FR2952438B1 - MAGNETOMETER - Google Patents

MAGNETOMETER

Info

Publication number
FR2952438B1
FR2952438B1 FR1059189A FR1059189A FR2952438B1 FR 2952438 B1 FR2952438 B1 FR 2952438B1 FR 1059189 A FR1059189 A FR 1059189A FR 1059189 A FR1059189 A FR 1059189A FR 2952438 B1 FR2952438 B1 FR 2952438B1
Authority
FR
France
Prior art keywords
magnetometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1059189A
Other languages
French (fr)
Other versions
FR2952438A1 (en
Inventor
Axel Franke
Po-Jui Chen
Daniel Christoph Meisel
Alexander Buhmann
Ando Feyh
Martin Eckardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2952438A1 publication Critical patent/FR2952438A1/en
Application granted granted Critical
Publication of FR2952438B1 publication Critical patent/FR2952438B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
FR1059189A 2009-11-09 2010-11-08 MAGNETOMETER Expired - Fee Related FR2952438B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910046515 DE102009046515A1 (en) 2009-11-09 2009-11-09 Magnetometer e.g. inclination sensor, for electronic compass to detect geomagnetic field, has oscillating structure comprising electrical line, and detector for determining tilting of oscillating structure with respect to substrate

Publications (2)

Publication Number Publication Date
FR2952438A1 FR2952438A1 (en) 2011-05-13
FR2952438B1 true FR2952438B1 (en) 2013-03-22

Family

ID=43852720

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1059189A Expired - Fee Related FR2952438B1 (en) 2009-11-09 2010-11-08 MAGNETOMETER

Country Status (3)

Country Link
CN (1) CN102073022B (en)
DE (1) DE102009046515A1 (en)
FR (1) FR2952438B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013014321A2 (en) * 2011-07-25 2013-01-31 Baolab Microsystems Sl Methods and systems for mems cmos devices including a multiwire compass
US9535137B2 (en) 2014-08-22 2017-01-03 Ams International Ag Membrane based magnetometer
CN110261798B (en) * 2019-07-22 2020-11-06 上海交通大学 Asymmetric differential magnetic field probe structure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6458615B1 (en) 1999-09-30 2002-10-01 Carnegie Mellon University Method of fabricating micromachined structures and devices formed therefrom
GB0322236D0 (en) * 2003-09-23 2003-10-22 Qinetiq Ltd Resonant magnetometer device
GB0329959D0 (en) * 2003-12-24 2004-01-28 Qinetiq Ltd Magnetic field sensor
US7429858B2 (en) * 2004-07-13 2008-09-30 Lucent Technologies Inc. Oscillating-beam magnetometer
KR20100080555A (en) * 2007-11-08 2010-07-08 로베르트 보쉬 게엠베하 Yaw rate sensor having two sensitive axes

Also Published As

Publication number Publication date
CN102073022B (en) 2016-03-02
DE102009046515A1 (en) 2011-05-12
FR2952438A1 (en) 2011-05-13
CN102073022A (en) 2011-05-25

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