FR3119888B1 - PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT - Google Patents

PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT Download PDF

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Publication number
FR3119888B1
FR3119888B1 FR2101603A FR2101603A FR3119888B1 FR 3119888 B1 FR3119888 B1 FR 3119888B1 FR 2101603 A FR2101603 A FR 2101603A FR 2101603 A FR2101603 A FR 2101603A FR 3119888 B1 FR3119888 B1 FR 3119888B1
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FR
France
Prior art keywords
pyroelectric
producing
substrate
surface layer
cavity
Prior art date
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Active
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FR2101603A
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French (fr)
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FR3119888A1 (en
Inventor
Ayrat Galisultanov
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Elichens
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Elichens
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Publication date
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Priority to FR2101603A priority Critical patent/FR3119888B1/en
Priority to PCT/FR2022/050247 priority patent/WO2022175618A1/en
Publication of FR3119888A1 publication Critical patent/FR3119888A1/en
Application granted granted Critical
Publication of FR3119888B1 publication Critical patent/FR3119888B1/en
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • G01J5/35—Electrical features thereof

Abstract

Procédé de réalisation d’un détecteur pyroélectrique (100), comportant : - réalisation d’une première électrode (116) sur une première partie (118) d’une face avant (112) d’une couche de matériau pyroélectrique (108) d’un substrat (102) comportant en outre une couche support (104) sur laquelle est disposée la couche de matériau pyroélectrique ; - réalisation d’une cavité (132) traversant la couche support telle qu’une paroi de fond de la cavité soit formée par une partie d’une face arrière (114) de la couche de matériau pyroélectrique, et telle qu’une partie de la paroi de fond de la cavité soit disposée à l’aplomb de la première électrode ; - réalisation d’une deuxième électrode (142) sur la partie de la paroi de fond de la cavité. Figure pour l’abrégé : Figure 10.Method for producing a pyroelectric detector (100), comprising: - production of a first electrode (116) on a first part (118) of a front face (112) of a layer of pyroelectric material (108) d a substrate (102) further comprising a support layer (104) on which the layer of pyroelectric material is disposed; - production of a cavity (132) passing through the support layer such that a bottom wall of the cavity is formed by a part of a rear face (114) of the layer of pyroelectric material, and such that a part of the bottom wall of the cavity is placed directly above the first electrode; - production of a second electrode (142) on the part of the bottom wall of the cavity. Figure for abstract: Figure 10.

FR2101603A 2021-02-18 2021-02-18 PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT Active FR3119888B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2101603A FR3119888B1 (en) 2021-02-18 2021-02-18 PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT
PCT/FR2022/050247 WO2022175618A1 (en) 2021-02-18 2022-02-11 Pyroelectric device comprising a substrate having a pyroelectric surface layer, and method for producing same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2101603 2021-02-18
FR2101603A FR3119888B1 (en) 2021-02-18 2021-02-18 PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT

Publications (2)

Publication Number Publication Date
FR3119888A1 FR3119888A1 (en) 2022-08-19
FR3119888B1 true FR3119888B1 (en) 2023-11-17

Family

ID=76730617

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2101603A Active FR3119888B1 (en) 2021-02-18 2021-02-18 PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT

Country Status (2)

Country Link
FR (1) FR3119888B1 (en)
WO (1) WO2022175618A1 (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60171425A (en) * 1984-02-17 1985-09-04 Matsushita Electric Ind Co Ltd Pyroelectric type heat detection element
JPS6135320A (en) * 1984-07-27 1986-02-19 Matsushita Electric Ind Co Ltd Pyroelectric type infrared detecting element and its manufacture
JPS6327722A (en) * 1986-07-21 1988-02-05 Meidensha Electric Mfg Co Ltd Pyroelectric matrix sensor and its preparation
JP2564526B2 (en) * 1986-11-20 1996-12-18 松下電器産業株式会社 Pyroelectric infrared array element and manufacturing method thereof
JPS63131032A (en) * 1986-11-20 1988-06-03 Matsushita Electric Ind Co Ltd Pyroelectric type infrared ray detector
JP2560560B2 (en) * 1991-04-22 1996-12-04 株式会社島津製作所 Method for manufacturing thermal photodetector and its support
US5286975A (en) * 1991-05-29 1994-02-15 Matsushita Electric Industrial Co., Ltd. Pyro-electric type infrared-ray sensor
US5471060A (en) * 1993-08-23 1995-11-28 Matsushita Electric Industrial Co., Ltd. Pyroelectric infrared radiation detector and method of producing the same
JP2015052517A (en) * 2013-09-06 2015-03-19 住友精密工業株式会社 Infrared sensor manufacturing method and infrared sensor

Also Published As

Publication number Publication date
FR3119888A1 (en) 2022-08-19
WO2022175618A1 (en) 2022-08-25

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