967-10-17 Varian Associates Electron tube apparatus

Also Published As

Publication number Publication date
US2219611A (en) 1940-10-29

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