FR3114255B1 - CMUT Transducer - Google Patents

CMUT Transducer Download PDF

Info

Publication number
FR3114255B1
FR3114255B1 FR2009451A FR2009451A FR3114255B1 FR 3114255 B1 FR3114255 B1 FR 3114255B1 FR 2009451 A FR2009451 A FR 2009451A FR 2009451 A FR2009451 A FR 2009451A FR 3114255 B1 FR3114255 B1 FR 3114255B1
Authority
FR
France
Prior art keywords
cmut transducer
conductivity
type
flexible membrane
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2009451A
Other languages
French (fr)
Other versions
FR3114255A1 (en
Inventor
Audren Boulme
Edgard Jeanne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moduleus SAS
Original Assignee
Moduleus SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moduleus SAS filed Critical Moduleus SAS
Priority to FR2009451A priority Critical patent/FR3114255B1/en
Publication of FR3114255A1 publication Critical patent/FR3114255A1/en
Application granted granted Critical
Publication of FR3114255B1 publication Critical patent/FR3114255B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/50—Application to a particular transducer type
    • B06B2201/51—Electrostatic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

Transducteur CMUT La présente description concerne un transducteur CMUT (200) comportant une membrane flexible (109) suspendue au-dessus d'une cavité (103), et une électrode inférieure (101) située au fond de la cavité (103), en vis-à-vis de la membrane flexible (109),dans lequel l'électrode inférieure (101) est en un matériau semiconducteur dopé d'un premier type de conductivité, et la membrane flexible (109) en un matériau semiconducteur dopé d'un deuxième type de conductivité opposé au premier type de conductivité. Figure pour l'abrégé : Fig. 2ACMUT transducer The present description relates to a CMUT transducer (200) comprising a flexible membrane (109) suspended above a cavity (103), and a lower electrode (101) located at the bottom of the cavity (103), facing -with respect to the flexible membrane (109), in which the lower electrode (101) is made of a semiconductor material doped with a first type of conductivity, and the flexible membrane (109) is made of a semiconductor material doped with a second type of conductivity opposed to the first type of conductivity. Figure for the abstract: Fig. 2A

FR2009451A 2020-09-18 2020-09-18 CMUT Transducer Active FR3114255B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR2009451A FR3114255B1 (en) 2020-09-18 2020-09-18 CMUT Transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2009451A FR3114255B1 (en) 2020-09-18 2020-09-18 CMUT Transducer
FR2009451 2020-09-18

Publications (2)

Publication Number Publication Date
FR3114255A1 FR3114255A1 (en) 2022-03-25
FR3114255B1 true FR3114255B1 (en) 2023-05-05

Family

ID=74347191

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2009451A Active FR3114255B1 (en) 2020-09-18 2020-09-18 CMUT Transducer

Country Status (1)

Country Link
FR (1) FR3114255B1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030536B2 (en) * 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
US7903830B2 (en) * 2006-08-10 2011-03-08 Siemens Medical Solutions Usa, Inc. Push-pull capacitive micro-machined ultrasound transducer array
EP2411163B1 (en) * 2009-03-26 2013-05-15 Norwegian University of Science and Technology (NTNU) Wafer bond cmut array with conductive vias
WO2012014010A1 (en) * 2010-07-26 2012-02-02 Selim Olcum System and method for operating capacitive micromachined ultrasonic transducers
EP3038764A1 (en) * 2013-08-27 2016-07-06 Koninklijke Philips N.V. Dual mode cmut transducer
EP3229979B1 (en) * 2014-12-11 2018-04-04 Koninklijke Philips N.V. Catheter transducer with staggered columns of micromachined ultrasonic transducers

Also Published As

Publication number Publication date
FR3114255A1 (en) 2022-03-25

Similar Documents

Publication Publication Date Title
ATE486668T1 (en) CAPACITIVE MICROPROCESSED ULTRASONIC TRANSDUCER AND ASSOCIATED OPERATING METHOD
JPH073321Y2 (en) Flow-through hydrogen peroxide electrode
CN105508208B (en) Piezoelectric pump
EP2308797A3 (en) Structure with a cavity comprising a bonding interface made from a getter material
ATE269973T1 (en) ELECTROCHEMICAL BIOSENSOR
EP1783902A3 (en) Wafer level package for surface acoustic wave device and fabrication method thereof
DK1218736T3 (en) Device for measuring cells in a liquid environment
DK1119637T3 (en) In vitro analyte sensor for small volumes with diffusible or non-leachable redox mediator
EP0990885A3 (en) Capacitive pressure sensor
CN1529566A (en) Piercing device
FR3114255B1 (en) CMUT Transducer
CN102099679A (en) Apparatus for hemolyzing a blood sample and for measuring at least one parameter thereof
FR2393434A1 (en) ELECTRODE PLATE FOR LEAD ACCUMULATORS
BE900141A (en) DROPPER ASSEMBLY.
DE10190748D2 (en) Enzymatic electrochemical measuring device
FR2603423A1 (en) SURFACE ACOUSTIC WAVE CONVERTER
FR2391467A1 (en) MEASUREMENT CELL FOR MICRODOSAGES, INCLUDING ELECTRODES WITH ENZYMATIC MEMBRANES
FR2373795A1 (en) IMMUNOLOGICAL DOSAGE BY FIXED ENZYME
DK0535014T3 (en) Hearing aids and reverser
DE60023121D1 (en) DIAGNOSTIC TEST
CN102568464A (en) Underwater transducer for deepwater
FR3083004B1 (en) PIEZOELECTRIC TRANSDUCER DEVICE AND METHOD OF EMBODIMENT OF SUCH A DEVICE
CN105840822B (en) A kind of filling valve piston
CN213756434U (en) A sample save set for physiology
CN214472064U (en) Water quality sampler for environmental monitoring

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20220325

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4