FR2403645A2 - Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge - Google Patents

Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge

Info

Publication number
FR2403645A2
FR2403645A2 FR7727785A FR7727785A FR2403645A2 FR 2403645 A2 FR2403645 A2 FR 2403645A2 FR 7727785 A FR7727785 A FR 7727785A FR 7727785 A FR7727785 A FR 7727785A FR 2403645 A2 FR2403645 A2 FR 2403645A2
Authority
FR
France
Prior art keywords
furnace
arc discharge
cathodes
anodes
ion bombardment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7727785A
Other languages
French (fr)
Other versions
FR2403645B2 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vide & Traitement SA
Original Assignee
Vide & Traitement SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vide & Traitement SA filed Critical Vide & Traitement SA
Priority to FR7727785A priority Critical patent/FR2403645A2/en
Priority to DE2811942A priority patent/DE2811942C2/en
Priority to JP53032290A priority patent/JPS6035428B2/en
Priority to GB11256/78A priority patent/GB1601244A/en
Priority to US05/888,536 priority patent/US4200805A/en
Priority to ES468158A priority patent/ES468158A1/en
Publication of FR2403645A2 publication Critical patent/FR2403645A2/en
Application granted granted Critical
Publication of FR2403645B2 publication Critical patent/FR2403645B2/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)

Abstract

The furnace for thermochemical treatment of metal is used e.g. for iron (alloys) by ion bombardment. The gas used in furnace is held at very low pressure. Several workpieces, each of different shape can be treated simultaneously and the danger of arc discharge is prevented. The furnace has >=1 anode and several cathodes. The latter are placed on the workpieces to be treated. The anodes and cathodes are connected in by switches for current conduction and for arc interruption. Each anode and cathode pair has operating point on the voltage and current curve close to arc discharge conditions. Voltage pulses can be applied and reaching of arc discharge point is prevented.
FR7727785A 1977-03-23 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge Granted FR2403645A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7727785A FR2403645A2 (en) 1977-09-14 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge
DE2811942A DE2811942C2 (en) 1977-03-23 1978-03-18 Furnace for the ionic nitriding treatment of metallic workpieces
JP53032290A JPS6035428B2 (en) 1977-03-23 1978-03-20 Multiple cathode thermal ionization furnace
GB11256/78A GB1601244A (en) 1977-03-23 1978-03-21 Multicathode thermochemical processing oven
US05/888,536 US4200805A (en) 1977-03-23 1978-03-21 Multicathode thermochemical processing oven
ES468158A ES468158A1 (en) 1977-03-23 1978-03-22 Multicathode thermochemical processing oven

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7727785A FR2403645A2 (en) 1977-09-14 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge

Publications (2)

Publication Number Publication Date
FR2403645A2 true FR2403645A2 (en) 1979-04-13
FR2403645B2 FR2403645B2 (en) 1981-08-21

Family

ID=9195395

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7727785A Granted FR2403645A2 (en) 1977-03-23 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge

Country Status (1)

Country Link
FR (1) FR2403645A2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2498205A1 (en) * 1981-01-17 1982-07-23 Kloeckner Ionon THERMAL TREATMENT INSTALLATION FOR METALLIC PARTS COMPRISING A VACUUMABLE CHAMBER
FR2584099A1 (en) * 1985-07-01 1987-01-02 Balzers Hochvakuum ARRANGEMENT FOR PROCESSING WORKPIECES IN A VACUUM CHAMBER
FR2594102A1 (en) * 1986-02-12 1987-08-14 Stein Heurtey AUTOMATED FLEXIBLE FAST THERMOCHEMICAL PROCESSING FACILITY
WO1990002414A1 (en) * 1988-08-18 1990-03-08 Klöckner Ionon Gmbh Device for glow potential processing, in particular ionic carburation

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE704254C (en) * 1937-08-27 1941-03-26 Bernhard Berghaus Method and device for the production of metal bodies from metal powders
FR1153552A (en) * 1953-12-09 1958-03-12 Berghaus Elektrophysik Anst Method and device for the automatic control and monitoring of the start-up and operation of electric corona processes
FR2082217A5 (en) * 1970-03-06 1971-12-10 Cit Alcatel Substrate coating by cathodic sputtering andevaporation
FR2227345A1 (en) * 1973-04-27 1974-11-22 Triplex Safety Glass Co
FR2297927A1 (en) * 1975-01-17 1976-08-13 Anvar Thermochemical treatment of metal with ion bombardment - using a sealed discharge chamber, an electrode support and an arc detecting generator
DE2534779A1 (en) * 1975-08-04 1977-02-17 Paul Thome Material handling system for airtight chambers - uses connected holder system fitted with separating devices and sealing elements
FR2335614A1 (en) * 1975-12-18 1977-07-15 Kawasaki Heavy Ind Ltd LUMINESCENT DISCHARGE NITRURATION UNIT

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE704254C (en) * 1937-08-27 1941-03-26 Bernhard Berghaus Method and device for the production of metal bodies from metal powders
FR1153552A (en) * 1953-12-09 1958-03-12 Berghaus Elektrophysik Anst Method and device for the automatic control and monitoring of the start-up and operation of electric corona processes
FR2082217A5 (en) * 1970-03-06 1971-12-10 Cit Alcatel Substrate coating by cathodic sputtering andevaporation
FR2227345A1 (en) * 1973-04-27 1974-11-22 Triplex Safety Glass Co
FR2297927A1 (en) * 1975-01-17 1976-08-13 Anvar Thermochemical treatment of metal with ion bombardment - using a sealed discharge chamber, an electrode support and an arc detecting generator
DE2534779A1 (en) * 1975-08-04 1977-02-17 Paul Thome Material handling system for airtight chambers - uses connected holder system fitted with separating devices and sealing elements
FR2335614A1 (en) * 1975-12-18 1977-07-15 Kawasaki Heavy Ind Ltd LUMINESCENT DISCHARGE NITRURATION UNIT

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2498205A1 (en) * 1981-01-17 1982-07-23 Kloeckner Ionon THERMAL TREATMENT INSTALLATION FOR METALLIC PARTS COMPRISING A VACUUMABLE CHAMBER
FR2584099A1 (en) * 1985-07-01 1987-01-02 Balzers Hochvakuum ARRANGEMENT FOR PROCESSING WORKPIECES IN A VACUUM CHAMBER
FR2594102A1 (en) * 1986-02-12 1987-08-14 Stein Heurtey AUTOMATED FLEXIBLE FAST THERMOCHEMICAL PROCESSING FACILITY
EP0236639A1 (en) * 1986-02-12 1987-09-16 Stein Heurtey Flexible automatic installation for performing a fast thermochemical treatment
US4790750A (en) * 1986-02-12 1988-12-13 Stein Heurtey Automated flexible installation for a rapid thermochemical treatment
WO1990002414A1 (en) * 1988-08-18 1990-03-08 Klöckner Ionon Gmbh Device for glow potential processing, in particular ionic carburation

Also Published As

Publication number Publication date
FR2403645B2 (en) 1981-08-21

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Legal Events

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CD Change of name or company name
TP Transmission of property